JP5783669B2 - 触媒金属微粒子形成方法 - Google Patents
触媒金属微粒子形成方法 Download PDFInfo
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- JP5783669B2 JP5783669B2 JP2009171975A JP2009171975A JP5783669B2 JP 5783669 B2 JP5783669 B2 JP 5783669B2 JP 2009171975 A JP2009171975 A JP 2009171975A JP 2009171975 A JP2009171975 A JP 2009171975A JP 5783669 B2 JP5783669 B2 JP 5783669B2
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- film
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Description
4 バリア膜
6 Al膜
8 酸素
10 Al/Fe合金膜
12 Fe微粒子
14 CNT
Claims (2)
- 真空環境下の基板上に炭素含有ガスに非反応の助触媒金属を導入する第1工程と、
この第1工程後、上記助触媒金属中に酸素を存在させる第2工程と、
この第2工程後、上記助触媒金属中に上記酸素が存在した状態下で、上記基板上に炭素含有ガスに接触反応する触媒金属を導入する第3工程と、
この第3工程後、上記基板に対して熱アニール処理を施すことで上記基板上最表面に触媒金属微粒子を析出させる第4工程と、
を含むことを特徴とする触媒金属微粒子形成方法。 - 上記助触媒金属が非磁性金属を主構成とし、上記触媒金属が磁性金属を主構成とする、請求項1に記載の触媒金属微粒子形成方法。
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JP2009171975A JP5783669B2 (ja) | 2009-07-23 | 2009-07-23 | 触媒金属微粒子形成方法 |
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JP2009171975A JP5783669B2 (ja) | 2009-07-23 | 2009-07-23 | 触媒金属微粒子形成方法 |
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JP2015112899A Division JP5989858B2 (ja) | 2015-06-03 | 2015-06-03 | 触媒金属微粒子形成基板 |
Publications (2)
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JP2011025129A JP2011025129A (ja) | 2011-02-10 |
JP5783669B2 true JP5783669B2 (ja) | 2015-09-24 |
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Families Citing this family (2)
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JP5508215B2 (ja) * | 2010-10-04 | 2014-05-28 | 株式会社神戸製鋼所 | カーボンナノ構造体形成用基板の製造方法 |
JP5857830B2 (ja) * | 2012-03-23 | 2016-02-10 | 富士通株式会社 | カーボンナノチューブシート及びその製造方法 |
Family Cites Families (4)
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JP3877302B2 (ja) * | 2002-06-24 | 2007-02-07 | 本田技研工業株式会社 | カーボンナノチューブの形成方法 |
JP2007091480A (ja) * | 2005-09-26 | 2007-04-12 | Sonac Kk | 触媒配置構造 |
US8753602B2 (en) * | 2006-10-19 | 2014-06-17 | University Of Cincinnati | Composite catalyst and method for manufacturing carbon nanostructured materials |
JP2009078956A (ja) * | 2007-09-27 | 2009-04-16 | Panasonic Corp | カーボンナノチューブ複合体、これを用いたエネルギーデバイス及びカーボンナノチューブ複合体の製造方法 |
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