TW201206549A - Filter box, exposure device, and device production method - Google Patents

Filter box, exposure device, and device production method Download PDF

Info

Publication number
TW201206549A
TW201206549A TW100111765A TW100111765A TW201206549A TW 201206549 A TW201206549 A TW 201206549A TW 100111765 A TW100111765 A TW 100111765A TW 100111765 A TW100111765 A TW 100111765A TW 201206549 A TW201206549 A TW 201206549A
Authority
TW
Taiwan
Prior art keywords
filter
frame
filter case
handle portion
case
Prior art date
Application number
TW100111765A
Other languages
English (en)
Chinese (zh)
Inventor
Koichi Katsura
Keiji Matsuura
Yoshinari Horita
Takashi Masukawa
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of TW201206549A publication Critical patent/TW201206549A/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • B01D53/0415—Beds in cartridges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
TW100111765A 2010-04-05 2011-04-06 Filter box, exposure device, and device production method TW201206549A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US32083210P 2010-04-05 2010-04-05

Publications (1)

Publication Number Publication Date
TW201206549A true TW201206549A (en) 2012-02-16

Family

ID=44762910

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100111765A TW201206549A (en) 2010-04-05 2011-04-06 Filter box, exposure device, and device production method

Country Status (5)

Country Link
JP (1) JPWO2011125975A1 (fr)
KR (1) KR20130032305A (fr)
CN (1) CN102821829A (fr)
TW (1) TW201206549A (fr)
WO (1) WO2011125975A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD195394S (zh) 2018-08-17 2019-01-11 明光電機有限公司 Part of a double-conducting special filter

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6447807B2 (ja) * 2014-08-13 2019-01-09 株式会社ニコン フィルタボックス及びその製造方法、フィルタ装置、並びに露光装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS532152B2 (fr) * 1973-06-08 1978-01-25
JPS5790724U (fr) * 1980-11-19 1982-06-04
JPH09113028A (ja) * 1995-10-17 1997-05-02 Matsushita Electric Ind Co Ltd 空気清浄フィルタ用収納ケース
JPH1147531A (ja) * 1997-07-31 1999-02-23 Tennex:Kk 室内空気処理用のフィルタ部材
JP2002158170A (ja) * 2000-09-08 2002-05-31 Nikon Corp 露光装置及びデバイス製造方法
EP1571694A4 (fr) * 2002-12-10 2008-10-15 Nikon Corp Appareil d'exposition et procede de fabrication de ce dispositif
CN201291102Y (zh) * 2008-10-31 2009-08-19 中国北车集团大同电力机车有限责任公司 空气过滤器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD195394S (zh) 2018-08-17 2019-01-11 明光電機有限公司 Part of a double-conducting special filter

Also Published As

Publication number Publication date
KR20130032305A (ko) 2013-04-01
WO2011125975A1 (fr) 2011-10-13
CN102821829A (zh) 2012-12-12
JPWO2011125975A1 (ja) 2013-07-11

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