KR870008317A - 반도체 기억장치 - Google Patents

반도체 기억장치

Info

Publication number
KR870008317A
KR870008317A KR1019870001400A KR870001400A KR870008317A KR 870008317 A KR870008317 A KR 870008317A KR 1019870001400 A KR1019870001400 A KR 1019870001400A KR 870001400 A KR870001400 A KR 870001400A KR 870008317 A KR870008317 A KR 870008317A
Authority
KR
South Korea
Prior art keywords
semiconductor memory
semiconductor
memory
Prior art date
Application number
KR1019870001400A
Other languages
English (en)
Other versions
KR910002038B1 (ko
Inventor
마사시 와다
Original Assignee
가부시키가이샤 도시바
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 도시바 filed Critical 가부시키가이샤 도시바
Publication of KR870008317A publication Critical patent/KR870008317A/ko
Application granted granted Critical
Publication of KR910002038B1 publication Critical patent/KR910002038B1/ko

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/34Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
    • G11C11/40Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
    • G11C11/401Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells
    • G11C11/403Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells with charge regeneration common to a multiplicity of memory cells, i.e. external refresh
    • G11C11/404Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells with charge regeneration common to a multiplicity of memory cells, i.e. external refresh with one charge-transfer gate, e.g. MOS transistor, per cell
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B12/00Dynamic random access memory [DRAM] devices
    • H10B12/30DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/37DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Semiconductor Memories (AREA)
KR1019870001400A 1986-02-20 1987-02-19 반도체 기억장치 KR910002038B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP61-035467 1986-02-20
JP61035467A JP2671899B2 (ja) 1986-02-20 1986-02-20 半導体記憶装置

Publications (2)

Publication Number Publication Date
KR870008317A true KR870008317A (ko) 1987-09-25
KR910002038B1 KR910002038B1 (ko) 1991-03-30

Family

ID=12442584

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019870001400A KR910002038B1 (ko) 1986-02-20 1987-02-19 반도체 기억장치

Country Status (3)

Country Link
JP (1) JP2671899B2 (ko)
KR (1) KR910002038B1 (ko)
DE (1) DE3640363A1 (ko)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6329968A (ja) * 1986-07-23 1988-02-08 Nec Corp 半導体メモリセル
JPH07120753B2 (ja) * 1986-09-18 1995-12-20 キヤノン株式会社 半導体メモリ装置及びその製造方法
JP2606857B2 (ja) * 1987-12-10 1997-05-07 株式会社日立製作所 半導体記憶装置の製造方法
DE3902693C2 (de) * 1988-01-30 1995-11-30 Toshiba Kawasaki Kk Mehrebenenverdrahtung für eine integrierte Halbleiterschaltungsanordnung und Verfahren zur Herstellung von Mehrebenenverdrahtungen für integrierte Halbleiterschaltungsanordnungen
JP2743391B2 (ja) * 1988-08-25 1998-04-22 ソニー株式会社 半導体メモリの製造方法
JPH07109876B2 (ja) * 1988-09-09 1995-11-22 株式会社東芝 半導体記憶装置の製造方法
US5528062A (en) * 1992-06-17 1996-06-18 International Business Machines Corporation High-density DRAM structure on soi
JPH06216338A (ja) * 1992-11-27 1994-08-05 Internatl Business Mach Corp <Ibm> 半導体メモリセル及びその製造方法
JP3959125B2 (ja) * 1994-09-14 2007-08-15 株式会社東芝 半導体装置
DE10256973B4 (de) 2002-12-05 2006-09-28 Infineon Technologies Ag Integrierter Halbleiterspeicher mit einem an einem Steg ausgebildeten Auswahltransistor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3128014A1 (de) * 1981-07-15 1983-02-03 Siemens AG, 1000 Berlin und 8000 München Anordnung zur reduzierung der empfindlichkeit von integrierten halbleiterspeichern gegen alpha-strahlung
JPS60136366A (ja) * 1983-12-26 1985-07-19 Hitachi Ltd 半導体集積回路装置
JPS60189964A (ja) * 1984-03-12 1985-09-27 Hitachi Ltd 半導体メモリ
ATE41267T1 (de) * 1984-04-25 1989-03-15 Siemens Ag Ein-transistor-speicherzelle fuer hochintegrierte dynamische halbleiterspeicher und verfahren zu ihrer herstellung.
JPS6235668A (ja) * 1985-08-09 1987-02-16 Nec Corp 半導体記憶装置

Also Published As

Publication number Publication date
KR910002038B1 (ko) 1991-03-30
DE3640363C2 (ko) 1992-02-13
JP2671899B2 (ja) 1997-11-05
JPS62193273A (ja) 1987-08-25
DE3640363A1 (de) 1987-08-27

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
G160 Decision to publish patent application
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20030228

Year of fee payment: 13

LAPS Lapse due to unpaid annual fee