JP6998439B2 - 分子真空ポンプ - Google Patents

分子真空ポンプ Download PDF

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Publication number
JP6998439B2
JP6998439B2 JP2020178180A JP2020178180A JP6998439B2 JP 6998439 B2 JP6998439 B2 JP 6998439B2 JP 2020178180 A JP2020178180 A JP 2020178180A JP 2020178180 A JP2020178180 A JP 2020178180A JP 6998439 B2 JP6998439 B2 JP 6998439B2
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Japan
Prior art keywords
pump
holbeck
intermediate port
rotor
blocking element
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JP2020178180A
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English (en)
Japanese (ja)
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JP2021116806A (ja
Inventor
ヤン・ホフマン
フロリアン・バーダー
マクシミリアン・ビルケンフェルト
Original Assignee
プファイファー・ヴァキューム・テクノロジー・アクチエンゲゼルシャフト
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Publication of JP2021116806A publication Critical patent/JP2021116806A/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2020178180A 2020-01-27 2020-10-23 分子真空ポンプ Active JP6998439B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP20153779 2020-01-27
EP20153779.2A EP3693610B1 (fr) 2020-01-27 2020-01-27 Pompe à vide moléculaire

Publications (2)

Publication Number Publication Date
JP2021116806A JP2021116806A (ja) 2021-08-10
JP6998439B2 true JP6998439B2 (ja) 2022-01-18

Family

ID=69326364

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2020178180A Active JP6998439B2 (ja) 2020-01-27 2020-10-23 分子真空ポンプ
JP2021009273A Active JP7252990B2 (ja) 2020-01-27 2021-01-25 分子真空ポンプ及び分子真空ポンプの排気速度に影響を及ぼす方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2021009273A Active JP7252990B2 (ja) 2020-01-27 2021-01-25 分子真空ポンプ及び分子真空ポンプの排気速度に影響を及ぼす方法

Country Status (2)

Country Link
EP (2) EP3693610B1 (fr)
JP (2) JP6998439B2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3693610B1 (fr) * 2020-01-27 2021-12-22 Pfeiffer Vacuum Technology AG Pompe à vide moléculaire

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003129990A (ja) 2001-10-15 2003-05-08 Boc Group Plc:The 真空ポンプ
JP2011529542A (ja) 2008-07-31 2011-12-08 オーリコン レイボルド バキューム ゲーエムベーハー 真空ポンプ
JP2013508595A (ja) 2009-10-19 2013-03-07 エドワーズ リミテッド 真空ポンプ
DE202013010204U1 (de) 2013-11-11 2015-02-13 Oerlikon Leybold Vacuum Gmbh Multi-Inlet-Vakuumpumpe

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2657164B1 (fr) * 1990-01-16 1992-04-03 Cit Alcatel Installation de detection de fuite a pompe holweck a prise intermediaire.
DE4228313A1 (de) * 1992-08-26 1994-03-03 Leybold Ag Gegenstrom-Lecksucher mit Hochvakuumpumpe
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
JPH11211604A (ja) * 1998-01-22 1999-08-06 Osaka Vacuum Ltd ヘリウムリークデテクタ
DE60101898T2 (de) * 2001-03-15 2004-11-18 Varian S.P.A., Leini Turbinenpumpe mit einer Statorstufe integriert mit einem Distanzring
GB0424199D0 (en) 2004-11-01 2004-12-01 Boc Group Plc Vacuum pump
DE102007044945A1 (de) * 2007-09-20 2009-04-09 Pfeiffer Vacuum Gmbh Vakuumpumpe
CN102889219B (zh) 2011-07-18 2016-05-11 李晨 盘式分子泵
EP3085963B1 (fr) * 2015-04-20 2019-09-04 Pfeiffer Vacuum Gmbh Pompe à vide
EP3085964B1 (fr) * 2015-04-21 2019-12-11 Pfeiffer Vacuum Gmbh Production d'un composant de pompe à vide par fabrication additive métallique
EP3693610B1 (fr) * 2020-01-27 2021-12-22 Pfeiffer Vacuum Technology AG Pompe à vide moléculaire

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003129990A (ja) 2001-10-15 2003-05-08 Boc Group Plc:The 真空ポンプ
JP2011529542A (ja) 2008-07-31 2011-12-08 オーリコン レイボルド バキューム ゲーエムベーハー 真空ポンプ
JP2013508595A (ja) 2009-10-19 2013-03-07 エドワーズ リミテッド 真空ポンプ
DE202013010204U1 (de) 2013-11-11 2015-02-13 Oerlikon Leybold Vacuum Gmbh Multi-Inlet-Vakuumpumpe

Also Published As

Publication number Publication date
JP2021116806A (ja) 2021-08-10
EP3693610B1 (fr) 2021-12-22
EP3851680B1 (fr) 2023-09-13
JP2021116814A (ja) 2021-08-10
JP7252990B2 (ja) 2023-04-05
EP3851680A1 (fr) 2021-07-21
EP3693610A1 (fr) 2020-08-12

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