JP6253915B2 - アクチュエータ装置及びミラー駆動装置 - Google Patents
アクチュエータ装置及びミラー駆動装置 Download PDFInfo
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- JP6253915B2 JP6253915B2 JP2013160425A JP2013160425A JP6253915B2 JP 6253915 B2 JP6253915 B2 JP 6253915B2 JP 2013160425 A JP2013160425 A JP 2013160425A JP 2013160425 A JP2013160425 A JP 2013160425A JP 6253915 B2 JP6253915 B2 JP 6253915B2
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- 239000007769 metal material Substances 0.000 claims description 26
- 239000004020 conductor Substances 0.000 claims description 25
- 229910045601 alloy Inorganic materials 0.000 claims description 11
- 239000000956 alloy Substances 0.000 claims description 11
- 238000010586 diagram Methods 0.000 description 11
- 238000000034 method Methods 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 3
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- 239000000203 mixture Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 229910021364 Al-Si alloy Inorganic materials 0.000 description 2
- 229910018182 Al—Cu Inorganic materials 0.000 description 2
- 229910018594 Si-Cu Inorganic materials 0.000 description 2
- 229910008465 Si—Cu Inorganic materials 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 230000002401 inhibitory effect Effects 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/004—Angular deflection
- B81B3/0045—Improve properties related to angular swinging, e.g. control resonance frequency
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
- H02K33/18—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0145—Flexible holders
- B81B2203/0154—Torsion bars
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
Description
Claims (9)
- 支持部と、
導体が配置された可動部と、
前記導体に接続される配線が配置され、前記可動部を前記支持部に揺動可能に連結するトーションバー部と、を備え、
前記トーションバー部は、前記トーションバー部の揺動軸に沿う第一方向に延び、前記第一方向と交差する第二方向に併置される複数の直状部分と、対応する前記直状部分の端を連結する折り返し部分と、を有する蛇行形状を呈しており、
前記配線は、前記折り返し部分に配置される第一配線部分と、前記第一配線部分に接続されると共に各前記直状部分に配置される第二配線部分と、を有し、
前記第一配線部分は、前記折り返し部分に形成された溝内に埋め込まれるように配置され、第一金属材料によって構成されるダマシン配線部分を含み、
前記第二配線部分は、前記直状部分上に配置され、前記第一金属材料よりも塑性変形し難い第二金属材料によって構成されていることを特徴とするアクチュエータ装置。 - 前記第一配線部分は、前記溝の開口を覆うように前記ダマシン配線部分上に配置され、前記第二金属材料によって構成される部分を更に含むことを特徴とする請求項1に記載のアクチュエータ装置。
- 前記トーションバー部と前記支持部との接続箇所及び前記トーションバー部と前記可動部との接続箇所は、前記トーションバー部の前記第二方向での中央部分を通り前記第一方向に延びる仮想線上に位置していることを特徴とする請求項1又は2に記載のアクチュエータ装置。
- 前記トーションバー部は、前記複数の直状部分のうち前記第二方向で最も外側に位置する一方の直状部分と前記支持部とを接続する第一接続部分と、前記複数の直状部分のうち前記第二方向で最も外側に位置する他方の直状部分と前記可動部とを接続する第二接続部分と、を更に有し、
前記配線は、前記第一配線部分に接続されると共に前記第一及び第二接続部分にそれぞれ配置される第三配線部分を更に有していることを特徴とする請求項3に記載のアクチュエータ装置。 - 前記第三配線部分は、前記第一及び第二接続部分にそれぞれ形成された溝内に埋め込まれるように配置され、前記第一金属材料によって構成されるダマシン配線部分を含むことを特徴とする請求項4に記載のアクチュエータ装置。
- 前記第二金属材料は、Al又はAlを含む合金からなることを特徴とする請求項1〜5のいずれか一項に記載のアクチュエータ装置。
- 前記可動部は、前記トーションバー部が連結される第一部分と、前記トーションバー部の揺動軸に直交する方向に延びる揺動軸周りに揺動可能に前記第一部分に支持される第二部分と、を有することを特徴とする請求項1〜6のいずれか一項に記載のアクチュエータ装置。
- 前記可動部には、前記導体としてコイルが配置されており、
前記コイルに磁界を作用させる磁界発生部を更に備えることを特徴とする請求項1〜7の何れか一項に記載のアクチュエータ装置。 - 請求項1〜8のいずれか一項に記載のアクチュエータ装置と、
前記可動部に配置されるミラーと、を備えることを特徴とするミラー駆動装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013160425A JP6253915B2 (ja) | 2013-08-01 | 2013-08-01 | アクチュエータ装置及びミラー駆動装置 |
PCT/JP2013/083362 WO2015015666A1 (ja) | 2013-08-01 | 2013-12-12 | アクチュエータ装置及びミラー駆動装置 |
US14/908,173 US9729038B2 (en) | 2013-08-01 | 2013-12-12 | Actuator device and mirror drive device |
EP13890693.8A EP3029818B1 (en) | 2013-08-01 | 2013-12-12 | Actuator device and mirror drive device |
US15/634,296 US10394017B2 (en) | 2013-08-01 | 2017-06-27 | Actuator device and mirror drive device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013160425A JP6253915B2 (ja) | 2013-08-01 | 2013-08-01 | アクチュエータ装置及びミラー駆動装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017229050A Division JP6426818B2 (ja) | 2017-11-29 | 2017-11-29 | アクチュエータ装置 |
Publications (3)
Publication Number | Publication Date |
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JP2015031786A JP2015031786A (ja) | 2015-02-16 |
JP2015031786A5 JP2015031786A5 (ja) | 2016-09-08 |
JP6253915B2 true JP6253915B2 (ja) | 2017-12-27 |
Family
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Family Applications (1)
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JP2013160425A Active JP6253915B2 (ja) | 2013-08-01 | 2013-08-01 | アクチュエータ装置及びミラー駆動装置 |
Country Status (4)
Country | Link |
---|---|
US (2) | US9729038B2 (ja) |
EP (1) | EP3029818B1 (ja) |
JP (1) | JP6253915B2 (ja) |
WO (1) | WO2015015666A1 (ja) |
Families Citing this family (32)
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JP6460406B2 (ja) * | 2015-06-09 | 2019-01-30 | 第一精工株式会社 | 可動反射素子及び二次元走査装置 |
US10196259B2 (en) * | 2015-12-30 | 2019-02-05 | Mems Drive, Inc. | MEMS actuator structures resistant to shock |
JP6691784B2 (ja) * | 2016-01-21 | 2020-05-13 | 浜松ホトニクス株式会社 | アクチュエータ装置 |
JP6696777B2 (ja) * | 2016-01-21 | 2020-05-20 | 浜松ホトニクス株式会社 | アクチュエータ装置 |
ITUA20162170A1 (it) * | 2016-03-31 | 2017-10-01 | St Microelectronics Srl | Dispositivo mems oscillante intorno a due assi e dotato di un sistema di rilevamento di posizione, in particolare di tipo piezoresistivo |
IT201600079604A1 (it) * | 2016-07-28 | 2018-01-28 | St Microelectronics Srl | Struttura oscillante con attuazione piezoelettrica, sistema e metodo di fabbricazione |
EP3591454B1 (en) * | 2017-02-28 | 2023-03-22 | Hamamatsu Photonics K.K. | Optical module and distance measurement device |
EP4220917A1 (en) * | 2017-03-13 | 2023-08-02 | Pioneer Corporation | Drive device and distance measuring device |
JP6924090B2 (ja) | 2017-07-21 | 2021-08-25 | 浜松ホトニクス株式会社 | アクチュエータ装置 |
WO2019031420A1 (ja) * | 2017-08-10 | 2019-02-14 | 浜松ホトニクス株式会社 | ミラー装置 |
JP6585147B2 (ja) | 2017-12-01 | 2019-10-02 | 浜松ホトニクス株式会社 | アクチュエータ装置 |
US11394284B2 (en) | 2017-12-01 | 2022-07-19 | Hamamatsu Photonics K.K. | Actuator device |
USD903614S1 (en) | 2018-05-01 | 2020-12-01 | Hamamatsu Photonics K.K. | Laser beam reflector |
JP1680386S (ja) * | 2018-05-01 | 2021-03-01 | ||
JP1639597S (ja) * | 2018-05-01 | 2019-08-19 | ||
JP1625135S (ja) * | 2018-05-01 | 2019-03-18 | ||
JP1680388S (ja) * | 2018-05-01 | 2021-03-01 | ||
JP1680387S (ja) * | 2018-05-01 | 2021-03-01 | ||
USD907085S1 (en) * | 2018-05-01 | 2021-01-05 | Hamamatsu Photonics K.K. | Laser beam reflector |
JP1680755S (ja) | 2018-05-01 | 2021-03-08 | ||
JP1680507S (ja) | 2018-05-01 | 2021-03-08 | ||
JP1680385S (ja) * | 2018-05-01 | 2021-03-01 | ||
JP1625495S (ja) * | 2018-05-01 | 2019-03-18 | ||
KR20210066906A (ko) * | 2018-10-04 | 2021-06-07 | 이노비즈 테크놀로지스 엘티디 | 가열 요소를 갖는 전기 광학 시스템 |
EP3666727A1 (en) * | 2018-12-14 | 2020-06-17 | STMicroelectronics S.r.l. | Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristics |
US10730744B2 (en) * | 2018-12-28 | 2020-08-04 | Industrial Technology Research Institute | MEMS device with movable stage |
CH715874A1 (fr) * | 2019-02-26 | 2020-08-31 | Sercalo Microtechnology Ltd | Dispositif micromécanique à bobine. |
JP7065146B2 (ja) * | 2020-04-23 | 2022-05-11 | 浜松ホトニクス株式会社 | アクチュエータ装置 |
JP7292469B2 (ja) * | 2020-04-23 | 2023-06-16 | 浜松ホトニクス株式会社 | アクチュエータ装置 |
US11733510B2 (en) * | 2020-06-10 | 2023-08-22 | Nokia Technologies Oy | Electromagnetic microactuator apparatus and method |
US11747611B2 (en) | 2020-12-16 | 2023-09-05 | Stmicroelectronics (Research & Development) Limited | Compact line scan mems time of flight system with actuated lens |
JP7499889B2 (ja) | 2021-01-28 | 2024-06-14 | 三菱電機株式会社 | Memsミラー装置及び測距装置 |
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JP2001051224A (ja) | 1999-08-06 | 2001-02-23 | Olympus Optical Co Ltd | アクチュエータ |
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JP2005245135A (ja) | 2004-02-26 | 2005-09-08 | Miyota Kk | プレーナ型電磁アクチュエータ及びその製造方法 |
JP5634670B2 (ja) * | 2008-10-20 | 2014-12-03 | 日本信号株式会社 | プレーナ型アクチュエータ |
JP5191939B2 (ja) * | 2009-03-31 | 2013-05-08 | スタンレー電気株式会社 | 光偏向器用アクチュエータ装置 |
JP2012088487A (ja) * | 2010-10-19 | 2012-05-10 | Jvc Kenwood Corp | 光偏向器 |
JP5842467B2 (ja) * | 2010-11-16 | 2016-01-13 | 株式会社リコー | アクチュエータ装置、このアクチュエータ装置用の保護カバー、このアクチュエータの製造方法、このアクチュエータ装置を用いた光偏向装置、二次元光走査装置及びこれを用いた画像投影装置 |
JP5775765B2 (ja) | 2011-01-21 | 2015-09-09 | オリンパス株式会社 | 光偏向器 |
WO2012130612A1 (en) | 2011-03-25 | 2012-10-04 | Lemoptix Sa | A reflective device |
JP2013200337A (ja) * | 2012-03-23 | 2013-10-03 | Stanley Electric Co Ltd | 光偏向器 |
US9341840B2 (en) * | 2012-06-13 | 2016-05-17 | Intel Corporation | MEMS device |
-
2013
- 2013-08-01 JP JP2013160425A patent/JP6253915B2/ja active Active
- 2013-12-12 WO PCT/JP2013/083362 patent/WO2015015666A1/ja active Application Filing
- 2013-12-12 US US14/908,173 patent/US9729038B2/en active Active
- 2013-12-12 EP EP13890693.8A patent/EP3029818B1/en active Active
-
2017
- 2017-06-27 US US15/634,296 patent/US10394017B2/en active Active
Also Published As
Publication number | Publication date |
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EP3029818A4 (en) | 2017-05-24 |
EP3029818B1 (en) | 2019-06-26 |
US20170293136A1 (en) | 2017-10-12 |
WO2015015666A1 (ja) | 2015-02-05 |
JP2015031786A (ja) | 2015-02-16 |
EP3029818A1 (en) | 2016-06-08 |
US10394017B2 (en) | 2019-08-27 |
US9729038B2 (en) | 2017-08-08 |
US20160172951A1 (en) | 2016-06-16 |
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