JP6212598B2 - カーボンファイバ成長用Fe微粒子形成方法 - Google Patents
カーボンファイバ成長用Fe微粒子形成方法 Download PDFInfo
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- JP6212598B2 JP6212598B2 JP2016107353A JP2016107353A JP6212598B2 JP 6212598 B2 JP6212598 B2 JP 6212598B2 JP 2016107353 A JP2016107353 A JP 2016107353A JP 2016107353 A JP2016107353 A JP 2016107353A JP 6212598 B2 JP6212598 B2 JP 6212598B2
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- 239000010419 fine particle Substances 0.000 title claims description 61
- 238000000034 method Methods 0.000 title claims description 19
- 229920000049 Carbon (fiber) Polymers 0.000 title claims description 8
- 239000004917 carbon fiber Substances 0.000 title claims description 8
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 title claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 82
- 239000002184 metal Substances 0.000 claims description 80
- 239000000758 substrate Substances 0.000 claims description 55
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 42
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 31
- 229910052760 oxygen Inorganic materials 0.000 claims description 31
- 239000001301 oxygen Substances 0.000 claims description 31
- 238000000137 annealing Methods 0.000 claims description 19
- 229910052799 carbon Inorganic materials 0.000 claims description 16
- 229910000838 Al alloy Inorganic materials 0.000 claims description 13
- 229910000640 Fe alloy Inorganic materials 0.000 claims description 13
- 239000007789 gas Substances 0.000 claims description 13
- 239000002245 particle Substances 0.000 claims description 11
- 238000006243 chemical reaction Methods 0.000 claims description 3
- -1 In the first step Substances 0.000 claims 1
- 230000001376 precipitating effect Effects 0.000 claims 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 72
- 239000002041 carbon nanotube Substances 0.000 description 41
- 239000003054 catalyst Substances 0.000 description 39
- 229910021393 carbon nanotube Inorganic materials 0.000 description 25
- 230000003197 catalytic effect Effects 0.000 description 17
- 230000004888 barrier function Effects 0.000 description 16
- 238000010586 diagram Methods 0.000 description 13
- 230000015572 biosynthetic process Effects 0.000 description 9
- 238000000151 deposition Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 238000005328 electron beam physical vapour deposition Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000003426 co-catalyst Substances 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- MUBKMWFYVHYZAI-UHFFFAOYSA-N [Al].[Cu].[Zn] Chemical compound [Al].[Cu].[Zn] MUBKMWFYVHYZAI-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 229910001026 inconel Inorganic materials 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011859 microparticle Substances 0.000 description 1
- 239000002110 nanocone Substances 0.000 description 1
- 239000002121 nanofiber Substances 0.000 description 1
- 239000002116 nanohorn Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Description
4 バリア膜
6 Al膜
8 酸素
10 Al/Fe合金膜
12 Fe微粒子
14 CNT
Claims (4)
- 基板上に、膜中に酸素を含ませながら炭素含有ガスに非反応の助触媒金属膜を形成する第1工程と、
前記助触媒金属膜上に、Fe膜を形成する第2工程と、
前記第2工程後に、前記基板に対して熱アニール処理を施すことで、前記基板上最表面に炭素含有ガスに接触反応するFe微粒子を析出させる第3工程とを含み、
前記第1工程では、チャンバ内に、チャンバ内圧力換算で2×10 ‐4 Paないし5×10 ‐3 Paとして酸素を存在させて、前記助触媒金属膜の膜中に酸素を含ませる
ことを特徴とするカーボンファイバ成長用Fe微粒子形成方法。 - 前記助触媒金属膜が非磁性金属を主構成とすることを特徴とする請求項1に記載のカーボンファイバ成長用Fe微粒子形成方法。
- 前記助触媒金属膜がAl膜であることを特徴とする請求項2に記載のカーボンファイバ成長用Fe微粒子形成方法。
- 前記第2工程では、Al/Fe合金膜が形成されることを特徴とする請求項3に記載のカーボンファイバ成長用Fe微粒子形成方法。
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JP2016107353A JP6212598B2 (ja) | 2016-05-30 | 2016-05-30 | カーボンファイバ成長用Fe微粒子形成方法 |
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JP2016107353A JP6212598B2 (ja) | 2016-05-30 | 2016-05-30 | カーボンファイバ成長用Fe微粒子形成方法 |
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JP2015112899A Division JP5989858B2 (ja) | 2015-06-03 | 2015-06-03 | 触媒金属微粒子形成基板 |
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JP2016172255A JP2016172255A (ja) | 2016-09-29 |
JP6212598B2 true JP6212598B2 (ja) | 2017-10-11 |
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Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2005279624A (ja) * | 2004-03-27 | 2005-10-13 | Osaka Prefecture | カーボンナノチューブの製造用触媒、製造方法及び製造装置 |
JP2007091480A (ja) * | 2005-09-26 | 2007-04-12 | Sonac Kk | 触媒配置構造 |
JP2007091479A (ja) * | 2005-09-26 | 2007-04-12 | Sonac Kk | カーボンファイバの製造方法 |
JP5002187B2 (ja) * | 2006-05-12 | 2012-08-15 | 株式会社アルバック | カーボンナノコイルの成長方法 |
US8753602B2 (en) * | 2006-10-19 | 2014-06-17 | University Of Cincinnati | Composite catalyst and method for manufacturing carbon nanostructured materials |
JP2009078956A (ja) * | 2007-09-27 | 2009-04-16 | Panasonic Corp | カーボンナノチューブ複合体、これを用いたエネルギーデバイス及びカーボンナノチューブ複合体の製造方法 |
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