JPS5771127A - Manufacture of semiamorphous semiconductor - Google Patents
Manufacture of semiamorphous semiconductorInfo
- Publication number
- JPS5771127A JPS5771127A JP55147304A JP14730480A JPS5771127A JP S5771127 A JPS5771127 A JP S5771127A JP 55147304 A JP55147304 A JP 55147304A JP 14730480 A JP14730480 A JP 14730480A JP S5771127 A JPS5771127 A JP S5771127A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- substrate
- mass
- reacted
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/24—Deposition of silicon only
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02381—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
Abstract
PURPOSE:To obtain an improved novel semiamorphous semiconductor by a system wherein a density is maintained 10% or less by diluting silicide gas or Ga substance gas with He or Ne and a reactive gas is caused to be reacted into crystallization by addition of inductive energy of 50 through 2,000W to a reaction system. CONSTITUTION:A substrate 10 is heated in a furnace 8 at 100 to 600 deg.C from the external of a reaction tube, a high frequency of 50 to 2,000W is applied to electrodes 3 at the both sides of the furnace 8 and inductive energy 9 is provided for the electrodes by a coupling means of capacitors. The density is maintained 10% or less by weakening silicide or Ga gas with H2 or the like. In this case, glow discharge is given to polymerized silicon or the like, which is spaced from the substrate and reacted into crystalization as a mass during sputtering. The mass forms intercoupling means between the substrate and the loose atoms and is covered as a semicrystallized mass or pillar cluster. The generation layer is not a polycrystal, a single crystal or amorphous semiconductor layer, but an intermediate semiconductor and has an electric property suitable for a photoelectric transducer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55147304A JPS5771127A (en) | 1980-10-21 | 1980-10-21 | Manufacture of semiamorphous semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55147304A JPS5771127A (en) | 1980-10-21 | 1980-10-21 | Manufacture of semiamorphous semiconductor |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58052264A Division JPS58175824A (en) | 1983-03-28 | 1983-03-28 | Device for plasma vapor phase reaction |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5771127A true JPS5771127A (en) | 1982-05-01 |
JPH0313737B2 JPH0313737B2 (en) | 1991-02-25 |
Family
ID=15427163
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55147304A Granted JPS5771127A (en) | 1980-10-21 | 1980-10-21 | Manufacture of semiamorphous semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5771127A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57187935A (en) * | 1981-05-15 | 1982-11-18 | Agency Of Ind Science & Technol | Forming of fine crystalline amorphous silicon film |
JPS59179151A (en) * | 1983-03-30 | 1984-10-11 | Mitsui Toatsu Chem Inc | Production of amorphous thin film |
JPH0620952A (en) * | 1983-03-28 | 1994-01-28 | Semiconductor Energy Lab Co Ltd | Manufacture of semiconductor film containing silicon as main ingredient |
JP2008179466A (en) * | 2007-01-26 | 2008-08-07 | Ss Pharmaceut Co Ltd | Tablet carrying device |
-
1980
- 1980-10-21 JP JP55147304A patent/JPS5771127A/en active Granted
Non-Patent Citations (3)
Title |
---|
APPL.PHYS.LETT=1980 * |
J.NON-CRYST.SOLIDS=1979 * |
JAPAN.J.APPL.PHYS=1980 * |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57187935A (en) * | 1981-05-15 | 1982-11-18 | Agency Of Ind Science & Technol | Forming of fine crystalline amorphous silicon film |
JPS6041453B2 (en) * | 1981-05-15 | 1985-09-17 | 工業技術院長 | Method for producing microcrystalline amorphous silicon film |
JPH0620952A (en) * | 1983-03-28 | 1994-01-28 | Semiconductor Energy Lab Co Ltd | Manufacture of semiconductor film containing silicon as main ingredient |
JPS59179151A (en) * | 1983-03-30 | 1984-10-11 | Mitsui Toatsu Chem Inc | Production of amorphous thin film |
JP2008179466A (en) * | 2007-01-26 | 2008-08-07 | Ss Pharmaceut Co Ltd | Tablet carrying device |
Also Published As
Publication number | Publication date |
---|---|
JPH0313737B2 (en) | 1991-02-25 |
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