JPS5328374A - Wafer production - Google Patents

Wafer production

Info

Publication number
JPS5328374A
JPS5328374A JP10267076A JP10267076A JPS5328374A JP S5328374 A JPS5328374 A JP S5328374A JP 10267076 A JP10267076 A JP 10267076A JP 10267076 A JP10267076 A JP 10267076A JP S5328374 A JPS5328374 A JP S5328374A
Authority
JP
Japan
Prior art keywords
wafer production
single crystal
wafer
warpage
polycrystalline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10267076A
Other languages
Japanese (ja)
Inventor
Shinya Iida
Hideo Komatsu
Tatsumi Mizutani
Mitsuru Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10267076A priority Critical patent/JPS5328374A/en
Publication of JPS5328374A publication Critical patent/JPS5328374A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To reduce the warpage of wafers by growing single crystal or polycrystalline Si also only the back surface of a sapphire single crystal wafer.
COPYRIGHT: (C)1978,JPO&Japio
JP10267076A 1976-08-30 1976-08-30 Wafer production Pending JPS5328374A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10267076A JPS5328374A (en) 1976-08-30 1976-08-30 Wafer production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10267076A JPS5328374A (en) 1976-08-30 1976-08-30 Wafer production

Publications (1)

Publication Number Publication Date
JPS5328374A true JPS5328374A (en) 1978-03-16

Family

ID=14333656

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10267076A Pending JPS5328374A (en) 1976-08-30 1976-08-30 Wafer production

Country Status (1)

Country Link
JP (1) JPS5328374A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5585665A (en) * 1978-12-21 1980-06-27 Paloma Ind Ltd Coating method for iron or cast iron product with nickel and chromium
US7198671B2 (en) * 2001-07-11 2007-04-03 Matsushita Electric Industrial Co., Ltd. Layered substrates for epitaxial processing, and device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5585665A (en) * 1978-12-21 1980-06-27 Paloma Ind Ltd Coating method for iron or cast iron product with nickel and chromium
US7198671B2 (en) * 2001-07-11 2007-04-03 Matsushita Electric Industrial Co., Ltd. Layered substrates for epitaxial processing, and device

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