JPS5390766A - Exposure method - Google Patents
Exposure methodInfo
- Publication number
- JPS5390766A JPS5390766A JP443177A JP443177A JPS5390766A JP S5390766 A JPS5390766 A JP S5390766A JP 443177 A JP443177 A JP 443177A JP 443177 A JP443177 A JP 443177A JP S5390766 A JPS5390766 A JP S5390766A
- Authority
- JP
- Japan
- Prior art keywords
- exposure method
- adhesiveness
- treating
- inert gas
- gas plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To give sufficient sensitivity and adhesiveness to a resist layer and perform electron beam exposure by adding a process of using an ordinary electron-beam sensitive resist and treating the same with inert gas plasma.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP443177A JPS5390766A (en) | 1977-01-20 | 1977-01-20 | Exposure method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP443177A JPS5390766A (en) | 1977-01-20 | 1977-01-20 | Exposure method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5390766A true JPS5390766A (en) | 1978-08-09 |
Family
ID=11584049
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP443177A Pending JPS5390766A (en) | 1977-01-20 | 1977-01-20 | Exposure method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5390766A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53110373A (en) * | 1977-03-08 | 1978-09-27 | Fujitsu Ltd | Manufacture of semiconductor device |
DE3323737A1 (en) | 1983-07-01 | 1985-01-03 | Alfred Teves Gmbh, 6000 Frankfurt | BOLT GUIDE FOR THE SADDLE OF A FLOATING SADDLE PART COVER BRAKE |
-
1977
- 1977-01-20 JP JP443177A patent/JPS5390766A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53110373A (en) * | 1977-03-08 | 1978-09-27 | Fujitsu Ltd | Manufacture of semiconductor device |
DE3323737A1 (en) | 1983-07-01 | 1985-01-03 | Alfred Teves Gmbh, 6000 Frankfurt | BOLT GUIDE FOR THE SADDLE OF A FLOATING SADDLE PART COVER BRAKE |
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