JPS5390766A - Exposure method - Google Patents

Exposure method

Info

Publication number
JPS5390766A
JPS5390766A JP443177A JP443177A JPS5390766A JP S5390766 A JPS5390766 A JP S5390766A JP 443177 A JP443177 A JP 443177A JP 443177 A JP443177 A JP 443177A JP S5390766 A JPS5390766 A JP S5390766A
Authority
JP
Japan
Prior art keywords
exposure method
adhesiveness
treating
inert gas
gas plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP443177A
Other languages
Japanese (ja)
Inventor
Kiyokatsu Jinno
Masataka Miyamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP443177A priority Critical patent/JPS5390766A/en
Publication of JPS5390766A publication Critical patent/JPS5390766A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To give sufficient sensitivity and adhesiveness to a resist layer and perform electron beam exposure by adding a process of using an ordinary electron-beam sensitive resist and treating the same with inert gas plasma.
COPYRIGHT: (C)1978,JPO&Japio
JP443177A 1977-01-20 1977-01-20 Exposure method Pending JPS5390766A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP443177A JPS5390766A (en) 1977-01-20 1977-01-20 Exposure method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP443177A JPS5390766A (en) 1977-01-20 1977-01-20 Exposure method

Publications (1)

Publication Number Publication Date
JPS5390766A true JPS5390766A (en) 1978-08-09

Family

ID=11584049

Family Applications (1)

Application Number Title Priority Date Filing Date
JP443177A Pending JPS5390766A (en) 1977-01-20 1977-01-20 Exposure method

Country Status (1)

Country Link
JP (1) JPS5390766A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53110373A (en) * 1977-03-08 1978-09-27 Fujitsu Ltd Manufacture of semiconductor device
DE3323737A1 (en) 1983-07-01 1985-01-03 Alfred Teves Gmbh, 6000 Frankfurt BOLT GUIDE FOR THE SADDLE OF A FLOATING SADDLE PART COVER BRAKE

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53110373A (en) * 1977-03-08 1978-09-27 Fujitsu Ltd Manufacture of semiconductor device
DE3323737A1 (en) 1983-07-01 1985-01-03 Alfred Teves Gmbh, 6000 Frankfurt BOLT GUIDE FOR THE SADDLE OF A FLOATING SADDLE PART COVER BRAKE

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