JPS5333571A - Semiconductor wafer and its production - Google Patents

Semiconductor wafer and its production

Info

Publication number
JPS5333571A
JPS5333571A JP10816976A JP10816976A JPS5333571A JP S5333571 A JPS5333571 A JP S5333571A JP 10816976 A JP10816976 A JP 10816976A JP 10816976 A JP10816976 A JP 10816976A JP S5333571 A JPS5333571 A JP S5333571A
Authority
JP
Japan
Prior art keywords
production
semiconductor wafer
swirls
expose
make
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10816976A
Other languages
Japanese (ja)
Inventor
Junichi Aoyama
Takanori Hayafuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP10816976A priority Critical patent/JPS5333571A/en
Publication of JPS5333571A publication Critical patent/JPS5333571A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To make a semiconductor device of good characteristics with the wafer made by cutting semiconductor crystal so as not to let swirls expose on the surface.
COPYRIGHT: (C)1978,JPO&Japio
JP10816976A 1976-09-09 1976-09-09 Semiconductor wafer and its production Pending JPS5333571A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10816976A JPS5333571A (en) 1976-09-09 1976-09-09 Semiconductor wafer and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10816976A JPS5333571A (en) 1976-09-09 1976-09-09 Semiconductor wafer and its production

Publications (1)

Publication Number Publication Date
JPS5333571A true JPS5333571A (en) 1978-03-29

Family

ID=14477721

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10816976A Pending JPS5333571A (en) 1976-09-09 1976-09-09 Semiconductor wafer and its production

Country Status (1)

Country Link
JP (1) JPS5333571A (en)

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