JPS534473A - Silicon semiconductor device - Google Patents
Silicon semiconductor deviceInfo
- Publication number
- JPS534473A JPS534473A JP7777376A JP7777376A JPS534473A JP S534473 A JPS534473 A JP S534473A JP 7777376 A JP7777376 A JP 7777376A JP 7777376 A JP7777376 A JP 7777376A JP S534473 A JPS534473 A JP S534473A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- silicon semiconductor
- plane
- azimuth
- suppress
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To select the azimuth of crystal planes as specified concerning Si single crystals with(111) plane as their main plane and suppress the production of plane defects at the time of thermal oxidation.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7777376A JPS534473A (en) | 1976-07-02 | 1976-07-02 | Silicon semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7777376A JPS534473A (en) | 1976-07-02 | 1976-07-02 | Silicon semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS534473A true JPS534473A (en) | 1978-01-17 |
Family
ID=13643263
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7777376A Pending JPS534473A (en) | 1976-07-02 | 1976-07-02 | Silicon semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS534473A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02159023A (en) * | 1988-12-13 | 1990-06-19 | Toshiba Corp | Manufacture of semiconductor device |
-
1976
- 1976-07-02 JP JP7777376A patent/JPS534473A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02159023A (en) * | 1988-12-13 | 1990-06-19 | Toshiba Corp | Manufacture of semiconductor device |
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