JP6645590B2 - 半導体モジュール - Google Patents

半導体モジュール Download PDF

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Publication number
JP6645590B2
JP6645590B2 JP2018557590A JP2018557590A JP6645590B2 JP 6645590 B2 JP6645590 B2 JP 6645590B2 JP 2018557590 A JP2018557590 A JP 2018557590A JP 2018557590 A JP2018557590 A JP 2018557590A JP 6645590 B2 JP6645590 B2 JP 6645590B2
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JP
Japan
Prior art keywords
protrusions
wiring layer
metal wiring
semiconductor chip
refrigerant passage
Prior art date
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Active
Application number
JP2018557590A
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English (en)
Japanese (ja)
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JPWO2018116653A1 (ja
Inventor
明夫 北村
明夫 北村
新一郎 安達
新一郎 安達
新井 伸英
伸英 新井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
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Fuji Electric Co Ltd
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Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Publication of JPWO2018116653A1 publication Critical patent/JPWO2018116653A1/ja
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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/46Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
    • H01L23/473Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3735Laminates or multilayers, e.g. direct bond copper ceramic substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/532Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
    • H01L23/53204Conductive materials
    • H01L23/53209Conductive materials based on metals, e.g. alloys, metal silicides
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/07Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/18Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different subgroups of the same main group of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/06Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
    • H01L27/07Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common
    • H01L27/0705Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common comprising components of the field effect type
    • H01L27/0711Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common comprising components of the field effect type in combination with bipolar transistors and diodes, or capacitors, or resistors

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
JP2018557590A 2016-12-20 2017-11-01 半導体モジュール Active JP6645590B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2016246597 2016-12-20
JP2016246597 2016-12-20
PCT/JP2017/039642 WO2018116653A1 (fr) 2016-12-20 2017-11-01 Module semi-conducteur

Publications (2)

Publication Number Publication Date
JPWO2018116653A1 JPWO2018116653A1 (ja) 2019-04-04
JP6645590B2 true JP6645590B2 (ja) 2020-02-14

Family

ID=62626211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018557590A Active JP6645590B2 (ja) 2016-12-20 2017-11-01 半導体モジュール

Country Status (5)

Country Link
US (1) US10756001B2 (fr)
EP (1) EP3454367B1 (fr)
JP (1) JP6645590B2 (fr)
CN (1) CN109219880B (fr)
WO (1) WO2018116653A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7086512B2 (ja) * 2019-07-05 2022-06-20 三菱電機株式会社 サーボアンプ
JP7459539B2 (ja) 2020-02-07 2024-04-02 富士電機株式会社 半導体装置
WO2021201019A1 (fr) * 2020-03-31 2021-10-07 マレリ株式会社 Dispositif de refroidissement
JP6984778B1 (ja) * 2021-05-20 2021-12-22 富士電機株式会社 冷却装置および冷却装置を備える半導体装置
JP2023023518A (ja) * 2021-08-05 2023-02-16 日本電産株式会社 液冷ジャケット、および冷却装置

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3982180B2 (ja) * 2000-02-16 2007-09-26 株式会社日立製作所 電力変換装置
US6414867B2 (en) * 2000-02-16 2002-07-02 Hitachi, Ltd. Power inverter
JP2002141164A (ja) * 2000-10-31 2002-05-17 Miyaden Co Ltd 大電力高周波誘導加熱用トランジスタインバータ装置
JP2003188326A (ja) * 2001-12-20 2003-07-04 Hitachi Ltd 冷却装置付電気機器
JP4789813B2 (ja) 2007-01-11 2011-10-12 トヨタ自動車株式会社 半導体素子の冷却構造
JP4777264B2 (ja) * 2007-01-11 2011-09-21 株式会社ティラド フィンタイプ液冷ヒートシンク
JP4920071B2 (ja) 2009-11-12 2012-04-18 株式会社日本自動車部品総合研究所 半導体素子の冷却装置
CN102612747B (zh) * 2010-01-08 2014-12-03 丰田自动车株式会社 半导体模块
JP5900506B2 (ja) * 2011-10-12 2016-04-06 富士電機株式会社 半導体モジュール用冷却器及び半導体モジュール
JP2013165097A (ja) * 2012-02-09 2013-08-22 Nissan Motor Co Ltd 半導体冷却装置
JP2013197483A (ja) * 2012-03-22 2013-09-30 Ihi Corp 冷却装置
JP6026808B2 (ja) 2012-08-03 2016-11-16 株式会社ティラド 積層型ヒートシンクのコア
WO2014045766A1 (fr) * 2012-09-19 2014-03-27 富士電機株式会社 Dispositif à semi-conducteur et procédé de fabrication de dispositif à semi-conducteur
JP6262422B2 (ja) * 2012-10-02 2018-01-17 昭和電工株式会社 冷却装置および半導体装置
US10037348B2 (en) * 2013-04-08 2018-07-31 Nuodb, Inc. Database management system with database hibernation and bursting
US9812377B2 (en) * 2013-09-04 2017-11-07 Mitsubishi Electric Corporation Semiconductor module and inverter device
JP2015073012A (ja) * 2013-10-03 2015-04-16 富士電機株式会社 半導体装置
WO2015079643A1 (fr) * 2013-11-28 2015-06-04 富士電機株式会社 Procédé de fabrication d'un réfrigérant pour module semi-conducteur, réfrigérant pour module semi-conducteur, module semi-conducteur, et véhicule piloté électriquement
EP3306659B1 (fr) * 2015-06-03 2021-08-04 Mitsubishi Electric Corporation Refroidisseur à refroidissement par liquide, et procédé de fabrication d'ailette de radiateur dans un refroidisseur à refroidissement par liquide

Also Published As

Publication number Publication date
WO2018116653A1 (fr) 2018-06-28
EP3454367B1 (fr) 2021-08-25
US20190148265A1 (en) 2019-05-16
JPWO2018116653A1 (ja) 2019-04-04
EP3454367A4 (fr) 2019-07-17
US10756001B2 (en) 2020-08-25
CN109219880B (zh) 2022-06-14
CN109219880A (zh) 2019-01-15
EP3454367A1 (fr) 2019-03-13

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