DE69727756D1 - Drehgeschwindigkeitssensor - Google Patents

Drehgeschwindigkeitssensor

Info

Publication number
DE69727756D1
DE69727756D1 DE69727756T DE69727756T DE69727756D1 DE 69727756 D1 DE69727756 D1 DE 69727756D1 DE 69727756 T DE69727756 T DE 69727756T DE 69727756 T DE69727756 T DE 69727756T DE 69727756 D1 DE69727756 D1 DE 69727756D1
Authority
DE
Germany
Prior art keywords
angular velocity
velocity sensor
sensor
angular
velocity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69727756T
Other languages
English (en)
Other versions
DE69727756T2 (de
Inventor
Christopher Paul Fell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atlantic Inertial Systems Ltd
Original Assignee
BAE Systems PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BAE Systems PLC filed Critical BAE Systems PLC
Publication of DE69727756D1 publication Critical patent/DE69727756D1/de
Application granted granted Critical
Publication of DE69727756T2 publication Critical patent/DE69727756T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42—Devices characterised by the use of electric or magnetic means
    • G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
    • G01P3/46—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring amplitude of generated current or voltage
    • G01P3/465—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring amplitude of generated current or voltage by using dynamo-electro tachometers or electric generator
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/02—Devices characterised by the use of mechanical means
    • G01P3/24—Devices characterised by the use of mechanical means by using friction effects
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0409—Moving fluids with specific forces or mechanical means specific forces centrifugal forces
    • B01L2400/0412—Moving fluids with specific forces or mechanical means specific forces centrifugal forces using additionally coriolis forces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
DE69727756T 1996-10-08 1997-10-07 Drehgeschwindigkeitssensor Expired - Lifetime DE69727756T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9620982A GB2318184B (en) 1996-10-08 1996-10-08 A rate sensor
GB9620982 1996-10-08

Publications (2)

Publication Number Publication Date
DE69727756D1 true DE69727756D1 (de) 2004-04-01
DE69727756T2 DE69727756T2 (de) 2004-07-29

Family

ID=10801121

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69727756T Expired - Lifetime DE69727756T2 (de) 1996-10-08 1997-10-07 Drehgeschwindigkeitssensor

Country Status (7)

Country Link
US (1) US5915276A (de)
EP (1) EP0836073B1 (de)
JP (1) JP3834397B2 (de)
KR (1) KR100486129B1 (de)
CA (1) CA2217683C (de)
DE (1) DE69727756T2 (de)
GB (1) GB2318184B (de)

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GB2338781B (en) * 1998-03-14 2002-04-03 British Aerospace A gyroscope
GB2335273B (en) * 1998-03-14 2002-02-27 British Aerospace A two axis gyroscope
JP2000009473A (ja) * 1998-06-22 2000-01-14 Tokai Rika Co Ltd ２軸ヨーレートセンサ及びその製造方法
GB9817347D0 (en) * 1998-08-11 1998-10-07 British Aerospace An angular rate sensor
US6198387B1 (en) 1998-11-09 2001-03-06 Delphi Technologies, Inc. Restraint deployment control with central and frontal crash sensing
JP3796991B2 (ja) * 1998-12-10 2006-07-12 株式会社デンソー 角速度センサ
US6128954A (en) * 1998-12-18 2000-10-10 Delco Electronics Corporation Spring for a resonance ring of an angular rate sensor
US6305222B1 (en) * 1999-05-27 2001-10-23 Delphi Technologies, Inc. Road vibration compensated angular rate sensor
US6158282A (en) * 1999-07-07 2000-12-12 Litton Systems Inc. Extraction of double-oscillation-frequency sinusoids in vibratory rotation sensors
DE19938206A1 (de) * 1999-08-12 2001-02-15 Bosch Gmbh Robert Mikromechanischer Drehbeschleunigungssensor
DE19945859A1 (de) * 1999-09-24 2001-03-29 Bosch Gmbh Robert Mikromechanischer Drehratensensor
US6189382B1 (en) * 1999-11-05 2001-02-20 Litton Systems, Inc. Vibratory sensor with self-calibration and low noise digital conversion
GB0001294D0 (en) 2000-01-20 2000-03-08 British Aerospace Multi-axis sensing device
GB0001775D0 (en) * 2000-01-27 2000-03-22 British Aerospace Improvements relating to angular rate sensor devices
FR2821422B1 (fr) * 2001-02-23 2003-05-23 Sagem Resonateur mecanique planaire sensible selon un axe perpendiculaire a son plan
GB0122253D0 (en) * 2001-09-14 2001-11-07 Bae Systems Plc Vibratory gyroscopic rate sensor
GB0122254D0 (en) * 2001-09-14 2001-11-07 Bae Systems Plc Vibratory gyroscopic rate sensor
GB0122258D0 (en) * 2001-09-14 2001-11-07 Bae Systems Plc Vibratory gyroscopic rate sensor
GB0122252D0 (en) * 2001-09-14 2001-11-07 Bae Systems Plc Vibratory gyroscopic rate sensor
GB0122256D0 (en) * 2001-09-14 2001-11-07 Bae Systems Plc Vibratory gyroscopic rate sensor
TWI220155B (en) * 2003-07-25 2004-08-11 Ind Tech Res Inst Micro vibratory dual-axis sensitive gyroscope
US20050062362A1 (en) * 2003-08-28 2005-03-24 Hongyuan Yang Oscillatory gyroscope
FR2863709B1 (fr) * 2003-12-11 2006-02-17 Sagem Capteur de rotation inertiel a traitement isotrope
JP2006064539A (ja) * 2004-08-26 2006-03-09 Matsushita Electric Works Ltd ジャイロセンサおよび角速度検出方法
US7426860B2 (en) * 2005-08-08 2008-09-23 Litton Systems Inc. Ring resonator gyro with folded cylinder suspension
WO2007086337A1 (ja) 2006-01-24 2007-08-02 Matsushita Electric Industrial Co., Ltd. 慣性力センサ
JP5036218B2 (ja) * 2006-05-29 2012-09-26 住友精密工業株式会社 角速度センサ
DE102007051591B4 (de) 2007-10-12 2019-04-25 Robert Bosch Gmbh Mikromechanische Vorrichtung mit Antriebsrahmen
JP2011503557A (ja) * 2007-11-08 2011-01-27 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング ２つの受感軸を備えるヨーレートセンサ
FR2932563B1 (fr) * 2008-06-13 2010-06-18 Sagem Defense Securite Capteur de rotation inertiel a derive compensee.
KR20120104919A (ko) * 2010-01-12 2012-09-24 소니 주식회사 각속도 센서, 전자 기기 및 각속도의 검출 방법
FR2958030B1 (fr) * 2010-03-23 2012-04-20 Sagem Defense Securite Procede et dispositif de mesure angulaire avec compensation de non linearites
JP5652112B2 (ja) * 2010-10-18 2015-01-14 セイコーエプソン株式会社 物理量センサーおよび電子機器
US9091544B2 (en) * 2010-11-05 2015-07-28 Analog Devices, Inc. XY-axis shell-type gyroscopes with reduced cross-talk sensitivity and/or mode matching
US20140260611A1 (en) * 2013-03-15 2014-09-18 Analog Devices, Inc. XY-Axis Gyroscopes with Electrode Configuration for Detecting Quadrature Errors and Out-of-Plane Sense Modes
US9709595B2 (en) 2013-11-14 2017-07-18 Analog Devices, Inc. Method and apparatus for detecting linear and rotational movement
US9599471B2 (en) * 2013-11-14 2017-03-21 Analog Devices, Inc. Dual use of a ring structure as gyroscope and accelerometer
US10746548B2 (en) 2014-11-04 2020-08-18 Analog Devices, Inc. Ring gyroscope structural features
US9869552B2 (en) * 2015-03-20 2018-01-16 Analog Devices, Inc. Gyroscope that compensates for fluctuations in sensitivity
CN106224480B (zh) * 2016-08-08 2018-07-20 太原理工大学 一种基于四杆机构的大行程柔性旋转铰
GB2565298B (en) 2017-08-07 2022-03-16 Atlantic Inertial Systems Ltd Angular rate sensors
CN110998231B (zh) 2017-08-08 2023-11-10 Hrl实验室有限责任公司 高品质因数mems硅生命之花式振动陀螺仪
US11656077B2 (en) 2019-01-31 2023-05-23 Analog Devices, Inc. Pseudo-extensional mode MEMS ring gyroscope
US11346668B2 (en) * 2019-12-12 2022-05-31 Enertia Microsystems Inc. System and method for micro-scale machining

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69102590T2 (de) * 1990-05-18 1994-10-06 British Aerospace Trägheitssensoren.
US5540094A (en) * 1990-12-22 1996-07-30 British Aerospace Public Limited Company Scale factor compensation for piezo-electric rate sensors
GB9207148D0 (en) * 1992-04-01 1992-05-13 British Aerospace Planar rate sensor
US5555765A (en) * 1993-02-10 1996-09-17 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope
JPH06242135A (ja) * 1993-02-12 1994-09-02 Aisin Seiki Co Ltd 角速度センサの駆動回路
JP3453724B2 (ja) * 1994-06-03 2003-10-06 アイシン精機株式会社 角速度検出装置
GB2299669B (en) * 1995-04-07 1998-12-16 British Aerospace Method for actively balancing a vibrating structure gyroscope sensing element structure

Also Published As

Publication number Publication date
EP0836073A2 (de) 1998-04-15
EP0836073A3 (de) 1999-07-28
GB2318184A (en) 1998-04-15
GB2318184B (en) 2000-07-05
DE69727756T2 (de) 2004-07-29
CA2217683C (en) 2001-02-20
JP3834397B2 (ja) 2006-10-18
GB9620982D0 (en) 1996-11-27
KR19980032646A (ko) 1998-07-25
JPH10160483A (ja) 1998-06-19
KR100486129B1 (ko) 2005-08-31
US5915276A (en) 1999-06-22
CA2217683A1 (en) 1998-04-08
EP0836073B1 (de) 2004-02-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: ATLANTIC INERTIAL SYSTEMS LIMITED, PLYMOUTH, GB