JPS5459078A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5459078A JPS5459078A JP12613877A JP12613877A JPS5459078A JP S5459078 A JPS5459078 A JP S5459078A JP 12613877 A JP12613877 A JP 12613877A JP 12613877 A JP12613877 A JP 12613877A JP S5459078 A JPS5459078 A JP S5459078A
- Authority
- JP
- Japan
- Prior art keywords
- film
- poly
- eutectic
- films
- constitution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12613877A JPS5459078A (en) | 1977-10-19 | 1977-10-19 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12613877A JPS5459078A (en) | 1977-10-19 | 1977-10-19 | Manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5459078A true JPS5459078A (en) | 1979-05-12 |
JPS5758773B2 JPS5758773B2 (ja) | 1982-12-11 |
Family
ID=14927604
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12613877A Granted JPS5459078A (en) | 1977-10-19 | 1977-10-19 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5459078A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56130919A (en) * | 1980-03-17 | 1981-10-14 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS56130965A (en) * | 1980-03-17 | 1981-10-14 | Matsushita Electric Ind Co Ltd | Semiconductor device and manufacture thereof |
-
1977
- 1977-10-19 JP JP12613877A patent/JPS5459078A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56130919A (en) * | 1980-03-17 | 1981-10-14 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS56130965A (en) * | 1980-03-17 | 1981-10-14 | Matsushita Electric Ind Co Ltd | Semiconductor device and manufacture thereof |
Also Published As
Publication number | Publication date |
---|---|
JPS5758773B2 (ja) | 1982-12-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5696850A (en) | Semiconductor device and manufacture thereof | |
JPS5643749A (en) | Semiconductor device and its manufacture | |
JPS54161894A (en) | Manufacture of semiconductor device | |
JPS5459078A (en) | Manufacture of semiconductor device | |
JPS56115557A (en) | Manufacture of semiconductor device | |
JPS5766673A (en) | Manufacture of mos type semiconductor device | |
JPS56100441A (en) | Semiconductor ic device with protection element and manufacture thereof | |
JPS5461490A (en) | Multi-layer wiring forming method in semiconductor device | |
JPS5789239A (en) | Semiconductor integrated circuit | |
JPS5339888A (en) | Semiconductor integrated circuit device and its production | |
JPS56158455A (en) | Semiconductor device | |
JPS5271994A (en) | Semiconductor integrated circuit device | |
JPS5451783A (en) | Manufacture of mos-type semiconductor device | |
JPS5522878A (en) | Insulation gate type field effect semiconductor device | |
JPS5448182A (en) | Semiconductor integrated circuit device | |
JPS577948A (en) | Semiconductor device and its manufacture | |
JPS5478681A (en) | Semiconductor device | |
JPS5317286A (en) | Production of semiconductor device | |
JPS5760855A (en) | Manufacture of semiconductor device | |
JPS5687346A (en) | Manufacture of semiconductor device | |
JPS5320875A (en) | Semiconductor integrated circuit device | |
JPS5331966A (en) | Production of semiconductor device | |
JPS647550A (en) | Semiconductor device | |
JPS5562750A (en) | Semiconductor integrated circuit device | |
JPS5486287A (en) | Integrated-circuit device |