SE9901575L - Halvledarelement - Google Patents
HalvledarelementInfo
- Publication number
- SE9901575L SE9901575L SE9901575A SE9901575A SE9901575L SE 9901575 L SE9901575 L SE 9901575L SE 9901575 A SE9901575 A SE 9901575A SE 9901575 A SE9901575 A SE 9901575A SE 9901575 L SE9901575 L SE 9901575L
- Authority
- SE
- Sweden
- Prior art keywords
- layer
- connections
- conductive type
- contact areas
- insulating
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 239000010410 layer Substances 0.000 abstract 5
- 239000002344 surface layer Substances 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7816—Lateral DMOS transistors, i.e. LDMOS transistors
- H01L29/7824—Lateral DMOS transistors, i.e. LDMOS transistors with a substrate comprising an insulating layer, e.g. SOI-LDMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/063—Reduced surface field [RESURF] pn-junction structures
- H01L29/0634—Multiple reduced surface field (multi-RESURF) structures, e.g. double RESURF, charge compensation, cool, superjunction (SJ), 3D-RESURF, composite buffer (CB) structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
- H01L29/7395—Vertical transistors, e.g. vertical IGBT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/0843—Source or drain regions of field-effect devices
- H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
- H01L29/0852—Source or drain regions of field-effect devices of field-effect transistors with insulated gate of DMOS transistors
- H01L29/0873—Drain regions
- H01L29/0878—Impurity concentration or distribution
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Composite Materials (AREA)
- Thin Film Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Element Separation (AREA)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9901575A SE9901575L (sv) | 1999-05-03 | 1999-05-03 | Halvledarelement |
EP00930012A EP1192664A1 (en) | 1999-05-03 | 2000-05-03 | A semiconductor element |
AU47912/00A AU4791200A (en) | 1999-05-03 | 2000-05-03 | A semiconductor element |
PCT/SE2000/000854 WO2000067329A1 (en) | 1999-05-03 | 2000-05-03 | A semiconductor element |
JP2000616078A JP2002543626A (ja) | 1999-05-03 | 2000-05-03 | 半導体要素 |
US09/959,744 US8053835B1 (en) | 1999-05-03 | 2000-05-03 | Lateral semiconductor device comprising two layers of mutually opposite conductivity-type materials between source and drain |
JP2008265103A JP2009016876A (ja) | 1999-05-03 | 2008-10-14 | 半導体要素 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9901575A SE9901575L (sv) | 1999-05-03 | 1999-05-03 | Halvledarelement |
Publications (2)
Publication Number | Publication Date |
---|---|
SE9901575D0 SE9901575D0 (sv) | 1999-05-03 |
SE9901575L true SE9901575L (sv) | 2000-11-04 |
Family
ID=20415428
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE9901575A SE9901575L (sv) | 1999-05-03 | 1999-05-03 | Halvledarelement |
Country Status (6)
Country | Link |
---|---|
US (1) | US8053835B1 ( ) |
EP (1) | EP1192664A1 ( ) |
JP (2) | JP2002543626A ( ) |
AU (1) | AU4791200A ( ) |
SE (1) | SE9901575L ( ) |
WO (1) | WO2000067329A1 ( ) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE533026C2 (sv) * | 2008-04-04 | 2010-06-08 | Klas-Haakan Eklund | Fälteffekttransistor med isolerad gate seriekopplad med en JFET |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5852347B2 (ja) * | 1980-02-04 | 1983-11-22 | 株式会社日立製作所 | 高耐圧半導体装置 |
US5059547A (en) * | 1986-12-20 | 1991-10-22 | Kabushiki Kaisha Toshiba | Method of manufacturing double diffused mosfet with potential biases |
JP2896141B2 (ja) * | 1987-02-26 | 1999-05-31 | 株式会社東芝 | 高耐圧半導体素子 |
US5241210A (en) * | 1987-02-26 | 1993-08-31 | Kabushiki Kaisha Toshiba | High breakdown voltage semiconductor device |
JP2565999B2 (ja) * | 1989-01-12 | 1996-12-18 | 日産自動車株式会社 | 横型絶縁ゲートバイポーラトランジスタ |
US5146298A (en) * | 1991-08-16 | 1992-09-08 | Eklund Klas H | Device which functions as a lateral double-diffused insulated gate field effect transistor or as a bipolar transistor |
US5306652A (en) * | 1991-12-30 | 1994-04-26 | Texas Instruments Incorporated | Lateral double diffused insulated gate field effect transistor fabrication process |
DE4244272A1 (de) * | 1992-12-28 | 1994-06-30 | Daimler Benz Ag | Feldeffektgesteuertes Halbleiterbauelement |
US5313082A (en) * | 1993-02-16 | 1994-05-17 | Power Integrations, Inc. | High voltage MOS transistor with a low on-resistance |
US5382818A (en) * | 1993-12-08 | 1995-01-17 | Philips Electronics North America Corporation | Lateral semiconductor-on-insulator (SOI) semiconductor device having a buried diode |
JP3250419B2 (ja) * | 1994-06-15 | 2002-01-28 | 株式会社デンソー | 半導体装置およびその製造方法 |
US5874768A (en) * | 1994-06-15 | 1999-02-23 | Nippondenso Co., Ltd. | Semiconductor device having a high breakdown voltage |
US5482888A (en) * | 1994-08-12 | 1996-01-09 | United Microelectronics Corporation | Method of manufacturing a low resistance, high breakdown voltage, power MOSFET |
EP0702411B1 (en) * | 1994-09-16 | 2002-11-27 | Kabushiki Kaisha Toshiba | High breakdown voltage semiconductor device with a buried MOS-gate structure |
JPH08227999A (ja) * | 1994-12-21 | 1996-09-03 | Mitsubishi Electric Corp | 絶縁ゲート型バイポーラトランジスタ及びその製造方法並びに半導体集積回路及びその製造方法 |
US5731603A (en) * | 1995-08-24 | 1998-03-24 | Kabushiki Kaisha Toshiba | Lateral IGBT |
SE513283C2 (sv) * | 1996-07-26 | 2000-08-14 | Ericsson Telefon Ab L M | MOS-transistorstruktur med utsträckt driftregion |
SE513284C2 (sv) * | 1996-07-26 | 2000-08-14 | Ericsson Telefon Ab L M | Halvledarkomponent med linjär ström-till-spänningskarasterik |
US5943579A (en) * | 1997-02-14 | 1999-08-24 | Micron Technology, Inc. | Method for forming a diffusion region in a semiconductor device |
DE19811604B4 (de) * | 1997-03-18 | 2007-07-12 | Kabushiki Kaisha Toshiba, Kawasaki | Halbleitervorrichtung |
US6211551B1 (en) * | 1997-06-30 | 2001-04-03 | Matsushita Electric Works, Ltd. | Solid-state relay |
JPH1154748A (ja) * | 1997-08-04 | 1999-02-26 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
JP2000332247A (ja) * | 1999-03-15 | 2000-11-30 | Toshiba Corp | 半導体装置 |
US6303492B1 (en) * | 1999-08-12 | 2001-10-16 | Micron Technology, Inc. | Expanded implantation of contact holes |
JP3602751B2 (ja) * | 1999-09-28 | 2004-12-15 | 株式会社東芝 | 高耐圧半導体装置 |
US6191453B1 (en) * | 1999-12-13 | 2001-02-20 | Philips Electronics North America Corporation | Lateral insulated-gate bipolar transistor (LIGBT) device in silicon-on-insulator (SOI) technology |
-
1999
- 1999-05-03 SE SE9901575A patent/SE9901575L/ not_active IP Right Cessation
-
2000
- 2000-05-03 JP JP2000616078A patent/JP2002543626A/ja active Pending
- 2000-05-03 US US09/959,744 patent/US8053835B1/en not_active Expired - Fee Related
- 2000-05-03 EP EP00930012A patent/EP1192664A1/en not_active Ceased
- 2000-05-03 AU AU47912/00A patent/AU4791200A/en not_active Abandoned
- 2000-05-03 WO PCT/SE2000/000854 patent/WO2000067329A1/en active Application Filing
-
2008
- 2008-10-14 JP JP2008265103A patent/JP2009016876A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
JP2009016876A (ja) | 2009-01-22 |
JP2002543626A (ja) | 2002-12-17 |
WO2000067329A1 (en) | 2000-11-09 |
EP1192664A1 (en) | 2002-04-03 |
SE9901575D0 (sv) | 1999-05-03 |
US8053835B1 (en) | 2011-11-08 |
AU4791200A (en) | 2000-11-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
NUG | Patent has lapsed |