JPWO2011125975A1 - フィルタボックス、露光装置、及びデバイス製造方法 - Google Patents
フィルタボックス、露光装置、及びデバイス製造方法 Download PDFInfo
- Publication number
- JPWO2011125975A1 JPWO2011125975A1 JP2012509651A JP2012509651A JPWO2011125975A1 JP WO2011125975 A1 JPWO2011125975 A1 JP WO2011125975A1 JP 2012509651 A JP2012509651 A JP 2012509651A JP 2012509651 A JP2012509651 A JP 2012509651A JP WO2011125975 A1 JPWO2011125975 A1 JP WO2011125975A1
- Authority
- JP
- Japan
- Prior art keywords
- filter box
- filter
- frame
- box according
- handle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/0407—Constructional details of adsorbing systems
- B01D53/0415—Beds in cartridges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Separation Of Gases By Adsorption (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US32083210P | 2010-04-05 | 2010-04-05 | |
US61/320,832 | 2010-04-05 | ||
PCT/JP2011/058513 WO2011125975A1 (fr) | 2010-04-05 | 2011-04-04 | Boîte de filtre, dispositif d'exposition, et procédé de production de dispositif |
Publications (1)
Publication Number | Publication Date |
---|---|
JPWO2011125975A1 true JPWO2011125975A1 (ja) | 2013-07-11 |
Family
ID=44762910
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012509651A Withdrawn JPWO2011125975A1 (ja) | 2010-04-05 | 2011-04-04 | フィルタボックス、露光装置、及びデバイス製造方法 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPWO2011125975A1 (fr) |
KR (1) | KR20130032305A (fr) |
CN (1) | CN102821829A (fr) |
TW (1) | TW201206549A (fr) |
WO (1) | WO2011125975A1 (fr) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6447807B2 (ja) * | 2014-08-13 | 2019-01-09 | 株式会社ニコン | フィルタボックス及びその製造方法、フィルタ装置、並びに露光装置 |
TWD195394S (zh) | 2018-08-17 | 2019-01-11 | 明光電機有限公司 | Part of a double-conducting special filter |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS532152B2 (fr) * | 1973-06-08 | 1978-01-25 | ||
JPS5790724U (fr) * | 1980-11-19 | 1982-06-04 | ||
JPH09113028A (ja) * | 1995-10-17 | 1997-05-02 | Matsushita Electric Ind Co Ltd | 空気清浄フィルタ用収納ケース |
JPH1147531A (ja) * | 1997-07-31 | 1999-02-23 | Tennex:Kk | 室内空気処理用のフィルタ部材 |
JP2002158170A (ja) * | 2000-09-08 | 2002-05-31 | Nikon Corp | 露光装置及びデバイス製造方法 |
EP1571694A4 (fr) * | 2002-12-10 | 2008-10-15 | Nikon Corp | Appareil d'exposition et procede de fabrication de ce dispositif |
CN201291102Y (zh) * | 2008-10-31 | 2009-08-19 | 中国北车集团大同电力机车有限责任公司 | 空气过滤器 |
-
2011
- 2011-04-04 JP JP2012509651A patent/JPWO2011125975A1/ja not_active Withdrawn
- 2011-04-04 CN CN2011800168721A patent/CN102821829A/zh active Pending
- 2011-04-04 KR KR1020127028906A patent/KR20130032305A/ko not_active Application Discontinuation
- 2011-04-04 WO PCT/JP2011/058513 patent/WO2011125975A1/fr active Application Filing
- 2011-04-06 TW TW100111765A patent/TW201206549A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
TW201206549A (en) | 2012-02-16 |
KR20130032305A (ko) | 2013-04-01 |
WO2011125975A1 (fr) | 2011-10-13 |
CN102821829A (zh) | 2012-12-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20140701 |