ITUA20162170A1 - Dispositivo mems oscillante intorno a due assi e dotato di un sistema di rilevamento di posizione, in particolare di tipo piezoresistivo - Google Patents

Dispositivo mems oscillante intorno a due assi e dotato di un sistema di rilevamento di posizione, in particolare di tipo piezoresistivo

Info

Publication number
ITUA20162170A1
ITUA20162170A1 ITUA2016A002170A ITUA20162170A ITUA20162170A1 IT UA20162170 A1 ITUA20162170 A1 IT UA20162170A1 IT UA2016A002170 A ITUA2016A002170 A IT UA2016A002170A IT UA20162170 A ITUA20162170 A IT UA20162170A IT UA20162170 A1 ITUA20162170 A1 IT UA20162170A1
Authority
IT
Italy
Prior art keywords
piezoresistic
axes
type
detection system
position detection
Prior art date
Application number
ITUA2016A002170A
Other languages
English (en)
Inventor
Massimiliano Merli
Roberto Carminati
Marco Rossi
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to ITUA2016A002170A priority Critical patent/ITUA20162170A1/it
Priority to US15/266,063 priority patent/US10048491B2/en
Priority to CN201621103386.XU priority patent/CN206494724U/zh
Priority to CN201910485274.7A priority patent/CN110240113A/zh
Priority to CN201610875661.8A priority patent/CN107265387B/zh
Priority to EP16194688.4A priority patent/EP3226059B1/en
Publication of ITUA20162170A1 publication Critical patent/ITUA20162170A1/it

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0027—Structures for transforming mechanical energy, e.g. potential energy of a spring into translation, sound into translation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means
    • H03H9/02275—Comb electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/042—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by opto-electronic means
    • G06F3/0421—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by opto-electronic means by interrupting or reflecting a light beam, e.g. optical touch-screen
    • G06F3/0423—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by opto-electronic means by interrupting or reflecting a light beam, e.g. optical touch-screen using sweeping light beams, e.g. using rotating or vibrating mirror
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
ITUA2016A002170A 2016-03-31 2016-03-31 Dispositivo mems oscillante intorno a due assi e dotato di un sistema di rilevamento di posizione, in particolare di tipo piezoresistivo ITUA20162170A1 (it)

Priority Applications (6)

Application Number Priority Date Filing Date Title
ITUA2016A002170A ITUA20162170A1 (it) 2016-03-31 2016-03-31 Dispositivo mems oscillante intorno a due assi e dotato di un sistema di rilevamento di posizione, in particolare di tipo piezoresistivo
US15/266,063 US10048491B2 (en) 2016-03-31 2016-09-15 MEMS device oscillating about two axes and having a position detecting system, in particular of a piezoresistive type
CN201621103386.XU CN206494724U (zh) 2016-03-31 2016-09-30 一种mems器件、mems微镜***和mems微小投影仪
CN201910485274.7A CN110240113A (zh) 2016-03-31 2016-09-30 关于两个轴线振荡并且具有位置检测***的特别是压阻型的mems器件
CN201610875661.8A CN107265387B (zh) 2016-03-31 2016-09-30 关于两个轴线振荡并且具有位置检测***的特别是压阻型的mems器件
EP16194688.4A EP3226059B1 (en) 2016-03-31 2016-10-19 Mems device oscillating about two axes and having a position detecting system, in particular of a piezoresistive type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITUA2016A002170A ITUA20162170A1 (it) 2016-03-31 2016-03-31 Dispositivo mems oscillante intorno a due assi e dotato di un sistema di rilevamento di posizione, in particolare di tipo piezoresistivo

Publications (1)

Publication Number Publication Date
ITUA20162170A1 true ITUA20162170A1 (it) 2017-10-01

Family

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Family Applications (1)

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ITUA2016A002170A ITUA20162170A1 (it) 2016-03-31 2016-03-31 Dispositivo mems oscillante intorno a due assi e dotato di un sistema di rilevamento di posizione, in particolare di tipo piezoresistivo

Country Status (4)

Country Link
US (1) US10048491B2 (it)
EP (1) EP3226059B1 (it)
CN (3) CN206494724U (it)
IT (1) ITUA20162170A1 (it)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112917473A (zh) * 2019-12-06 2021-06-08 精工爱普生株式会社 光扫描装置、三维计测装置及机器人***

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITUA20162170A1 (it) * 2016-03-31 2017-10-01 St Microelectronics Srl Dispositivo mems oscillante intorno a due assi e dotato di un sistema di rilevamento di posizione, in particolare di tipo piezoresistivo
DE102017218670A1 (de) * 2017-10-19 2019-04-25 Robert Bosch Gmbh Mikromechanische Mikrospiegelanordnung und entsprechendes Betriebsverfahren
CN108710138A (zh) * 2018-01-29 2018-10-26 上海思致汽车工程技术有限公司 一种基于微机电***的广域激光雷达***
CN110275284B (zh) * 2018-03-14 2021-10-29 铭异科技股份有限公司 双轴光学致动器的悬吊***
TWI716239B (zh) * 2019-12-26 2021-01-11 財團法人工業技術研究院 一種可感測低頻力與高頻力的力感測裝置
CN113495335B (zh) * 2020-03-18 2023-08-25 扬明光学股份有限公司 光路调整机构及其制造方法
CN113551828B (zh) * 2020-04-24 2023-07-04 研能科技股份有限公司 致动传感模块
TWI720877B (zh) 2020-04-24 2021-03-01 研能科技股份有限公司 致動傳感模組
US11693233B2 (en) * 2020-06-19 2023-07-04 Microsoft Technology Licensing, Llc Microelectromechanical system (MEMS) scanner having actuator pairs cantilevered adjacent to opposite sides of a scanning mirror
CN112965240B (zh) * 2021-02-09 2022-04-26 无锡微视传感科技有限公司 一种离轴式mems微镜及其制备方法
CN113135548B (zh) * 2021-04-20 2024-06-11 广州蜂鸟传感科技有限公司 一种压电微机械执行器

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19857946C1 (de) * 1998-12-16 2000-01-20 Bosch Gmbh Robert Mikroschwingspiegel
US20110199284A1 (en) * 2010-02-17 2011-08-18 Microvision, Inc. Piezoresistive Sensors for MEMS Device Having Rejection of Undesired Motion
US20120162739A1 (en) * 2010-12-22 2012-06-28 Mitsumi Electric Co., Ltd. Optical scanning device
US20130083378A1 (en) * 2011-10-03 2013-04-04 Toyoki Tanaka Optical scanner apparatus and optical scanner control apparatus
KR20130038751A (ko) * 2011-10-10 2013-04-18 엘지전자 주식회사 센서의 온도 보상 기능을 포함하는 스캐닝 마이크로미러 및 온도 보상 방법
US20130301103A1 (en) * 2012-03-23 2013-11-14 Stanley Electric Co., Ltd. Optical deflector including piezoelectric sensor incorporated into outermost piezoelectric cantilever
US20130308173A1 (en) * 2012-05-15 2013-11-21 Robert Bosch Gmbh Micromechanical assembly, method for manufacturing a micromechanical assembly and method for operating a micromechanical assembly
US20140117888A1 (en) * 2012-10-26 2014-05-01 Robert Bosch Gmbh Mechanical component, mechanical system, and method for operating a mechanical component
US20150241196A1 (en) * 2014-02-26 2015-08-27 Apple Inc. Strain-based sensing of mirror position

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6845665B2 (en) * 2003-04-28 2005-01-25 Analog Devices, Inc. Micro-machined multi-sensor providing 2-axes of acceleration sensing and 1-axis of angular rate sensing
JP4161971B2 (ja) * 2005-02-16 2008-10-08 セイコーエプソン株式会社 光走査装置及び画像表示装置
JP4893335B2 (ja) * 2007-01-26 2012-03-07 セイコーエプソン株式会社 ジャイロモジュール
JP4915246B2 (ja) * 2007-01-26 2012-04-11 セイコーエプソン株式会社 ジャイロモジュール
JP5262613B2 (ja) * 2008-11-20 2013-08-14 パナソニック株式会社 光学反射素子
JP2012088487A (ja) * 2010-10-19 2012-05-10 Jvc Kenwood Corp 光偏向器
JP5775765B2 (ja) * 2011-01-21 2015-09-09 オリンパス株式会社 光偏向器
JP5890115B2 (ja) * 2011-06-22 2016-03-22 スタンレー電気株式会社 光偏向器
JP5816002B2 (ja) * 2011-06-22 2015-11-17 スタンレー電気株式会社 光偏向器
JP5990917B2 (ja) * 2012-02-03 2016-09-14 船井電機株式会社 Ｍｅｍｓデバイスおよびプロジェクタ機能を有する電子機器
JP5524254B2 (ja) * 2012-02-14 2014-06-18 富士フイルム株式会社 ミラー駆動装置及びその制御方法
WO2014068846A1 (ja) * 2012-10-31 2014-05-08 パナソニック株式会社 アクチュエータ
JP6253915B2 (ja) * 2013-08-01 2017-12-27 浜松ホトニクス株式会社 アクチュエータ装置及びミラー駆動装置
JP6168353B2 (ja) * 2013-09-13 2017-07-26 株式会社リコー 光偏向装置、画像形成装置、車両、光偏向装置の制御方法、及び光偏向装置の調整方法
ITUB20156807A1 (it) * 2015-12-07 2017-06-07 St Microelectronics Srl Dispositivo micromeccanico dotato di una struttura orientabile tramite attuazione quasi-statica di tipo piezoelettrico
ITUA20162170A1 (it) * 2016-03-31 2017-10-01 St Microelectronics Srl Dispositivo mems oscillante intorno a due assi e dotato di un sistema di rilevamento di posizione, in particolare di tipo piezoresistivo

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19857946C1 (de) * 1998-12-16 2000-01-20 Bosch Gmbh Robert Mikroschwingspiegel
US20110199284A1 (en) * 2010-02-17 2011-08-18 Microvision, Inc. Piezoresistive Sensors for MEMS Device Having Rejection of Undesired Motion
US20120162739A1 (en) * 2010-12-22 2012-06-28 Mitsumi Electric Co., Ltd. Optical scanning device
US20130083378A1 (en) * 2011-10-03 2013-04-04 Toyoki Tanaka Optical scanner apparatus and optical scanner control apparatus
KR20130038751A (ko) * 2011-10-10 2013-04-18 엘지전자 주식회사 센서의 온도 보상 기능을 포함하는 스캐닝 마이크로미러 및 온도 보상 방법
US20130301103A1 (en) * 2012-03-23 2013-11-14 Stanley Electric Co., Ltd. Optical deflector including piezoelectric sensor incorporated into outermost piezoelectric cantilever
US20130308173A1 (en) * 2012-05-15 2013-11-21 Robert Bosch Gmbh Micromechanical assembly, method for manufacturing a micromechanical assembly and method for operating a micromechanical assembly
US20140117888A1 (en) * 2012-10-26 2014-05-01 Robert Bosch Gmbh Mechanical component, mechanical system, and method for operating a mechanical component
US20150241196A1 (en) * 2014-02-26 2015-08-27 Apple Inc. Strain-based sensing of mirror position

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
CHI ZHANG ET AL: "Two-Dimensional Micro Scanner Integrated with a Piezoelectric Actuator and Piezoresistors", SENSORS, M D P I AG, CH, vol. 9, no. 1, 23 January 2009 (2009-01-23), pages 631 - 644, XP002620220, ISSN: 1424-8220, DOI: 10.3390/S90100631 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112917473A (zh) * 2019-12-06 2021-06-08 精工爱普生株式会社 光扫描装置、三维计测装置及机器人***
CN112917473B (zh) * 2019-12-06 2023-11-03 精工爱普生株式会社 光扫描装置、三维计测装置及机器人***

Also Published As

Publication number Publication date
US20170285332A1 (en) 2017-10-05
CN206494724U (zh) 2017-09-15
EP3226059A1 (en) 2017-10-04
CN110240113A (zh) 2019-09-17
EP3226059B1 (en) 2021-01-20
CN107265387A (zh) 2017-10-20
US10048491B2 (en) 2018-08-14
CN107265387B (zh) 2019-07-09

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