KR940005202A - 인쇄 배선기판의 제조방법 - Google Patents

인쇄 배선기판의 제조방법 Download PDF

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KR940005202A
KR940005202A KR1019930016708A KR930016708A KR940005202A KR 940005202 A KR940005202 A KR 940005202A KR 1019930016708 A KR1019930016708 A KR 1019930016708A KR 930016708 A KR930016708 A KR 930016708A KR 940005202 A KR940005202 A KR 940005202A
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manufacturing
wiring board
printed wiring
resist
copolymer
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KR1019930016708A
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KR970004758B1 (ko
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마사시 미야자끼
하루오 아까호시
소조 노하라
겐찌 기꾸따
도시아끼 이시마루
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가나이 쓰또무
가부시끼가이샤 히다찌세이사꾸쇼
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor
    • G03F7/30Imagewise removal using liquid means
    • G03F7/32Liquid compositions therefor, e.g. developers
    • G03F7/322Aqueous alkaline compositions
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/033Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor
    • G03F7/30Imagewise removal using liquid means
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/108Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by semi-additive methods; masks therefor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H05K3/181Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
    • H05K3/182Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method
    • H05K3/184Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method using masks
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0779Treatments involving liquids, e.g. plating, rinsing characterised by the specific liquids involved
    • H05K2203/0783Using solvent, e.g. for cleaning; Regulating solvent content of pastes or coatings for adjusting the viscosity
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0779Treatments involving liquids, e.g. plating, rinsing characterised by the specific liquids involved
    • H05K2203/0786Using an aqueous solution, e.g. for cleaning or during drilling of holes
    • H05K2203/0793Aqueous alkaline solution, e.g. for cleaning or etching
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0073Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0076Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the composition of the mask
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49126Assembling bases
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155Manufacturing circuit on or in base
    • Y10T29/49156Manufacturing circuit on or in base with selective destruction of conductive paths

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)

Abstract

인쇄 배선기판의 제조를 위한 어디티브(additive)공정에 있어서, 비염소계 유기 용매 및 알칼리성 수용액을 포함하는 현상액과, 레지스트 재료로서, 메타 크릴산 메타크릴레이트로 이루어진 공중합체 등을 사용함으로서, 대면적을 갖는 기판을 사용함에도 불구하고, 상기 제조단계가 단순화되며, 현상액으로서, 염소계 유기용매의 사용을 폐지할 수 있게 된다.

Description

인쇄 배선기판의 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따른 인쇄 배선기판의 제조방법을 설명하는 순서도.
제2a 내지 2f도는 제1도에 대응하는 세미어디티브(semiadditive)공정에 의해 본 발명의 방법을 설명하기 위한 단면도.
제3a 내지 3d도는 풀어디티브(fulladditive)공정에 의해 본 발명의 방법을 설명하기 위한 단면도.
* 도면의 주요부분에 대한 부호의 설명
1 : 기판 2 : 동박
3 : 패턴동도금 4 : 포토레지스트
4a : 포토레지스트의 조사부 4b : 도금레지스트
5 : 포토마스크 6 : 자외선
7 : 스프레이 노즐 8 : 현상액
9 : 땜납도금막 10 : 접착제

Claims (11)

  1. 인쇄 배선기판의 제조방법에 있어서, 기판상에 포토레지스트 막을 형성하는 단계와, 상기 포토레지스트 막에 자외선을 조사하는 단계와, 상기 포토레지스트 막을 현상하여 레지스트 패턴을 형성하는 단계와, 그리고 도금 레지스트로서 상기 레지스트 패턴을 사용하여 동도금을 행하여 배선패턴을 형성하는 단계를 포함하고, 상기 포토레지스트 막은 비염소계 유기용매 및 알칼리성 수용액으로 이루어진 현상액으로 현상할 수 있는 레지스트 재료를 사용하는 제조됨을 특징으로 하는 인쇄 배선기판의 제조방법.
  2. 제1항에 있어서, 상기 도금 레지스트는 영구 레지스트로서 사용됨을 특징으로 하는 인쇄 배선기판의 제조방법.
  3. 제1항에 있어서, 상기 기판은 그 위에 동박을 구비하고, 상기 배선패턴은 도금 레지스트로서 레지스트 패턴을 사용하여 동도금을 행하고, 상기 동도금 상에 에칭 레지스트를 형성하며, 상기 도금 레지스트를 박리하고, 상기 기판상의 상기 동박을 에칭하는 것에 의해 형성됨을 특징으로 하는 인쇄 배선기판의 제조방법.
  4. 제1,2 또는 3항에 있어서, 상기 동도금은 무전해 동도금으로 행해짐을 특징으로 하는 인쇄 배선기판의 제조방법.
  5. 제3항에 있어서, 상기 동도금은 전기도금을 행해짐을 특징으로 하는 인쇄 배선기판의 제조방법.
  6. 제1,2 또는 3항에 있어서, 상기 레지스트 재료는 메틸 메타크릴레이트와 메타크릴산의 공중합체를 포함함을 특징으로 하는 인쇄 배선기판의 제조방법.
  7. 제6항에 있어서, 상기 상기 레지스트 재료는 메틸-메타크릴레이트와 메타크릴산의 공중합체이고, 상기 타크릴산의 함량은 공중합체의 100중량부당 1.5 내지 10중량부임을 특징으로 하는 인쇄 배선기판의 제조방법.
  8. 제6항에 있어서, 상기 레지스트 재료는 메틸 메탈크릴레이트와 메타크릴산의 공중합체를 포함하고, 비수성 용매를 사용하여 박리되며, 쌍기 메타크릴산의 함량은 상기 공중합체의 10중량부당 1.5 내지 6중량부임을 특징으로 하는 인쇄 배선기판의 제조방법.
  9. 제6항에 있어서, 비염소계 유기용매 및 알칼리성 수용액을 포함하는 박리용액으로 박리하는 경우에, 상기 메타크릴산 함량이 공중합체의 100중량부 당 6 내지 10중량부임을 특징으로 하는 인쇄 배선기판의 제조방법.
  10. 제1,2 또는 3항에 있어서, 상기 현상액은 에틸렌글리콜 에테르 도는 프로필렌글리콜 에테르를 알칼리성 수용액에 용해시킴으로써 얻어짐을 특징으로 하는 인쇄 배선기판의 제조방법.
  11. 제9항에 있어서, 상기 박리용액은 아민 화합물을 또한 포함함을 특징으로 하는 인쇄 배선기판의 제조방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019930016708A 1992-08-28 1993-08-26 인쇄 배선기판의 제조방법 KR970004758B1 (ko)

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JP22969292 1992-08-28
JP92-229692 1992-08-28

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KR940005202A true KR940005202A (ko) 1994-03-16
KR970004758B1 KR970004758B1 (ko) 1997-04-03

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US (2) US5438751A (ko)
EP (1) EP0584780B1 (ko)
KR (1) KR970004758B1 (ko)
CN (1) CN1038806C (ko)
DE (1) DE69326925T2 (ko)
TW (1) TW229350B (ko)

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KR100932535B1 (ko) * 2007-11-28 2009-12-17 주식회사 심텍 임베디드 저항이 포함된 인쇄회로기판 및 그 제조방법

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KR970004758B1 (ko) 1997-04-03
CN1038806C (zh) 1998-06-17
EP0584780A3 (en) 1995-08-02
TW229350B (ko) 1994-09-01
DE69326925D1 (de) 1999-12-09
US5919603A (en) 1999-07-06
US5438751A (en) 1995-08-08
EP0584780B1 (en) 1999-11-03
CN1086372A (zh) 1994-05-04
EP0584780A2 (en) 1994-03-02

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