CN1579894A - Substrate box - Google Patents
Substrate box Download PDFInfo
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- CN1579894A CN1579894A CNA2004100559055A CN200410055905A CN1579894A CN 1579894 A CN1579894 A CN 1579894A CN A2004100559055 A CNA2004100559055 A CN A2004100559055A CN 200410055905 A CN200410055905 A CN 200410055905A CN 1579894 A CN1579894 A CN 1579894A
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- substrate
- substrate box
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- frame
- frame parts
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
- B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
- Warehouses Or Storage Devices (AREA)
Abstract
The invention provides a board cassette, which is easy to transport and manufacture, and has a structure to meet a variety of requirements, such as low dust productivity, heat resistance, chemical resistance, electric conductivity, light weight, low cost, and dimensional specification. The board cassette is for use in housing and supporting one large-sized glass board, and comprises a tray member 150 for supporting the glass board directly from the under surface side and a frame member 110 for supporting at least the periphery of the tray member 150 from the under surface side.
Description
Technical field
The present invention relates to substrate box, relate in particular to the structure of the substrate box that is used to accommodate large-size glass substrate etc.
Background technology
In Liquid Crystal Display (LCD) etc., use glass substrate, in its manufacturing process, for carry at inter process, the store glass substrate, use the substrate box of accommodating this glass substrate one by one.As this substrate box, disclosed structure in Japanese patent laid-open 10-287382 communique shown below is arranged.
In recent years, the maximization of flat-panel monitor etc. constantly develops, the size of the glass substrate that for example in Liquid Crystal Display (LCD), uses, upperlimit was 1100mm (minor face size) * 1300mm (a long limit size) in the past, but further strengthen at present, consider as 1500mm (minor face size) * 1800mm (long limit size), 1800mm (minor face size) * 2100mm (long limit size) etc., and the size of glass substrate can maximize post after thinking.Its result will cause substrate box also can maximize along with the maximization of glass substrate.
From now on, for this substrate box, need to satisfy following various requirement, that is, can not make it the support stably of deflection ground and accommodate substrate, transportation dirt, resistance to heat, chemical resistance, electric conductivity, light weight, low cost, the dimensional accuracy etc. sent out easy to manufacture, low.But, in order to satisfy such requirement, satisfy these requirements if only depend on above-mentioned spy to open the disclosed casing structure of flat 10-287382 communique, then can't avoid the increase of weight, can go wrong from transportation, manufacture view, the result causes manufacturing cost to rise.
Summary of the invention
The present invention proposes in order to address the above problem, its purpose is to provide a kind of substrate box with the structure that can satisfy following various requirement, that is transportation dirt, resistance to heat, chemical resistance, electric conductivity, light weight, low cost, the dimensional accuracy etc. sent out easy to manufacture, low.
In order to address the above problem, based on a substrate box of the present invention, be the substrate box that is used to accommodate laminal substrate, it possesses the frame parts that formed by cage construction and along the upper face side setting of said frame parts and directly support the support component of aforesaid substrate from the face side of below.
Like this, by making substrate box form frame parts, with upper face side setting along the said frame parts, and directly support the duplex of the support component of aforesaid substrate from the face side of below, for example, for the weight-saving viewpoint below the face side support in the support component of aforesaid substrate and use the resin system material, rigidity for substrate box, stable on heating viewpoint and in frame parts, use metallic material, thereby satisfy the desired various conditions of substrate box, that is, transportation is easy to manufacture, the low dirt of sending out, resistance to heat, chemical resistance, electric conductivity, light weight, low-cost, dimensional accuracy etc.
And, optimal way as the aforesaid substrate box, it is characterized in that: the said frame parts have outside frame and are arranged on the interior subframe of outside frame, above-mentioned support component be for the face side from the below directly supports aforesaid substrate at the tray member of roughly whole of said frame parts configuration, above-mentioned tray member is being provided with and is a plurality ofly supporting the recess area of reference plane towards the below from it.
Like this, by forming the duplex of frame parts and tray member, for example, for the lightweight viewpoint below the face side support in the tray member of aforesaid substrate and use the resin system material, for the rigidity of substrate box, stable on heating viewpoint and in frame parts, use metallic material, thereby satisfy the desired various conditions of substrate box, that is, transport easy to manufacture, low send out dirt, resistance to heat, chemical resistance, electric conductivity, light weight, low cost, dimensional accuracy etc.
And the optimal way as the aforesaid substrate box is characterized in that: in selected above-mentioned recess area peristome is being set.Constitute according to this, the substrate elevating pin that is arranged on the outside conveyor, substrate conveying roller etc. are passed through from this peristome.Its result can make substrate rise with respect to substrate box, thus can easily implement substrate to the conveying of substrate box, take out of.
And, as the optimal way of aforesaid substrate box, the laminar parts that cover above-mentioned recess area and elastically deformable are being set in above-mentioned recess area.According to this formation, recess area is covered by laminar parts, invades in recess area and accumulates so can prevent rubbish, cleaning liquid etc.And, be provided with in recess area under the situation of peristome, even pass through under the situation of this peristome at substrate elevating pin, substrate conveying roller etc., laminar parts extend owing to elastic deformation, so can not hinder the vertical motion of substrate elevating pin, substrate conveying roller etc., and substrate is risen.
And as the optimal way of aforesaid substrate box, above-mentioned outside frame has the framework that surrounding periphery zone, cross sectional shape be " コ " font of opening to foreign side and constitutes.According to this formation, even when utilizing chemical agent that substrate box is cleaned,,, and can be drained, and easily the inner face of outside frame is carried out drying so liquid that can nots such as chemical agent remain in the inside of outside frame because outside frame is opened to foreign side.
And, as the optimal way of aforesaid substrate box, the subframe that the said frame parts have outside frame and are arranged in the outside frame and are provided with reticulation, the direction setting that above-mentioned support component extends along above-mentioned subframe at the upper face side of above-mentioned subframe.
Like this, by forming the duplex of subframe and support component, for example, for the weight-saving viewpoint below the face side support in the tray member of aforesaid substrate and use the resin system material, for the rigidity of substrate box, stable on heating viewpoint and in frame parts, use metallic material, thereby satisfy the desired various conditions of substrate box, that is, transport easy to manufacture, low send out dirt, resistance to heat, chemical resistance, electric conductivity, light weight, low cost, dimensional accuracy etc.
In order to address the above problem, substrate box based on another way of the present invention, be the substrate box that is used to accommodate laminal substrate, it possesses: have the frame parts of outside frame and link the resinous resin system turning binding parts of the corner part of said frame parts; Above-mentioned resin system turning links parts to have along the derby of the short transverse configuration of this substrate box.
Constitute according to this, the stack thickness of substrate box is determined by derby.Here, can make the scale error of the height that utilizes the derby that machine up makes littler than synthetic resin.So, even under the situation of stacking substrates box on the short transverse, link parts with the turning that only constitutes and compare by synthetic resin, can reduce to link the single-piece stack size error of parts based on the turning with derby of the present invention.
And,,, can enumerate following formation as other optimal way for the aforesaid substrate box.For example the aspect of the above-mentioned recess area of above-mentioned tray member can adopt the combination of round-shaped, rectangular shape, polygon or these shapes.And tray member is formed by the plastics with at least a characteristic in electric conductivity and the anti-charging property.And, as other material, form by the composite material of metallic paper and expanded material.Has the sealing element that is used to eliminate gap when piling up this substrate box, that between the upper and lower base plate box, produce.
Description of drawings
Fig. 1 is the overall perspective view of formation of the substrate box of expression embodiment 1.
Fig. 2 be among Fig. 1 II line place to looking section drawing.
Fig. 3 (a) is the birds-eye view of tray member, and Fig. 3 (b) is the lateral plan of tray member.
Fig. 4 be among Fig. 3 IV line place to looking section drawing.
Fig. 5 is the birds-eye view of the frame parts of embodiment 1.
Fig. 6 is the local amplification plan view of corner part of the frame parts of embodiment 1.
Fig. 7 be among Fig. 6 VII line place to looking section drawing.
Fig. 8 is the 1st block diagram that the substrate box of expression embodiment 1 uses form.
Fig. 9 is the 2nd block diagram that the substrate box of expression embodiment 1 uses form.
Figure 10 is the 3rd block diagram that the substrate box of expression embodiment 1 uses form.
Figure 11 is the 4th block diagram that the substrate box of expression embodiment 1 uses form.
Figure 12 is the 5th block diagram that the substrate box of expression embodiment 1 uses form.
Figure 13 is the block diagram when being provided with the laminar parts of the recess area that covers tray member.
Figure 14 be among Figure 13 XIV-XIV line place to looking section drawing.
Figure 15 is that expression utilizes the substrate elevating pin to extend the partial perspective view of the state of laminar parts.
Figure 16 be among Figure 15 XVI-XVI line place to looking section drawing.
Figure 17 is the overall perspective view of formation of the substrate box of expression embodiment 2.
Figure 18 be among Figure 17 XVIII-XVIII line place to looking section drawing.
Figure 19 is that expression is applicable to that the turning of the substrate box of embodiment 3 links the figure of the formation of parts.
Among the figure: 1-glass substrate, 100, the 300-substrate box, 110, the 310-frame parts, 111, the 311-outside frame, 111a-wall portion, 111b-upper wall portions, the 111c-bottom wall portion, the overhanging wall of 111d-portion, 112,312, the 350-turning links parts, 112a-the 1st wall, 112b-the 2nd wall, 112c-the 3rd wall, 112d, the 112e-conical surface, 113, the 313-subframe, the 150-tray member, 151-stay bearing plate zone, 152-overhang region, 152a-the 1st protuberance, 152b-the 2nd protuberance, 152c-bottom outlet, 152d-return portion, the 153-recess area, 154-peristome, 156-substrate supporting protuberance, the laminar parts of 158-, 180-rivet, 200-outside conveyor, 210-substrate elevating pin, 220-substrate conveying roller, 314-support component, 351-resin system corner piece, 351a-locatees wall, the last side contact regions of 351u-, side contact regions under the 351d-, 352,353-resin armite, the 355-derby, the 400-conveying arm, 500-feedway, 510-conveying roller, the 600-supporting plate, the S-reference plane.
The specific embodiment
Below, with reference to accompanying drawing each embodiment based on substrate box of the present invention is described.
(embodiment 1)
At first, see figures.1.and.2 summary to the substrate box 100 of present embodiment constitutes and describes.Fig. 1 is the overall perspective view of formation of the substrate box 100 of expression present embodiment, Fig. 2 be among Fig. 1 II line place to looking section drawing.
(integral body of substrate box 100 constitutes)
As an example, the oad of this substrate box 100 is 1630mm (minor face size) * 1930mm (a long limit size), is to support the substrate box of accommodating a big type glass substrate.Substrate box 100 has and is used for from the tray member 150 of whole the direct support glass substrate of face side of below and is used for supporting from the face side of below the frame parts 110 of the periphery at least of this tray member 150.In the present embodiment, shown in the cross section of Fig. 2, tray member 150 and frame parts 110, in the stack region of the periphery of tray member 150 and frame parts 110, suitably use the rivet 180 that constitutes by aluminium (also can use other link such as bolt, screw) that both are fixed together.
(structure of tray member 150)
Below, with reference to Fig. 3 and Fig. 4 the structure of tray member 150 is described.Among Fig. 3, (a) being the birds-eye view of tray member 150, (b) is the lateral plan of tray member 150, Fig. 4 be among Fig. 3 IV line place to looking section drawing.
The tray member 150 of present embodiment is formed by a plastic flagstone that utilizes the vacuum forming moulding, and its material can adopt polypropylene (PP; Polypropylene), polyethylene (PE; Polyethylene), polystyrene (PS; PolyStyrene), the copolymer (ABS of acrylonitrile-butadiene-styrene; ACRYLONITRILE BUTADIENE STYRENE), polysulfones (PSF; Polysulfone) etc.Plate thickness is about 2.0mm.In addition, be not limited to vacuum forming, also can adopt multiple job operations such as foaming method, injection molding method.
This tray member 150 has the stay bearing plate zone 151 of rectangular shape and is arranged on this stay bearing plate zone 151 overhang region 152 on every side.In the present embodiment, at the corner region of supporting board 151, overhang region 152 is not set, and overhang region 152 is being set along four limits in stay bearing plate zone 151.
On stay bearing plate zone 151, the recess area 153 that is rectangular shape with the regular aspect that disposes of ranks shape is provided with according to 7 row, 10 row.In stay bearing plate zone 151, under the situation of benchmark as reference plane S with the plane, recess area 153 is made of the recess shapes that caves in downwards from this reference plane S.The size of this recess area 153 is about about 180mm * about 145mm, and its degree of depth is apart from about the about 20mm of reference plane S.
And, in the regulation zone of the reference plane S in stay bearing plate zone 151, be provided with a plurality of by from the face side direct contact of below and supporting substrate and from the outstanding upward substrate supporting protuberance 156 of reference plane S.The height of this substrate supporting protuberance 156 is apart from about the about 5mm of reference plane S.And, the quantity of substrate supporting protuberance 156, the viewpoint of supporting substrate is provided with 5 * 7=35 in the present embodiment for not making substrate produce distortion, and the summit of substrate supporting protuberance 156 is arranged in the same plane.
And, this substrate supporting protuberance 156 also can be provided with when tray member 150 moulding simultaneously, but viewpoint for a slip that further suppresses substrate and a dirt, also can utilize subsequent handling that the formed body of sending out dirt resin (for example, polyether etherketone, polyimide, polyetherimide, polyacetal, polyamide, ultra-high molecular weight polyethylene, polytetrafluoroethylene, various elastic bodys etc.) by anti-is installed.And, under the situation of the formed body that uses an anti-dirt resin, preferably use the natural prodcuts of not mixing filler in fact.
And, as shown in Figure 4, overhang region 152 to be provided with for the location of carrying out substrate side surfaces be provided with from the 1st outstanding upward protuberance 152a of reference plane S, in order combine with frame parts 110 and to compare the 2nd protuberance 152b that the 1st protuberance 152a gives prominence to more upward, in order to realize with respect to the location of frame parts 110 return portion 152d being set reliably.And, on the 2nd protuberance 152, the bottom outlet 152c that is used for to frame parts 110 riveted joints is being set suitably.
(structure of frame parts 110)
Below, with reference to Fig. 5～Fig. 7 the structure of frame parts 110 is described.Fig. 5 is the birds-eye view of frame parts 110, and Fig. 6 is the local amplification plan view of the corner part of frame parts 110, Fig. 7 be among Fig. 6 VII line place to looking section drawing.
The frame parts 110 of present embodiment is formed by rectangular shape shown in Figure 5, by the outside frame 111 of the framework that constitutes four limits, link parts 112 at the turning that corner part links each outside frame 111 and subframe 113 constitutes.
Link in the binding of the binding of parts 112 and outside frame 111 and subframe 113 at outside frame 111 and turning, suitably use the rivet that forms by aluminium (also can use other links such as bolt, screw).And, the quantity that is provided with of subframe 113 is not limited to 1, can be provided with according to the size of frame parts 110 a plurality of, and can be with respect to outside frame 111 and with the shape configuration of "=", "+", " キ ", " well ", "/", " * ", " * * ".
Like this, by adopting the shape of opening to foreign side, even when utilizing chemical agent that substrate box 100 is cleaned, because outside frame 111 is opened to foreign side, so liquid that can nots such as chemical agent remain in the inside of outside frame 111, and can be drained, and easily the inner face of outside frame 111 is carried out drying.And, by the overhanging wall 111d of portion is set, can utilize people's hand to transport, and when utilizing roller to carry, can play the effect of guiding.
And, as mentioned above, four corner parts at frame parts 110 are provided with turning binding parts 112, the cross sectional shape that this turning links parts 112 as shown in Figure 7, have the 1st wall 112a that is positioned at overhanging wall 111d upside, from the 1st wall 112a horizontal expansion and be positioned at upper wall 111b above the 2nd wall 112b and the 3rd wall 112c that stretches out in the upper end of the 1st wall 112a side direction outside.In the inboard of the 1st wall 112a, the position below the 2nd wall 112b is formed with the conical surface 112d that plate thickness reduces gradually downwards.By this conical surface 112d, realize that easily the turning links the location of parts 112 with respect to outside frame 111.
And in the inboard of the 1st wall 112a, the position above the 2nd wall 112b is formed with the conical surface 112e that plate thickness increases upward gradually.By this conical surface 112e, under the situation that substrate box 100 piles up, the bottom wall portion 111c of mounting outside frame 111 on the 2nd wall 112b can easily carry out the location of outside frame 111, and can easily take off mounting substrate box 100 thereon from the substrate box 100 that is in stacked state.
(action effect)
According to constituting the substrate box 100 that forms by above-mentioned, shown in the section drawing of Fig. 2, on the plane that forms on summit by substrate supporting protuberance 156, can not make glass substrate 1 produce distortion, and realize stably keeping glass substrate 1 under the low situation of sending out dirt by reducing area of contact with tray member 150.
And, by forming the duplex of tray member 150 and frame parts 110, from below the tray member 150 of face side support glass substrate 1 on, use resin material for the weight-saving viewpoint, from below the frame parts 110 of face side supporting bracket disk component 110 on, for rigidity, stable on heating viewpoint and use metallic material, thereby can satisfy substrate box 100 desired following various conditions, that is transportation dirt, resistance to heat, chemical resistance, electric conductivity, light weight, low cost, the dimensional accuracy etc. sent out easy to manufacture, low.
And, by bottom surface portions a plurality of peristomes 154 are set in selected recess area 153, as shown in Figure 8, can utilize the substrate elevating pin 210 that is arranged on the outside conveyor 200 to realize being supported on the lifting of the glass substrate in the substrate box 100.Its result, as shown in Figure 9, the conveying arm 400 of fork truck etc. is inserted between substrate boxes 100 and the glass substrate 1, can easily carry out glass substrate 1 to substrate box 100 move into and glass substrate 1 from the taking out of of substrate box 100, can realize easily that the substrate of inter process is carried.
And, by making substrate conveying roller 220 as shown in figure 10 by peristome 154, as shown in figure 11, can be when glass substrate 1 be risen with respect to substrate box 100, easily implement glass substrate 1 to the conveying of the conveying roller 510 of feedway 500, take out of, can realize easily that the substrate of inter process is carried.
And because adopted four corner parts at frame parts 110 that turning connecting part 112 is set, thereby so the formation that substrate box 100 is piled up as shown in figure 12, can be piled up a plurality of substrate boxes 100 on supporting plate 600, carry between factory.
And consideration can occur the situation of following problem, that is, the recess area 153 that is arranged in the aforesaid substrate box 100 on the tray member 150 is invaded and is accumulated in meetings such as rubbish, cleaning liquid.In this case, as Figure 13 and shown in Figure 14, also can adopt the formation of the laminar parts 158 that the elastically deformable that covers recess area 153 is set.By this formation, recess area 153 is covered by laminar parts 158, invades in recess area 153 and accumulates so can prevent rubbish, cleaning liquid etc.And,, also can adopt the formation that covers a plurality of recess area 153 with laminar parts 158 though represented the situation of laminar parts 158 and each recess area 153 corresponding setting in the drawings.
And, even be in recess area 153 with peristome 154, because laminar parts 158 adopt the material of elastically deformable, so as Figure 15 and shown in Figure 16, pass through under the situation of this peristome 154 in substrate elevating pin 210 grades, laminar parts 158 are owing to elastic deformation extends, thus can not hinder the vertical motion of substrate elevating pin 210 grades, and substrate is risen.
(embodiment 2)
Below with reference to Figure 17 and Figure 18 the general structure of the substrate box 300 of present embodiment is described.Figure 17 is the overall perspective view of formation of the substrate box 300 of expression present embodiment, Figure 18 be among Figure 17 XVIII-XVIII line place to looking section drawing.
(integral body of substrate box 300 constitutes)
The substrate box 100 of the oad of this substrate box 300 and above-mentioned embodiment 1 is roughly the same.Though in the formation of the substrate box 100 of above-mentioned embodiment 1, be characterised in that the duplex of tray member 150 and frame parts 110, but the substrate box of present embodiment 300 is characterised in that following duplex, promptly, can not adopt tray member, and, the support component 314 that is provided with along the direction of subframe 313 extensions is set at the upper face side that is arranged on the subframe 313 on the frame parts 310 with reticulation.
As its concrete formation, at first, as shown in figure 17, frame parts 310 is formed by rectangular shape, and links parts 312 and with reticulation a plurality of subframes 313 are being set by the outside frame 311 of the framework that constitutes four limits, at the turning that corner part links each outside frame 311 and constitute.
The binding structure that outside frame 311 and turning link the binding of parts 312 and outside frame 311 and subframe 313 is identical with above-mentioned embodiment 1.And, subframe 313 quantity is set, can be according to the size of frame parts 310 and suitably change.And can be with respect to outside frame 311 and with the shape configuration of " キ ", "/", " * ", " * * ".
Outside frame 311 uses corrosion-resistant steel (SUS), aluminium (Al) parts etc. for the viewpoint of lightweight, rigidity.Its cross sectional shape is identical with above-mentioned embodiment 1.And the formation that the turning that is arranged on four corner parts of frame parts 310 links parts 312 is also identical with above-mentioned embodiment 1.
The cross sectional shape of subframe 313 shown in Figure 18 (a), has the cross sectional shape that roughly is the C-channel type that has peristome up.And, embedding at the opening portion of subframe 313 has support component 314, the neck area 314b that this built in items 314 is provided with towards foreign side and than body zone 314a width by the in-to-in body zone 314a that is housed in subframe 313, from this body zone 314a narrowly and expose from the facial outwards side of going up of subframe 313 and directly supporting substrate, its surface constitute with the head zone 314c of bending setting.Substrate-placing is on the same plane by the top area regulation of the head zone 314c of support component 314.
The direction setting that this support component 314 preferably extends along subframe 313 at the upper face side of all subframes 313 basically, but also can be provided with in that the zone of suitably selecting is local.
And, the cross sectional shape of subframe 313 is not limited to the shape shown in Figure 18 (a), for example also can be shown in Figure 18 (b), adopt the cross section to be the subframe 313 of T font, will roughly cover this subframe 313, have the direction setting that the support component 314 of the head zone that its surface is provided with curved shape extends along subframe 313.
Material as support component 314, angle viewpoint for a slip that further suppresses substrate and a dirt, can utilize the anti-formed body of sending out dirt resin (for example, polyether etherketone, polyimide, polyetherimide, polyacetal, polyamide, ultra-high molecular weight polyethylene, polytetrafluoroethylene, various elastic bodys etc.).And, under the situation of the formed body that uses an anti-dirt resin, preferably use the natural prodcuts of not mixing filler in fact.
(action effect)
According to constituting the substrate box 300 that forms, on the plane that can form, do not make glass substrate 1 produce the shifting ground and stably keep glass substrate 1 on top by support component 314 by above-mentioned.
(embodiment 3)
Below with reference to Figure 19 the summary formation of the substrate box of present embodiment is described.And Figure 19 is the figure that the employed turning of substrate box of expression present embodiment links the formation of parts 350, (A) is birds-eye view, (B) is lateral plan.
In above-mentioned embodiment 1 and 2, be applicable to that the turning of substrate box 100 links parts 112 and is applicable to that the turning binding parts 312 of substrate box 300 constitute by synthetic resin.
At this, referring again to Figure 12, the turning links parts 112 location piles up a plurality of substrate boxes 100 on supporting plate 600 mutually, can carry between factory.But, under the situation of synthetic resin, because scale error is bigger, thus consider to have following situation, that is, under the situation that substrate box 100 is piled up, error accumulation, and make the whole height of the substrate box 100 that piles up become big.The turning that is applicable to substrate box 300 links parts 312 too.
Thereby, link in the parts 350 at the turning of present embodiment, it is characterized in that basic comprising is identical with above-mentioned turning binding parts 112,312, but has adopted the formation that embeds derby in the zone of piling up.
Particularly, as shown in figure 19, this turning links parts 350 and has resin armite 352,353 and the resin system corner piece 351 that is attached on the outside frame.Location wall 351a is being set on resin system corner piece 351, and is embedding the barrel-contoured derby 355 that forms by aluminium etc. in the substantial middle portion of resin system corner piece 351.With cooresponding position above the derby 355, the last side contact regions 351u that is formed by outstanding upward zone is being set, in cooresponding position below derby 355, the following side contact regions 351d that is formed by the zone of giving prominence to is being set downwards.Last side contact regions 351u and following side contact regions 351d by thickness 0.5mm～1.0mm about and the zone formation that covers the upper and lower end face of derby 355.And, also can be that the upper and lower end face that makes derby 355 is exposed, self formed the formation that goes up side contact regions 351u and following side contact regions 351d by derby 355.
(action effect)
Like this, by in resin system corner piece 351, embedding derby 355, be synthetic resin even the turning links the height of parts 350, also the height by derby 355 determines.Here, can make the scale error of the height that utilizes the derby that machine up makes littler than synthetic resin.So, even in the resin system of utilization corner piece 351 under the situation of stacking substrates box on the short transverse, because making side contact regions 351u contact one side with following side contact regions 351d, one side piles up, compare so link parts with the turning that only is made of synthetic resin, the turning that can reduce to have derby links the single-piece stack size error of parts 351.
And, in the respective embodiments described above, represented to carry the substrate box 100 of glass substrate as an example, still also go for the substrate that forms by large-scale thin sheet form with same character.
And the employed material of tray member and frame parts is not limited to above-mentioned material, and the mode of the condition that can suitably require according to being suitable for changes.
Therefore, technical scope of the present invention not only explained by above-mentioned embodiment, and delimits based on the claim scope.And, comprise implication that the scope with claim is equal to and all changes in the scope.
(effect of invention)
Employing is based on substrate box of the present invention, can provide a kind of have can satisfy following various requirement The substrate box of structure, that is, and transport easy to manufacture, low send out dirt, heat resistance, chemical resistance, Electric conductivity, light weight, low cost, dimensional accuracy etc.
Claims (4)
1. a substrate box is the substrate box (100,300) that is used to accommodate laminal substrate (1), it is characterized in that possessing:
The frame parts (110,310) that forms by cage construction and
Along the upper face side setting of said frame parts (110,310) and be used for directly supporting the support component (150,314) of aforesaid substrate from aspect side down.
2. substrate box according to claim 1 is characterized in that: said frame parts (110) have outside frame (111) and are arranged on the interior subframe (113) of outside frame (111); Above-mentioned support component (150) is at roughly whole tray member (150) that disposes of said frame parts (110) in order directly to support aforesaid substrate (1) from following aspect side; Above-mentioned tray member (150) is being provided with a plurality of from the recess area (153) of its support reference plane towards the below.
3. substrate box according to claim 1 is characterized in that: the subframe (313) that said frame parts (310) have outside frame (311) and are arranged in the outside frame (311) and are provided with reticulation; The direction setting that above-mentioned support component (314) extends along above-mentioned subframe (313) at the upper face side of above-mentioned subframe (313).
4. a substrate box is the substrate box that is used to accommodate laminal substrate (1), it is characterized in that possessing:
Have outside frame frame parts (310) and
The resin system turning that is used to link the corner part of said frame parts (310) links parts (350);
Above-mentioned resin system turning links parts (350) to have along the derby (355) of the short transverse configuration of this substrate box.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003205768A JP2005053493A (en) | 2003-08-04 | 2003-08-04 | Board cassette |
| JP2003205768 | 2003-08-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1579894A true CN1579894A (en) | 2005-02-16 |
Family
ID=34362895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2004100559055A Pending CN1579894A (en) | 2003-08-04 | 2004-08-03 | Substrate box |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2005053493A (en) |
| KR (1) | KR20050016109A (en) |
| CN (1) | CN1579894A (en) |
| TW (1) | TWI282323B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101673699B (en) * | 2009-09-03 | 2011-05-11 | 东莞宏威数码机械有限公司 | Carrying platform of substrate box |
| CN103264846A (en) * | 2012-11-30 | 2013-08-28 | 上海中航光电子有限公司 | Tray for packaging liquid crystal display device and packaging method |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4407586B2 (en) * | 2005-07-25 | 2010-02-03 | 村田機械株式会社 | Single wafer transfer tray |
| JP2007201066A (en) * | 2006-01-25 | 2007-08-09 | Murata Mach Ltd | Tray for sheet transfer, and apparatus of storing or transferring tray for sheet transfer |
| JP2007201341A (en) * | 2006-01-30 | 2007-08-09 | Murata Mach Ltd | Tray for sheet transfer |
| JP5115388B2 (en) * | 2008-07-31 | 2013-01-09 | 株式会社Ｓｕｍｃｏ | Wafer transfer container |
| US9228256B2 (en) * | 2009-12-11 | 2016-01-05 | Kgt Graphit Technologie Gmbh | Substrate support |
| KR101035628B1 (en) * | 2010-01-11 | 2011-05-19 | 삼성모바일디스플레이주식회사 | Tray for substrate |
| JP5665526B2 (en) * | 2010-12-21 | 2015-02-04 | サイデック株式会社 | Transport tray for transported plate-like articles |
| JP2014504039A (en) * | 2011-02-01 | 2014-02-13 | 株式会社テラセミコン | Substrate support boat and support unit using the same |
-
2003
- 2003-08-04 JP JP2003205768A patent/JP2005053493A/en not_active Withdrawn
-
2004
- 2004-08-03 TW TW093123156A patent/TWI282323B/en active
- 2004-08-03 KR KR1020040061065A patent/KR20050016109A/en not_active Application Discontinuation
- 2004-08-03 CN CNA2004100559055A patent/CN1579894A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101673699B (en) * | 2009-09-03 | 2011-05-11 | 东莞宏威数码机械有限公司 | Carrying platform of substrate box |
| CN103264846A (en) * | 2012-11-30 | 2013-08-28 | 上海中航光电子有限公司 | Tray for packaging liquid crystal display device and packaging method |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20050016109A (en) | 2005-02-21 |
| TWI282323B (en) | 2007-06-11 |
| TW200510227A (en) | 2005-03-16 |
| JP2005053493A (en) | 2005-03-03 |
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
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