JPS5328374A - Wafer production - Google Patents
Wafer productionInfo
- Publication number
- JPS5328374A JPS5328374A JP10267076A JP10267076A JPS5328374A JP S5328374 A JPS5328374 A JP S5328374A JP 10267076 A JP10267076 A JP 10267076A JP 10267076 A JP10267076 A JP 10267076A JP S5328374 A JPS5328374 A JP S5328374A
- Authority
- JP
- Japan
- Prior art keywords
- wafer production
- single crystal
- wafer
- warpage
- polycrystalline
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To reduce the warpage of wafers by growing single crystal or polycrystalline Si also only the back surface of a sapphire single crystal wafer.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10267076A JPS5328374A (en) | 1976-08-30 | 1976-08-30 | Wafer production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10267076A JPS5328374A (en) | 1976-08-30 | 1976-08-30 | Wafer production |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5328374A true JPS5328374A (en) | 1978-03-16 |
Family
ID=14333656
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10267076A Pending JPS5328374A (en) | 1976-08-30 | 1976-08-30 | Wafer production |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5328374A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5585665A (en) * | 1978-12-21 | 1980-06-27 | Paloma Ind Ltd | Coating method for iron or cast iron product with nickel and chromium |
US7198671B2 (en) * | 2001-07-11 | 2007-04-03 | Matsushita Electric Industrial Co., Ltd. | Layered substrates for epitaxial processing, and device |
-
1976
- 1976-08-30 JP JP10267076A patent/JPS5328374A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5585665A (en) * | 1978-12-21 | 1980-06-27 | Paloma Ind Ltd | Coating method for iron or cast iron product with nickel and chromium |
US7198671B2 (en) * | 2001-07-11 | 2007-04-03 | Matsushita Electric Industrial Co., Ltd. | Layered substrates for epitaxial processing, and device |
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