NO976138L - Vinkelhastighets sensor med monolitisk vibrerende bjelke - Google Patents

Vinkelhastighets sensor med monolitisk vibrerende bjelke

Info

Publication number: NO976138L
Authority: NO; Norway
Prior art keywords: angular velocity; velocity sensor; vibrating beam; monolithic vibrating; monolithic
Prior art date: 1997-05-09

Application number

NO976138A

Other languages

English (en)

Other versions

NO976138D0 (no

Inventor

Robert E Stewart

Original Assignee

Litton Systems Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1997-05-09

Filing date

1997-12-30

Publication date

1998-11-10

1997-12-30 Application filed by Litton Systems Inc filed Critical Litton Systems Inc

1997-12-30 Publication of NO976138D0 publication Critical patent/NO976138D0/no

1998-11-10 Publication of NO976138L publication Critical patent/NO976138L/no

Links

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure

Landscapes

Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
General Physics & Mathematics (AREA)
Radar, Positioning & Navigation (AREA)
Remote Sensing (AREA)
Gyroscopes (AREA)
Pressure Sensors (AREA)

NO976138A 1997-05-09 1997-12-30 Vinkelhastighets sensor med monolitisk vibrerende bjelke NO976138L (no)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US08/854,240 US6250158B1 (en)	1997-05-09	1997-05-09	Monolithic vibrating beam angular velocity sensor

Publications (2)

Publication Number	Publication Date
NO976138D0 NO976138D0 (no)	1997-12-30
NO976138L true NO976138L (no)	1998-11-10

Family

ID=25318130

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
NO976138A NO976138L (no)	1997-05-09	1997-12-30	Vinkelhastighets sensor med monolitisk vibrerende bjelke

Country Status (8)

Country	Link
US (1)	US6250158B1 (no)
EP (1)	EP0877226B1 (no)
JP (1)	JP3039860B2 (no)
KR (1)	KR19980086521A (no)
CN (1)	CN1199171A (no)
BR (1)	BR9801582A (no)
DE (1)	DE69719012T2 (no)
NO (1)	NO976138L (no)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6639761B1 (en) *	1999-12-02	2003-10-28	Seagate Technology Llc	Micro-actuator damping and humidity protection
JP2002286452A (ja) *	2001-03-26	2002-10-03	Murata Mfg Co Ltd	振動ジャイロおよびそれを用いた電子装置
JP3687609B2 (ja) *	2001-04-19	2005-08-24	株式会社村田製作所	振動ジャイロおよびそれを用いた電子装置
AUPR631801A0 (en) *	2001-07-12	2001-08-02	Luscombe, Andrew	Roadside sensor system
US7091451B2 (en) *	2003-06-20	2006-08-15	Northrop Grumman Corporation	Heating element induction of time-varying thermal gradient in elongated beam to cause one or more elongated beam oscillations
JP2006214898A (ja) *	2005-02-04	2006-08-17	Seiko Epson Corp	圧電デバイス及び電子機器
JP5107399B2 (ja) *	2005-03-04	2012-12-26	ソニー株式会社	振動型ジャイロセンサ
JP5037819B2 (ja) *	2005-03-04	2012-10-03	ソニー株式会社	電子機器
US7617728B2 (en) *	2006-05-17	2009-11-17	Donato Cardarelli	Tuning fork gyroscope
US8079259B2 (en) *	2005-06-27	2011-12-20	Milli Sensor Systems & Actuators	MEMS gyroscope with output oscillation about the normal to the plane
CN103196437B (zh) *	2006-03-15	2016-04-06	松下知识产权经营株式会社	角速度传感器及其制造方法
FR2898884B1 (fr) *	2006-03-27	2008-05-02	Commissariat Energie Atomique	Micro-capteur inertiel resonant a epaisseur variable realise en technologies de surface
JP2008076222A (ja) *	2006-09-21	2008-04-03	Fujitsu Ltd	音叉型振動ジャイロセンサ
US7571648B2 (en) *	2007-05-23	2009-08-11	Seiko Epson Corporation	Piezoelectric vibration angular velocity sensor
JP4509152B2 (ja) *	2007-08-28	2010-07-21	シャープ株式会社	薄膜圧電トランスおよびその製造方法
FI119895B (fi) *	2007-10-05	2009-04-30	Vti Technologies Oy	Värähtelevä mikromekaaninen kulmanopeusanturi
JP2009198493A (ja) *	2007-12-26	2009-09-03	Rohm Co Ltd	角速度検出装置
CN102662074B (zh) *	2012-06-06	2014-02-19	重庆邮电大学	采用摆动质量块的框架式振动角速率传感器及测量***
CN103063206B (zh) *	2012-12-19	2015-06-24	瑞声科技（南京）有限公司	压电陀螺仪
US20160349053A1 (en) *	2015-06-01	2016-12-01	Analog Devices, Inc.	Micromachined Resonating Beam Gyroscopes
KR101724332B1 (ko) *	2015-12-16	2017-04-07	국방과학연구소	관성 측정 장치
CN112953304B (zh) *	2021-04-22	2022-06-17	长春工业大学	一种骨伞式道路压电发电装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3520195A (en)	1965-10-11	1970-07-14	Gen Electric	Solid state angular velocity sensing device
US4305298A (en) *	1978-08-28	1981-12-15	Itt Industries, Inc.	Mechanical resonator arrangements
JPS61114123A (ja)	1984-11-09	1986-05-31	Hitachi Ltd	振動ジヤイロ
JPH0821722B2 (ja) *	1985-10-08	1996-03-04	日本電装株式会社	半導体振動・加速度検出装置
US4836023A (en) *	1988-03-09	1989-06-06	Yazaki Corporation	Vibrational angular rate sensor
US5056366A (en)	1989-12-26	1991-10-15	Litton Systems, Inc.	Piezoelectric vibratory rate sensor
US5331852A (en) *	1991-09-11	1994-07-26	The Charles Stark Draper Laboratory, Inc.	Electromagnetic rebalanced micromechanical transducer
JPH05333038A (ja)	1992-06-03	1993-12-17	Canon Inc	角速度センサ
US5430342A (en) *	1993-04-27	1995-07-04	Watson Industries, Inc.	Single bar type vibrating element angular rate sensor system
JPH07131280A (ja)	1993-10-28	1995-05-19	Toyota Motor Corp	振動子の支持構造
JP3291968B2 (ja)	1994-12-15	2002-06-17	株式会社村田製作所	振動ジャイロ
GB2300047B (en) *	1995-04-19	1999-04-14	Smiths Industries Plc	Inertial sensor assemblies

1997
- 1997-05-09 US US08/854,240 patent/US6250158B1/en not_active Expired - Fee Related
- 1997-12-15 EP EP97310093A patent/EP0877226B1/en not_active Expired - Lifetime
- 1997-12-15 DE DE69719012T patent/DE69719012T2/de not_active Expired - Fee Related
- 1997-12-30 NO NO976138A patent/NO976138L/no not_active Application Discontinuation
- 1997-12-31 CN CN97126152.0A patent/CN1199171A/zh active Pending
1998
- 1998-02-27 JP JP10046495A patent/JP3039860B2/ja not_active Expired - Fee Related
- 1998-03-06 KR KR1019980007395A patent/KR19980086521A/ko active IP Right Grant
- 1998-05-05 BR BR9801582A patent/BR9801582A/pt not_active Application Discontinuation

Also Published As

Publication number	Publication date
NO976138D0 (no)	1997-12-30
EP0877226A3 (en)	2000-05-10
JP3039860B2 (ja)	2000-05-08
EP0877226B1 (en)	2003-02-12
DE69719012T2 (de)	2003-10-09
CN1199171A (zh)	1998-11-18
US6250158B1 (en)	2001-06-26
EP0877226A2 (en)	1998-11-11
DE69719012D1 (de)	2003-03-20
BR9801582A (pt)	1999-06-15
JPH10318759A (ja)	1998-12-04
KR19980086521A (ko)	1998-12-05

Legal Events

Date	Code	Title	Description
2008-04-14	FC2A	Withdrawal, rejection or dismissal of laid open patent application

Publication	Publication Date	Title
NO976138L (no)	1998-11-10	Vinkelhastighets sensor med monolitisk vibrerende bjelke
DE69727756D1 (de)	2004-04-01	Drehgeschwindigkeitssensor
DE69618042D1 (de)	2002-01-31	Drehgeschwindigkeitssensor
DE69726631D1 (de)	2004-01-22	Winkelgeschwindigkeitsaufnehmer
DE69934169D1 (de)	2007-01-11	Drehgeschwindigkeitssensor
DE69401607D1 (de)	1997-03-13	Winkelgeschwindigkeitsmessaufnehmer
DE69915919D1 (de)	2004-05-06	Drehgeschwindigkeitssensor
DE69904551D1 (de)	2003-01-30	Drehgeschwindigkeitssensorvorrichtung
DE59408354D1 (de)	1999-07-08	Coriolis-massedurchflussaufnehmer
DE10011830B8 (de)	2013-01-03	Winkelgeschwindigkeitssensor mit Oszillatoren
DE69637287D1 (de)	2007-11-22	Winkelgeschwindigkeitssensor
DE69829233D1 (de)	2005-04-07	Lenkwinkelsensoreinheit
DE60042907D1 (de)	2009-10-15	Aufzeichnen bei konstanter Winkelgeschwindigkeit
DE69712121D1 (de)	2002-05-29	Drehgeschwindigkeitssensor
DE59605586D1 (de)	2000-08-17	Winkelsensor
DE69009314D1 (de)	1994-07-07	Winkelgeschwindigkeitssensor.
DE59811747D1 (de)	2004-09-09	Monolithischer kraftsensor
DK0803713T3 (da)	2000-04-03	Coriolis-massegennemstrømningsdetektor
DE59510163D1 (de)	2002-05-16	Inertialsensor-Einheit
DE69619307D1 (de)	2002-03-28	Vibrationskreisel
DE69817453D1 (de)	2003-10-02	Piezoelektrischer Beschleunigungssensor
DE69841731D1 (de)	2010-08-05	Vibrationsdrehsensor
DE69921264D1 (de)	2004-11-25	Drehgeschwindigkeitssensor
DE69621372D1 (de)	2002-07-04	Vibrationskreisel
DE69102312D1 (de)	1994-07-14	Winkelgeschwindigkeitsmessaufnehmer.