KR880011886A - 제조방법 및 제조장치 - Google Patents

제조방법 및 제조장치 Download PDF

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Publication number
KR880011886A
KR880011886A KR1019880002942A KR880002942A KR880011886A KR 880011886 A KR880011886 A KR 880011886A KR 1019880002942 A KR1019880002942 A KR 1019880002942A KR 880002942 A KR880002942 A KR 880002942A KR 880011886 A KR880011886 A KR 880011886A
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KR
South Korea
Prior art keywords
processing
manufacturing
intermediate product
recorded
product
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KR1019880002942A
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English (en)
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KR920001028B1 (ko
Inventor
요시히토 후카사와
Original Assignee
아오이 죠이치
가부시키가이샤 도시바
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Publication date
Application filed by 아오이 죠이치, 가부시키가이샤 도시바 filed Critical 아오이 죠이치
Publication of KR880011886A publication Critical patent/KR880011886A/ko
Application granted granted Critical
Publication of KR920001028B1 publication Critical patent/KR920001028B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/12—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using record carriers
    • G05B19/128—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using record carriers the workpiece itself serves as a record carrier, e.g. by its form, by marks or codes on it
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Factory Administration (AREA)
  • Multi-Process Working Machines And Systems (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
  • Die Bonding (AREA)

Abstract

내용 없음

Description

제조방법 및 제조장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 1실시예에 따른 반도체장치의 제조장치의 블록도.
제2도는 본 발명의 다른 실시예에 따른 반도체장치의 제조장치의 블록도.
제3도(A)(B)는 매거진(magazime)의 전체사시도 및 부분사시도.

Claims (2)

  1. 각 공정에 배치된 복수개의 가공장치에 의해 중간제품을 계단적으로 가공해 주는 복수개의 공정을 갖추어서 상기 중간제품 또는 중간제품을 수납하는 케리어를 반송해주게 되므로 제품을 제조하는 제조방법에 있어서, 상기 중간제품 또는 케리어에 부착된 식별부호를 최초의 공정이전으로 끄집어내고, 독출된 식별부호를 기본정보로서 기록해줌과 더불어 각 공정의 가공장치에 의해 처리된 가공정보를 기본 정보로 대응시켜 기록한 다음 그 기록된 정보에 준해 다음단의 공정인 복수개의 가공장치중으로 부터 1개의 가공장치를 선택해주는 것을 특징으로 하는 제조방법.
  2. 중간제품을 계단적으로 가공해주는 복수개의 공정에 복수개의 가공장치가 배치되어 상기 중간제품 또는 중간제품을 수납하는 케리어를 반송해주게 되므로 제품을 제조하는 제조장치에 있어서, 상기 중간제품 또는 케리어에 부착된 식별부호를 최초의 공정이전으로 독출해주는 독출수단과, 이 독출 수단에 의해 독출된 식별부호를 기본 정보로서 기록해줌과 더불어 각 공정의 가공장치에 의해 처리된 가공정보를 기본 정보로 대응시켜 기록한 다음 그 기록된 정보에 준해 다음단의 공정인 복수개의 가공장치중으로 부터 1개의 가공장치를 선택해주는 관리제어 수단을 갖추어서 이루어진 것을 특징으로 하는 제조장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019880002942A 1987-03-19 1988-03-19 복수의 공정을 식별부호를 이용해서 관리하는 제조방법 및 제조장치 KR920001028B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP62065141A JPS63232921A (ja) 1987-03-19 1987-03-19 製造方法及び装置
JP62-65141 1987-03-19

Publications (2)

Publication Number Publication Date
KR880011886A true KR880011886A (ko) 1988-10-31
KR920001028B1 KR920001028B1 (ko) 1992-02-01

Family

ID=13278309

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880002942A KR920001028B1 (ko) 1987-03-19 1988-03-19 복수의 공정을 식별부호를 이용해서 관리하는 제조방법 및 제조장치

Country Status (5)

Country Link
US (1) US4930086A (ko)
EP (1) EP0283034B1 (ko)
JP (1) JPS63232921A (ko)
KR (1) KR920001028B1 (ko)
DE (1) DE3853220T2 (ko)

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Also Published As

Publication number Publication date
US4930086A (en) 1990-05-29
KR920001028B1 (ko) 1992-02-01
JPS63232921A (ja) 1988-09-28
DE3853220T2 (de) 1995-08-24
EP0283034B1 (en) 1995-03-08
DE3853220D1 (de) 1995-04-13
EP0283034A3 (en) 1990-04-04
EP0283034A2 (en) 1988-09-21

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