DE69915919D1 - Drehgeschwindigkeitssensor - Google Patents

Drehgeschwindigkeitssensor

Info

Publication number
DE69915919D1
DE69915919D1 DE69915919T DE69915919T DE69915919D1 DE 69915919 D1 DE69915919 D1 DE 69915919D1 DE 69915919 T DE69915919 T DE 69915919T DE 69915919 T DE69915919 T DE 69915919T DE 69915919 D1 DE69915919 D1 DE 69915919D1
Authority
DE
Germany
Prior art keywords
angular velocity
velocity sensor
sensor
angular
velocity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69915919T
Other languages
English (en)
Other versions
DE69915919T2 (de
Inventor
Yasuhiro Negoro
Kazufumi Moriya
Yoshihiro Konaka
Shinji Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of DE69915919D1 publication Critical patent/DE69915919D1/de
Application granted granted Critical
Publication of DE69915919T2 publication Critical patent/DE69915919T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
DE69915919T 1998-03-16 1999-03-16 Drehgeschwindigkeitssensor Expired - Lifetime DE69915919T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP10084967A JP3123503B2 (ja) 1998-03-16 1998-03-16 角速度センサ
JP8496798 1998-03-16

Publications (2)

Publication Number Publication Date
DE69915919D1 true DE69915919D1 (de) 2004-05-06
DE69915919T2 DE69915919T2 (de) 2005-02-10

Family

ID=13845405

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69915919T Expired - Lifetime DE69915919T2 (de) 1998-03-16 1999-03-16 Drehgeschwindigkeitssensor

Country Status (4)

Country Link
US (1) US6240780B1 (de)
EP (1) EP0943893B1 (de)
JP (1) JP3123503B2 (de)
DE (1) DE69915919T2 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6257059B1 (en) * 1999-09-24 2001-07-10 The Charles Stark Draper Laboratory, Inc. Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation
US6430998B2 (en) * 1999-12-03 2002-08-13 Murata Manufacturing Co., Ltd. Resonant element
JP3554965B2 (ja) * 1999-12-28 2004-08-18 株式会社村田製作所 角速度センサ
JP3603746B2 (ja) * 2000-05-02 2004-12-22 株式会社村田製作所 振動子
US6988408B2 (en) * 2000-07-13 2006-01-24 Dong-Il Cho Surface/bulk micromachined single-crystalline silicon micro-gyroscope
JP2002188924A (ja) * 2000-12-20 2002-07-05 Denso Corp 半導体装置
DE10203515A1 (de) * 2002-01-30 2003-08-07 Bosch Gmbh Robert Mikromechanischer Drehratensensor
KR100431004B1 (ko) * 2002-02-08 2004-05-12 삼성전자주식회사 회전형 비연성 멤스 자이로스코프
KR100476562B1 (ko) * 2002-12-24 2005-03-17 삼성전기주식회사 수평형 및 튜닝 포크형 진동식 마이크로 자이로스코프
JP3861813B2 (ja) * 2003-01-14 2006-12-27 株式会社デンソー 静電振動型デバイス
KR100503472B1 (ko) * 2003-03-06 2005-07-25 삼성전자주식회사 회전형 자이로스코프
DE10320725A1 (de) * 2003-05-08 2004-11-25 Robert Bosch Gmbh Mikromechanischer Bewegungssensor
JP4433747B2 (ja) * 2003-09-29 2010-03-17 株式会社村田製作所 角速度検出装置
DE102005041059B4 (de) * 2004-09-02 2014-06-26 Denso Corporation Winkelratensensor und Anbringungsstruktur eines Winkelratensensors
JP2008514968A (ja) 2004-09-27 2008-05-08 コンティ テミック マイクロエレクトロニック ゲゼルシャフト ミット ベシュレンクテル ハフツング 回転速度センサ
JP5105968B2 (ja) * 2007-06-22 2012-12-26 株式会社日立製作所 角速度検出装置
US7814794B2 (en) * 2007-09-07 2010-10-19 Pixart Imaging Inc. Micromachined sensors
JP5193541B2 (ja) * 2007-09-19 2013-05-08 アオイ電子株式会社 角速度検出装置
WO2010021242A1 (ja) 2008-08-18 2010-02-25 株式会社日立製作所 微小電気機械システム
WO2010050967A1 (en) * 2008-10-31 2010-05-06 Hewlett-Packard Development Company, L.P. Compensating frequency mismatch in gyroscopes
JP2011058860A (ja) * 2009-09-08 2011-03-24 Hitachi Automotive Systems Ltd 角速度検出装置
KR101208278B1 (ko) * 2011-05-20 2012-12-05 삼성전기주식회사 각속도 센서
WO2013061558A1 (ja) * 2011-10-24 2013-05-02 パナソニック株式会社 角速度センサとそれに用いられる検出素子
JPWO2014203896A1 (ja) * 2013-06-19 2017-02-23 株式会社村田製作所 Ｍｅｍｓセンサ用モジュール、振動駆動モジュール及びｍｅｍｓセンサ
WO2014203903A1 (ja) * 2013-06-19 2014-12-24 ヤマハ株式会社 共振周波数調整モジュール
WO2015194480A1 (ja) * 2014-06-18 2015-12-23 株式会社村田製作所 振動駆動モジュール及びｍｅｍｓセンサ
WO2015194479A1 (ja) * 2014-06-18 2015-12-23 株式会社村田製作所 共振周波数調整モジュール及びｍｅｍｓセンサ
JP2019033631A (ja) * 2017-08-09 2019-02-28 国立大学法人静岡大学 Ｍｅｍｓ振動素子、ｍｅｍｓ振動素子の製造方法および振動発電素子
AU2023204710A1 (en) * 2022-07-17 2024-02-01 Preda, Dorin MR Plate anchor

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100360479B1 (ko) 1995-05-25 2003-03-19 삼성전자 주식회사 진동구조물의고유진동수조정방법
KR100363246B1 (ko) 1995-10-27 2003-02-14 삼성전자 주식회사 진동구조물및진동구조물의고유진동수제어방법
US5992233A (en) 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
US5945599A (en) * 1996-12-13 1999-08-31 Kabushiki Kaisha Toyota Chuo Kenkyusho Resonance type angular velocity sensor

Also Published As

Publication number Publication date
JPH11257970A (ja) 1999-09-24
US6240780B1 (en) 2001-06-05
DE69915919T2 (de) 2005-02-10
EP0943893B1 (de) 2004-03-31
JP3123503B2 (ja) 2001-01-15
EP0943893A1 (de) 1999-09-22

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Legal Events

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