JPWO2016157606A1 - 炭化珪素半導体装置およびその製造方法 - Google Patents
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- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 66
- 239000004065 semiconductor Substances 0.000 title claims description 107
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- 102000004129 N-Type Calcium Channels Human genes 0.000 description 1
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Abstract
Description
図1は、本実施の形態に係るMOSFET91(炭化珪素半導体装置)のセルの構成を概略的に示す断面図である。MOSFET91は、基板1(半導体基板)、半導体層21、ゲート酸化膜9(ゲート絶縁膜)、ゲート電極10、ソース電極11、ドレイン電極12、および層間絶縁膜16を有する。
d1>L1、かつd2>0
が満たされることが好ましい。
図14は、本実施の形態に係るMOSFET92(炭化珪素半導体装置)のセルの構成を概略的に示す断面図である。本実施の形態では、実施の形態1と比較して、トレンチ底面保護層15の構成が相違している。具体的には、MOSFET92のトレンチ底面保護層15においては、低濃度保護層7の幅が高濃度保護層8の幅よりも小さく形成されている。このため低濃度保護層7はトレンチ底面保護層15の底面の一部(図中、底面の中央部)のみをなしており、高濃度保護層8がトレンチ底面保護層15の底面の他部(図中、底面の両端部)をなしている。なお、上記以外の構成については、上述した実施の形態1の構成とほぼ同じであるため、その説明を繰り返さない。
図16は、本実施の形態に係るMOSFET93(炭化珪素半導体装置)のセルの構成を概略的に示す断面図である。本実施の形態では、実施の形態1と比較して、トレンチ底面保護層15の構成が相違している。具体的には、MOSFET93のトレンチ底面保護層15においては、低濃度保護層7の幅が高濃度保護層8の幅よりも大きく形成されている。なお、上記以外の構成については、上述した実施の形態1の構成とほぼ同じであるため、その説明を繰り返さない。
図22は、本実施の形態に係るMOSFET94(炭化珪素半導体装置)のセルの構成を概略的に示す断面図である。本実施の形態では、実施の形態1と比較して、トレンチ底面保護層15の構成が相違している。具体的には、MOSFET94のトレンチ底面保護層15は低濃度保護層20(第2低濃度保護層)を含む。低濃度保護層20は、図中、高濃度保護層8よりも上方に設けられている。具体的には低濃度保護層20は高濃度保護層8とトレンチ6の底面との間に設けられている。よって本実施の形態においては、高濃度保護層8は、低濃度保護層20を介してトレンチ6の底面に面している。
Claims (13)
- 炭化珪素からなる第1導電型のドリフト層(2)と、
前記ドリフト層上に設けられた第2導電型のボディ領域(5)と、
前記ボディ領域上に設けられた第1導電型のソース領域(3)と、
前記ソース領域に接続されたソース電極(11)と、
前記ボディ領域と前記ソース領域とを貫通するトレンチの側面上と底面上とに設けられたゲート絶縁膜(9)と、
前記ゲート絶縁膜を介して前記トレンチ内に設けられたゲート電極(10)と、
前記ドリフト層内において、前記トレンチの底面より下方に設けられ、前記ソース電極に電気的に接続された第2導電型のトレンチ底面保護層(15)と、
を備え、
前記トレンチ底面保護層は、
高濃度保護層(8)と、
前記高濃度保護層の下方に設けられ、前記高濃度保護層よりも不純物濃度の低い第1低濃度保護層(7)と、
を有することを特徴とする炭化珪素半導体装置(91〜94)。 - 前記第1低濃度保護層の厚さをL1、前記高濃度保護層の厚さをL2、前記炭化珪素半導体装置に逆方向電圧が印加された時に前記第1低濃度保護層と前記ドリフト層との界面から前記トレンチ底面保護層に伸びる空乏層の厚さをd1とし、d2={(L1+L2)−d1}としたとき、
d1>L1、かつd2>0
が満たされる、請求項1に記載の炭化珪素半導体装置。 - 前記高濃度保護層は、不純物濃度が深さ方向に一定となる領域(RC1)を少なくとも1つ含み、前記第1低濃度保護層は、不純物濃度が前記高濃度保護層よりも小さくかつ深さ方向に一定となる領域(RC2)を少なくとも1つ含む、請求項1または2に記載の炭化珪素半導体装置。
- 前記高濃度保護層は深さ方向において不純物濃度の山形ピーク(PL1)を有し、前記第1低濃度保護層は深さ方向において前記山形ピークよりも小さい不純物濃度の山形ピーク(PL2)を有する、請求項1または2に記載の炭化珪素半導体装置。
- 前記第1低濃度保護層の不純物濃度のプロファイルは、深さ方向に向かうにつれてプロファイルの傾きが大きくなる箇所(FL)を少なくとも1つ含む、請求項1または2に記載の炭化珪素半導体装置。
- 前記高濃度保護層の不純物濃度は前記第1低濃度保護層の不純物濃度の2倍以上である、請求項1から5のいずれか1項に記載の炭化珪素半導体装置。
- 前記第1低濃度保護層の幅は前記高濃度保護層の幅よりも小さい、請求項1から6のいずれか1項に記載の炭化珪素半導体装置(92)。
- 前記第1低濃度保護層の幅は前記高濃度保護層の幅よりも大きい、請求項1から6のいずれか1項に記載の炭化珪素半導体装置(93)。
- 前記トレンチ底面保護層は、前記高濃度保護層および前記第1低濃度保護層の2層からなる、請求項1から8のいずれか1項に記載の炭化珪素半導体装置(91〜93)。
- 前記トレンチ底面保護層は、前記高濃度保護層よりも上方に、前記高濃度保護層の不純物濃度よりも低い不純物濃度を有する第2低濃度保護層(20)を含む、請求項1から8のいずれか1項に記載の炭化珪素半導体装置(94)。
- 前記第2低濃度保護層は、前記高濃度保護層におけるピークよりも小さい不純物濃度のピークを有する、請求項10に記載の炭化珪素半導体装置。
- 炭化珪素から作られた第1導電型の半導体層(21)が設けられた半導体基板(1)を用意する工程と、
前記半導体層の上部に第2導電型のボディ領域(5)を形成する工程と、
前記ボディ領域の表面に前記第1導電型のソース領域(3)を形成する工程と、
前記ソース領域の表面から前記ボディ領域を貫通するトレンチ(6)を形成する工程と、
前記トレンチの底面に、前記第2導電型の高濃度保護層(8)と、前記高濃度保護層の下方に設けられ前記高濃度保護層の不純物濃度よりも低い不純物濃度を有する前記第2導電型の第1低濃度保護層(7)とを、加速エネルギーの異なる複数回のイオン注入により形成する工程と、
を備えた、炭化珪素半導体装置(91〜94)の製造方法。 - 炭化珪素から作られた第1導電型の半導体層(21)が設けられた半導体基板(1)を用意する工程と、
前記半導体層の上部に第2導電型のボディ領域(5)を形成する工程と、
前記ボディ領域の表面に前記第1導電型のソース領域(3)を形成する工程と、
前記ソース領域の表面から前記ボディ領域を貫通するトレンチ(6)を形成する工程と、
前記トレンチの底面に、前記第2導電型の第1低濃度保護層(7)をエピタキシャル成長により形成する工程と、
前記第1低濃度保護層の上面に、前記第1低濃度保護層の不純物濃度よりも高い不純物濃度を有する前記第2導電型の高濃度保護層(8)をエピタキシャル成長により形成する工程と、
を備えた、炭化珪素半導体装置(91〜94)の製造方法。
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