JPS5411680A - Exposure unit of electron beam - Google Patents

Exposure unit of electron beam

Info

Publication number
JPS5411680A
JPS5411680A JP7698177A JP7698177A JPS5411680A JP S5411680 A JPS5411680 A JP S5411680A JP 7698177 A JP7698177 A JP 7698177A JP 7698177 A JP7698177 A JP 7698177A JP S5411680 A JPS5411680 A JP S5411680A
Authority
JP
Japan
Prior art keywords
electron beam
exposure unit
reaction
stoppage
restricting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7698177A
Other languages
Japanese (ja)
Inventor
Masaki Ito
Yoshitake Onishi
Kenji Mizuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP7698177A priority Critical patent/JPS5411680A/en
Publication of JPS5411680A publication Critical patent/JPS5411680A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To increase the pattern accuracy, by providing the reaction controlling gas introducing set near the test piece, and by stopping or restricting the reaction after the stoppage of electron beam radiation.
COPYRIGHT: (C)1979,JPO&Japio
JP7698177A 1977-06-27 1977-06-27 Exposure unit of electron beam Pending JPS5411680A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7698177A JPS5411680A (en) 1977-06-27 1977-06-27 Exposure unit of electron beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7698177A JPS5411680A (en) 1977-06-27 1977-06-27 Exposure unit of electron beam

Publications (1)

Publication Number Publication Date
JPS5411680A true JPS5411680A (en) 1979-01-27

Family

ID=13620945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7698177A Pending JPS5411680A (en) 1977-06-27 1977-06-27 Exposure unit of electron beam

Country Status (1)

Country Link
JP (1) JPS5411680A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5797623A (en) * 1980-12-10 1982-06-17 Fujitsu Ltd Electron beam exposure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5797623A (en) * 1980-12-10 1982-06-17 Fujitsu Ltd Electron beam exposure
JPS6339094B2 (en) * 1980-12-10 1988-08-03 Fujitsu Ltd

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