JPH0444217Y2 - - Google Patents

Info

Publication number: JPH0444217Y2
Authority: JP; Japan
Prior art keywords: workpiece; spinner; solvent; coating liquid; guide
Prior art date: 1985-10-07
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP1985153309U

Other languages

English (en)

Japanese (ja)

Other versions

JPS6262869U (zh

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1985-10-07

Filing date

1985-10-07

Publication date

1992-10-19

1985-10-07 Application filed filed Critical

1985-10-07 Priority to JP1985153309U priority Critical patent/JPH0444217Y2/ja

1987-04-18 Publication of JPS6262869U publication Critical patent/JPS6262869U/ja

1992-10-19 Application granted granted Critical

1992-10-19 Publication of JPH0444217Y2 publication Critical patent/JPH0444217Y2/ja

Status Expired legal-status Critical Current

Links

239000011248 coating agent Substances 0.000 claims description 39
238000000576 coating method Methods 0.000 claims description 39
239000007788 liquid Substances 0.000 claims description 30
239000002904 solvent Substances 0.000 claims description 30
239000007789 gas Substances 0.000 description 5
239000003595 mist Substances 0.000 description 5
229910052787 antimony Inorganic materials 0.000 description 2
WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 2
230000000694 effects Effects 0.000 description 2
239000011261 inert gas Substances 0.000 description 2
239000004065 semiconductor Substances 0.000 description 2
238000010521 absorption reaction Methods 0.000 description 1
230000015572 biosynthetic process Effects 0.000 description 1
239000000919 ceramic Substances 0.000 description 1
230000007547 defect Effects 0.000 description 1
238000009792 diffusion process Methods 0.000 description 1
239000011521 glass Substances 0.000 description 1
230000009931 harmful effect Effects 0.000 description 1
239000000463 material Substances 0.000 description 1
239000002184 metal Substances 0.000 description 1
238000000034 method Methods 0.000 description 1
229920002120 photoresistant polymer Polymers 0.000 description 1

Landscapes

Coating Apparatus (AREA)

JP1985153309U 1985-10-07 1985-10-07 Expired JPH0444217Y2 (zh)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP1985153309U JPH0444217Y2 (zh)	1985-10-07	1985-10-07

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP1985153309U JPH0444217Y2 (zh)	1985-10-07	1985-10-07

Publications (2)

Publication Number	Publication Date
JPS6262869U JPS6262869U (zh)	1987-04-18
JPH0444217Y2 true JPH0444217Y2 (zh)	1992-10-19

Family

ID=31072075

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP1985153309U Expired JPH0444217Y2 (zh)	1985-10-07	1985-10-07

Country Status (1)

Country	Link
JP (1)	JPH0444217Y2 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS636843A (ja) *	1986-06-26	1988-01-12	Dainippon Screen Mfg Co Ltd	基板現像処理方法
JP2767308B2 (ja) *	1990-01-25	1998-06-18	富士写真フイルム株式会社	光情報記録媒体の製造方法
JP5029486B2 (ja)	2008-05-13	2012-09-19	東京エレクトロン株式会社	塗布装置、塗布方法及び記憶媒体

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS57201564A (en) *	1981-06-01	1982-12-10	Dainippon Printing Co Ltd	Coating method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6074775U (ja) *	1984-09-13	1985-05-25	大日本スクリーン製造株式会社	回転式表面処理装置

1985
- 1985-10-07 JP JP1985153309U patent/JPH0444217Y2/ja not_active Expired

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS57201564A (en) *	1981-06-01	1982-12-10	Dainippon Printing Co Ltd	Coating method

Also Published As

Publication number	Publication date
JPS6262869U (zh)	1987-04-18

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