JPS534473A - Silicon semiconductor device - Google Patents

Silicon semiconductor device

Info

Publication number
JPS534473A
JPS534473A JP7777376A JP7777376A JPS534473A JP S534473 A JPS534473 A JP S534473A JP 7777376 A JP7777376 A JP 7777376A JP 7777376 A JP7777376 A JP 7777376A JP S534473 A JPS534473 A JP S534473A
Authority
JP
Japan
Prior art keywords
semiconductor device
silicon semiconductor
plane
azimuth
suppress
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7777376A
Other languages
Japanese (ja)
Inventor
Teruo Kato
Yoshimitsu Sugita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7777376A priority Critical patent/JPS534473A/en
Publication of JPS534473A publication Critical patent/JPS534473A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To select the azimuth of crystal planes as specified concerning Si single crystals with(111) plane as their main plane and suppress the production of plane defects at the time of thermal oxidation.
COPYRIGHT: (C)1978,JPO&Japio
JP7777376A 1976-07-02 1976-07-02 Silicon semiconductor device Pending JPS534473A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7777376A JPS534473A (en) 1976-07-02 1976-07-02 Silicon semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7777376A JPS534473A (en) 1976-07-02 1976-07-02 Silicon semiconductor device

Publications (1)

Publication Number Publication Date
JPS534473A true JPS534473A (en) 1978-01-17

Family

ID=13643263

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7777376A Pending JPS534473A (en) 1976-07-02 1976-07-02 Silicon semiconductor device

Country Status (1)

Country Link
JP (1) JPS534473A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02159023A (en) * 1988-12-13 1990-06-19 Toshiba Corp Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02159023A (en) * 1988-12-13 1990-06-19 Toshiba Corp Manufacture of semiconductor device

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