KR101012532B1 - 반도체 장치 및 그 제조 방법 - Google Patents
반도체 장치 및 그 제조 방법 Download PDFInfo
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- KR101012532B1 KR101012532B1 KR1020087008540A KR20087008540A KR101012532B1 KR 101012532 B1 KR101012532 B1 KR 101012532B1 KR 1020087008540 A KR1020087008540 A KR 1020087008540A KR 20087008540 A KR20087008540 A KR 20087008540A KR 101012532 B1 KR101012532 B1 KR 101012532B1
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Abstract
Description
Claims (24)
- 제1 도전형의 반도체 기판(base);상기 반도체 기판의 일 주면(one main surface)에 접하며 상기 반도체 기판과는 상이한 밴드 갭 폭을 갖는 이종 반도체 영역;상기 이종 반도체 영역에 접속되는 제1 전극; 및상기 반도체 기판에 접속되는 제2 전극을 포함하고,상기 이종 반도체 영역은, 역방향 동작(reverse operation) 중에 생성되는 누설 전류를 차단하기 위한 구조를 포함하고,상기 이종 반도체 영역은, 복수의 반도체층들이 서로 중첩되어 있는 적층 이종 반도체 영역으로 형성되어 있으며,상기 적층 이종 반도체 영역의 최상층 반도체층은 상기 제1 전극에 접속되고, 상기 적층 이종 반도체 영역의 최하층은 상기 반도체 기판과 접촉하고, 상기 최상층 반도체층은 상기 반도체 기판과 직접적으로 접촉하고 있으며, 상기 최상층 반도체층은 상기 최하층보다 더 높은 불순물 농도를 가지는 반도체 장치.
- 제1항에 있어서,상기 제2 전극은 상기 반도체 기판과 오믹 접촉을 형성하고,상기 반도체층들 중 적어도 두 층 사이의 경계는, 결정 배열이 불연속적인 부분을 갖는 반도체 장치.
- 제1항에 있어서,게이트 절연막을 통해 상기 이종 반도체 영역과 상기 반도체 기판 사이의 접합부에 인접한 게이트 전극을 더 포함하고,상기 제2 전극은 상기 반도체 기판에 대해 오믹 접촉을 형성하고,상기 반도체층들의 적어도 두 층 사이의 경계는, 결정 배열이 불연속적인 부분을 갖는 반도체 장치.
- 제1항 내지 제3항 중 어느 한 항에 있어서,상기 적층 이종 반도체 영역은, 불순물 농도가 불연속적인 부분을 갖는 반도체 장치.
- 제1항 내지 제3항 중 어느 한 항에 있어서,상기 적층 이종 반도체 영역의 최상층 반도체층은 상기 제1 전극과 오믹 접촉을 형성하는 반도체 장치.
- 제1항 내지 제3항 중 어느 한 항에 있어서,상기 적층 이종 반도체 영역의 최상층 반도체층은 제2 도전형인 반도체 장치.
- 삭제
- 제1항 내지 제3항 중 어느 한 항에 있어서,상기 반도체 기판은 탄화규소, 질화갈륨, 및 다이아몬드 중 어느 하나로 이루어진 반도체 장치.
- 제1항 내지 제3항 중 어느 한 항에 있어서,상기 반도체층들은 단결정 실리콘, 비정질 실리콘, 폴리실리콘, 갈륨비소, 게르마늄, 및 실리콘 게르마늄 중 어느 하나로 이루어진 반도체 장치.
- 제1항 내지 제3항 중 어느 한 항에 따른 반도체 장치의 제조 방법으로서,상기 반도체 장치의 적층 이종 반도체 영역을 형성하는 단계는, 복수의 폴리실리콘 층들을 중첩하는 단계를 포함하는 반도체 장치의 제조 방법.
- 제10항에 있어서,상기 반도체 기판 상에 최하층 폴리실리콘 층을 형성하는 단계;상기 최하층 폴리실리콘 층 또는 상기 최하층 폴리실리콘 층 상에 중첩되는 하나 이상의 중간 폴리실리콘 층들 중 임의의 층 상에 최상층 폴리실리콘 층을 형성하는 단계; 및상기 최상층 폴리실리콘 층으로 소정의 농도로 불순물을 도입하는 공정에서, 상기 소정의 농도와는 상이한 농도로 상기 최하층 폴리실리콘 층으로도 상기 불순물을 도입하는 단계를 포함하는 반도체 장치의 제조 방법.
- 제11항에 있어서,최상층 폴리실리콘 층의 형성 공정을 실행하기 전에, 소정의 마스크 패턴을 이용하여 최하층 폴리실리콘 층을 선택적으로 에칭한 후, 최상층 폴리실리콘 층 형성 공정을 실행함으로써, 상기 최상층 폴리실리콘 층이, 반도체 기판에 직접적으로, 또는 하나 이상의 중간 폴리실리콘 층을 통해 인접하도록 형성되는 반도체 장치의 제조 방법.
- 제10항에 있어서,상기 폴리실리콘 층들에 접하는 비정질 실리콘 층을 형성하는 단계; 및상기 비정질 실리콘 층을 고상 결정 성장에 의해 결정화하는 단계를 더 포함하는 반도체 장치의 제조 방법.
- 제10항에 있어서,상기 반도체 장치의 반도체 기판과 상기 폴리실리콘 층들 간에 협지된 비정질 실리콘 층을 형성하는 단계; 및상기 비정질 실리콘 층을 고상 결정 성장에 의해 결정화하는 단계를 더 포함하는 반도체 장치의 제조 방법.
- 제10항에 있어서,상기 폴리실리콘 층들 중 2개의 층들 간에 협지되는 비정질 실리콘 층을 형성하는 단계; 및상기 비정질 실리콘 층을 고상 결정 성장에 의해 결정화하는 단계를 더 포함하는 반도체 장치의 제조 방법.
- 제13항에 있어서,상기 비정질 실리콘 층을 형성하는 공정 및 상기 폴리실리콘 층들을 형성하는 공정은 형성 온도를 연속적으로 변경함으로써 연속하여 수행되는 반도체 장치의 제조 방법.
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