KR880011886A - 제조방법 및 제조장치 - Google Patents
제조방법 및 제조장치 Download PDFInfo
- Publication number
- KR880011886A KR880011886A KR1019880002942A KR880002942A KR880011886A KR 880011886 A KR880011886 A KR 880011886A KR 1019880002942 A KR1019880002942 A KR 1019880002942A KR 880002942 A KR880002942 A KR 880002942A KR 880011886 A KR880011886 A KR 880011886A
- Authority
- KR
- South Korea
- Prior art keywords
- processing
- manufacturing
- intermediate product
- recorded
- product
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/12—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using record carriers
- G05B19/128—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using record carriers the workpiece itself serves as a record carrier, e.g. by its form, by marks or codes on it
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Factory Administration (AREA)
- Multi-Process Working Machines And Systems (AREA)
- Management, Administration, Business Operations System, And Electronic Commerce (AREA)
- Die Bonding (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 1실시예에 따른 반도체장치의 제조장치의 블록도.
제2도는 본 발명의 다른 실시예에 따른 반도체장치의 제조장치의 블록도.
제3도(A)(B)는 매거진(magazime)의 전체사시도 및 부분사시도.
Claims (2)
- 각 공정에 배치된 복수개의 가공장치에 의해 중간제품을 계단적으로 가공해 주는 복수개의 공정을 갖추어서 상기 중간제품 또는 중간제품을 수납하는 케리어를 반송해주게 되므로 제품을 제조하는 제조방법에 있어서, 상기 중간제품 또는 케리어에 부착된 식별부호를 최초의 공정이전으로 끄집어내고, 독출된 식별부호를 기본정보로서 기록해줌과 더불어 각 공정의 가공장치에 의해 처리된 가공정보를 기본 정보로 대응시켜 기록한 다음 그 기록된 정보에 준해 다음단의 공정인 복수개의 가공장치중으로 부터 1개의 가공장치를 선택해주는 것을 특징으로 하는 제조방법.
- 중간제품을 계단적으로 가공해주는 복수개의 공정에 복수개의 가공장치가 배치되어 상기 중간제품 또는 중간제품을 수납하는 케리어를 반송해주게 되므로 제품을 제조하는 제조장치에 있어서, 상기 중간제품 또는 케리어에 부착된 식별부호를 최초의 공정이전으로 독출해주는 독출수단과, 이 독출 수단에 의해 독출된 식별부호를 기본 정보로서 기록해줌과 더불어 각 공정의 가공장치에 의해 처리된 가공정보를 기본 정보로 대응시켜 기록한 다음 그 기록된 정보에 준해 다음단의 공정인 복수개의 가공장치중으로 부터 1개의 가공장치를 선택해주는 관리제어 수단을 갖추어서 이루어진 것을 특징으로 하는 제조장치.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62065141A JPS63232921A (ja) | 1987-03-19 | 1987-03-19 | 製造方法及び装置 |
JP62-65141 | 1987-03-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR880011886A true KR880011886A (ko) | 1988-10-31 |
KR920001028B1 KR920001028B1 (ko) | 1992-02-01 |
Family
ID=13278309
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019880002942A KR920001028B1 (ko) | 1987-03-19 | 1988-03-19 | 복수의 공정을 식별부호를 이용해서 관리하는 제조방법 및 제조장치 |
Country Status (5)
Country | Link |
---|---|
US (1) | US4930086A (ko) |
EP (1) | EP0283034B1 (ko) |
JP (1) | JPS63232921A (ko) |
KR (1) | KR920001028B1 (ko) |
DE (1) | DE3853220T2 (ko) |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0235743A (ja) * | 1988-07-26 | 1990-02-06 | Mitsubishi Electric Corp | 半導体装置の製造装置 |
JPH02185350A (ja) * | 1989-01-12 | 1990-07-19 | Mitsubishi Electric Corp | ワーク加工装置 |
JP2780814B2 (ja) * | 1989-06-22 | 1998-07-30 | 株式会社日立製作所 | 生産管理システム |
IT1235835B (it) * | 1989-08-08 | 1992-11-03 | Sgs Thomson Microelectronics | Movimentazione automatica di contenitori diversi con punti di prelievo e di codificazione standarizzati |
JPH0770453B2 (ja) * | 1989-10-05 | 1995-07-31 | 三菱電機株式会社 | 半導体装置の製造方法 |
US5150288A (en) * | 1989-12-18 | 1992-09-22 | Honda Giken Kogyo Kabushiki Kaisha | Production management system and method of transmitting data |
JPH03214743A (ja) * | 1990-01-19 | 1991-09-19 | Nec Corp | 半導体装置の製造システム |
US5347463A (en) * | 1990-07-03 | 1994-09-13 | Honda Giken Kogyo Kabushiki Kaisha | System and method for line production management |
JP2734183B2 (ja) * | 1990-07-19 | 1998-03-30 | 日本電気株式会社 | 液晶表示素子 |
WO1992005012A1 (en) * | 1990-09-17 | 1992-04-02 | Honda Giken Kogyo Kabushiki Kaisha | Method and system of production control |
US5228820A (en) * | 1990-09-21 | 1993-07-20 | Advanced Technology And Research Corporation | Article handling system with distributed storage |
US5570293A (en) * | 1990-11-29 | 1996-10-29 | Tokyo Seimitsu Co., Ltd. | Method and device for manufacturing a semiconductor chip |
US5532942A (en) * | 1991-07-08 | 1996-07-02 | Shin-Etsu Chemical Co., Ltd. | Automatic apparatus for inspecting powdery product |
JPH05121521A (ja) * | 1991-10-29 | 1993-05-18 | Komatsu Electron Metals Co Ltd | 半導体ウエハ製造装置および製造方法 |
JP3211526B2 (ja) * | 1993-12-21 | 2001-09-25 | 富士通株式会社 | ピッキングシステム |
WO1995017993A1 (fr) * | 1993-12-27 | 1995-07-06 | Hitachi, Ltd. | Procede et appareil de production continue d'une multiplicite de types d'articles |
US5555504A (en) * | 1994-06-10 | 1996-09-10 | Johnson & Johnson Vision Products, Inc. | Production line tracking and quality control system |
US5607642A (en) * | 1994-06-10 | 1997-03-04 | Johnson & Johnson Vision Products, Inc. | Interactive control system for packaging control of contact lenses |
US5659481A (en) * | 1995-02-01 | 1997-08-19 | International Billing Services, Inc. | Dynamic insertion system and method for including selected enclosures/inserts in mailed statements |
US5886896A (en) * | 1996-11-19 | 1999-03-23 | Advanced Micro Devices, Inc. | Method and apparatus for integrated control of a sensor in a manufacturing processing station |
US5828989A (en) * | 1997-01-22 | 1998-10-27 | Advanced Micro Devices, Inc. | Semiconductor manufacturing system having a bar-code interface |
US5942739A (en) * | 1997-01-22 | 1999-08-24 | Advanced Micro Devices, Inc. | Process timer monitor |
JPH10326729A (ja) * | 1997-05-26 | 1998-12-08 | Toshiba Corp | 製造システム |
US6418352B1 (en) * | 1997-12-12 | 2002-07-09 | Brooks Automation Gmbh | Integrated material management module |
US6136614A (en) * | 1998-03-04 | 2000-10-24 | Agilent Technologies | Apparatus and method for manufacturing integrated circuit devices |
DE19952194A1 (de) * | 1999-10-29 | 2001-05-17 | Infineon Technologies Ag | Anlage zur Bearbeitung von Wafern |
EP1136166B1 (en) * | 2000-03-15 | 2003-02-26 | PCam Sagl | System for moving workpieces to be processed by electroerosion machines |
JP2002200729A (ja) * | 2001-01-05 | 2002-07-16 | Think Laboratory Co Ltd | グラビア印刷用被製版ロールのハンドリング処理方法 |
US6749100B2 (en) * | 2001-11-28 | 2004-06-15 | Asm Technology Singapore Pte Ltd. | Multiple-head wire-bonding system |
US7136988B2 (en) * | 2003-10-03 | 2006-11-14 | International Business Machines Corporation | Mass data storage library frame spanning for mixed media |
DE102004050290A1 (de) * | 2004-10-15 | 2006-04-20 | Krauss-Maffei Kunststofftechnik Gmbh | Verfahren und Vorrichtung zum Herstellen von unterschiedlich beschichteten Kunststoffformteilen |
JP5055732B2 (ja) * | 2005-09-15 | 2012-10-24 | 村田機械株式会社 | 段取工具情報表示装置 |
US7809458B2 (en) * | 2008-03-31 | 2010-10-05 | Honda Motor Co., Ltd. | Process control system with ability to exchange data with production line machine controllers |
JP5968705B2 (ja) * | 2012-07-13 | 2016-08-10 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
JP6638865B2 (ja) * | 2017-07-21 | 2020-01-29 | 株式会社村田製作所 | 生産管理システムおよび生産管理方法 |
JP7038907B2 (ja) * | 2019-05-16 | 2022-03-18 | 三菱電機株式会社 | 生産管理システム、生産管理装置、生産管理方法およびプログラム |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB883620A (en) * | 1957-07-31 | 1961-12-06 | Standard Telephones Cables Ltd | Programming system for automatic manufacturing processes |
JPS5577434A (en) * | 1978-11-27 | 1980-06-11 | Nissan Motor Co Ltd | Car assembly control system |
GB2049994B (en) * | 1979-05-21 | 1983-08-03 | Rca Corp | Method for assembly in a crt |
US4408291A (en) * | 1979-06-15 | 1983-10-04 | M. Wile & Company, Inc. | Point-of-manufacture data acquisition system |
JPS56139862A (en) * | 1980-04-03 | 1981-10-31 | Toshiba Mach Co Ltd | Operation control system of machine tool group |
DE3137323A1 (de) * | 1981-09-19 | 1983-11-24 | Erwin Dr.-Ing. 1466 Luxembourg Gardosi | Maschinenlesbarer informationstraeger |
JPS59175948A (ja) * | 1983-03-23 | 1984-10-05 | Toyoda Mach Works Ltd | トランスフアマシン用加工制御装置 |
FR2547520B1 (fr) * | 1983-06-17 | 1985-10-11 | Prodel Maurice | Installation modulaire pour l'assemblage et/ou l'usinage de pieces, avec dispositifs claviers-afficheurs a chaque poste |
JPH065482B2 (ja) * | 1983-06-22 | 1994-01-19 | 株式会社日立製作所 | ロボット装置 |
DE3406325A1 (de) * | 1984-02-22 | 1985-08-22 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Anordnung zur bearbeitung von werkstuecken |
JPS61249251A (ja) * | 1985-04-25 | 1986-11-06 | Mazda Motor Corp | 加工または組立ラインの作業制御装置 |
GB2380358B (en) * | 2001-09-28 | 2006-04-05 | Nokia Corp | Capacity management |
-
1987
- 1987-03-19 JP JP62065141A patent/JPS63232921A/ja active Pending
-
1988
- 1988-03-11 US US07/167,193 patent/US4930086A/en not_active Expired - Fee Related
- 1988-03-18 EP EP88104360A patent/EP0283034B1/en not_active Expired - Lifetime
- 1988-03-18 DE DE3853220T patent/DE3853220T2/de not_active Expired - Lifetime
- 1988-03-19 KR KR1019880002942A patent/KR920001028B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US4930086A (en) | 1990-05-29 |
KR920001028B1 (ko) | 1992-02-01 |
JPS63232921A (ja) | 1988-09-28 |
DE3853220T2 (de) | 1995-08-24 |
EP0283034B1 (en) | 1995-03-08 |
DE3853220D1 (de) | 1995-04-13 |
EP0283034A3 (en) | 1990-04-04 |
EP0283034A2 (en) | 1988-09-21 |
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GRNT | Written decision to grant | ||
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Payment date: 20030130 Year of fee payment: 12 |
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