JPS5339888A - Semiconductor integrated circuit device and its production - Google Patents
Semiconductor integrated circuit device and its productionInfo
- Publication number
- JPS5339888A JPS5339888A JP11369276A JP11369276A JPS5339888A JP S5339888 A JPS5339888 A JP S5339888A JP 11369276 A JP11369276 A JP 11369276A JP 11369276 A JP11369276 A JP 11369276A JP S5339888 A JPS5339888 A JP S5339888A
- Authority
- JP
- Japan
- Prior art keywords
- production
- integrated circuit
- semiconductor integrated
- circuit device
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Bipolar Transistors (AREA)
- Element Separation (AREA)
Abstract
PURPOSE: To lower corrector series resistance without producing crystal defects and obtain a bipolar IC of high performances by making shallow the diffusion depth of the isolation layers and collector sink layers reaching the buried layers provided in a semiconductor substrate.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11369276A JPS5339888A (en) | 1976-09-24 | 1976-09-24 | Semiconductor integrated circuit device and its production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11369276A JPS5339888A (en) | 1976-09-24 | 1976-09-24 | Semiconductor integrated circuit device and its production |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5339888A true JPS5339888A (en) | 1978-04-12 |
Family
ID=14618756
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11369276A Pending JPS5339888A (en) | 1976-09-24 | 1976-09-24 | Semiconductor integrated circuit device and its production |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5339888A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5559765A (en) * | 1978-10-27 | 1980-05-06 | Hitachi Ltd | Semiconductor integrated circuit device |
JPS5595358A (en) * | 1979-01-12 | 1980-07-19 | Seiko Instr & Electronics Ltd | Bipolar transistor |
JPS60109274A (en) * | 1983-11-18 | 1985-06-14 | Hitachi Ltd | Semiconductor ic device and manufacture thereof |
-
1976
- 1976-09-24 JP JP11369276A patent/JPS5339888A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5559765A (en) * | 1978-10-27 | 1980-05-06 | Hitachi Ltd | Semiconductor integrated circuit device |
JPS5595358A (en) * | 1979-01-12 | 1980-07-19 | Seiko Instr & Electronics Ltd | Bipolar transistor |
JPS60109274A (en) * | 1983-11-18 | 1985-06-14 | Hitachi Ltd | Semiconductor ic device and manufacture thereof |
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