EP3851680A1 - Pompe à vide moléculaire et procédé d'influence de la capacité d'aspiration d'une telle pompe - Google Patents

Pompe à vide moléculaire et procédé d'influence de la capacité d'aspiration d'une telle pompe Download PDF

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Publication number
EP3851680A1
EP3851680A1 EP20217527.9A EP20217527A EP3851680A1 EP 3851680 A1 EP3851680 A1 EP 3851680A1 EP 20217527 A EP20217527 A EP 20217527A EP 3851680 A1 EP3851680 A1 EP 3851680A1
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EP
European Patent Office
Prior art keywords
pumping
vacuum pump
pump
blocking element
inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20217527.9A
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German (de)
English (en)
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EP3851680B1 (fr
Inventor
Max Birkenfeld
Jan Hofmann
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Pfeiffer Vacuum Technology AG
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Pfeiffer Vacuum Technology AG
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Priority to JP2021009273A priority Critical patent/JP7252990B2/ja
Publication of EP3851680A1 publication Critical patent/EP3851680A1/fr
Application granted granted Critical
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Definitions

  • the present invention relates to a molecular vacuum pump, a method for influencing the pumping speed of a molecular vacuum pump, a leak detection device with a molecular vacuum pump and the use of a molecular vacuum pump for searching for a leak in a vacuum system.
  • This object is achieved by a method according to claim 1.
  • This serves to influence the pumping speed, in particular an internal pumping speed, of a molecular vacuum pump, which comprises at least one molecular pumping stage, by means of which a gaseous medium can be conveyed along a flow path from an inlet to an outlet of the molecular vacuum pump, the pumping stage in one pumping direction and transversely to the pumping direction has a passage cross section.
  • the pumping speed is influenced at a first point in the flow path of the molecular vacuum pump, namely by providing a blocking element at a second point different from the first point in the flow path of the molecular vacuum pump, through which the passage cross-section is locally reduced.
  • One idea on which the invention is based consists in a targeted weakening of the pumping speed at the second point in order to specifically influence the pumping speed at another point, namely the first point.
  • the provision of the blocking element allows the pumping speed to be influenced in a targeted manner at the second point.
  • a blocking element has a particularly simple structure and can be manufactured inexpensively, so that the targeted influencing of the pumping speed at the second point can be achieved with particularly simple means.
  • the pumping speed at the second point is not completely arbitrary due to the blocking element at the first point, i. H. is not limitlessly adjustable. Rather, the pumping speed at the second point is typically limited by various conditions, in particular the other structure of the molecular vacuum pump.
  • the pumping speed at the second point can only be reduced by the blocking element at the first point. Even if a generally high pumping speed is often sought in many vacuum applications, in special vacuum applications it may also be necessary or advantageous to reduce the pumping speed at the second point.
  • the method according to the invention can also increase a backflow of the gaseous medium as a whole or for individual gas constituents.
  • the blocking element By locally reducing the passage cross-section, the blocking element causes, in particular, a local reduction in the conductance at the second point.
  • the blocking element is a static element and / or is arranged on a stator of the pump, since, in particular, due to dynamic forces on the rotor, its structural change would generally be significantly more complex.
  • the invention can thus be implemented by modifying an existing pump without changing its rotor to have to.
  • a blocking element can also be arranged on the rotor, for example.
  • the first point at which the pumping speed should be influenced can, for example, be an inlet area of the molecular vacuum pump.
  • the first point can be different from an inlet region of a first or single inlet of the molecular vacuum pump in the pumping direction.
  • the first point in particular is not located on a so-called high vacuum inlet.
  • the first point can be arranged at an intermediate inlet, for example.
  • the first point can also be provided outside of all inlet areas, for example.
  • the first point can in particular lie within a housing of the molecular vacuum pump and / or within an envelope of pump-active elements.
  • An effective pumping speed there is referred to as internal pumping speed.
  • the first point can in particular be provided in an area which is arranged within the housing and is directly connected to an inlet - that is, without an interposed pump-active element.
  • One can also speak of the internal pumping speed at the inlet, which is to be influenced. Again, this applies in particular to an intermediate entry.
  • the first point can in particular be provided in an axial area of an inlet or intermediate inlet or an internal pumping speed in the axial area of the inlet can be influenced.
  • an intermediate inlet can be designed, for example, as a recess in the housing of a turbo-molecular pump stage. This recess has a conductance which influences the pumping speed of the intermediate inlet itself. In the axial area of the intermediate inlet within the housing, however, this conductance has no influence. This is where the internal pumping speed prevails.
  • the aim here can in particular be to influence the internal pumping speed at the relevant inlet. However, influencing the internal pumping speed at the inlet can in principle also affect the pumping speed of the inlet itself.
  • the blocking element can preferably be provided within a pump stage. This means that the pumping stage has an active pumping element both upstream and downstream of the blocking element.
  • the blocking element is in particular not arranged at the end of the pumping stage in question.
  • first positions can also be provided, i. H. the pumping speed at several points can be influenced.
  • a plurality of blocking elements can also be provided at a respective second point, for example in order to influence the suction capacity at a first point or at a plurality of first points.
  • the second point can be spaced apart from the first point.
  • the second location can preferably be arranged downstream of the first location. Upstream of the same or the first point, the blocking element influences the pumping speed in a simple and advantageous manner.
  • the, in particular internal, pumping speed at the first point is influenced in such a way that there a difference and / or a ratio between a partial pumping speed, in particular internal partial pumping speed, for a first gas and a partial pumping speed, in particular internal partial pumping speed, for a second gas.
  • the blocking element can be used to influence the partial pumping speed for different gases at the first point in different ways.
  • the partial pumping speeds can thus be influenced in a targeted manner in such a way that the difference or the ratio between two partial pumping speeds for different gases is as large as possible.
  • the quantitative ratio of the first gas flowing back against the pumping direction to the second gas flowing back changes.
  • a type of selection can be implemented. The greater the difference, the stronger the selection.
  • this idea and thus the invention also relates to a method for increasing the difference and / or a ratio between a partial pumping speed for a first gas and a partial pumping speed for a second gas, comprising a method according to the type described above.
  • the difference can be effectively increased in particular if the first and the second gas have a different molar mass.
  • the first gas can preferably have a molar mass of more than 10 g / mol, in particular of more than 20 g / mol.
  • the first gas can be, for example, nitrogen, also referred to below as N2. Nitrogen has a molar mass of approx. 28 g / mol.
  • the first gas can also be air, for example.
  • the second gas can preferably have a molar mass of less than 10 g / mol, in particular less than 5 g / mol.
  • the second gas can be, for example, helium, hereinafter also referred to as He. Helium has a molar mass of approx. 4 g / mol.
  • the second gas can also be, for example be about hydrogen. Hydrogen has a molar mass of approx. 2 g / mol.
  • the second gas can, for example, be a test gas
  • the increase in the difference in the signed sense includes that the partial pumping speed for a first gas is as high as possible greater than the partial pumping speed for a second gas. It is therefore also the aim that the difference does not assume a negative sign.
  • partial pumping speeds for three or more gases can also be advantageously influenced by the blocking element according to the invention in terms of their difference and / or in relation to one another.
  • the first point is arranged within a housing of the molecular vacuum pump, in an area directly connected to an inlet and / or in an axial area of an inlet.
  • the inlet can preferably be an intermediate inlet.
  • the second point or the blocking element is arranged outside an inlet area, in particular outside all inlet areas.
  • the second point or the blocking element is provided within a housing of the molecular vacuum pump.
  • the second point or the blocking element can be provided within a pump stage. This makes use of the fact that the blocking element in its immediate vicinity can bring about a very drastic local reduction in the pumping speed. If the second digit in a Is arranged inlet area, this can lead to the fact that the pumping speed at the relevant inlet is greatly reduced, which is often not desirable. If, on the other hand, the blocking element is arranged at a certain distance from the inlet, the pumping speed at this inlet can be influenced without a drastic reduction.
  • the blocking element is designed in such a way that a partial pumping speed for a first gas and a partial pumping speed for a second gas at the second point are at least essentially the same.
  • This can be implemented in a simple manner, for example, in that the blocking element has an active pumping structure and / or at least one active pumping feature. It has been shown in simulations that the difference in the partial pumping speed at the first point can be increased particularly strongly by this development.
  • a deviation of at most 2 liters per second (L / s), preferably at most 1 L / s, is to be understood as being essentially the same.
  • the invention also relates to a method for designing a molecular vacuum pump comprising a method according to the type described above.
  • the invention also relates to a method for producing a molecular vacuum pump comprising a method according to the type described above.
  • the object of the invention is also achieved by a molecular vacuum pump according to the independent claim directed thereto.
  • a molecular vacuum pump with at least one molecular pumping stage, by means of which a gaseous medium can be conveyed along a flow path from an inlet to an outlet of the molecular vacuum pump, the pumping stage being a Has a passage cross section in the pumping direction and transversely to the pumping direction, wherein an, in particular static, blocking element is provided, by means of which the passage cross section is locally reduced.
  • the molecular vacuum pump comprises an intermediate inlet which is arranged within the pumping stage.
  • an intermediate inlet can also be arranged between two pump stages.
  • a molecular vacuum pump with an intermediate inlet is also known as a split-flow pump. In such a case, the advantages according to the invention can be used particularly effectively.
  • the blocking element is arranged in the pumping direction after an inlet, in particular after an intermediate inlet, preferably in a pumping stage which is arranged downstream of a first pumping stage in the pumping direction.
  • the blocking element is arranged outside an inlet area. This means that at least one pump-active element is arranged between the relevant inlet and the blocking element in the pumping direction.
  • the blocking element can thus in particular be spaced apart from an inlet area.
  • the blocking element can preferably be arranged outside of each inlet area or not in an inlet area and / or be spaced apart from all inlets.
  • the blocking element can also be arranged outside one or each outlet area.
  • a blocking element in an inlet area, in particular immediately in front of an inlet area, of a molecular vacuum pump can serve to guide the inflowing gaseous medium and a backflow against the pumping direction to reduce.
  • the blocking element is arranged outside the inlet area, the, in particular internal, pumping speed for different gases can be influenced differently at the inlet and in particular a difference and / or a ratio of a partial pumping speed for a first gas to a partial pumping speed for a second gas increase. This also influences the probability with which a given gas molecule flows back against the pumping direction, but not directly through a conductive function of the blocking element, but rather by influencing the pumping speed at a first point by the blocking element at a second point.
  • the blocking element therefore has a kind of remote effect with regard to the local suction capacity at other points in the flow path.
  • the proportions of the different gases in the return flow in particular change. This ultimately results in a selection of the different gases. It is true that the gases in question cannot be completely separated from one another in this way. Nevertheless, it can be advantageous for certain applications to change the proportions of the gases in the return flow - even if only slightly.
  • the blocking element can in particular be arranged within a pump stage, i.e. between two pump-active elements of the pump stage.
  • the blocking element can preferably be arranged in the pumping direction between two inlets or between an inlet and an outlet.
  • the blocking element is closed over an angular range with respect to an axis of rotation of a pump rotor, in particular over an angular range of more than 180 °, in particular more than 270 °.
  • the rest of the angular range can be completely open, for example.
  • the blocking element comprises a pump-active structure.
  • the blocking element can advantageously be closed over a certain angular range and have a pumping-active structure in the remaining angular range.
  • the partial suction capacities for different gases in the blocking element ie at the second point, can be dimensioned particularly similar, at best at least substantially the same. This can have a particularly strong influence on the pumping speed, in particular an increase in the difference or the ratio of two partial pumping speeds for different gases, particularly at another, that is to say the first, point.
  • the pump-active structure can in particular have a number, in particular an effective number, pump-active features and / or passages between pump-active features, the number preferably being at least 1 and / or at most 10. This area has proven to be particularly advantageous with regard to the greatest possible difference between the partial pumping speed at the first point. A number of at most 4 has also proven to be particularly advantageous.
  • the molecular vacuum pump can preferably comprise at least one of or any combination of turbo molecular pump stage, Holweck pump stage and / or Siegbahn pump stage.
  • the pump stages can in particular be connected in series.
  • the pump stages in particular have rotors or rotor sections which are arranged on a common rotor shaft or are preferably driven by a common rotor shaft.
  • the blocking element can be arranged, for example, on or within a turbo-molecular pumping stage, a Holweck pumping stage or a Siegbahn pumping stage. It A plurality of blocking elements can also be provided, for example in different or similar pump stages.
  • an active pumping element is formed by a turbo rotor disk or a turbostator disk.
  • a pumping active feature is formed by a turbo rotor vane or a turbostator vane.
  • an active pumping element is formed by an axial section in relation to an axis of rotation of a pump rotor, in which axial section Holweck webs are distributed over the, in particular at least substantially entire, circumference.
  • An active pumping feature is formed by a Holweck web section.
  • an active pumping element is formed by a radial section in relation to an axis of rotation of a pump rotor, in which radial section Siegbahn webs are distributed over the, in particular at least substantially entire, circumference.
  • a pumping-active feature is formed by a Siegbahnsteg section.
  • the blocking element can, for example, also be arranged in one of several pump stages, in particular in order to influence the pumping speed at a point, in particular a point within the housing connected directly to an inlet, which is arranged in or on another pump stage. It can therefore be provided, for example, that the molecular vacuum pump has a Holweck pump stage within which a blocking element is arranged, the pumping speed being influenced at an intermediate inlet which is arranged within a turbomolecular pump stage upstream of the Holweck pump stage or between two turbomolecular pump stages upstream of the Holweck pump stage.
  • the blocking element is arranged between two pump stages, in particular between a Holweck pump stage and a turbo-molecular pump stage. This can also serve to influence the pumping speed at an intermediate inlet which is arranged within a turbomolecular pump stage connected upstream of the Holweck pump stage or between two turbomolecular pump stages connected upstream of the Holweck pump stage.
  • the blocking element can also be provided, for example, between two inlets, in particular between two intermediate inlets.
  • the blocking element can be arranged in a pumping stage, before and after which an inlet or intermediate inlet is provided.
  • a blocking element between two inlets can ensure, for example, that the compression of the pump stage between the inlets changes or is influenced. This influences the pressure ratio between the relevant inlets.
  • the blocking element can be produced from sheet metal, in particular if the blocking element is arranged in or on a turbo-molecular pumping stage.
  • the blocking element can for example comprise pumping-active features, for example turbostator blades, which are produced by stamping and / or bending.
  • the blocking element can be designed, for example, as a transverse wall which blocks one or more Holweck grooves or Siegbahn grooves.
  • several or all Holweck or Siegbahn grooves of a pumping stage can be closed at an axial or radial position by a web perpendicular to the pumping direction, with only one groove or only individual grooves running normally - ie open.
  • the blocking element can in principle be designed, for example, as a diaphragm.
  • the invention also relates to a leak detector comprising a molecular vacuum pump of the type described above and a detection device, in particular for a test gas.
  • the advantages according to the invention can be used particularly effectively in a leak detector.
  • the leak detector can preferably be designed as a countercurrent leak detector.
  • Helium or hydrogen can preferably be used as test gas - especially in the case of hydrogen, e.g. in the form of a gas mixture that contains the test gas or hydrogen.
  • the detection device can, for example, be designed as a mass spectrometer.
  • the molecular vacuum pump of the leak detector comprises a first inlet and an intermediate inlet, the first inlet being connected to the detection device and the intermediate inlet being connected or connectable to a vacuum system to be examined for leaks.
  • the blocking element can preferably be provided downstream of the intermediate inlet, wherein advantageously at least one pump-active element can be provided in the pumping direction between the intermediate inlet and the blocking element.
  • the blocking element is therefore in particular arranged outside the area of the intermediate inlet and / or at a distance from it.
  • the invention also relates to the use of a molecular vacuum pump of the type described above for searching for a leak in a vacuum system.
  • a passage cross section is the open area within a pumping stage in cross section measured at a selected point along the pumping direction or the flow path.
  • the passage cross section is therefore in particular through the Sum of the openings formed in the cross section in question, through which the gas particles to be conveyed can pass.
  • the passage cross section relates in particular to a cross section at a selected point along the rotor axis, the sectional plane running in particular perpendicular to the rotor axis.
  • the passage cross-section of the pumping stage is defined in particular by one or more stator elements, in the case of a turbo-molecular pumping stage in particular stator disks, namely in particular one or more stator elements that are upstream or downstream of the blocking element in the pumping direction.
  • the pump stage can basically have a variable passage cross section along its axial extent. The local reduction through the blocking element is decisive.
  • the passage cross-section is merely reduced by the blocking element, but not completely blocked.
  • the blocking element can therefore cover part of the passage cross section, for example. It is therefore still possible to convey gas through the pumping stage past the blocking element and, for example, to the next pumping stage.
  • the passage cross section is thus formed in particular by the open area of a cross section through a rotor of the pump in the area of the pumping stage.
  • a passage cross section of a turbostator disk is limited, for example radially outward, by a radially outer boundary of the turbostator blades.
  • the passage cross-section is limited by a radially inner limitation of the turbostator blades, namely by a so-called blade base.
  • the passage cross-section has open sections separated by the blades in the circumferential direction. The same applies to a turbo rotor or a turbo rotor disk.
  • the passage cross-section is, for example, outwards or bounded on the inside by a respective base of several Holwecknuten.
  • the passage cross-section is limited in particular by a Holweck rotor.
  • the passage cross-section has open sections separated in the circumferential direction by Holweck webs, namely the Holweck grooves.
  • the passage cross-section in a Holweck pumping stage corresponds in particular essentially to the sum of the cross-sections of the Holweck grooves. The same applies to Siegbahn pump stages in the radial direction.
  • the passage cross-section through the blocking element can be reduced by at least 25%, in particular at least 50%, more preferably at least 75%, in particular based on the cross-sectional area of the passage cross-section of the pumping stage before and / or after the blocking element.
  • An intermediate inlet of a multistage molecular vacuum pump is also referred to, for example, as an "interstage port” and a molecular vacuum pump with such an intermediate inlet is also referred to as a "split-flow pump”.
  • the passage cross section through the blocking element can be locally asymmetrical, in particular with respect to a rotor axis of the pump stage.
  • the blocking element can be arranged such that on a side of a rotor shaft of the pump stage facing the intermediate inlet the blocking element blocks a larger proportion of the passage cross section than on a side of the rotor facing away from the intermediate inlet, or vice versa.
  • the blocking element can be arranged on a side of the rotor shaft facing or facing away from the intermediate inlet.
  • the blocking element can only be arranged in a partial angular region with respect to the rotor axis, which can in particular be assigned or not assigned to the intermediate inlet.
  • the blocking element can, for example, in the passage cross section block an area radially between the rotor axis and the intermediate inlet.
  • the blocking element is impermeable at least in a circumferential section assigned or not assigned to the intermediate inlet, in particular essentially only in this circumferential section.
  • An area radially opposite the intermediate inlet or an area radially facing the intermediate inlet can in particular be designed to be permeable and / or pump-active.
  • the stator can in particular be designed to be permeable and generally like a “normal” stator.
  • the geometry of the blocking element can, for example, be changeable. Depending on the selected geometry, a different performance in terms of pumping speed can be set.
  • the blocking element is designed as a wall and / or as a continuous surface element and / or extends transversely to the pumping direction.
  • the blocking element can in particular extend perpendicularly and / or transversely to the pumping direction and / or to the rotor axis.
  • a surface element or a wall can be arranged, for example, parallel to a delimitation of the intermediate inlet and / or obliquely or perpendicularly with respect to a rotor axis.
  • the blocking element extends in the radial direction only over part of the passage cross section of the pumping stage, in particular with respect to the adjacent, in particular upstream and / or downstream passage cross section before or after the local reduction.
  • the blocking element can cover and / or cover a radially inner part do not cover a radially outer part.
  • a combination with a blocking element or a section of the same blocking element in a different circumferential area extending over the entire radial width is also possible.
  • the blocking element is designed as part of a turbostator disk.
  • the blocking element can, for example, be directly connected to a stator disk, in particular a partial stator disk, and / or be axially assigned to such a disk.
  • Axially assigned means that the blocking element is at least partially arranged in the same axial area as the stator disk or partial stator disk.
  • the blocking element can replace a section of the turbostator disk facing or facing away from the intermediate inlet.
  • stator blades can be provided, for example, on one side of the rotor shaft, in particular facing or facing the intermediate inlet, while on another side of the rotor shaft facing the intermediate inlet, the blocking element or a closed area thereof and in particular none Stator blades are provided.
  • the blocking element can be designed as a sheet metal.
  • Turbostator disks are often also designed as sheet metal parts and the blocking element can generally be produced or designed in a manner similar to a turbostator disk, but with no separate blades being provided in a closed area of the blocking element in particular.
  • the blocking element defines a, in particular radially inner, blade base for one or more stator blades.
  • the blade base diameter can be larger than the blade base diameter of an upstream or downstream rotor and / or stator disk, in particular larger by at least 20%.
  • the blocking element is preferably designed to be at least essentially planar and at least with a closed area of the blocking element.
  • the blocking element can, for example, also be shell-shaped and / or funnel-shaped, in particular part-ring, part-shell and / or part-funnel-shaped, the term "partial” referring in particular to an angular range around the rotor shaft.
  • the pump can have, for example, an active pumping rotor section upstream of the intermediate inlet in relation to the pumping direction and a pumping active rotor section downstream in relation to the pumping direction, wherein in particular both rotor sections can be connected to the same rotor shaft and / or connected in series.
  • the molecular vacuum pump can, for example, have only one rotor shaft, wherein in particular all pump stages and pump stage sections can be driven by the rotor shaft and / or can be connected in series.
  • the intermediate inlet can preferably open into an axial region, in particular in a pump housing, via which the pumping stage or pumping stage section upstream of the intermediate inlet is connected in series with a pumping stage or pumping stage section downstream of the intermediate inlet.
  • This axial area can be, for example, an intermediate stage area or an axial area within a pump stage, for example an axial area of a turbo rotor disk.
  • the conveyance of gas can take place in particular over the axial region into which the intermediate inlet opens and / or over the intermediate stage region.
  • the turbo molecular pump 111 shown comprises a pump inlet 115 which is surrounded by an inlet flange 113 and to which a recipient (not shown) can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms according to FIG Fig. 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121 on which an electronics housing 123 is arranged laterally. Electrical and / or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump (see also FIG Fig. 3 ).
  • a plurality of connections 127 for accessories are provided on the electronics housing 123.
  • a data interface 129 for example in accordance with the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • turbo-molecular pumps that do not have an electronic housing attached in this way, but are connected to external drive electronics.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbo molecular pump 111, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as a purging gas connection via which purging gas is used to protect the electric motor 125 (see e.g. Fig. 3 ) can be admitted into the engine compartment 137, in which the electric motor 125 in the vacuum pump 111 is accommodated, before the gas conveyed by the pump.
  • Two coolant connections 139 are also arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant, which can be passed into the vacuum pump for cooling purposes.
  • Other existing turbo-molecular vacuum pumps (not shown) are operated exclusively with air cooling.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the lower side 141.
  • the vacuum pump 111 can, however, also be attached to a recipient via the inlet flange 113 and can thus be operated in a suspended manner, as it were.
  • the vacuum pump 111 can be designed in such a way that it can also be put into operation when it is oriented in a different way than in FIG Fig. 1 is shown.
  • Embodiments of the vacuum pump can also be implemented in which the underside 141 cannot be arranged facing downwards, but facing to the side or facing upwards. In principle, any angle is possible.
  • various screws 143 are also arranged by means of which components of the vacuum pump not specified here are attached to one another.
  • a bearing cap 145 is attached to the underside 141.
  • Fastening bores 147 are also arranged on the underside 141, via which the pump 111 can be fastened to a support surface, for example. This is not possible with other existing turbo molecular vacuum pumps (not shown), which are in particular larger than the pump shown here.
  • a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pump stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 rotatable about an axis of rotation 151.
  • the turbomolecular pump 111 comprises several turbomolecular pump stages connected in series with one another for effective pumping, with several radial rotor disks 155 fastened to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119 a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular pump stage.
  • the stator disks 157 are held at a desired axial distance from one another by spacer rings 159.
  • the vacuum pump also comprises Holweck pump stages which are arranged one inside the other in the radial direction and are connected in series with one another for effective pumping. There are other turbo-molecular vacuum pumps (not shown) that do not have Holweck pump stages.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylinder-jacket-shaped Holweck rotor sleeves 163, 165 which are attached to the rotor hub 161 and carried by the latter, which are oriented coaxially to the axis of rotation 151 and nested in one another in the radial direction. Furthermore, two cylinder jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and, viewed in the radial direction, are nested inside one another.
  • the active pumping surfaces of the Holweck pump stages are formed by the jacket surfaces, that is to say by the radial inner and / or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163 with the formation of a radial Holweck gap 171 and with this forms the first Holweck pump stage following the turbomolecular pumps.
  • the radial inner surface of the outer Holweck rotor sleeve 163 faces the radial outer surface of the inner Holweck stator sleeve 169 with the formation of a radial Holweck gap 173 and forms with this a second Holweck pumping stage.
  • the radial inner surface of the inner Holweck stator sleeve 169 lies opposite the radial outer surface of the inner Holweck rotor sleeve 165 with the formation of a radial Holweck gap 175 and with this forms the third Holweck pumping stage.
  • a radially running channel can be provided, via which the radially outer Holweck gap 171 is connected to the central Holweck gap 173.
  • a radially running channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175.
  • a connecting channel 179 to the outlet 117 can also be provided at the lower end of the radially inner Holweck rotor sleeve 165.
  • the aforementioned pump-active surfaces of the Holweck stator sleeves 167, 169 each have a plurality of Holweck grooves running helically around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas for operating the Drive vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 is provided in the area of the pump outlet 117 and a permanent magnetic bearing 183 in the area of the pump inlet 115.
  • a conical injection molded nut 185 is provided on the rotor shaft 153 with an outer diameter that increases towards the roller bearing 181.
  • the injection-molded nut 185 is in sliding contact with at least one stripper of an operating medium reservoir.
  • an injection screw can be provided instead of an injection nut. Since different designs are thus possible, the term "spray tip" is also used in this context.
  • the operating medium reservoir comprises several absorbent disks 187 stacked on top of one another, which are impregnated with an operating medium for the roller bearing 181, for example with a lubricant.
  • the operating medium is transferred by capillary action from the operating medium reservoir via the scraper to the rotating injection nut 185 and, as a result of the centrifugal force, is conveyed along the injection nut 185 in the direction of the increasing outer diameter of the injection nut 185 to the roller bearing 181, where it eg fulfills a lubricating function.
  • the roller bearing 181 and the operating medium store are enclosed in the vacuum pump by a trough-shaped insert 189 and the bearing cover 145.
  • the permanent magnetic bearing 183 comprises a rotor-side bearing half 191 and a stator-side bearing half 193, each of which comprises a ring stack of several permanent magnetic rings 195, 197 stacked on top of one another in the axial direction.
  • the ring magnets 195, 197 are opposite one another with the formation of a radial bearing gap 199, the rotor-side ring magnets 195 being arranged radially on the outside and the stator-side ring magnets 197 being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 causes magnetic repulsive forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • the rotor-side ring magnets 195 are carried by a carrier section 201 of the rotor shaft 153 which surrounds the ring magnets 195 radially on the outside.
  • the stator-side ring magnets 197 are carried by a stator-side support section 203 which extends through the ring magnets 197 and is suspended from radial struts 205 of the housing 119.
  • the ring magnets 195 on the rotor side are fixed parallel to the axis of rotation 151 by a cover element 207 coupled to the carrier section 201.
  • the stator-side ring magnets 197 are parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 209 connected to the carrier section 203 connected fastening ring 211 set.
  • a plate spring 213 can also be provided between the fastening ring 211 and the ring magnet 197.
  • An emergency or retainer bearing 215 is provided within the magnetic bearing, which runs empty during normal operation of the vacuum pump 111 without contact and only comes into engagement with an excessive radial deflection of the rotor 149 relative to the stator to create a radial stop for the rotor 149 to form so that a collision of the rotor-side structures with the stator-side structures is prevented.
  • the backup bearing 215 is designed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and / or the stator, which has the effect that the backup bearing 215 is disengaged during normal pumping operation.
  • the radial deflection at which the backup bearing 215 engages is dimensioned large enough that the backup bearing 215 does not come into engagement during normal operation of the vacuum pump, and at the same time small enough that a collision of the rotor-side structures with the stator-side structures under all circumstances is prevented.
  • the vacuum pump 111 comprises the electric motor 125 for rotatingly driving the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 extending through the motor stator 217.
  • the motor stator 217 is fixed in the housing within the motor compartment 137 provided for the electric motor 125.
  • a sealing gas which is also referred to as a flushing gas and which can be air or nitrogen, for example, can enter the engine compartment 137 via the sealing gas connection 135.
  • the electric motor 125 can be protected from process gas, e.g. from corrosive components of the process gas, via the sealing gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, i.e. the vacuum pressure produced by the backing pump connected to the pump outlet 117 is at least approximately in the engine compartment 137.
  • a so-called and known labyrinth seal 223 can also be provided between the rotor hub 161 and a wall 221 delimiting the engine compartment 137, in particular to achieve better sealing of the motor compartment 217 from the Holweck pump stages located radially outside.
  • pumps and systems described below are shown in a highly schematic and simplified manner. For the purpose of practical implementation, they can advantageously be implemented with one or more features of the pump described above. Likewise, the above-described pump can advantageously be equipped with a blocking element, in particular instead of one of the stator disks shown.
  • FIG. 6 A plot of two partial pumping speeds for different gases within an exemplary molecular vacuum pump 250 is shown, which is shown in FIG Fig. 7 is shown.
  • the molecular vacuum pump 250 comprises a turbo pump stage 252 and a Holweck pump stage 254.
  • the ordinate of the plot in Fig. 6 is assigned to the pumping speed S in L / s.
  • the abscissa is assigned to a point i under consideration along the flow path of the molecular vacuum pump 250.
  • the turbo pumping stage 250 comprises 16 Slices, each having a "spot" in the sense of the application of the Fig. 6 represent.
  • the Holweck pump stage 254 as a whole represents a point in the sense of the application of the Fig. 6 All points i are arranged within the housing, not shown here, of the molecular vacuum pump 250.
  • the plot shows the course of the internal partial pumping speed for the different gases.
  • the numbering of the positions of the flow path takes place here against the pumping direction.
  • the turbo rotor disk at point 17 forms the end of the molecular vacuum pump 250 on the high vacuum side
  • the Holweck pump stage 254 at point 1 forms the end of the molecular vacuum pump 250 on the pressure side.
  • the pumping direction is therefore in Figures 6 and 7 from right to left.
  • Turbostator disks have even digit numbers, whereas turbo rotor disks have odd numbers, the latter not being listed separately for the sake of clarity. In Fig. 7 however, positions 1 and 17 are indicated to facilitate understanding.
  • the pumping speed S is at the high vacuum end of the molecular pump 250, on the right in Fig. 6 , quite large and takes up 250, in Fig. 6 to the left, down.
  • the pumping speed curves shown relate to the partial pumping speeds for helium and nitrogen. Correspondingly, the pumping speed curves are denoted by S N2 and S He . These pumping speed curves - like the pumping speed curves described below - were determined by simulation.
  • the molecular vacuum pump 250 comprises a first inlet 256 in the pumping direction, which opens at point 17 or at the turbo rotor disk on the high vacuum side.
  • the molecular vacuum pump 250 includes one Intermediate inlet 258, which opens at point 11 or at the corresponding turbo rotor disk.
  • FIGS. 8 and 9 show to the Figures 6 and 7 similar representations, why regarding the Figures 8 and 9 only special features are discussed.
  • the molecular vacuum pump 250 under consideration is basically like that of FIG Fig. 7 built up. In place 6, however, no ordinary turbostator disk is provided, but a static blocking element 262.
  • the blocking element 262 is both in Fig. 8 as well as in Fig. 9 indicated.
  • the blocking element 262 causes a local reduction in the passage cross-section of the molecular vacuum pump 250. This is achieved, for example, in that the blocking element 262 is designed as a closed disk in some areas and as an at least partially open disk in some areas, as shown in FIG Fig. 9 is indicated by a solid line on the one hand of the rotor shaft 264 and a dashed line on the other hand of the rotor shaft 264.
  • Fig. 8 As can be seen, the partial pumping speeds S N2 and S He at point 6 and at the blocking element 262 are greatly reduced. This corresponds to the expectations of the person skilled in the art, since the blocking element 262 locally reduces the passage cross section of the turbo pumping stage 252. It has also been shown that the pumping speeds S N2 and S He are thereby also influenced at other points along the flow path, in particular also at points that are spaced apart from the blocking element 262. This can be seen from a comparison of the Fig. 6 and 8th . It has also been shown that the partial pumping speeds S N2 and S He cannot be influenced in the same way but differently.
  • a blocking element 262 can be used for targeted influencing of a pumping speed at a point different from the location of the blocking element 262 and that in particular the different influence on partial pumping speeds for different gases can be used in order to avoid a difference and / or to specifically influence a ratio between the partial pumping speed.
  • the partial pumping speeds S N2; 11 and S He; 11 were influenced by the blocking element 262 in such a way that the difference 260 between these two partial pumping speeds compared to Fig. 6 or to the molecular vacuum pump 250 without blocking element according to Fig. 7 was enlarged.
  • the partial pumping speed for nitrogen was thus ultimately increased relative to the partial pumping speed for helium.
  • a blocking element 262 is shown.
  • the viewing direction of the observer is here parallel to the rotor shaft.
  • the blocking element 262 is designed as a disk which is designed to be closed over an angular range with respect to the rotor shaft.
  • the closed angular region 264 extends here over approximately 270 °.
  • the blocking element 262 is simply open.
  • the area 266 is thus a permeable area.
  • the blocking element 262 shown here forms a particularly simple embodiment.
  • the pumping speed curves according to Fig. 8 are based in particular on such a blocking element 262.
  • the blocking element 262 In its center, the blocking element 262 has an in Fig. 10 free central area 268, through which the rotor shaft extends in the assembled state.
  • the central region 268 therefore does not form an open passage cross-section. Such, however, is only formed by the angular range 266.
  • an open central area can, for example, also be larger than the rotor shaft so that a radial area between the blocking element and the rotor shaft is open or permeable. This affects the inner circumference of the blocking element. It goes without saying that this also applies correspondingly to its outer circumference, ie an open radial area can also be provided on the outer circumference.
  • a further embodiment of a blocking element 262 is shown in perspective.
  • the blocking element 262 of the Fig. 11 comprises a closed angular range 264, which is greater than 300 ° here.
  • the blocking element 262 is designed to be permeable, but in contrast to the area 266 in FIG Fig. 10 an active pumping structure.
  • the active pumping structure is formed here by turbostator blades 272.
  • the pump-active structure or the region 270 has turbostator blades 272 with two passages 274 in between.
  • the turbostator blade 272.2 is designed to a certain extent as a “normal” turbostator blade, in particular it forms a complete turbostator blade.
  • the turbostator blades 272.1 and 272.3 are only designed as partial or “half” turbostator blades.
  • the active pumping structure of the blocking element 262 thus effectively has two turbostator blades, which corresponds to the number of passages 274 between the turbostator blades 272.
  • the active pumping structure of the blocking element 262 brings about a relative equalization of the partial pumping speeds for different gases in the area of the blocking element 262.
  • Fig. 12 shows a plot of the partial pumping speeds for nitrogen and helium in a pump according to FIG Fig. 9 , wherein the blocking element 262 according to Fig. 11 is formed and is also provided at point 6.
  • a comparison of the plots of Fig. 8 and 12th at point 6 shows that with the blocking element 262 according to Fig. 11 the partial pumping speed S N2 and S He at the point of the Blocking element 262, here at point 6, are more similar than in the case of the blocking element 262 according to FIG Fig. 10 or without a pump-active structure, in particular at least essentially the same.
  • the leak detector 280 comprises a molecular vacuum pump 282, a detection device 284, which is designed as a mass spectrometer, and a connection 286 for a vacuum system, not shown here, which is to be checked for leaks.
  • the molecular vacuum pump 282 is designed as a split-flow pump. It comprises a first inlet 288, an intermediate inlet 290, a further intermediate inlet 292 and an outlet 294.
  • the molecular vacuum pump 282 comprises a turbo pumping stage 296 and a Holweck pumping stage 298.
  • a pumping direction and a flow path run from the first inlet 288 to the outlet 294 End of the Holweck pumping stage 298.
  • the leak detector 280 further comprises a backing pump 300.
  • the connection 286 is connected in particular to the intermediate inlets 290 and 292 via a line system and the backing pump 300 is connected in particular to the outlet 294.
  • the line system is also designed and flexibly controllable by valves 302 to the effect that both the connection 286 and the backing pump 300 can essentially be connected to or separated from the intermediate inlets 290 and 292 and the outlet 294 as desired.
  • the leak detector 280 is operated, for example, with helium as the test gas.
  • helium as the test gas.
  • hydrogen or a gas mixture containing hydrogen can also be used as test gas.
  • the present descriptions of the figures largely relate only to helium, but apply accordingly to hydrogen.
  • helium When searching for a leak, helium is distributed in the area of the vacuum system to be examined for leaks, which is not shown here, and the vacuum system is evacuated via connection 286. If the vacuum system has a leak, helium - in addition to the ambient air - gets into the vacuum system and to connection 286. This is connected in particular to the intermediate inlet 290, so that the helium, together with the gas components of the ambient air, reaches the intermediate inlet 290 and into the molecular vacuum pump 282 .
  • the detection device 284 is used to detect the helium. A certain part of the helium will flow from the intermediate inlet 290 against the pumping direction and reach the detection device 284 via the first inlet 288. For this reason, a leak detector of the type shown here is also referred to as a countercurrent leak detector.
  • the molecular vacuum pump 282 is equipped with a blocking element 262. This is arranged at a location downstream of the intermediate inlet 290 and at a distance from it. Specifically, several active pumping elements are provided in the pumping direction between the blocking element 262 and the intermediate inlet 290.
  • the blocking element 262 has the effect that at the location of the intermediate inlet 290 in relation to the flow path the partial pumping speed for nitrogen is increased relative to the partial pumping speed for helium, in particular that the difference between these partial pumping speeds is increased. This is done in a similar way as it is with respect to the Fig. 8 and 12th for the intermediate inlet 258 or position 11 is described.
  • the ratio of backflowing helium to backflowing nitrogen also changes.
  • a partial pumping speed for nitrogen at the intermediate inlet 290 which is large relative to the partial pumping speed for helium, has the effect that a large part of the nitrogen is transported away in the pumping direction and only a small part of the nitrogen flows against the pumping direction.
  • this has the effect that a small part of the helium is transported away in the pumping direction and a large part of the helium flows against the pumping direction.
  • the quantitative ratio of backflowing helium to backflowing nitrogen is thus improved and the detection accuracy of the leak detector 280 is improved as a result.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP20217527.9A 2020-01-27 2020-12-29 Pompe à vide moléculaire et procédé d'influence de la capacité d'aspiration d'une telle pompe Active EP3851680B1 (fr)

Priority Applications (1)

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JP2021009273A JP7252990B2 (ja) 2020-01-27 2021-01-25 分子真空ポンプ及び分子真空ポンプの排気速度に影響を及ぼす方法

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EP20153779.2A EP3693610B1 (fr) 2020-01-27 2020-01-27 Pompe à vide moléculaire

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EP3693610B1 (fr) * 2020-01-27 2021-12-22 Pfeiffer Vacuum Technology AG Pompe à vide moléculaire

Citations (6)

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DE4228313A1 (de) * 1992-08-26 1994-03-03 Leybold Ag Gegenstrom-Lecksucher mit Hochvakuumpumpe
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
DE60101898T2 (de) * 2001-03-15 2004-11-18 Varian S.P.A., Leini Turbinenpumpe mit einer Statorstufe integriert mit einem Distanzring
EP2039941A2 (fr) * 2007-09-20 2009-03-25 Pfeiffer Vacuum Gmbh Pompe à vide
EP3085963A1 (fr) * 2015-04-20 2016-10-26 Pfeiffer Vacuum Gmbh Pompe à vide
EP3693610A1 (fr) * 2020-01-27 2020-08-12 Pfeiffer Vacuum Technology AG Pompe à vide moléculaire

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Publication number Priority date Publication date Assignee Title
FR2657164B1 (fr) * 1990-01-16 1992-04-03 Cit Alcatel Installation de detection de fuite a pompe holweck a prise intermediaire.
JPH11211604A (ja) * 1998-01-22 1999-08-06 Osaka Vacuum Ltd ヘリウムリークデテクタ
GB0124731D0 (en) 2001-10-15 2001-12-05 Boc Group Plc Vacuum pumps
GB0424199D0 (en) 2004-11-01 2004-12-01 Boc Group Plc Vacuum pump
DE102008035891A1 (de) 2008-07-31 2010-02-04 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
GB2474507B (en) 2009-10-19 2016-01-27 Edwards Ltd Vacuum pump
CN102889219B (zh) 2011-07-18 2016-05-11 李晨 盘式分子泵
DE202013010204U1 (de) 2013-11-11 2015-02-13 Oerlikon Leybold Vacuum Gmbh Multi-Inlet-Vakuumpumpe
EP3085964B1 (fr) * 2015-04-21 2019-12-11 Pfeiffer Vacuum Gmbh Production d'un composant de pompe à vide par fabrication additive métallique

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4228313A1 (de) * 1992-08-26 1994-03-03 Leybold Ag Gegenstrom-Lecksucher mit Hochvakuumpumpe
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
DE60101898T2 (de) * 2001-03-15 2004-11-18 Varian S.P.A., Leini Turbinenpumpe mit einer Statorstufe integriert mit einem Distanzring
EP2039941A2 (fr) * 2007-09-20 2009-03-25 Pfeiffer Vacuum Gmbh Pompe à vide
EP3085963A1 (fr) * 2015-04-20 2016-10-26 Pfeiffer Vacuum Gmbh Pompe à vide
EP3693610A1 (fr) * 2020-01-27 2020-08-12 Pfeiffer Vacuum Technology AG Pompe à vide moléculaire

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Publication number Publication date
JP2021116806A (ja) 2021-08-10
EP3693610B1 (fr) 2021-12-22
EP3851680B1 (fr) 2023-09-13
JP6998439B2 (ja) 2022-01-18
JP2021116814A (ja) 2021-08-10
JP7252990B2 (ja) 2023-04-05
EP3693610A1 (fr) 2020-08-12

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