JP4407586B2 - Single wafer transfer tray - Google Patents

Single wafer transfer tray Download PDF

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Publication number
JP4407586B2
JP4407586B2 JP2005214158A JP2005214158A JP4407586B2 JP 4407586 B2 JP4407586 B2 JP 4407586B2 JP 2005214158 A JP2005214158 A JP 2005214158A JP 2005214158 A JP2005214158 A JP 2005214158A JP 4407586 B2 JP4407586 B2 JP 4407586B2
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outer frame
tray
crosspiece
wafer carrying
resin block
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JP2007035763A (en
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博 深沢
良祐 田原
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Murata Machinery Ltd
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Murata Machinery Ltd
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Priority to JP2005214158A priority Critical patent/JP4407586B2/en
Priority to KR1020060008796A priority patent/KR100965526B1/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67333—Trays for chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D21/00—Nestable, stackable or joinable containers; Containers of variable capacity
    • B65D21/02—Containers specially shaped, or provided with fittings or attachments, to facilitate nesting, stacking, or joining together
    • B65D21/0209—Containers specially shaped, or provided with fittings or attachments, to facilitate nesting, stacking, or joining together stackable or joined together one-upon-the-other in the upright or upside-down position
    • B65D21/0213—Containers presenting a continuous stacking profile along the upper or lower edge of at least two opposite side walls
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/68313—Auxiliary support including a cavity for storing a finished device, e.g. IC package, or a partly finished device, e.g. die, during manufacturing or mounting

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Stackable Containers (AREA)
  • Rigid Containers With Two Or More Constituent Elements (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Description

本発明は、薄型表示装置のガラス基板などの板状物を１枚ずつ載置して搬送する枚葉搬送用トレイに関する。特に、小さなスペースに多くのトレイを積み重ねて保管することのできる枚葉搬送用トレイに関する。   The present invention relates to a single-wafer carrying tray for placing and carrying plate-like objects such as glass substrates of thin display devices one by one. In particular, the present invention relates to a single-wafer carrying tray capable of stacking and storing many trays in a small space.

例えば薄型表示装置の製造工程等において、ガラス基板に代表される板状物を搬送する技術が必要となっている。板状物は捻れや撓み等の変形が発生しやすく、搬送中に変形が原因で周囲に接触して表面に傷が付いたり、破損してしまう恐れがある。このため搬送には、板状物を変形させずに載置できるトレイが用いられる。   For example, in a manufacturing process of a thin display device or the like, a technique for conveying a plate-like object typified by a glass substrate is required. The plate-like object is likely to be deformed such as twisting and bending, and may be damaged or damaged on the surface due to deformation during transportation. For this reason, a tray on which a plate-like object can be placed without being deformed is used for conveyance.

板状物を、１枚ずつ個別のトレイに載置して搬送することで、搬送中の物品の変形を防止することができる。しかしこのような搬送形態では、搬送途中で一時保管を行う場合に、保管スペースを広く占めてしまうという問題があった。また、別の場所にまとめて移送したい場合にも手間がかかるという問題があった。   By placing and transporting the plate-like objects one by one on individual trays, it is possible to prevent deformation of the article being conveyed. However, in such a transport mode, there is a problem that the storage space is occupied widely when temporary storage is performed during the transport. In addition, there is a problem that it takes time and effort to transport the materials collectively to another location.

そこで、例えば、特許文献１に記載されたような、板状物を個別に載置可能であり、且つ一時保管や別の場所への移送の際にはトレイ同士を積み重ねることのできる枚葉搬送用トレイが考案された。   Therefore, for example, as described in Patent Document 1, it is possible to individually place plate-like objects, and single-sheet conveyance that can stack trays for temporary storage or transfer to another place. Tray was devised.

しかしながら、この枚葉搬送用トレイは、トレイ内にダストが蓄積したり、積み重ねる際に自身からダストが発生して載置した物品を汚染してしまうという問題が発生した。また、積み重ねた場合の全体の重量が重くなり、保管や運搬が不便であるという問題があった。   However, this single-wafer carrying tray has a problem that dust accumulates in the tray or dust is generated from itself when it is stacked to contaminate the placed article. In addition, there is a problem that the total weight when stacked is inconvenient, and storage and transportation are inconvenient.

また、この枚葉搬送用トレイは、全体が一体化され、各パーツをばらばらにすることができないものであったため、ガラス基板などの大型化に伴い、トレイが大きくなってくると、これを用いる工場等へ持ち込む場合に、運搬が大変になる。   In addition, this single-wafer carrying tray is integrated as a whole, and each part cannot be separated. Therefore, when the tray becomes larger with an increase in the size of the glass substrate or the like, this is used. When it is brought into a factory, transportation becomes difficult.

このような問題点を克服すべく、板状物を搬送するために、複数枚を一度に収容するカセットが考案された。しかし、このようなカセットを用いて装置間の搬送を行う場合には、物品を投入する各装置の入り口に、板状物をカセットから取り出して投入するための専用の投入ロボットが必要となった。   In order to overcome such problems, a cassette has been devised that accommodates a plurality of sheets at a time in order to transport plate-like objects. However, when transporting between devices using such a cassette, a dedicated loading robot for taking out and loading a plate-like object from the cassette is required at the entrance of each device for loading articles. .

薄型表示装置等は、クリーンルーム内で製造されることが多く、クリーンルーム内の搬送が必要となる。クリーンルーム内の各製造装置にガラス基板を投入するためには、ダストの発生が極めて少なく、且つ無人運転が可能なクリーンルーム対応の投入ロボットが必要とされる。このような投入ロボットは非常に高価であり、搬送システムの導入コストの増大を招いていた。   Thin display devices and the like are often manufactured in a clean room and need to be transported in the clean room. In order to throw a glass substrate into each manufacturing apparatus in a clean room, a throwing robot corresponding to a clean room that generates very little dust and can be operated unattended is required. Such a feeding robot is very expensive, which has led to an increase in the introduction cost of the transfer system.

また、近年、薄型表示装置の急激な大型化が進んでおり、表示装置に使用される大型のガラス基板の重量は、１枚が数十キログラムとなっている。更に、大型のガラス基板を収容するカセットには相当の強度が要求されているために、カセット自体の重量が大きくなっている。通常、搬送には２０枚から４０枚のガラス基板を収容して一度に搬送する箱状のカセットが用いられているが、ガラス基板を収容したカセットの総重量は、１トンを超える場合がある。   In recent years, the size of thin display devices has been increasing rapidly, and the weight of a large glass substrate used in a display device is several tens of kilograms. Furthermore, since the cassette which accommodates a large glass substrate is required to have a considerable strength, the weight of the cassette itself is increased. Normally, a box-shaped cassette that accommodates 20 to 40 glass substrates and conveys them at a time is used for conveyance, but the total weight of the cassette that accommodates glass substrates may exceed 1 ton. .

大型化して重いガラス基板を投入するためのロボットが、更に高価なものとなっているばかりか、総重量が１トン前後のカセットを工程と工程の間で搬送するためにはクレーンが必要になっている。これらの設備が必要なために、カセットを使用する搬送システムでは、搬送する物品の大型化に伴って著しくシステムの導入コストが増大し、問題となっている。   Robots for loading heavy glass substrates with larger sizes are becoming more expensive, and cranes are required to transport cassettes with a total weight of around 1 ton between processes. ing. Since these facilities are necessary, in the transport system using the cassette, the introduction cost of the system is remarkably increased with the increase in size of articles to be transported, which is a problem.

また、１トン前後のカセットを人力で搬送することが非常に困難になってきたために、投入ロボットやクレーンが調整や修理のために停止したとき、ガラス基板の搬送が中断してしまう可能性がでてきた。このため、従来の搬送システムにおいては、投入ロボットやクレーンの停止によって薄型表示装置の製造工程が停止してしまい、製造工程全体の稼働率の低下を招く恐れがある。
特開２００４−１６８４８４号公報（図１の板状容器２） In addition, since it has become very difficult to manually transport cassettes of about 1 ton, there is a possibility that the transportation of the glass substrate may be interrupted when the loading robot or crane stops for adjustment or repair. It came out. For this reason, in the conventional transfer system, the manufacturing process of the thin display device is stopped by stopping the feeding robot and the crane, and the operation rate of the entire manufacturing process may be reduced.
JP 2004-168484 A (Plate-like container 2 in FIG. 1)

本願発明は、上記従来技術の問題点に鑑みてなされたものであり、板状物を一枚ずつ載置し、搬送し、複数枚積み重ねた状態で保管することのできる枚葉搬送用トレイであって、収容する板状物にトレイからダストが付着することがない枚葉搬送用トレイを提供することを課題としている。   The present invention has been made in view of the above-mentioned problems of the prior art, and is a single-wafer carrying tray that can place and transport plate-like objects one by one and store them in a stacked state. Therefore, an object is to provide a single-wafer carrying tray in which dust does not adhere to the plate-like object to be accommodated from the tray.

また、本願発明は、トレイの使用現場に持ち込むまでのスペースを節約できる枚葉搬送用トレイを提供することを課題としている。   Moreover, this invention makes it the subject to provide the tray for sheet | seat conveyance which can save the space until it brings in a use site of a tray.

請求項１記載の枚葉搬送用トレイは、外枠間に桟を架け渡すことによってワーク載置部を形成する枚葉搬送用トレイであって、前記桟の両端を外枠に接合するとともに、その接合箇所をワーク載置部の外側に設け、前記外枠を上下に平坦部を備えた構造とし、前記桟の両端は、前記外枠の下方の平坦部に接合され、前記外枠の上方の平坦部には、他の部分に比べてダストの発生が少ない樹脂ブロックが各辺毎に設けられ、上下のトレイが前記樹脂ブロックで接触することを特徴とする。 The single-wafer carrying tray according to claim 1 is a single-wafer carrying tray that forms a workpiece placement unit by bridging a cross between outer frames, and joins both ends of the cross to the outer frame, The joint location is provided outside the workpiece placement part, and the outer frame is structured to have a flat part up and down, and both ends of the crosspiece are joined to the flat part below the outer frame and above the outer frame. The flat portion is provided with a resin block that generates less dust compared to other portions on each side, and the upper and lower trays are in contact with the resin block .

請求項２記載の枚葉搬送用トレイは、請求項１に従属し、桟を平坦部から上方に突出する膨出部を有する構成とし、この膨出部の上方をワーク載置部とし、前記外枠の下方の平坦部と前記桟の平坦部とを重ねて、前記外枠と前記桟とを接合するようにしたことを特徴とする。 The single-wafer carrying tray according to claim 2 is dependent on claim 1, and has a configuration in which the crosspiece has a bulging portion protruding upward from the flat portion, and an upper portion of the bulging portion serves as a work placement portion, The flat portion below the outer frame and the flat portion of the rail are overlapped to join the outer frame and the rail.

請求項３記載の枚葉搬送用トレイは、請求項２に従属し、４本の部材の上方の平坦部をコーナー部分で接合することによって外枠を形成し、こうして接合された外枠のコーナー部分の隣合う部材の下方の平坦部を斜めに架け渡されるコーナー桟で接合したことを特徴とする。   The single-wafer carrying tray according to claim 3 is dependent on claim 2 and forms an outer frame by joining the flat portions above the four members at the corner portions, and thus the corners of the joined outer frames. It is characterized in that the flat part below the adjacent members of the part is joined by a corner beam which is bridged obliquely.

請求項１記載の枚葉搬送用トレイによれば、トレイ側としては、トレイを変形させる力が作用した際に擦れ合ったり、洗浄の際に洗い残しや洗浄液が残ることにより、ダスト発生の可能性の高い接合箇所がワーク載置部の外側に離れた場所とされていることになり、板状物へのダストの影響を避けることができる。   According to the single-wafer carrying tray according to claim 1, dust can be generated on the tray side by rubbing when a force for deforming the tray is applied, or by leaving unwashed or washing liquid at the time of washing. The highly jointed portion is located away from the workpiece placement portion, and the influence of dust on the plate-like object can be avoided.

特に、このトレイを積み重ねた場合であっても、板状物の上方に上のトレイの接合箇所が位置することがなく、接合箇所から発生するダストにより板状物が汚染されるのを防止することができる。加えて、上下のトレイがダストの発生しにくい樹脂ブロックで接触するので、板状物へのダストの影響を極力抑えることができる。 In particular, even when the trays are stacked, the joint portion of the upper tray is not located above the plate-like material, and the plate-like material is prevented from being contaminated by dust generated from the joint portion. be able to. In addition, since the upper and lower trays are in contact with resin blocks that are less likely to generate dust, the influence of dust on the plate-like object can be suppressed as much as possible.

請求項２記載の枚葉搬送用トレイによれば、請求項１の効果に加え、このように桟の平坦な取付部と、外枠の内側平坦部との間で接合されるので、接合を容易にすることができる。   According to the sheet transport tray of claim 2, in addition to the effect of claim 1, since it is joined between the flat mounting portion of the crosspiece and the inner flat portion of the outer frame, the joining is performed. Can be easily.

請求項３記載の枚葉搬送用トレイによれば、請求項２の効果に加え、それぞれの部品はばらばらの直線状の部材となり、それぞれ纏めて、持ち込むことができ、運搬・組立までの保管スペースを大幅に節約することができる。   According to the single-wafer carrying tray of claim 3, in addition to the effect of claim 2, each part becomes a separate linear member, and can be brought together and stored, and storage space until transportation and assembly Can save a lot.

以下に発明を実施するための最良の形態を列記する。   The best mode for carrying out the invention is listed below.

（形態１）枚葉搬送用トレイは、４本の板状部材を略長方形に接合することで構成された外枠の間に、複数の桟を架け渡すことによってワーク載置部が形成されている。   (Embodiment 1) In the single-wafer carrying tray, a work placement portion is formed by bridging a plurality of bars between outer frames formed by joining four plate-like members into a substantially rectangular shape. Yes.

（形態２）４本の板状部材の相互接合箇所、桟と外枠との接合箇所は、ワーク載置部から離れた位置となるように構成されている。   (Embodiment 2) The locations where the four plate-shaped members are mutually joined and the location where the crosspiece and the outer frame are joined are configured to be located away from the work placing portion.

（形態３）略長方形の外枠は、外側平坦部と外側平坦部よりも低い位置に設けられた内側平坦部を備えており、外側平坦部と内側平坦部の間に傾斜部が設けられている。傾斜部の長さは、外枠の平面を維持するために要求される強度を保てる長さに設定される。要求される強度が大きいとき傾斜部は長くなり、要求される強度が小さいとき傾斜部は短くなる。   (Mode 3) The substantially rectangular outer frame includes an outer flat part and an inner flat part provided at a position lower than the outer flat part, and an inclined part is provided between the outer flat part and the inner flat part. Yes. The length of the inclined portion is set to a length that can maintain the strength required to maintain the plane of the outer frame. When the required strength is large, the inclined portion becomes long, and when the required strength is small, the inclined portion becomes short.

（形態４）上下に積み重ねられるトレイ間の接触部を構成するために、複数個の樹脂ブロックが、外側平坦部の４辺全てに取り付けられている。樹脂ブロックの高さは、１枚の板状物を安全に収容する為の収容高さＨ１（図９参照。）と等しくなっている。   (Form 4) In order to constitute the contact part between the trays stacked up and down, a plurality of resin blocks are attached to all four sides of the outer flat part. The height of the resin block is equal to the housing height H1 (see FIG. 9) for safely housing one plate-like object.

（形態５）樹脂ブロックには、耐磨耗性が高く、機械的な強度に優れているためにダストが発生しにくい樹脂である超高分子量（高密度）ポリエチレン（ＵＰＥ）が使用される。   (Embodiment 5) For the resin block, ultra high molecular weight (high density) polyethylene (UPE), which is a resin that has high abrasion resistance and is excellent in mechanical strength and hardly generates dust, is used.

（形態６）複数枚の枚葉搬送用トレイを上下方向に積み重ねる場合には、傾斜部で囲まれた部分が上方から別のトレイが入り込むための受容部として機能するために、所定の収容高さを変えることなく積み重ねることが可能となる。   (Mode 6) When stacking a plurality of single-sheet transport trays in the vertical direction, a portion enclosed by the inclined portion functions as a receiving portion for entering another tray from above, so that a predetermined storage height It is possible to stack without changing the height.

（形態７）樹脂ブロックの上面は、外枠の外側平坦部の上面よりも高い位置にあり、樹脂ブロックの下面は、外側平坦部の下面よりも低い位置にある。複数枚の枚葉搬送用トレイを積み重ねた状態では、樹脂ブロックの高さが上下の積み重ねピッチとなる。   (Mode 7) The upper surface of the resin block is at a position higher than the upper surface of the outer flat portion of the outer frame, and the lower surface of the resin block is lower than the lower surface of the outer flat portion. In a state where a plurality of single-sheet transport trays are stacked, the height of the resin blocks is the vertical stacking pitch.

（形態８）樹脂ブロックの上面には凸部が設けられており、樹脂ブロックの下面には凹部が設けられている。下面の凹部は、上面の凸部に対応した形状を有している。上下方向に重ねた枚葉搬送用トレイの樹脂ブロックの凸部と凹部を嵌め合わせることで、枚葉搬送用トレイの位置決め固定がなされる。   (Mode 8) A convex portion is provided on the upper surface of the resin block, and a concave portion is provided on the lower surface of the resin block. The concave portion on the lower surface has a shape corresponding to the convex portion on the upper surface. By positioning the convex and concave portions of the resin block of the sheet transport tray stacked in the vertical direction, the sheet transport tray is positioned and fixed.

以下に、本発明の実施の形態（実施例）について、図面を用いて説明する。   Hereinafter, embodiments (examples) of the present invention will be described with reference to the drawings.

以下、本発明を適用した枚葉搬送用トレイ（以下、トレイと省略する場合もある）の実施例を、図面を参照しつつ詳細に説明する。図１（ａ）は、本発明による枚葉搬送用トレイの一実施例の構成を示す斜視図、（ｂ）は（ａ）のＡ視要部拡大平面図である。   Hereinafter, embodiments of a single-wafer carrying tray to which the present invention is applied (hereinafter sometimes abbreviated as a tray) will be described in detail with reference to the drawings. FIG. 1A is a perspective view showing a configuration of an embodiment of a single-wafer carrying tray according to the present invention, and FIG. 1B is an enlarged plan view of a main part A of FIG.

本実施例における枚葉搬送用トレイ１は、外枠２、外枠２の対向する辺の間に掛け渡された複数の桟４、外枠用部材の下方の接合部近傍で隣り合う部材の間に斜めに掛け渡されるコーナー桟６、上方の接合部に用いられる接合金具１０を備えている。   In this embodiment, the single-wafer carrying tray 1 includes an outer frame 2, a plurality of crosspieces 4 spanned between opposite sides of the outer frame 2, and members adjacent to each other in the vicinity of a joint portion below the outer frame member. There are provided a corner beam 6 that is slanted between and a joint fitting 10 that is used for an upper joint.

外枠２は、２本の長辺部材２ａと２本の短辺部材２ｂから構成される。本実施例における長辺部材２ａと短辺部材２ｂとには一定の板厚のＳＵＳ３０４が使用されており、板金加工によって同一の断面形状（後述するフランジ１４、外側平坦部１１、傾斜部１３、内側平坦部１２）となるように加工されている。   The outer frame 2 includes two long side members 2a and two short side members 2b. SUS304 having a constant plate thickness is used for the long side member 2a and the short side member 2b in the present embodiment, and the same cross-sectional shape (flange 14, outer flat portion 11, inclined portion 13, which will be described later) is obtained by sheet metal processing. The inner flat portion 12) is processed.

接合金具１０は、長辺部材２ａと短辺部材２ｂの上方の外側平坦部１１をコーナー部分で接合し、コーナー桟６は、こうして接合された外枠のコーナー部分の隣合う部材の下方の内側平坦部１２に斜めに架け渡されて双方の部材２ａ、２ｂを接合している。   The joining metal fitting 10 joins the outer flat portion 11 above the long side member 2a and the short side member 2b at the corner portion, and the corner crosspiece 6 is below the adjacent member of the corner portion of the outer frame thus joined. The two members 2a and 2b are joined to the flat portion 12 at an angle.

複数の桟４は、短辺部材２ｂの内側平坦部１２間に架け渡されて、その両端部がこの内側平坦部１２に接合されている。これらの部材間の接合部分を接合箇所３として示している。   The plurality of crosspieces 4 are bridged between the inner flat portions 12 of the short side member 2 b, and both end portions thereof are joined to the inner flat portion 12. A joint portion between these members is shown as a joint portion 3.

複数の桟４と、コーナー桟６の真ん中には、この枚葉搬送用トレイ１の収容対象とする板状物３１を載置するための載置ピン２８が設けられている。コーナー桟６の適所には、載置される板状物３１のコーナー部分の位置決めをする位置決めピン２９が設けられている。   In the middle of the plurality of crosspieces 4 and the corner crosspiece 6, a placement pin 28 is provided for placing the plate-like object 31 to be accommodated in the single-wafer carrying tray 1. Positioning pins 29 for positioning the corner portions of the plate-like object 31 to be placed are provided at appropriate positions on the corner bar 6.

このような構成で、本発明の枚葉搬送用トレイ１は、図１（ｂ）でより明確に分かるように、桟４の両端を外枠２に接合するとともに、その接合箇所３が板状物３１を載置するワーク載置部３１（同じ符合とする。）の外側になるように構成されているので、トレイ１側としては、もっともダスト発生の可能性の高い接合箇所３がワーク載置部３１の下方であって外側に離れた場所とされていることになり、板状物３１へのダストの影響を避けることができる。   With such a configuration, the single-wafer carrying tray 1 according to the present invention joins both ends of the crosspiece 4 to the outer frame 2 as shown in FIG. Since it is configured to be outside the workpiece placement portion 31 (with the same sign) on which the object 31 is placed, on the tray 1 side, the joint portion 3 that is most likely to generate dust is the workpiece placement. It is a place below the placement portion 31 and away from the outside, so that the influence of dust on the plate-like object 31 can be avoided.

特に、このトレイ１を積み重ねた場合であっても、板状物３１の上方に上のトレイ１の接合箇所が位置することがなく、接合箇所３から発生するダストにより板状物３１が汚染されるのを防止することができる。   In particular, even when the trays 1 are stacked, the joint portion of the upper tray 1 is not located above the plate member 31, and the plate member 31 is contaminated by dust generated from the joint portion 3. Can be prevented.

これより、この枚葉搬送用トレー１の詳細について、以下説明する。   The details of the single-wafer carrying tray 1 will be described below.

図２（ａ）に、長辺部材２ａと短辺部材２ｂの斜視図を示し、図２（ｂ）にそのＢ−Ｂ断面図を示す。また、図３に、長辺部材２ａと短辺部材２ｂの端部付近の斜視図を示す。   FIG. 2 (a) shows a perspective view of the long side member 2a and the short side member 2b, and FIG. 2 (b) shows a BB cross-sectional view thereof. FIG. 3 is a perspective view of the vicinity of the end portions of the long side member 2a and the short side member 2b.

長辺部材２ａと短辺部材２ｂは、図２（ｂ）の断面形状で解るように、外側平坦部１１と、外側平坦部１１よりも低い位置に形成される内側平坦部１２を備えており、外側平坦部１１と内側平坦部１２の間に傾斜部１３が設けられている。   The long-side member 2a and the short-side member 2b include an outer flat portion 11 and an inner flat portion 12 formed at a position lower than the outer flat portion 11, as can be seen from the cross-sectional shape of FIG. An inclined portion 13 is provided between the outer flat portion 11 and the inner flat portion 12.

傾斜部１３は、外枠２が形成されたときに上方に向けて広がったコーン形状となるように角度が付けられている。又、外側平坦部１１の外側には、フランジ１４が設けられている。   The inclined portion 13 is angled so as to have a cone shape that spreads upward when the outer frame 2 is formed. A flange 14 is provided outside the outer flat portion 11.

傾斜部１３の高さは、長辺部材２ａと短辺部材２ｂが長方形の外枠２として組み合わされた場合に、外枠２の平面を維持するために必要な強度を保てる高さに設定される。このため、傾斜部１３の高さが、１枚の板状物３１を安全に収容するために必要な収容高さを越えた高さになる場合がある。   The height of the inclined portion 13 is set to a height that can maintain the strength necessary for maintaining the plane of the outer frame 2 when the long side member 2a and the short side member 2b are combined as a rectangular outer frame 2. The For this reason, there is a case where the height of the inclined portion 13 is higher than the accommodation height necessary for safely accommodating the single plate-like object 31.

外枠２の形状が大型化された場合には要求される強度が大きくなり、外枠２を強化するために傾斜部１３の高さはより高くなる。小型の外枠２で要求される強度が小さい場合には、傾斜部１３を短くすることができる。   When the shape of the outer frame 2 is increased, the required strength is increased, and the height of the inclined portion 13 is increased in order to strengthen the outer frame 2. When the strength required for the small outer frame 2 is small, the inclined portion 13 can be shortened.

本実施例における長辺部材２ａと短辺部材２ｂには、外側平坦部１１に、樹脂ブロック８を取り付けるためのブロック取付孔１５ａ、１５ｂが１部材にそれぞれ２カ所ずつ設けられている。又、それぞれの部材の外側平坦部１１の端部には、部材同士を接合するための接合孔１６が３個ずつ設けられている。内側平坦部１２には、桟４を接合するための桟取付孔１７が設けられている。   In the long side member 2a and the short side member 2b in the present embodiment, two block attachment holes 15a and 15b for attaching the resin block 8 are provided in the outer flat portion 11, respectively. Further, three joining holes 16 for joining the members to each other are provided at the end of the outer flat portion 11 of each member. The inner flat portion 12 is provided with a crosspiece mounting hole 17 for joining the crosspiece 4.

図４に、長辺部材２ａと短辺部材２ｂに取り付けられる前の樹脂ブロック８の斜視図を示す。樹脂ブロック８は、略直方体の本体部２０の上面に凸部２１が設けられており、樹脂ブロックの下面には凹部２２が設けられている。本体部２０の高さは、１枚の板状物３１を安全に収容する為の収容高さＨ１（図９参照。）と等しくなるように形成されている。   FIG. 4 is a perspective view of the resin block 8 before being attached to the long side member 2a and the short side member 2b. The resin block 8 is provided with a convex portion 21 on the upper surface of a substantially rectangular parallelepiped main body portion 20 and a concave portion 22 on the lower surface of the resin block. The height of the main body 20 is formed to be equal to the housing height H1 (see FIG. 9) for safely housing one plate-like object 31.

本実施例における樹脂ブロック８の凸部２１は、円錐台形状に形成されている。下面の凹部２２は、上面の凸部２１に対応した形状を有している。本体部２０の右面と左面には、トレイマガジンとの接触部となる被支持部２３が伸びている。被支持部２３には、長辺部材２ａ又は短辺部材２ｂに樹脂ブロック８を固定するための外枠取付孔２４が貫通している。   The convex portion 21 of the resin block 8 in the present embodiment is formed in a truncated cone shape. The concave portion 22 on the lower surface has a shape corresponding to the convex portion 21 on the upper surface. A supported portion 23 serving as a contact portion with the tray magazine extends on the right surface and the left surface of the main body portion 20. An outer frame mounting hole 24 for fixing the resin block 8 to the long side member 2a or the short side member 2b passes through the supported portion 23.

樹脂ブロック８は、上下に積み重ねられる枚葉搬送用トレイ１との接触部となるために、ダストの発生が押さえられた素材で形成されることが好ましい。本実施例における樹脂ブロック８は、耐磨耗性が高く、機械的な強度に優れた超高分子量（高密度）ポリエチレン（ＵＰＥ）で形成されている。樹脂ブロック８は、ブロック同士が接触しても摩耗せず、ダストを発生することがないために、搬送する板状物３１を汚染しない。   Since the resin block 8 is a contact portion with the single-wafer carrying tray 1 stacked up and down, the resin block 8 is preferably formed of a material in which generation of dust is suppressed. The resin block 8 in this embodiment is made of ultra high molecular weight (high density) polyethylene (UPE) having high wear resistance and excellent mechanical strength. The resin block 8 does not wear even if the blocks come into contact with each other and does not generate dust, so the plate-like object 31 to be conveyed is not contaminated.

樹脂ブロック８は、外枠２に、リベット若しくはネジによって固定される。図５は、長辺部材２ａの側面図であり、樹脂ブロック８が長辺部材２ａにリベット若しくはネジによって固定された状態を示す図である。   The resin block 8 is fixed to the outer frame 2 with rivets or screws. FIG. 5 is a side view of the long side member 2a, and shows a state where the resin block 8 is fixed to the long side member 2a by rivets or screws.

樹脂ブロック８は、被支持部２３の上面が長辺部材２ａの外側平坦部の下面に突き当てられて、ブロック取付孔１５ａから凸部２１と本体部２０の上部が突出した状態で固定されている。   The resin block 8 is fixed in a state in which the upper surface of the supported portion 23 is abutted against the lower surface of the outer flat portion of the long side member 2a and the upper portion of the convex portion 21 and the main body portion 20 protrudes from the block mounting hole 15a. Yes.

外枠２に固定された樹脂ブロック８は、本体部２０の上面が、長辺部材２ａの外側平坦部１１よりも高くなっている。また、本体部２０の下面は、外側平坦部１１に設けられたフランジ１４の下面よりも低くなっている。   As for the resin block 8 fixed to the outer frame 2, the upper surface of the main-body part 20 is higher than the outer side flat part 11 of the long side member 2a. Further, the lower surface of the main body 20 is lower than the lower surface of the flange 14 provided on the outer flat portion 11.

外枠２と樹脂ブロック８のこのような配置を採用することで、上下方向に枚葉搬送用トレイ１を多段で積み重ねると、各々のトレイの樹脂ブロック８の本体部２０の上面と下面が互いに接することとなり、枚葉搬送用トレイ１は、樹脂ブロック８の本体部２０の高さをピッチとして積み重ねられる。   By adopting such an arrangement of the outer frame 2 and the resin block 8, when the sheet transport trays 1 are stacked in multiple stages in the vertical direction, the upper surface and the lower surface of the main body portion 20 of the resin block 8 of each tray are mutually connected. Thus, the single-wafer carrying tray 1 is stacked with the height of the main body 20 of the resin block 8 as a pitch.

この枚葉搬送用トレイ１は、接触部である樹脂ブロック８と外枠２を異なる素材で別々に形成してから固定する構成となっている。このことにより、接触部だけにダストの発生を抑えられた素材を適用することが可能となり、接触部を容易に加工し、形成することができる。   This single-wafer carrying tray 1 has a configuration in which a resin block 8 and an outer frame 2 as contact portions are separately formed from different materials and then fixed. As a result, it is possible to apply a material in which dust generation is suppressed only to the contact portion, and the contact portion can be easily processed and formed.

一方、外枠２の他の部分は、他の枚葉搬送用トレイ１や設備等とほとんど接触しないため、ダストの抑制よりも強度を重視した素材を適用することが可能となり、外枠２の素材を選択する自由度を広げることができる。   On the other hand, since the other parts of the outer frame 2 are hardly in contact with other single-wafer carrying trays 1 or equipment, it is possible to apply a material that emphasizes strength rather than dust suppression. The degree of freedom in selecting materials can be expanded.

外枠２の組立について更に説明する。長辺部材２ａと短辺部材２ｂとは、図６に示すＬ字型の接合金具１０を用いて接合されている。本実施例における接合金具１０には、Ｌ字型のそれぞれの辺に３個ずつ係６個の接合孔１８が設けられている。接合孔１８同士の相対位置は、長辺部材２ａと短辺部材２ｂの接合孔１６の孔同士の相対位置関係と同一になるように、配置されている。   The assembly of the outer frame 2 will be further described. The long side member 2a and the short side member 2b are joined using the L-shaped joining metal fitting 10 shown in FIG. The joint fitting 10 according to the present embodiment is provided with six joint holes 18 each having three L-shaped sides. The relative positions of the joint holes 18 are arranged to be the same as the relative positional relationship between the joint holes 16 of the long side member 2a and the short side member 2b.

接合金具１０の一辺は、長辺部材２ａの端部に重ね合わされる。長辺部材２ａの接合孔１６と接合金具１０の接合孔１８の両方を貫通するようにブラインドリベットが打たれ、長辺部材２ａと接合金具１０がリベット接合され、接合箇所３を形成する。   One side of the joint fitting 10 is overlapped with the end of the long side member 2a. A blind rivet is struck so as to penetrate both the joint hole 16 of the long side member 2a and the joint hole 18 of the joint metal 10, and the long side member 2a and the joint metal 10 are rivet joined to form the joint part 3.

接合金具１０の他辺は、短辺部材２ｂの端部に重ね合わされる。短辺部材２ｂの接合孔１６と接合金具１０の接合孔１８の両方を貫通するようにブラインドリベットが打たれ、短辺部材２ｂと接合金具１０がブラインドリベット接合され、接合箇所３を形成する。   The other side of the joint fitting 10 is overlaid on the end of the short side member 2b. A blind rivet is struck so as to penetrate both the joint hole 16 of the short side member 2b and the joint hole 18 of the joint fitting 10, and the short side member 2b and the joint fitting 10 are blind rivet joined to form the joint portion 3.

２本の長辺部材２ａと２本の短辺部材２ｂが４個の接合金具１０を用いてブラインドリベット接合されて、略長方形の外枠２が形成される。   The two long side members 2a and the two short side members 2b are blind rivet-joined using the four joining fittings 10 to form the substantially rectangular outer frame 2.

ブラインドリベット接合により形成された外枠２は、長辺部材２ａと短辺部材２ｂの接合部に、空間１９（図１参照）が設けられている。空間１９が設けられていることで、接合部にダストが留まることがなく、又外枠２の洗浄と乾燥を容易に行うことができる。即ち空間１９を設けていることによって、外枠２の接合部にダストが蓄積されなくなり、載置する板状物３１の汚染を未然に防止する効果が得られている。   The outer frame 2 formed by blind rivet joining is provided with a space 19 (see FIG. 1) at the joint between the long side member 2a and the short side member 2b. Since the space 19 is provided, dust does not stay at the joint, and the outer frame 2 can be easily cleaned and dried. That is, by providing the space 19, dust is not accumulated at the joint portion of the outer frame 2, and the effect of preventing contamination of the plate-like object 31 to be placed is obtained.

本実施例の枚葉搬送用トレイ１は、外枠２の対向する短辺部材２ｂの間に、複数の桟４が掛け渡されて、板状物３１の載置部３１が形成されている。桟４には一定の板厚のＳＵＳ３０４が使用されており、板金加工によって所定の断面形状をとるように加工されている。   In the single-wafer carrying tray 1 of the present embodiment, a plurality of crosspieces 4 are spanned between opposing short side members 2b of the outer frame 2 to form a placement portion 31 for a plate-like object 31. . The crosspiece 4 is made of SUS304 having a certain thickness, and is processed to have a predetermined cross-sectional shape by sheet metal processing.

桟４の一端部の拡大図を図７（ａ）に、その短手方向の側面図を図７（ｂ）に示す。桟４は、両側に外枠２への平坦な取付部２５が形成されており、平坦部の間に上方に突出する膨出部２６が形成されている。取付部２５の端部には、外枠２に接合するための外枠取付孔２７が設けられている。膨出部２６には、板状物３１を支持するための複数の載置ピン２８が固定されている。   An enlarged view of one end of the crosspiece 4 is shown in FIG. 7 (a), and a side view in the short direction is shown in FIG. 7 (b). The crosspiece 4 is formed with flat attachment portions 25 to the outer frame 2 on both sides, and a bulging portion 26 protruding upward is formed between the flat portions. An outer frame mounting hole 27 for joining to the outer frame 2 is provided at the end of the mounting portion 25. A plurality of mounting pins 28 for supporting the plate-like object 31 are fixed to the bulging portion 26.

載置ピン２８は耐磨耗性の高い超高分子量（高密度）ポリエチレン（ＵＰＥ）で形成されており、板状物３１を繰り返し搭載しても、磨耗によるダストが発生せず、板状物３１を汚染しない。   The mounting pin 28 is made of ultra-high molecular weight (high density) polyethylene (UPE) having high wear resistance. Even when the plate-like object 31 is repeatedly mounted, dust due to wear is not generated, and the plate-like object. 31 is not polluted.

桟４の外枠取付孔２７と、外枠２の桟取付孔１７を貫通するようにリベットが打たれて、外枠２と桟４がリベット接合され、接合箇所３を形成する。このように桟４の平坦な取付部２５と、外枠２の内側平坦部１２との間で接合されるので、接合を容易にすることができる。   A rivet is struck through the outer frame attachment hole 27 of the crosspiece 4 and the crosspiece attachment hole 17 of the outer frame 2, and the outer frame 2 and the crosspiece 4 are rivet-joined to form a joint 3. Thus, since it joins between the flat attachment part 25 of the crosspiece 4 and the inner side flat part 12 of the outer frame 2, joining can be made easy.

また、桟４が膨出部２６を備えているために、桟４は外枠２に対して両端に開口部を持った状態で接合されている。このため外枠２と桟４の接合部にダストが蓄積されにくく、又枚葉搬送用トレイ１を洗浄する際に桟４の部分の洗浄と乾燥を容易に行うことができる。   Further, since the crosspiece 4 includes the bulging portion 26, the crosspiece 4 is joined to the outer frame 2 with openings at both ends. For this reason, it is difficult for dust to accumulate at the joint between the outer frame 2 and the crosspiece 4, and when the single-sheet transport tray 1 is washed, the portion of the crosspiece 4 can be easily cleaned and dried.

又、桟４は、図７（ｂ）でより明確に分かるように、膨出部２６が形成されているために、平板の部材を用いた場合よりも梁強度が向上している。このため、桟４にはより板厚の薄い素材を用いることが可能となっており、桟４の軽量化が図られている。   Further, as can be seen more clearly in FIG. 7B, the crosspiece 4 has a bulging portion 26, so that the beam strength is improved as compared with the case where a flat plate member is used. For this reason, it is possible to use a material with a thinner plate thickness for the crosspiece 4, thereby reducing the weight of the crosspiece 4.

この膨出部２６の形状は、桟４を両持ち梁と考えた場合に、その撓みを最も小さくすることができるように考慮すればよく、より具体的には、 撓み＝他の条件で決まる数値／断面二次モーメントＩ の式から解るように、桟４の横断面の断面二次モーメントＩができるだけ大きくなるように、設計すればよい。   The shape of the bulging portion 26 may be determined so that the bending can be minimized when the crosspiece 4 is considered as a doubly supported beam. More specifically, the bending is determined by other conditions. As can be understood from the numerical value / cross section secondary moment I, the cross section secondary moment I of the cross section of the crosspiece 4 may be designed to be as large as possible.

ただし、設計上の他の条件、例えば、収容高さＨ１をできるだけ小さくする、取付部２５、膨出部２６の上方の一定の平坦部分を確保する、といった条件も併せて考慮する必要がある。   However, it is also necessary to consider other design conditions, for example, to make the accommodation height H1 as small as possible, and to ensure a certain flat portion above the mounting portion 25 and the bulging portion 26.

コーナー桟６は、枚葉搬送用トレイ１に搭載される板状物３１の位置決めと、外枠２のコーナー部の補強のために、外枠２のコーナー部近傍の長辺部材２ａと短辺部材２ｂの間に、斜めに掛け渡されている。   The corner crosspiece 6 is provided with a long side member 2a and a short side near the corner portion of the outer frame 2 for positioning the plate-like object 31 mounted on the sheet feeding tray 1 and reinforcing the corner portion of the outer frame 2. It is spanned diagonally between the members 2b.

コーナー桟６の斜視図を図９に示す。コーナー桟６は、桟４と同様に膨出部２６が設けられており、膨出部の上に、板状物３１を支持するための載置ピン２８と、板状物３１のコーナー部を突き当てて載置位置の位置決めを行うための２個の位置決めピン２９が固定されている。   A perspective view of the corner beam 6 is shown in FIG. The corner beam 6 is provided with a bulging portion 26 as in the case of the beam 4, and a mounting pin 28 for supporting the plate-like object 31 and a corner portion of the plate-like object 31 are provided on the bulged portion. Two positioning pins 29 for abutting and positioning the mounting position are fixed.

なお、このコーナ桟６と外枠２との接合においても、ブラインドリベットによるリベット接合が用いられ、接合箇所３が形成されている。   It should be noted that rivet joining using blind rivets is also used for joining the corner beam 6 and the outer frame 2 to form the joint portion 3.

コーナー桟６の位置決めピン２９は、板状物３１のコーナー位置を定めるために設けられており、実際の板状物３１の寸法に対して片側で２ミリメートルから３ミリメートルのクリアランスを確保できるように配置されている。位置決めピン２９は、耐磨耗性の高い超高分子量（高密度）ポリエチレンで形成されており、板状物３１が位置決めのために繰り返し接触しても、磨耗によるダストが発生せず、板状物３１を汚染しない。   The positioning pin 29 of the corner bar 6 is provided to determine the corner position of the plate-like object 31 so that a clearance of 2 mm to 3 mm can be secured on one side with respect to the actual size of the plate-like object 31. Has been placed. The positioning pin 29 is made of ultra-high molecular weight (high density) polyethylene having high wear resistance. Even if the plate-like object 31 is repeatedly contacted for positioning, dust due to wear is not generated, and the plate-like pin 29 It does not contaminate the object 31.

こうして、上述したように、本発明の枚葉搬送用トレイ１においては、長辺部材２ａと短辺部材２ｂとの接合金具１０による接合、桟４と外枠２との接合、コーナー桟６と外枠２との接合、樹脂ブロック８の外枠への取り付けのいずれの場合も、このトレイ１を用いる現場で施行可能なブラインドリベットや、ネジ締結手段を用いて接合されているので、この現場に持ち込む際には、それぞれの部品である長辺部材２ａ、短辺部材２ｂ、桟４、コーナー桟６、接合金具１０はばらばらの直線状の部材として、それぞれ纏めて、持ち込むことができ、運搬・組立までの保管スペースを大幅に節約することができる。   Thus, as described above, in the single-wafer carrying tray 1 of the present invention, the joining of the long-side member 2a and the short-side member 2b by the joining bracket 10, the joining of the crosspiece 4 and the outer frame 2, the corner crosspiece 6 In both cases of joining to the outer frame 2 and attaching the resin block 8 to the outer frame, since it is joined using a blind rivet or screw fastening means that can be implemented on the spot using the tray 1, When bringing them in, the long side member 2a, the short side member 2b, the crosspiece 4, the corner crosspiece 6 and the joint fitting 10 which are the respective parts can be brought together as separate linear members and transported.・ Storage space until assembly can be saved significantly.

特にブラインドリベットなどの塑性変形による軸状締結手段を用いる場合は、それぞれの取付穴の位置などが精確に形成されておれば、単に現場でリベット接合するだけで、接合後のトレー形状も精度のよいものを得ることができる。   In particular, when using shaft-type fastening means such as blind rivets by plastic deformation, if the position of each mounting hole is precisely formed, the rivet is simply joined on-site, and the tray shape after joining is accurate. You can get a good one.

また、桟４の膨出部２６の形状を、図７（ｂ）に示すような直立する帽子型形状ではなく、相互に積み重ね可能なように少し側壁を傾斜させるようにすると、桟４自体も組立前には上下に省スペースで積み重ねることができ、よりスペースを節約することができる。
この点は、図２（ｂ）の断面図に示した外枠２を構成する長辺部材２ａ、短辺部材２ｂについても同様である。 Further, if the shape of the bulging portion 26 of the crosspiece 4 is not an upright hat shape as shown in FIG. 7B, but the side walls are slightly inclined so that they can be stacked on each other, the crosspiece 4 itself is also Prior to assembly, it can be stacked up and down in a space-saving manner, saving more space.
This also applies to the long side member 2a and the short side member 2b constituting the outer frame 2 shown in the cross-sectional view of FIG.

図９に、枚葉搬送用トレイ１を上下方向に複数枚重ね合わせた状態を模式的に示す。   FIG. 9 schematically shows a state in which a plurality of single-wafer carrying trays 1 are stacked in the vertical direction.

この図８によると、下側のトレイ１の傾斜部１３に、上から載せられた別のトレイ１の傾斜部１３が入り込むことで、傾斜部１３積み重ねたときに小さなスペースで多くのトレイを保管することが可能となっている。   According to FIG. 8, the inclined portion 13 of another tray 1 placed from above enters the inclined portion 13 of the lower tray 1 so that many trays can be stored in a small space when the inclined portions 13 are stacked. It is possible to do.

本実施例の複数の枚葉搬送用トレイ１を積み重ねたときの全体の高さについて、積み重ねのピッチと、上側に載せられるトレイ１が下のトレイに入り込む高さ、即ち受容部１３ｂの高さとの関係を明らかにしつつ説明する。   Regarding the overall height when the plurality of single-wafer carrying trays 1 of this embodiment are stacked, the stacking pitch and the height at which the tray 1 placed on the upper side enters the lower tray, that is, the height of the receiving portion 13b. This will be explained while clarifying the relationship.

本実施例の枚葉搬送用トレイ１は、外枠２に固定された樹脂ブロック８の本体部２０の上面と下面だけが互いに接した状態で積み重ねられる。樹脂ブロック８の高さが、１枚の板状物３１を安全に収容する為の収容高さＨ１となっており、枚葉搬送用トレイ１の外枠２の他の部分及び桟４は、積み重ねたときに上下のトレイ１とは接触しない。   The single-wafer carrying tray 1 of this embodiment is stacked with only the upper and lower surfaces of the main body 20 of the resin block 8 fixed to the outer frame 2 in contact with each other. The height of the resin block 8 is a housing height H1 for safely housing one plate-like object 31, and the other part of the outer frame 2 of the sheet transport tray 1 and the crosspiece 4 are There is no contact with the upper and lower trays 1 when stacked.

このことから、枚葉搬送用トレイ１は、樹脂ブロック８によって規定される高さ、即ち収容高さＨ１をピッチとして積み重ねられる。   Accordingly, the single-wafer carrying tray 1 is stacked with the height defined by the resin block 8, that is, the accommodation height H1 as a pitch.

枚葉搬送用トレイ１が樹脂ブロック８によって規定される収容高さＨ１のピッチで積み重ねられるとき、下側のトレイ１の外枠２に、上から載せられた別のトレイ１の外枠２が入り込む。   When the single-wafer carrying tray 1 is stacked at a pitch of the accommodation height H1 defined by the resin block 8, the outer frame 2 of another tray 1 placed from above is placed on the outer frame 2 of the lower tray 1. Get in.

入り込んだ上側のトレイ１の内側平坦部１２の下面から、下側の枚葉搬送用トレイ１の内側平坦部１２の下面までの距離を１３ａとすると、ここで示される高さ１３ａが、樹脂ブロック８の高さＨ１に等しいことは明かである。そして、下側のトレイ１の傾斜部１３に、上から載せられた別のトレイ１の傾斜部１３が入り込む高さ、即ち受容部１３ｂの高さは、傾斜部１３の高さＨから、収容高さＨ１を減じた高さＨ２となる。   When the distance from the lower surface of the inner flat portion 12 of the upper tray 1 that has entered into the lower surface of the inner flat portion 12 of the lower sheet transporting tray 1 is 13a, the height 13a shown here is a resin block. It is clear that it is equal to a height H1 of 8. The height at which the inclined portion 13 of another tray 1 placed from above enters the inclined portion 13 of the lower tray 1, that is, the height of the receiving portion 13 b is accommodated from the height H of the inclined portion 13. The height H2 is obtained by subtracting the height H1.

積み重ねる枚葉搬送用トレイ１の枚数が１枚増える毎に必要となる高さの増分は、傾斜部１３の高さＨに関わらず、積み重ねのピッチである収容高さＨ１である。例えば、傾斜部の高さＨ、収容高さＨ１、受容部の高さＨ２の枚葉搬送用トレイ１をｎ枚積み重ねた場合の、全体の高さは、以下に示す式１で表される。   The increment in height that is required every time the number of stacked single-sheet transport trays 1 increases is the accommodation height H1, which is the stacking pitch, regardless of the height H of the inclined portion 13. For example, the total height when n pieces of the single-sheet transport trays 1 having the height H of the inclined portion, the housing height H1, and the height H2 of the receiving portion are stacked is expressed by the following formula 1. .

Ｈ１×ｎ ＋ Ｈ２ ・・・・（式１）
ｎ枚の枚葉搬送用トレイ１を積み重ねた場合に、全体の高さに最も影響する高さは、枚数に比例するところの積み重ねのピッチ即ち収容高さＨ１であることは上式から明かである。たとえ、外枠２の強度を高くするために傾斜部の高さＨを高くした枚葉搬送用トレイ１を積み重ねたとしても、全体の高さに対する傾斜部１３の高さの変更の影響は、１枚分の受容部１３ｂの高さＨ２だけであって、全体の高さに対する影響はわずかである。 H1 × n + H2 (Formula 1)
It is clear from the above formula that when n sheets of single-sheet transport trays 1 are stacked, the height that has the greatest influence on the overall height is the stacking pitch, that is, the accommodation height H1 proportional to the number of sheets. is there. Even if the single-wafer carrying trays 1 with the height H of the inclined portion increased to increase the strength of the outer frame 2 are stacked, the influence of the change in the height of the inclined portion 13 on the overall height is as follows: Only the height H2 of the receiving portion 13b for one sheet is small, and the influence on the overall height is slight.

このように、本実施例の枚葉搬送用トレイ１は、下側のトレイ１の傾斜部１３に、上から載せられた別のトレイ１の傾斜部１３が入り込む受容部１３ｂが設けられることで、たとえ傾斜部１３の高さを変更した場合であっても、常により一定の収容高さＨ１で積み重ねることが可能となっている。   As described above, the single-wafer carrying tray 1 of the present embodiment is provided with the receiving portion 13b into which the inclined portion 13 of the other tray 1 placed from above is inserted in the inclined portion 13 of the lower tray 1. Even if the height of the inclined portion 13 is changed, it is possible to always stack with a more constant accommodation height H1.

上述したように、本実施例の枚葉搬送用トレイ１が上下方向に積み重ねられているとき、上下の枚葉搬送用トレイ１の間では、樹脂ブロック８だけが接触しており、外枠２と桟４は他の枚葉搬送用トレイ１と全く接触しない。   As described above, when the single-wafer carrying trays 1 of this embodiment are stacked in the vertical direction, only the resin block 8 is in contact between the upper and lower single-wafer carrying trays 1, and the outer frame 2. And the crosspiece 4 are not in contact with the other single-wafer carrying tray 1 at all.

樹脂ブロック８は超高分子量（高密度）ポリエチレン樹脂で形成されているために接触によってもダストが発生しない。また外枠２と桟４は他の枚葉搬送用トレイ１と接触しないためにダストを発生させない。このように、本実施例の枚葉搬送用トレイ１は積み重ねてもダストが発生せず、板状物３１を汚染しない。   Since the resin block 8 is made of ultra high molecular weight (high density) polyethylene resin, no dust is generated by contact. Further, since the outer frame 2 and the crosspiece 4 do not come into contact with the other single-wafer carrying tray 1, no dust is generated. In this way, the single-wafer carrying tray 1 of this embodiment does not generate dust even when stacked, and does not contaminate the plate-like object 31.

更に、本実施例の枚葉搬送用トレイ１は、上積みされた枚葉搬送用トレイ１の荷重を、樹脂ブロック８が支持する構成となっており、外枠２には、上側の枚葉搬送用トレイ１の荷重が加えられることがない。   Furthermore, the single-wafer carrying tray 1 of this embodiment is configured such that the resin block 8 supports the load of the stacked single-wafer carrying tray 1, and the upper single-wafer carrying is provided on the outer frame 2. The load on the tray 1 is not applied.

このために、外枠２は、自らの重量と、載置した板状物３１の重量を支持できる強度を備えていればよく、外枠２によって上積みされた枚葉搬送用トレイ１を支持する構成を採用した場合と比較すると、要求される強度は小さい。このため、外枠２に要求される強度を容易に得ることができ、軽量化を図ることができる。   For this purpose, the outer frame 2 only needs to have a strength capable of supporting its own weight and the weight of the placed plate-like object 31, and supports the single-wafer carrying tray 1 stacked by the outer frame 2. Compared with the case where the configuration is adopted, the required strength is small. For this reason, the intensity | strength requested | required of the outer frame 2 can be obtained easily, and weight reduction can be achieved.

図１０、図１１、図１２は、本発明の枚葉搬送用トレイ１を上下に積み重ねた場合に、その任意の段のトレイ１を取り出す方法を説明するものである。   10, FIG. 11, and FIG. 12 illustrate a method of taking out the tray 1 at an arbitrary stage when the single-wafer carrying trays 1 of the present invention are stacked one above the other.

まず、図１０、１１から解るように、積み重ねられたトレイ１の任意の段から上のものを下の段から分離させる場合には、トレーの両側から水平方向に進退する分離アーム３５を、目的の段の一つ上のトレー１の樹脂ブロック８の支持部２３下面に入り込むようにする。   First, as can be seen from FIGS. 10 and 11, when separating the upper one of the stacked trays 1 from the lower one, the separation arm 35 that advances and retreats horizontally from both sides of the tray is used. The bottom of the support portion 23 of the resin block 8 of the tray 1 on the one stage is entered.

この際の、分離アーム３５に対する積み上げられたトレイ１の上下位置調整は、このトレイ１の最下段部分を受ける昇降台３２（図１２参照。）を昇降させることによる。   At this time, the vertical position adjustment of the stacked trays 1 with respect to the separation arm 35 is performed by moving up and down a lifting platform 32 (see FIG. 12) that receives the lowermost portion of the tray 1.

その後、この昇降台３２を下げれば、相対的にこの分離アーム３５に受けれたトレイ１から上方の複数のトレイ１は、下方のトレイ１から分離されたことになる。   Thereafter, when the elevator 32 is lowered, the plurality of upper trays 1 from the tray 1 relatively received by the separation arm 35 are separated from the lower tray 1.

ここで、図１２に示すように、別個に設けられた搬送ローラ３３を水平方向にトレイ１側に寄せ、下方のトレイ１の内、最上段の目的とする段のトレイ１のフランジ１４の下面に当接し受けるようにし、ついで、昇降台３２を下げれば、この目的の段のトレイ１だけが搬送ローラ３３に乗り、他の下方の複数のトレイ１は下方に分離される。   Here, as shown in FIG. 12, the separately provided transport rollers 33 are moved toward the tray 1 side in the horizontal direction, and the lower surface of the flange 14 of the tray 1 of the uppermost target tray among the lower trays 1. Then, when the elevator base 32 is lowered, only the tray 1 at the target stage is placed on the transport roller 33, and the other plurality of lower trays 1 are separated downward.

そして、搬送ローラ３３を回転駆動させれば、目的とするトレイ１だけを取り出すことができる。   And if the conveyance roller 33 is rotationally driven, only the target tray 1 can be taken out.

以上、実施例において本発明の具体例を詳細に説明したが、これらは例示にすぎず、特許請求の範囲を限定するものではない。特許請求の範囲に記載の技術には、以上に例示した具体例を様々に変形、変更したものが含まれる。   As mentioned above, although the specific example of this invention was described in detail in the Example, these are only illustrations and do not limit a claim. The technology described in the claims includes various modifications and changes of the specific examples illustrated above.

たとえば、実施例における外枠２の長辺部材２ａと短辺部材２ｂの接合方法や接合箇所、外枠２と桟４の接合方法や接合箇所は、搭載する板状物３１の大きさや重量に合わせて、適宜変更が可能である。   For example, the joining method and joining location of the long side member 2a and the short side member 2b of the outer frame 2 and the joining method and joining location of the outer frame 2 and the crosspiece 4 in the embodiment depend on the size and weight of the plate-like object 31 to be mounted. In addition, it can be changed as appropriate.

また、外枠２の形状や、樹脂ブロック８の形状や配置を、作用効果を損なわない範囲において、変更することが可能である。   Moreover, it is possible to change the shape of the outer frame 2 and the shape and arrangement of the resin block 8 within a range that does not impair the effects.

本発明の枚葉搬送用トレイは、薄型表示装置のガラス基板などの板状物を収容、搬送するトレイであって、トレイから板状物への汚染の防止、現場での組立が可能で、組み立てて用いるまでの部材の運搬、保管のスペースの節約が要請される、あらゆる産業分野に用いることができる。   The single-wafer carrying tray of the present invention is a tray that accommodates and conveys a plate-like object such as a glass substrate of a thin display device, prevents contamination from the tray to the plate-like object, and can be assembled on-site. It can be used in all industrial fields where saving of space for transportation and storage of components before assembly is required.

（ａ）は実施例の枚葉搬送用トレイの概要を説明する斜視図、（ｂ）は（ａ）のＡ視要部拡大平面図(A) is a perspective view explaining the outline | summary of the sheet | seat conveyance tray of an Example, (b) is an A view principal part enlarged plan view of (a). （ａ）は実施例の外枠を構成する部材の斜視図、（ｂ）はＢＢ断面図(A) is a perspective view of the member which comprises the outer frame of an Example, (b) is BB sectional drawing. 実施例の外枠を構成する部材端部の斜視図The perspective view of the member edge part which comprises the outer frame of an Example 実施例の樹脂ブロックの斜視図The perspective view of the resin block of an Example 実施例の長辺部材に固定された樹脂ブロックの側面図Side view of resin block fixed to long side member of embodiment 実施例の接合金具の斜視図The perspective view of the joining metal fitting of an Example （ａ）は実施例の桟の一端部の斜視図、（ｂ）は側面図(A) is a perspective view of one end of the crosspiece of the embodiment, (b) is a side view 実施例のコーナー桟の斜視図Perspective view of corner bar of embodiment 実施例の枚葉搬送用トレイを上下方向に複数枚重ね合わせた状態を示す図The figure which shows the state which piled up the several sheet | seat conveyance tray of an Example in the up-down direction 複数段積み重ねられた枚葉搬送用トレイから任意のトレイを取り出す方法を説明する図The figure explaining the method of taking out arbitrary trays from the tray for single-wafer conveyance stacked in multiple steps 複数段積み重ねられた枚葉搬送用トレイから任意のトレイを取り出す方法を説明する図The figure explaining the method of taking out arbitrary trays from the tray for single-wafer conveyance stacked in multiple steps 複数段積み重ねられた枚葉搬送用トレイから任意のトレイを取り出す方法を説明する図The figure explaining the method of taking out arbitrary trays from the tray for single-wafer conveyance stacked in multiple steps

符号の説明Explanation of symbols

１ 枚葉搬送用トレイ
２ 外枠
２ａ 長辺部材
２ｂ 短辺部材
３ 接合箇所
４ 桟
６ コーナー桟
８ 樹脂ブロック
１０ 接合金具
１１ 外側平坦部
１２ 内側平坦部
２５ 取付部
２６ 膨出部
２８ 載置ピン
２９ 位置決めピン
３１ 板状物（ワーク載置部） 1 Single-wafer transport tray 2 Outer frame 2a Long side member 2b Short side member
DESCRIPTION OF SYMBOLS 3 Joining location 4 Crossing 6 Corner crossing 8 Resin block 10 Joining metal fitting 11 Outer flat part 12 Inner flat part 25 Mounting part 26 Swelling part 28 Mounting pin 29 Positioning pin 31 Plate-shaped object (work mounting part)

Claims (3)

外枠間に桟を架け渡すことによってワーク載置部を形成する枚葉搬送用トレイであって、前記桟の両端を外枠に接合するとともに、その接合箇所をワーク載置部の外側に設け、前記外枠を上下に平坦部を備えた構造とし、前記桟の両端は、前記外枠の下方の平坦部に接合され、前記外枠の上方の平坦部には、他の部分に比べてダストの発生が少ない樹脂ブロックが各辺毎に設けられ、上下のトレイが前記樹脂ブロックで接触する枚葉搬送用トレイ。 A single-wafer carrying tray that forms a workpiece placement section by spanning a crosspiece between outer frames, and joins both ends of the crosspiece to the outer frame and provides the joint portion on the outside of the work placement section. The outer frame is structured to have a flat portion at the top and bottom, and both ends of the crosspiece are joined to the flat portion below the outer frame, and the flat portion above the outer frame is compared with other portions. A single-wafer carrying tray in which a resin block that generates less dust is provided on each side, and upper and lower trays are in contact with the resin block . 桟を平坦部から上方に突出する膨出部を有する構成とし、この膨出部の上方をワーク載置部とし、前記外枠の下方の平坦部と前記桟の平坦部とを重ねて、前記外枠と前記桟とを接合するようにした請求項１記載の枚葉搬送用トレイ。   The cross has a bulging portion that protrudes upward from the flat portion, and the upper portion of the bulging portion serves as a work placing portion, and the flat portion below the outer frame and the flat portion of the cross are overlapped, The single-wafer carrying tray according to claim 1, wherein an outer frame and the crosspiece are joined. ４本の部材の上方の平坦部をコーナー部分で接合することによって外枠を形成し、こうして接合された外枠のコーナー部分の隣合う部材の下方の平坦部を斜めに架け渡されるコーナー桟で接合した請求項２記載の枚葉搬送用トレイ。   An outer frame is formed by joining the upper flat portions of the four members at the corner portions, and the lower flat portions of the adjacent members of the corner portions of the outer frames thus joined are obliquely spanned. The single wafer carrying tray according to claim 2 joined.
JP2005214158A 2005-07-25 2005-07-25 Single wafer transfer tray Expired - Fee Related JP4407586B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005214158A JP4407586B2 (en) 2005-07-25 2005-07-25 Single wafer transfer tray
KR1020060008796A KR100965526B1 (en) 2005-07-25 2006-01-27 Tray for conveying single wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005214158A JP4407586B2 (en) 2005-07-25 2005-07-25 Single wafer transfer tray

Publications (2)

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JP2007035763A JP2007035763A (en) 2007-02-08
JP4407586B2 true JP4407586B2 (en) 2010-02-03

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Country Link
JP (1) JP4407586B2 (en)
KR (1) KR100965526B1 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5281874B2 (en) * 2008-11-21 2013-09-04 サイデック株式会社 Inspection tray

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5623212Y2 (en) * 1974-10-08 1981-06-01
JPS603070Y2 (en) * 1977-12-15 1985-01-28 株式会社日軽技研 palette
JPS57123737U (en) * 1981-01-26 1982-08-02
JPH0435595A (en) * 1990-05-31 1992-02-06 Sanyo Electric Co Ltd Color contour correcting circuit
JP3977481B2 (en) * 1997-04-11 2007-09-19 淀川ヒューテック株式会社 Substrate tray cassette
JP2001185610A (en) * 1999-12-24 2001-07-06 Kanegafuchi Chem Ind Co Ltd Substrate transporting tray
JP2005053493A (en) * 2003-08-04 2005-03-03 Yodogawa Hu-Tech Kk Board cassette

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KR100965526B1 (en) 2010-06-23
KR20070013186A (en) 2007-01-30

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