TW200510227A - Cassette for substrate - Google Patents

Cassette for substrate

Info

Publication number
TW200510227A
TW200510227A TW093123156A TW93123156A TW200510227A TW 200510227 A TW200510227 A TW 200510227A TW 093123156 A TW093123156 A TW 093123156A TW 93123156 A TW93123156 A TW 93123156A TW 200510227 A TW200510227 A TW 200510227A
Authority
TW
Taiwan
Prior art keywords
cassette
supporting
substrate
surface side
tray
Prior art date
Application number
TW093123156A
Other languages
Chinese (zh)
Other versions
TWI282323B (en
Inventor
Toshio Yoshida
Tasuku Arimitsu
Naoto Takami
Tomohisa Oe
Nobukazu Tanaka
Yamanaka Akihiro
Original Assignee
Yodogawa Hu Tech Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yodogawa Hu Tech Co Ltd filed Critical Yodogawa Hu Tech Co Ltd
Publication of TW200510227A publication Critical patent/TW200510227A/en
Application granted granted Critical
Publication of TWI282323B publication Critical patent/TWI282323B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

A tray cassette for substrate is provided to satisfy a variety of requirements such as accessibility of carriage and production, low dust-emitting property, heat resistance, chemical resistance, electrical conductivity, lightweight, low cost, dimensional accuracy, etc. The cassette, which is capable of supporting and storing one large glass substrate, comprises a tray member 150 for supporting the glass substrate directly from the lower surface side and a frame member 110 for supporting at least the peripheral edge of the tray member 150 from the lower surface side.
TW093123156A 2003-08-04 2004-08-03 Cassette for substrate TWI282323B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003205768A JP2005053493A (en) 2003-08-04 2003-08-04 Board cassette

Publications (2)

Publication Number Publication Date
TW200510227A true TW200510227A (en) 2005-03-16
TWI282323B TWI282323B (en) 2007-06-11

Family

ID=34362895

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093123156A TWI282323B (en) 2003-08-04 2004-08-03 Cassette for substrate

Country Status (4)

Country Link
JP (1) JP2005053493A (en)
KR (1) KR20050016109A (en)
CN (1) CN1579894A (en)
TW (1) TWI282323B (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4407586B2 (en) * 2005-07-25 2010-02-03 村田機械株式会社 Single wafer transfer tray
JP2007201066A (en) * 2006-01-25 2007-08-09 Murata Mach Ltd Tray for sheet transfer, and apparatus of storing or transferring tray for sheet transfer
JP2007201341A (en) * 2006-01-30 2007-08-09 Murata Mach Ltd Tray for sheet transfer
JP5115388B2 (en) * 2008-07-31 2013-01-09 株式会社Ｓｕｍｃｏ Wafer transfer container
CN101673699B (en) * 2009-09-03 2011-05-11 东莞宏威数码机械有限公司 Carrying platform of substrate box
US9228256B2 (en) * 2009-12-11 2016-01-05 Kgt Graphit Technologie Gmbh Substrate support
KR101035628B1 (en) * 2010-01-11 2011-05-19 삼성모바일디스플레이주식회사 Tray for substrate
JP5665526B2 (en) * 2010-12-21 2015-02-04 サイデック株式会社 Transport tray for transported plate-like articles
JP2014504039A (en) * 2011-02-01 2014-02-13 株式会社テラセミコン Substrate support boat and support unit using the same
CN103264846B (en) * 2012-11-30 2016-01-20 上海中航光电子有限公司 A kind of wrapping pallet of liquid crystal indicator and packing method

Also Published As

Publication number Publication date
KR20050016109A (en) 2005-02-21
CN1579894A (en) 2005-02-16
TWI282323B (en) 2007-06-11
JP2005053493A (en) 2005-03-03

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