JPWO2011090004A1 - 積層体の製造方法および積層体 - Google Patents
積層体の製造方法および積層体 Download PDFInfo
- Publication number
- JPWO2011090004A1 JPWO2011090004A1 JP2011550901A JP2011550901A JPWO2011090004A1 JP WO2011090004 A1 JPWO2011090004 A1 JP WO2011090004A1 JP 2011550901 A JP2011550901 A JP 2011550901A JP 2011550901 A JP2011550901 A JP 2011550901A JP WO2011090004 A1 JPWO2011090004 A1 JP WO2011090004A1
- Authority
- JP
- Japan
- Prior art keywords
- resin layer
- device substrate
- support plate
- laminated body
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 70
- 239000000758 substrate Substances 0.000 claims abstract description 228
- 229920005989 resin Polymers 0.000 claims abstract description 179
- 239000011347 resin Substances 0.000 claims abstract description 179
- 238000000034 method Methods 0.000 claims abstract description 100
- 230000002093 peripheral effect Effects 0.000 claims abstract description 49
- 239000011521 glass Substances 0.000 claims description 80
- 230000008569 process Effects 0.000 claims description 38
- 229920002050 silicone resin Polymers 0.000 claims description 26
- 238000005498 polishing Methods 0.000 claims description 22
- 238000006124 Pilkington process Methods 0.000 claims description 10
- 239000004925 Acrylic resin Substances 0.000 claims description 4
- 229920000178 Acrylic resin Polymers 0.000 claims description 3
- 229920005672 polyolefin resin Polymers 0.000 claims description 3
- 229920005749 polyurethane resin Polymers 0.000 claims description 3
- 238000005520 cutting process Methods 0.000 abstract description 17
- 239000010410 layer Substances 0.000 description 159
- 229920001296 polysiloxane Polymers 0.000 description 31
- 238000000576 coating method Methods 0.000 description 20
- 238000010438 heat treatment Methods 0.000 description 20
- 239000011248 coating agent Substances 0.000 description 18
- 239000000243 solution Substances 0.000 description 18
- 239000000428 dust Substances 0.000 description 14
- 239000000463 material Substances 0.000 description 14
- 239000007788 liquid Substances 0.000 description 12
- 239000004973 liquid crystal related substance Substances 0.000 description 12
- 238000010586 diagram Methods 0.000 description 11
- 239000011342 resin composition Substances 0.000 description 11
- 239000000126 substance Substances 0.000 description 10
- 238000001723 curing Methods 0.000 description 9
- 239000010408 film Substances 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 7
- -1 polyethylene terephthalate Polymers 0.000 description 7
- 239000003054 catalyst Chemical group 0.000 description 6
- 238000002347 injection Methods 0.000 description 6
- 239000007924 injection Substances 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 238000007259 addition reaction Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000011282 treatment Methods 0.000 description 5
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 238000013007 heat curing Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 229920006136 organohydrogenpolysiloxane Polymers 0.000 description 4
- 230000007261 regionalization Effects 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000003513 alkali Substances 0.000 description 3
- 238000003486 chemical etching Methods 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 238000007429 general method Methods 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 230000035484 reaction time Effects 0.000 description 3
- 239000003566 sealing material Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 229920002554 vinyl polymer Polymers 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000004695 Polyether sulfone Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 229910052783 alkali metal Inorganic materials 0.000 description 2
- 150000001340 alkali metals Chemical class 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000006482 condensation reaction Methods 0.000 description 2
- 239000003431 cross linking reagent Substances 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000005108 dry cleaning Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000009477 glass transition Effects 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 230000005012 migration Effects 0.000 description 2
- 238000013508 migration Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000006060 molten glass Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229920006393 polyether sulfone Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000009719 polyimide resin Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 229920001342 Bakelite® Polymers 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229920000106 Liquid crystal polymer Polymers 0.000 description 1
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 102100026827 Protein associated with UVRAG as autophagy enhancer Human genes 0.000 description 1
- 101710102978 Protein associated with UVRAG as autophagy enhancer Proteins 0.000 description 1
- 239000006087 Silane Coupling Agent Substances 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000005411 Van der Waals force Methods 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000004840 adhesive resin Substances 0.000 description 1
- 229920006223 adhesive resin Polymers 0.000 description 1
- 125000003342 alkenyl group Chemical group 0.000 description 1
- 229920003235 aromatic polyamide Polymers 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 150000001925 cycloalkenes Chemical class 0.000 description 1
- 238000007607 die coating method Methods 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 238000003280 down draw process Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000001227 electron beam curing Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000010828 elution Methods 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000005187 foaming Methods 0.000 description 1
- 238000007756 gravure coating Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 230000005525 hole transport Effects 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000007500 overflow downdraw method Methods 0.000 description 1
- 238000006864 oxidative decomposition reaction Methods 0.000 description 1
- 239000000075 oxide glass Substances 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 229920001643 poly(ether ketone) Polymers 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 229920001690 polydopamine Polymers 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000037452 priming Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 125000005372 silanol group Chemical group 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
- B32B37/26—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with at least one layer which influences the bonding during the lamination process, e.g. release layers or pressure equalising layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
- B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
- B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
- B32B17/1055—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer
- B32B17/10743—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer containing acrylate (co)polymers or salts thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
- B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
- B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
- B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
- B32B17/10009—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets
- B32B17/10036—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets comprising two outer glass sheets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
- B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
- B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
- B32B17/10009—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets
- B32B17/10128—Treatment of at least one glass sheet
- B32B17/10155—Edge treatment or chamfering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
- B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
- B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
- B32B17/10165—Functional features of the laminated safety glass or glazing
- B32B17/10293—Edge features, e.g. inserts or holes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
- B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
- B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
- B32B17/1055—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer
- B32B17/1077—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer containing polyurethane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
- B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
- B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
- B32B17/1055—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer
- B32B17/10798—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer containing silicone
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
- B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
- B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
- B32B17/10807—Making laminated safety glass or glazing; Apparatus therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/10—Removing layers, or parts of layers, mechanically or chemically
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
- B32B37/26—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with at least one layer which influences the bonding during the lamination process, e.g. release layers or pressure equalising layers
- B32B2037/268—Release layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
- B32B2457/20—Displays, e.g. liquid crystal displays, plasma displays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/28—Adhesive materials or arrangements
Abstract
Description
デバイス基板と支持板との間に樹脂層が介装され、該樹脂層が前記デバイス基板の第1主面に剥離可能に密着されると共に前記支持板上に固定された積層体ブロックを所定寸法に切断し、前記積層体ブロックの外周面の少なくとも周方向一部を平面化する工程を含む方法である。
また、前記樹脂層の外周面の平面化された部分が前記樹脂層の厚さ方向に略平行であることが好ましい。
また、前記デバイス基板がフロート法により製造されたガラス基板であって、前記角部を面取り後、前記デバイス基板の第2主面を研磨する工程を含むことが好ましい。
前記樹脂層は、アクリル樹脂層、ポリオレフィン樹脂層、ポリウレタン樹脂層、及びシリコーン樹脂層からなる群から選ばれる少なくとも一種を含むことが好ましい。
前記樹脂層の厚さが5〜50μmであることが好ましい。
デバイス基板と支持板との間に樹脂層が介装され、該樹脂層が前記デバイス基板の第1主面に剥離可能に密着されると共に前記支持板上に固定された積層体ブロックを所定寸法に切断し、前記積層体ブロックの外周面の少なくとも周方向一部を平面化したものである。
図1は、本発明の第1実施形態における積層体の製造方法の工程図である。図1に示すように、積層体の製造方法は、デバイス基板と支持板との間に樹脂層が介装され、該樹脂層がデバイス基板の第1主面に剥離可能に密着されると共に支持板上に固定された積層体ブロックを所定寸法に切断し、積層体ブロックの外周面の少なくとも周方向一部を平面化する工程(ステップS11)を有する。
デバイス基板11は、第2主面112にデバイス用部材が形成されてデバイスを構成する。ここで、デバイス用部材とは、デバイス(電子機器)の少なくとも一部を構成する部材をいう。具体例としては、薄膜トランジスタ(TFT)、カラーフィルタ(CF)が挙げられる。デバイスとしては、太陽電池(PV)、液晶パネル(LCD)、有機ELパネル(OLED)等が例示される。デバイス用部材は、積層体ブロック10の外周面を平面化した後に、デバイス基板11の第2主面112に形成される。
支持板12は、デバイス基板11を支持して補強し、デバイスの製造工程においてデバイス基板11の変形、傷付き、破損等を防止する。また、従来よりも厚さが薄いデバイス基板11を使用する場合、従来のデバイス基板と同じ厚さの積層体ブロック10とすることにより、デバイスの製造工程において、従来の厚さのデバイス基板に適合した製造技術や製造設備を使用可能にすることも、支持板12を使用する目的の1つである。
樹脂層13は、支持板12上に固定されており、また、デバイス基板11の第1主面111に剥離可能に密着されている。樹脂層13は、剥離操作が行われるまでデバイス基板11の位置ずれを防止すると共に、剥離操作によってデバイス基板11から容易に剥離し、デバイス基板11等が剥離操作によって破損するのを防止する。
樹脂層13を支持板12上に固定する方法は、特に限定されないが、例えばフィルム状の樹脂を支持板12の表面に固定する方法が挙げられる。具体的には、支持板12の表面に、フィルムの表面に対する高い固定力(高い剥離強度)を付与するために、支持板12の表面に表面改質処理(プライミング処理)を行い、支持板12上に固定する方法が挙げられる。例えば、シランカップリング剤のような化学的に固定力を向上させる化学的方法(プライマー処理)、フレーム(火炎)処理のように表面活性基を増加させる物理的方法、サンドブラスト処理のように表面の粗度を増加させることにより引っかかりを増加させる機械的処理方法などが例示される。
支持体上に形成した樹脂層13をデバイス基板11上に剥離可能に密着させる方法は、公知の方法であってよい。例えば、常圧環境下で樹脂層13の剥離性表面にデバイス基板11を重ねた後、ロールやプレスを用いて樹脂層13とデバイス基板11とを圧着させる方法が挙げられる。ロールやプレスで圧着することにより樹脂層13とデバイス基板11とがより密着するので好ましい。また、ロールまたはプレスによる圧着により、樹脂層13とデバイス基板11との間に混入している気泡が比較的容易に除去されるので好ましい。
このようにして得られた積層体ブロック10の外周面14には、凹溝15が形成されてしまうことがある。例えば、図2に示すように、デバイス基板11や支持板12が面取り加工されたものである場合や、樹脂層13が液状の樹脂組成物を支持板12に塗布して加熱硬化させたものである場合、デバイス基板11や支持板12、樹脂層13の外周面が丸みを帯びているので、積層体ブロック10の外周面14に凹溝15が形成されてしまう。
図1に示すように、積層体の製造方法は、積層体ブロックの外周面の平面化された部分の角部を面取りする工程(ステップS12)をさらに有してよい。面取りによって、耐衝撃性、安全性を高めることができる。
図1に示すように、積層体の製造方法は、デバイス基板がフロート法により製造されたガラス基板である場合、面取り後(即ち、平面化後)、デバイス基板の第2主面を研磨する研磨工程(ステップS13)をさらに有してよい。ここで、フロート法により製造されたガラス基板には、フロート法により製造されたガラス基板をリドロー法により引き伸ばして、厚さをさらに薄くしたガラス基板が含まれる。
図9は、本発明の第1実施形態におけるデバイスの製造方法を示す工程図である。
第2実施形態は、平面化前の積層体ブロックに関するものである。
図13は、本発明の第3実施形態における平面化前の積層体ブロックの部分側面図である。図13に示すように、平面化前の積層体ブロック30は、デバイス基板31と支持板32との間に樹脂層33が介装されたものである。樹脂層33は、デバイス基板31の第1主面311に剥離可能に密着されると共に、支持板32上に固定されている。
支持板には、フロート法により得られた縦370mm×横320mm×厚さ0.6mmのガラス板(旭硝子社製、AN100、無アルカリガラス)を用いた。このガラス板の平均線膨張係数は、38×10−7/℃であった。
実施例2では、支持板にフロート法により得られた縦370mm×横320mm×厚さ0.4mmのガラス板(旭硝子社製、AN100、無アルカリガラス)を用いた以外は、実施例1と同様にして、ガラス板上に樹脂層を形成し、固定した。
比較例1では、実施例2と同様にして得られた切断前の積層体ブロックを、実施例1と同様にして、レジスト液中に漬け、洗浄し、乾燥した後、顕微鏡で積層体の外周面を観察した。その結果、レジスト液の残渣が見られた。
本出願は、2010年1月25日出願の日本特許出願2010−012785に基づくものであり、その内容はここに参照として取り込まれる。
11 デバイス基板
111 第1主面
112 第2主面
12 支持板
13 樹脂層
14 外周面
15 凹溝
Claims (8)
- デバイス基板と支持板との間に樹脂層が介装され、該樹脂層が前記デバイス基板の第1主面に剥離可能に密着されると共に前記支持板上に固定された積層体ブロックを所定寸法に切断し、前記積層体ブロックの外周面の少なくとも周方向一部を平面化する工程を含む、積層体の製造方法。
- さらに、前記積層体ブロックの外周面の平面化された部分の角部を面取りする工程を含む、請求項1に記載の積層体の製造方法。
- 前記樹脂層の外周面の平面化された部分が前記樹脂層の厚さ方向に略平行である、請求項1または2に記載の積層体の製造方法。
- 前記デバイス基板がフロート法により製造されたガラス基板であって、
前記角部を面取り後、前記デバイス基板の第2主面を研磨する工程を含む、請求項2または3に記載の積層体の製造方法。 - 前記デバイス基板は、厚さ0.03mm以上0.8mm未満のガラス基板である請求項1〜4のいずれか一項に記載の積層体の製造方法。
- 前記樹脂層は、アクリル樹脂、ポリオレフィン樹脂、ポリウレタン樹脂、及びシリコーン樹脂からなる群から選ばれる少なくとも一種を含む、請求項1〜5のいずれか一項に記載の積層体の製造方法。
- 前記樹脂層の厚さが5〜50μmである請求項1〜6のいずれか一項に記載の積層体の製造方法。
- デバイス基板と支持板との間に樹脂層が介装され、該樹脂層が前記デバイス基板の第1主面に剥離可能に密着されると共に前記支持板上に固定された積層体ブロックを所定寸法に切断し、前記積層体ブロックの外周面の少なくとも周方向一部を平面化した積層体。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011550901A JP5716678B2 (ja) | 2010-01-25 | 2011-01-17 | 積層体の製造方法および積層体 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010012785 | 2010-01-25 | ||
JP2010012785 | 2010-01-25 | ||
PCT/JP2011/050680 WO2011090004A1 (ja) | 2010-01-25 | 2011-01-17 | 積層体の製造方法および積層体 |
JP2011550901A JP5716678B2 (ja) | 2010-01-25 | 2011-01-17 | 積層体の製造方法および積層体 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2011090004A1 true JPWO2011090004A1 (ja) | 2013-05-23 |
JP5716678B2 JP5716678B2 (ja) | 2015-05-13 |
Family
ID=44306807
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011550901A Active JP5716678B2 (ja) | 2010-01-25 | 2011-01-17 | 積層体の製造方法および積層体 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5716678B2 (ja) |
KR (1) | KR101538835B1 (ja) |
CN (1) | CN102725143B (ja) |
TW (1) | TWI508863B (ja) |
WO (1) | WO2011090004A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111918489A (zh) * | 2020-08-26 | 2020-11-10 | 鸿安(福建)机械有限公司 | 一种多层pcb板压合装置 |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012090787A1 (ja) * | 2010-12-28 | 2012-07-05 | 旭硝子株式会社 | 積層体の製造方法 |
JP5904457B2 (ja) * | 2011-05-13 | 2016-04-13 | 日本電気硝子株式会社 | 積層体 |
EP2708355B1 (en) * | 2011-05-13 | 2020-12-02 | Nippon Electric Glass Co., Ltd. | Laminate and manufacturing method therefor |
JP5790392B2 (ja) * | 2011-10-12 | 2015-10-07 | 旭硝子株式会社 | 電子デバイスの製造方法 |
JP5887946B2 (ja) * | 2012-01-18 | 2016-03-16 | 旭硝子株式会社 | 電子デバイスの製造方法、およびガラス積層体の製造方法 |
US9806565B2 (en) | 2012-03-23 | 2017-10-31 | Lg Innotek Co., Ltd. | Wireless power receiver and method of manufacturing the same |
EP2830152A4 (en) | 2012-03-23 | 2016-03-09 | Lg Innotek Co Ltd | ANTENNA ASSEMBLY AND METHOD FOR MANUFACTURING THE SAME |
US20140014260A1 (en) | 2012-07-12 | 2014-01-16 | Dipakbin Qasem Chowdhury | Laminated structures and methods of manufacturing laminated structures |
JP6003604B2 (ja) * | 2012-12-10 | 2016-10-05 | 旭硝子株式会社 | 積層板の加工方法、加工された積層板 |
CN104854055A (zh) * | 2012-12-13 | 2015-08-19 | 旭硝子株式会社 | 电子装置的制造方法以及玻璃层叠体的制造方法 |
JP6375595B2 (ja) * | 2013-06-21 | 2018-08-22 | 凸版印刷株式会社 | コアレス配線基板の製造方法および剥離装置 |
JP2015096313A (ja) * | 2013-11-15 | 2015-05-21 | 日本電気硝子株式会社 | ガラスフィルム積層体および液晶パネルの製造方法 |
KR20170103855A (ko) * | 2015-01-06 | 2017-09-13 | 코닝 인코포레이티드 | 유리-운반체 조립체 및 가요성 유리 시트를 프로세스하기 위한 방법 |
JP6541987B2 (ja) * | 2015-02-18 | 2019-07-10 | コニカミノルタ株式会社 | 光学素子及び結像素子の製造方法 |
JP6593676B2 (ja) * | 2015-03-02 | 2019-10-23 | 日本電気硝子株式会社 | 積層体及び半導体パッケージの製造方法 |
JP2016210023A (ja) * | 2015-04-30 | 2016-12-15 | 日本電気硝子株式会社 | 可撓性積層体の製造方法 |
JP7024408B2 (ja) * | 2015-12-09 | 2022-02-24 | Agc株式会社 | 合わせガラスおよび合わせガラスの製造方法 |
CN108367981B (zh) * | 2015-12-21 | 2021-01-15 | Agc株式会社 | 层叠板 |
JP2018032661A (ja) * | 2016-08-22 | 2018-03-01 | イビデン株式会社 | プリント配線板およびその製造方法 |
CN109982834B (zh) * | 2016-11-15 | 2021-05-18 | Agc株式会社 | 层叠基板和电子器件的制造方法 |
CN106624628B (zh) * | 2016-11-22 | 2019-07-23 | 江西昌河航空工业有限公司 | 一种无倒角缺陷的蜂窝芯nc加工方法 |
KR102200159B1 (ko) * | 2017-12-18 | 2021-01-08 | 주식회사 포스코 | 초박물 광폭 강판의 제조방법 |
CN112969582A (zh) * | 2018-11-08 | 2021-06-15 | 日东电工株式会社 | 薄玻璃层叠体 |
KR102443795B1 (ko) * | 2020-11-03 | 2022-09-16 | 주식회사 도우인시스 | 초박형 글라스의 가공 방법 |
JP2022078516A (ja) * | 2020-11-13 | 2022-05-25 | 日東電工株式会社 | 複層構造体及びその製造方法 |
TWI770818B (zh) * | 2021-02-10 | 2022-07-11 | 彩碁科技股份有限公司 | 基板及其製作方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5545277A (en) * | 1994-10-03 | 1996-08-13 | Ford Motor Company | Plate glass edge strength |
EP1048628A1 (de) * | 1999-04-30 | 2000-11-02 | Schott Glas | Polymerbeschichtete Dünnglasfoliensubstrate |
JP4326635B2 (ja) * | 1999-09-29 | 2009-09-09 | 三菱樹脂株式会社 | ガラスフィルムの取扱い方法及びガラス積層体 |
JP4250276B2 (ja) * | 1999-10-20 | 2009-04-08 | 三菱樹脂株式会社 | プラスチックフィルム・ガラスフィルム積層体及びその製造方法 |
JP2002011826A (ja) * | 2000-06-29 | 2002-01-15 | Mitsubishi Plastics Ind Ltd | 金属積層射出成形体及びその製造方法 |
JP4406752B2 (ja) * | 2005-05-27 | 2010-02-03 | 日本電気硝子株式会社 | ガラス基板の端面加工装置及び端面加工方法 |
WO2007018028A1 (ja) * | 2005-08-09 | 2007-02-15 | Asahi Glass Company, Limited | 薄板ガラス積層体及び薄板ガラス積層体を用いた表示装置の製造方法 |
JP2007281067A (ja) * | 2006-04-04 | 2007-10-25 | Nitto Denko Corp | 半導体装置の製造方法、及びそれに用いる半導体ウェハ加工用の粘着シート |
JP2009008973A (ja) * | 2007-06-29 | 2009-01-15 | Hitachi Displays Ltd | 液晶表示装置 |
JP4961329B2 (ja) * | 2007-11-14 | 2012-06-27 | Agc硝子建材株式会社 | 強化合わせガラス、及びガラススクリーン構造、並びにガラス製手摺り |
-
2011
- 2011-01-17 KR KR1020127019623A patent/KR101538835B1/ko active IP Right Grant
- 2011-01-17 JP JP2011550901A patent/JP5716678B2/ja active Active
- 2011-01-17 CN CN201180007092.0A patent/CN102725143B/zh active Active
- 2011-01-17 WO PCT/JP2011/050680 patent/WO2011090004A1/ja active Application Filing
- 2011-01-25 TW TW100102691A patent/TWI508863B/zh active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111918489A (zh) * | 2020-08-26 | 2020-11-10 | 鸿安(福建)机械有限公司 | 一种多层pcb板压合装置 |
Also Published As
Publication number | Publication date |
---|---|
KR101538835B1 (ko) | 2015-07-22 |
KR20120123375A (ko) | 2012-11-08 |
WO2011090004A1 (ja) | 2011-07-28 |
JP5716678B2 (ja) | 2015-05-13 |
CN102725143B (zh) | 2015-09-30 |
CN102725143A (zh) | 2012-10-10 |
TWI508863B (zh) | 2015-11-21 |
TW201132503A (en) | 2011-10-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5716678B2 (ja) | 積層体の製造方法および積層体 | |
JP5887946B2 (ja) | 電子デバイスの製造方法、およびガラス積層体の製造方法 | |
JP5790392B2 (ja) | 電子デバイスの製造方法 | |
WO2010079688A1 (ja) | ガラス積層体およびその製造方法 | |
JP5796449B2 (ja) | 電子デバイスの製造方法、樹脂層付きキャリア基板の製造方法 | |
JP5842821B2 (ja) | 積層体、支持板付き表示装置用パネル、表示装置用パネル、および表示装置 | |
TWI480165B (zh) | Manufacture of electronic devices | |
KR20090120454A (ko) | 보호 유리 부착 유리 기판 및 보호 유리 부착 유리 기판을 사용한 표시 장치의 제조 방법 | |
WO2014092015A1 (ja) | 電子デバイスの製造方法およびガラス積層体の製造方法 | |
KR102267241B1 (ko) | 유리 필름 적층체 및 액정 패널의 제조 방법 | |
JP6610563B2 (ja) | ガラス積層体、電子デバイスの製造方法、ガラス積層体の製造方法、ガラス板梱包体 | |
WO2018034290A1 (ja) | 積層体、電子デバイスの製造方法、積層体の製造方法 | |
WO2014061565A1 (ja) | ガラス積層体およびその製造方法、並びに、シリコーン樹脂層付き支持基材 | |
JP5861647B2 (ja) | 積層体の製造方法 | |
TWI526316B (zh) | A method for removing the resin film and a method for producing the layered product | |
JP5907168B2 (ja) | 積層体の製造方法、および積層体 | |
JP6003604B2 (ja) | 積層板の加工方法、加工された積層板 | |
JP2014104712A (ja) | 電子デバイスの製造方法および多層ガラス積層体 | |
TWI656967B (zh) | 玻璃積層體及其製造方法、電子裝置之製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130902 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140819 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140922 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20150217 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20150302 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5716678 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |