JP6665457B2 - 半導体装置 - Google Patents
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- 230000005684 electric field Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 230000000994 depressogenic effect Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000005380 borophosphosilicate glass Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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Description
特許文献1 特開2014−053552号公報
特許文献2 特開2010−050211号公報
図5は、実施例1に係るダミーパッドDPの周辺を拡大した平面図の一例を示す。本例では、ダミーパッドDPの周辺に形成されたダミーライナDR及びゲートライナGRを図示する。
図10は、実施例2に係るダミーパッドDP周辺の拡大した平面図の一例を示す。本例のゲートライナGRは、対向端部48を有さない。
図14は、実施例3に係る半導体装置100の全体の平面図の一例を示す。本例のダミーパッドDPは、エミッタ電極60の中心線ECに対して非対称に配置される。
Claims (10)
- 半導体基板と、
前記半導体基板の表面側に形成されたダミートレンチ部と、
前記半導体基板の表面の上方に形成され、平面視で、外周の窪んだ窪み部を有するエミッタ電極と、
前記ダミートレンチ部と電気的に接続され、平面視で、少なくとも一部が前記窪み部の内側に形成されたダミーパッドと、
前記エミッタ電極と前記ダミーパッドとを電気的に接続するダミーワイヤと、
前記半導体基板の表面側に形成されたゲートトレンチ部と、
前記ゲートトレンチ部に電気的に接続され、平面視で、前記エミッタ電極の中心線に対して線対称に配置されるゲートパッドと
を備え、
前記エミッタ電極との接続点を有し、前記エミッタ電極の外部に引き出して、前記エミッタ電極を外部端子と電気的に接続する1又は複数のエミッタワイヤを更に備え、
前記ダミーワイヤは、前記1又は複数のエミッタワイヤの引き出し側とは前記ダミーパッドを挟んだ反対側において、前記エミッタ電極との接続点を有する
半導体装置。 - 半導体基板と、
前記半導体基板の表面側に形成されたダミートレンチ部と、
前記半導体基板の表面の上方に形成され、平面視で、外周の窪んだ窪み部を有するエミッタ電極と、
前記ダミートレンチ部と電気的に接続され、平面視で、少なくとも一部が前記窪み部の内側に形成されたダミーパッドと、
前記エミッタ電極と前記ダミーパッドとを電気的に接続するダミーワイヤと
を備え、
前記エミッタ電極との接続点を有し、前記エミッタ電極の外部に引き出して、前記エミッタ電極を外部端子と電気的に接続する1又は複数のエミッタワイヤを更に備え、
前記ダミーワイヤは、前記1又は複数のエミッタワイヤの引き出し側とは前記ダミーパッドを挟んだ反対側において、前記エミッタ電極との接続点を有し、
前記1又は複数のエミッタワイヤは、前記1又は複数のエミッタワイヤの引き出し側及び前記引き出し側とは前記ダミーパッドを挟んだ反対側の両側に、前記エミッタ電極との接続点を有する
半導体装置。 - 前記1又は複数のエミッタワイヤは、前記ダミーワイヤに隣接する第1エミッタワイヤと、前記第1エミッタワイヤに隣接して並列に配列された第2エミッタワイヤとを含み、
前記ダミーワイヤの前記接続点と前記第1エミッタワイヤの接続点との間隔は、前記第1エミッタワイヤの接続点と前記第2エミッタワイヤの接続点との間隔よりも大きい
請求項2に記載の半導体装置。 - 前記ダミーワイヤの前記接続点は、前記複数のエミッタワイヤの接続点よりも、前記複数のエミッタワイヤの引き出し側と反対側の前記エミッタ電極の端部との距離が近い
請求項2又は3に記載の半導体装置。 - 前記ダミーパッドは、平面視で、前記エミッタ電極の中心線に対して非対称に配置される
請求項1から4のいずれか一項に記載の半導体装置。 - 前記ゲートトレンチ部の少なくとも一部は、前記ダミーパッドの下層に形成される
請求項1に記載の半導体装置。 - 前記半導体基板の表面において、前記ダミートレンチ部及び前記ゲートトレンチ部に隣接して形成されたエミッタ領域と、
前記ダミーパッドと前記エミッタ領域とを電気的に接続するコンタクト部と、
をさらに備える
請求項6に記載の半導体装置。 - 平面視で、前記エミッタ電極の外側に形成され、前記ゲートトレンチ部と前記ゲートパッドとを電気的に接続するゲートランナと、
平面視で、前記エミッタ電極の外周と前記ゲートランナの内周との間に配置され、前記ダミートレンチ部と前記ダミーパッドとを電気的に接続するダミーランナと
を更に備える
請求項1、6、または7に記載の半導体装置。 - 前記ゲートパッドは、平面視で、前記ダミーランナ及び前記ゲートランナの外側に形成され、
前記ゲートランナは、第1対向端部と、前記第1対向端部と対向した第2対向端部とを有し、
前記ダミーランナは、平面視で、前記第1対向端部と前記第2対向端部との間を横断して形成される
請求項8に記載の半導体装置。 - 前記ゲートランナは、平面視で、前記エミッタ電極の外周を覆うリング形状を有する
請求項8に記載の半導体装置。
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JP2015183087A JP6665457B2 (ja) | 2015-09-16 | 2015-09-16 | 半導体装置 |
US15/247,934 US9870965B2 (en) | 2015-09-16 | 2016-08-26 | Semiconductor device |
CN201610796522.6A CN106549046B (zh) | 2015-09-16 | 2016-08-31 | 半导体装置 |
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JP2015183087A JP6665457B2 (ja) | 2015-09-16 | 2015-09-16 | 半導体装置 |
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CN105226090B (zh) | 2015-11-10 | 2018-07-13 | 株洲中车时代电气股份有限公司 | 一种绝缘栅双极晶体管及其制作方法 |
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DE102016117264B4 (de) * | 2016-09-14 | 2020-10-08 | Infineon Technologies Ag | Leistungshalbleiterbauelement mit Steuerbarkeit von dU/dt |
US10256331B2 (en) * | 2017-03-03 | 2019-04-09 | Pakal Technologies, Inc. | Insulated gate turn-off device having low capacitance and low saturation current |
WO2019176327A1 (ja) * | 2018-03-15 | 2019-09-19 | 富士電機株式会社 | 半導体装置 |
EP3817039B1 (en) | 2019-02-07 | 2022-11-23 | Fuji Electric Co., Ltd. | Semiconductor device |
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CN103229286B (zh) * | 2010-11-29 | 2015-12-16 | 丰田自动车株式会社 | 半导体装置 |
US8502346B2 (en) * | 2010-12-23 | 2013-08-06 | Alpha And Omega Semiconductor Incorporated | Monolithic IGBT and diode structure for quasi-resonant converters |
US8354733B2 (en) * | 2011-03-04 | 2013-01-15 | International Rectifier Corporation | IGBT power semiconductor package having a conductive clip |
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