SG190514A1 - Crystalline silicon ingot and method of fabricating the same - Google Patents
Crystalline silicon ingot and method of fabricating the same Download PDFInfo
- Publication number
- SG190514A1 SG190514A1 SG2012078762A SG2012078762A SG190514A1 SG 190514 A1 SG190514 A1 SG 190514A1 SG 2012078762 A SG2012078762 A SG 2012078762A SG 2012078762 A SG2012078762 A SG 2012078762A SG 190514 A1 SG190514 A1 SG 190514A1
- Authority
- SG
- Singapore
- Prior art keywords
- silicon
- grains
- ingot
- promotion layer
- crystalline
- Prior art date
Links
- 229910021419 crystalline silicon Inorganic materials 0.000 title claims abstract description 53
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 133
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 133
- 239000010703 silicon Substances 0.000 claims abstract description 133
- 230000006911 nucleation Effects 0.000 claims abstract description 67
- 238000010899 nucleation Methods 0.000 claims abstract description 67
- 238000000034 method Methods 0.000 claims abstract description 42
- 239000013078 crystal Substances 0.000 claims description 66
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 38
- 230000007547 defect Effects 0.000 claims description 34
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 31
- 239000002245 particle Substances 0.000 claims description 27
- 239000011856 silicon-based particle Substances 0.000 claims description 12
- 230000008018 melting Effects 0.000 claims description 9
- 238000002844 melting Methods 0.000 claims description 9
- 230000001788 irregular Effects 0.000 claims description 7
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 4
- 210000004027 cell Anatomy 0.000 description 28
- 238000007711 solidification Methods 0.000 description 12
- 230000008023 solidification Effects 0.000 description 12
- 238000006243 chemical reaction Methods 0.000 description 9
- 230000008569 process Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- TVZRAEYQIKYCPH-UHFFFAOYSA-N 3-(trimethylsilyl)propane-1-sulfonic acid Chemical compound C[Si](C)(C)CCCS(O)(=O)=O TVZRAEYQIKYCPH-UHFFFAOYSA-N 0.000 description 5
- 238000009826 distribution Methods 0.000 description 5
- 230000004907 flux Effects 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 238000005266 casting Methods 0.000 description 4
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 239000002800 charge carrier Substances 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 210000001787 dendrite Anatomy 0.000 description 1
- 230000003292 diminished effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000007847 structural defect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/02—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method without using solvents
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B28/00—Production of homogeneous polycrystalline material with defined structure
- C30B28/04—Production of homogeneous polycrystalline material with defined structure from liquids
- C30B28/06—Production of homogeneous polycrystalline material with defined structure from liquids by normal freezing or freezing under temperature gradient
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Silicon Compounds (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW100143484 | 2011-11-28 | ||
| TW101208779 | 2012-05-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG190514A1 true SG190514A1 (en) | 2013-06-28 |
Family
ID=47502601
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG2012078762A SG190514A1 (en) | 2011-11-28 | 2012-10-23 | Crystalline silicon ingot and method of fabricating the same |
Country Status (5)
| Country | Link |
|---|---|
| JP (2) | JP3181884U (ko) |
| KR (3) | KR101594474B1 (ko) |
| CN (1) | CN103088420A (ko) |
| DE (2) | DE202012011360U1 (ko) |
| SG (1) | SG190514A1 (ko) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SG190514A1 (en) | 2011-11-28 | 2013-06-28 | Sino American Silicon Prod Inc | Crystalline silicon ingot and method of fabricating the same |
| JP2015214473A (ja) * | 2014-04-24 | 2015-12-03 | 京セラ株式会社 | 多結晶シリコンのインゴットの製造方法 |
| JP6487675B2 (ja) * | 2014-11-21 | 2019-03-20 | シャープ株式会社 | 多結晶シリコンインゴット製造方法、多結晶シリコンインゴットの用途の製造方法及び多結晶シリコンインゴット |
| TWI557281B (zh) * | 2015-07-17 | 2016-11-11 | Sino American Silicon Prod Inc | 多晶矽晶鑄錠、多晶矽晶棒及多晶矽晶片 |
| US10825940B2 (en) * | 2015-08-26 | 2020-11-03 | Sino-American Silicon Products Inc. | Polycrystalline silicon column and polycrystalline silicon wafer |
| DE102015216734A1 (de) | 2015-09-02 | 2017-03-02 | Alzchem Ag | Tiegel zur Herstellung von Silicium-Ingots, Verfahren zu dessen Herstellung sowie Silicium-Ingot |
| JP6562415B2 (ja) * | 2015-10-01 | 2019-08-21 | 国立大学法人名古屋大学 | シリコンインゴット及びその製造方法 |
| CN105568374A (zh) * | 2016-03-16 | 2016-05-11 | 常熟华融太阳能新型材料有限公司 | 一种多晶铸锭用选择性全熔高效坩埚 |
| GB2550415A (en) * | 2016-05-18 | 2017-11-22 | Rec Solar Pte Ltd | Silicon ingot growth crucible with patterned protrusion structured layer |
| DE102018206969B3 (de) | 2018-05-04 | 2019-06-06 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Tiegel zur Herstellung von multikristallinem Silicium mittels gerichteter Erstarrung sowie Verfahren zur Herstellung des Tiegels und Verwendung des Tiegels |
| DE102018206982A1 (de) | 2018-05-04 | 2019-11-07 | Alzchem Trostberg Gmbh | Tiegel zur Herstellung von multikristallinem Silicium mittels gerichteter Erstarrung, Verfahren zu dessen Herstellung und dessen Verwendung, sowie Verfahren zur Herstellung von multikristallinem Silicium mittels gerichteter Erstarrung |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2664444B2 (ja) * | 1988-12-07 | 1997-10-15 | 株式会社日立製作所 | 分解溶融組成結晶体の製造方法 |
| DE19607098C2 (de) * | 1996-02-24 | 1999-06-17 | Ald Vacuum Techn Gmbh | Verfahren und Vorrichtung zum gerichteten Erstarren einer Schmelze aus Silizium zu einem Block in einem bodenlosen metallischen Kaltwandtiegel |
| JP3852147B2 (ja) * | 1996-12-27 | 2006-11-29 | Ｊｆｅスチール株式会社 | 太陽電池用多結晶シリコン・インゴットの製造方法 |
| AU2003254919A1 (en) * | 2002-08-12 | 2004-03-03 | Sharp Kabushiki Kaisha | Plate-type silicon, method of producing the plate-type silicon, solar battery, and base plate for producing the plate-type silicon |
| JP4054873B2 (ja) * | 2003-07-17 | 2008-03-05 | 国立大学法人東北大学 | Ｓｉ系結晶の製造方法 |
| AU2007205947B2 (en) * | 2006-01-20 | 2012-03-08 | Amg Idealcast Solar Corporation | Methods and apparatuses for manufacturing monocrystalline cast silicon and monocrystalline cast silicon bodies for photovoltaics |
| CN101370970B (zh) * | 2006-01-20 | 2014-05-14 | Amg艾迪卡斯特太阳能公司 | 制造单晶铸硅的方法和装置以及用于光电领域的单晶铸硅实体 |
| KR20100050510A (ko) * | 2007-07-20 | 2010-05-13 | 비피 코포레이션 노쓰 아메리카 인코포레이티드 | 시드 결정으로부터 캐스트 실리콘을 제조하는 방법 |
| JP2012516572A (ja) | 2009-01-30 | 2012-07-19 | エイエムジー・アイデアルキャスト・ソーラー・コーポレーション | シード層及びシード層の製造方法 |
| JP5676900B2 (ja) * | 2010-03-26 | 2015-02-25 | 三菱マテリアル株式会社 | 多結晶シリコンインゴットの製造方法 |
| SG190514A1 (en) | 2011-11-28 | 2013-06-28 | Sino American Silicon Prod Inc | Crystalline silicon ingot and method of fabricating the same |
-
2012
- 2012-10-23 SG SG2012078762A patent/SG190514A1/en unknown
- 2012-10-31 JP JP2012006633U patent/JP3181884U/ja not_active Expired - Fee Related
- 2012-10-31 JP JP2012241091A patent/JP5883766B2/ja not_active Expired - Fee Related
- 2012-11-08 CN CN2012104418506A patent/CN103088420A/zh active Pending
- 2012-11-08 KR KR1020120126116A patent/KR101594474B1/ko active IP Right Grant
- 2012-11-27 DE DE202012011360U patent/DE202012011360U1/de not_active Expired - Lifetime
- 2012-11-27 DE DE102012023120A patent/DE102012023120A1/de not_active Withdrawn
-
2015
- 2015-07-17 KR KR1020150101825A patent/KR101738077B1/ko active IP Right Grant
-
2016
- 2016-08-29 KR KR1020160110350A patent/KR101815620B1/ko active IP Right Grant
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013112603A (ja) | 2013-06-10 |
| KR101594474B1 (ko) | 2016-02-16 |
| KR101738077B1 (ko) | 2017-05-19 |
| JP5883766B2 (ja) | 2016-03-15 |
| KR20150088776A (ko) | 2015-08-03 |
| KR20160105751A (ko) | 2016-09-07 |
| KR20130059272A (ko) | 2013-06-05 |
| DE102012023120A1 (de) | 2013-05-29 |
| JP3181884U (ja) | 2013-02-28 |
| DE202012011360U1 (de) | 2012-12-05 |
| KR101815620B1 (ko) | 2018-01-05 |
| CN103088420A (zh) | 2013-05-08 |
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