JP5929117B2 - Static pressure gas bearing and linear motion guide device using the static pressure gas bearing - Google Patents

Static pressure gas bearing and linear motion guide device using the static pressure gas bearing Download PDF

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JP5929117B2
JP5929117B2 JP2011253340A JP2011253340A JP5929117B2 JP 5929117 B2 JP5929117 B2 JP 5929117B2 JP 2011253340 A JP2011253340 A JP 2011253340A JP 2011253340 A JP2011253340 A JP 2011253340A JP 5929117 B2 JP5929117 B2 JP 5929117B2
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bearing
static pressure
annular
pressure gas
base
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JP2013108557A (en
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佐藤　光
光 佐藤
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Oiles Corp
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Priority to TW101139982A priority patent/TWI491815B/en
Priority to KR1020120120450A priority patent/KR20130055517A/en
Priority to CN2012104257487A priority patent/CN103122932A/en
Priority to PCT/JP2012/007269 priority patent/WO2013073166A1/en
Priority to CN201280047766.4A priority patent/CN103842672A/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/001—Bearings for parts moving only linearly adjustable for alignment or positioning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
    • F16C32/0666—Details of hydrostatic bearings independent of fluid supply or direction of load of bearing pads
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
    • F16C32/067—Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F16C33/04—Brasses; Bushes; Linings
    • F16C33/20—Sliding surface consisting mainly of plastics
    • F16C33/201—Composition of the plastic

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Description

本発明は、静圧気体軸受及びこの静圧気体軸受を用いた直動案内装置に関する。   The present invention relates to a static pressure gas bearing and a linear motion guide device using the static pressure gas bearing.

精密工作機械や半導体露光装置においては、加工工具や基板等の被加工物を高精度で位置決めすることが要求されている。そのため、加工工具や被加工物の載置台の位置決め装置に摩擦のほとんどない静圧気体軸受を装着した直動案内装置が用いられている。このような直動案内装置では、被加工物の載置台としての可動テーブルと、案内部材としてのガイドレールとの間に加圧流体が介在され、この可動テーブルがガイドレールに対して非接触で移動されるように構成されている。   In precision machine tools and semiconductor exposure apparatuses, it is required to position a workpiece such as a processing tool or a substrate with high accuracy. For this reason, a linear motion guide device is used in which a static pressure gas bearing with little friction is mounted on a positioning device for a work tool or a work table. In such a linear motion guide device, a pressurized fluid is interposed between a movable table as a work table and a guide rail as a guide member, and the movable table is not in contact with the guide rail. It is configured to be moved.

この直動案内装置に装着される静圧気体軸受の空気吹出口の絞りの形式としては、多孔質絞り、表面絞り、オリフィス絞り、自成絞り等があり、それぞれ用途に応じて負荷容量及び軸受剛性等を調節しながら使用している。   The form of the air outlet of the static pressure gas bearing mounted on this linear motion guide device includes a porous throttle, a surface throttle, an orifice throttle, and a self-contained throttle. It is used while adjusting the rigidity.

例えば、特許文献１には、被支持体または支持体のいずれか一方に固定され、その軸受部材を介して軸受面に供給される加圧空気により支持体を移動自在に支承するようにした静圧軸受パッドにおいて、軸受部材として、素材粒子の径がほぼ均一で開気孔の均等性が得られる種類のカーボングラファイト系の材料が記載されている。   For example, in Patent Document 1, a static body is fixed to either a supported body or a support body, and the support body is movably supported by pressurized air supplied to the bearing surface via the bearing member. In the pressure bearing pad, as a bearing member, a carbon graphite-based material of a type in which the diameter of material particles is almost uniform and the uniformity of open pores is obtained is described.

また、特許文献２には、比較的高い剛性を保ちながら、高い減衰性を実現した気体軸受装置として、２つの相対向する実質的に平行な軸受面及び両軸受面間の軸受隙間に、オリフィスを通じて気体を供給する少なくとも１つの気体ダクトを有する気体軸受装置が提案されている。   Further, in Patent Document 2, as a gas bearing device that realizes a high damping property while maintaining a relatively high rigidity, an orifice is provided between two opposed substantially parallel bearing surfaces and a bearing gap between both bearing surfaces. A gas bearing device having at least one gas duct for supplying gas through is proposed.

さらに、特許文献３には、多孔質体からなる母材と、この母材上に接合され、予め所望の空気透過量になるように、貫通孔の径及び分布を調整して作製された多孔板からなる表面絞り層とを備え、表面絞り層を介して気体を噴出させ、その静圧によって被支持部材を支持する静圧気体軸受が提案されている。   Furthermore, Patent Document 3 discloses a porous material prepared by adjusting the diameter and distribution of through holes so that a base material made of a porous body is bonded to the base material and a desired air permeation amount is obtained in advance. There has been proposed a static pressure gas bearing including a surface constriction layer made of a plate, jetting gas through the surface constriction layer, and supporting a supported member by the static pressure.

特開昭６３−２３１０２０号公報JP 63-23310 A 特表２００６−５１０８５６号公報JP 2006-510856 A 特開２００１−５６０２７号公報JP 2001-56027 A 特開２００８−８２４４９号公報JP 2008-82449 A

上記従来の静圧気体軸受は、超低摩擦、超高精度及び超高速運動を実現することができるものの、軸受材料として、主に、高強度の金属やセラミックが用いられるとともに、高精度の研削仕上げ等を行う必要があるため、必然的に高価となるという問題がある。   Although the above-mentioned conventional static pressure gas bearings can achieve ultra-low friction, ultra-high precision, and ultra-high-speed motion, high-strength metals and ceramics are mainly used as bearing materials, and high-precision grinding There is a problem that it is inevitably expensive because finishing or the like is necessary.

しかしながら、超低摩擦、超高精度及び超高速運動までは要求されないが、例えば、液晶スクリーン等の物品を非接触で搬送したり、温度変化を生じさせることなく物品を水平移動させたりする場合には、静圧気体軸受を用いると装置の構成が簡略化されるなどの利点を有する反面、静圧気体軸受自体が高価なため、当該用途には広く活用されていないのが実情である。   However, ultra-low friction, ultra-high accuracy, and ultra-high-speed motion are not required, but for example, when an article such as a liquid crystal screen is transported in a non-contact manner or when the article is moved horizontally without causing a temperature change. However, the use of a static pressure gas bearing has the advantage that the configuration of the apparatus is simplified. On the other hand, since the static pressure gas bearing itself is expensive, it is not widely used for this purpose.

上記実情に鑑み、種々の分野で活用可能な安価な静圧気体軸受を提供するべく本出願人は先に、上面に自成絞り形状又はオリフィス絞り形状の複数個の空気吹出口を、下面に該複数の空気吹出口と連通する給気溝を有する樹脂製軸受部材と、該樹脂製軸受部材の下面に前記給気溝を覆うように接合され、該給気溝と連通する給気口を有する基体とを備える静圧気体軸受を提案した（特許文献４）。   In view of the above situation, in order to provide an inexpensive static pressure gas bearing that can be used in various fields, the present applicant has firstly provided a plurality of air outlets having a self-contained throttle shape or an orifice throttle shape on the upper surface, and a lower surface. A resin bearing member having an air supply groove communicating with the plurality of air outlets, and an air supply port connected to the lower surface of the resin bearing member so as to cover the air supply groove and communicating with the air supply groove. The hydrostatic gas bearing provided with the base | substrate which has is proposed (patent document 4).

この特許文献４に記載された静圧気体軸受によれば、静圧気体軸受を構成する樹脂製軸受部材を、金型を用いて射出成形によって形成することができ、機械的な加工を不要とすることができるとともに、基体の構造も樹脂製軸受部材と連通する給気口を形成するのみで、樹脂製軸受部材と基体とを接合するだけで静圧気体軸受を組み立てることができ、静圧気体軸受の大量生産が可能となり、安価な静圧気体軸受を提供することができるというものである。   According to the hydrostatic gas bearing described in Patent Document 4, the resin bearing member constituting the hydrostatic gas bearing can be formed by injection molding using a mold, and mechanical processing is unnecessary. In addition, the structure of the base also forms an air supply port communicating with the resin bearing member, and the static pressure gas bearing can be assembled simply by joining the resin bearing member and the base. Mass production of gas bearings is possible, and an inexpensive static pressure gas bearing can be provided.

しかしながら、特許文献４に記載された静圧気体軸受における空気吹出口は、射出成形で形成されるため、その直径が０．２〜０．４ｍｍ程度の比較的大きな直径の自成絞りあるいはオリフィス形状となり、当該空気吹出口からの給気吹出量が多すぎて自励振動を起こす虞があり、やはり実用化するには改良が必要である。   However, since the air outlet in the static pressure gas bearing described in Patent Document 4 is formed by injection molding, a self-contained throttle or orifice shape having a relatively large diameter of about 0.2 to 0.4 mm. Therefore, there is a risk that the amount of air supply from the air outlet will be too large and cause self-excited vibration.

本発明は上記諸点に鑑みてなされたものであり、その目的とするところは、大量生産が可能で安価な静圧気体軸受及びこの静圧気体軸受を用いた直動案内装置を提供することにある。   The present invention has been made in view of the above points, and an object of the present invention is to provide a static pressure gas bearing that can be mass-produced and is inexpensive, and a linear motion guide device that uses the static pressure gas bearing. is there.

本発明の静圧気体軸受は、基部、該基部の一方の面の外周縁に突設されている円筒突出部及び一端では基部の一方の面で開口している一方、他端では基部の外周面で開口する給気通路を備えた軸受基体と、基部の一方の面に対面している一方の面に形成された円環状凹部、他方の面で開口した環状凹溝及び一端では環状凹溝に連通していると共に他端では円環状凹部の円環状底面で開口した自成絞りとしての複数個の空気吹出孔を有した合成樹脂製の軸受体とを具備しており、該軸受体は、一方の面に隣接する外周面を基部の円筒突出部の内面に嵌合させ、当該嵌合部において接着されて、軸受基体に一体化されており、環状凹溝は、少なくとも０．３ｍｍの幅と、少なくとも０．０１ｍｍの深さとを有しており、空気吹出孔は、その一端で少なくとも３０μｍの直径を有して、円環状凹部と環状凹溝との間で自成絞りを形成していることを特徴とする。   The hydrostatic gas bearing according to the present invention has a base, a cylindrical projecting portion projecting from the outer peripheral edge of one surface of the base, and an opening at one surface of the base at one end, and an outer periphery of the base at the other end. A bearing base having an air supply passage that opens on the surface, an annular recess formed on one surface facing one surface of the base, an annular groove opened on the other surface, and an annular groove on one end And a synthetic resin bearing body having a plurality of air blowing holes as a self-contained aperture opened at the annular bottom surface of the annular recess at the other end. The outer peripheral surface adjacent to one surface is fitted to the inner surface of the cylindrical protrusion of the base, and is bonded to the fitting portion and integrated with the bearing base, and the annular groove is at least 0.3 mm. Having a width and a depth of at least 0.01 mm, and the air blowing hole at one end thereof Have a diameter of 30μm even without, characterized in that it forms a self-formed aperture between the annular recess and the annular groove.

本発明の静圧気体軸受によれば、合成樹脂製の軸受体は、一方の面に隣接する外周面を基部の円筒突出部の内面に嵌合させると共に、当該嵌合部において接着剤により接着されて軸受基体に一体化されており、また、合成樹脂製の軸受体が他方の面で開口した環状凹溝及び一端では環状凹溝に連通していると共に他端では円環状凹部に開口した複数個の空気吹出孔を有しており、環状凹溝が少なくとも０．３ｍｍの幅と、少なくとも０．０１ｍｍの深さを有しており、空気吹出孔は、その一端で少なくとも３０μｍの直径を有して、円環状凹部と環状凹溝との間で自成絞りを形成しており、当該環状凹溝及び複数個の空気吹出孔を機械加工によることなく形成されているため、大量生産が可能で、安価な製作が可能となる。   According to the hydrostatic gas bearing of the present invention, the synthetic resin bearing body is fitted with the outer peripheral surface adjacent to one surface to the inner surface of the cylindrical protruding portion of the base, and is bonded with an adhesive at the fitting portion. The synthetic resin bearing body is connected to the annular concave groove opened at the other surface and the annular concave groove at one end and opened to the annular concave portion at the other end. A plurality of air blowing holes, the annular groove has a width of at least 0.3 mm and a depth of at least 0.01 mm, and the air blowing hole has a diameter of at least 30 μm at one end thereof; A self-contained throttle is formed between the annular recess and the annular groove, and the annular recess and the plurality of air blowing holes are formed without machining, so that mass production is possible. It is possible and inexpensive to manufacture.

好ましい例では、環状凹溝は、０．３〜１．０ｍｍ又は０．３〜０．７ｍｍの幅と、０．０１〜０．０５ｍｍ又は０．０１〜０．０３ｍｍの深さとを有しており、該空気吹出孔は、その一端で３０〜１２０μｍの直径を有している。   In a preferred example, the annular groove has a width of 0.3 to 1.0 mm or 0.3 to 0.7 mm and a depth of 0.01 to 0.05 mm or 0.01 to 0.03 mm. The air blowing hole has a diameter of 30 to 120 μm at one end thereof.

環状凹溝及び空気吹出孔の夫々は、好ましくは、レーザー加工により形成されている。加工用レーザーとしては、炭酸ガスレーザー、ＹＡＧレーザー、ＵＶレーザー、エキシマレーザー等から選択される。   Each of the annular concave groove and the air blowing hole is preferably formed by laser processing. The processing laser is selected from a carbon dioxide laser, a YAG laser, a UV laser, an excimer laser, and the like.

環状凹溝及び空気吹出孔の夫々をレーザー加工により形成すると、切削等の機械加工等に比較して、瞬時にこれらを形成でき、大量生産が可能となるばかりでなく、安価に製作することができる。   If each of the annular concave groove and the air blowing hole is formed by laser processing, these can be formed instantaneously compared with machining such as cutting, which enables mass production and can be manufactured at low cost. it can.

本発明の静圧気体軸受において、軸受基体の他方の面には、球体受圧凹部が形成されていてもよい。球体受圧凹部は、該他方の面で開口した截頭円錐凹部あるいは凹球部からなり、これらの球体受圧凹部は、軸受基体の他方の面に直接形成されていてもよい。   In the static pressure gas bearing of the present invention, a spherical pressure receiving recess may be formed on the other surface of the bearing base. The spherical pressure receiving concave portion is a frustoconical concave portion or a concave spherical portion opened on the other surface, and these spherical pressure receiving concave portions may be directly formed on the other surface of the bearing base.

本発明の静圧気体軸受において、軸受基体の他方の面には、当該他方の面で開口する円柱状凹部が形成されており、該円柱状凹部には、駒が嵌合固定されており、球体受圧凹部は、軸受基体の他方の面側の該駒の一方の面で開口すると共に当該駒に形成された截頭円錐面を有していてもよい。   In the static pressure gas bearing of the present invention, the other surface of the bearing base is formed with a cylindrical recess that opens on the other surface, and a piece is fitted and fixed to the cylindrical recess. The spherical body pressure-receiving recess may open on one surface of the piece on the other surface side of the bearing base and have a truncated conical surface formed on the piece.

本発明の静圧気体軸受において、軸受基体の他方の面には、当該他方の面で開口する円柱状凹部が形成されており、該円柱状凹部には、駒が嵌合固定されており、球体受圧凹部は、軸受基体の他方の面側の該駒の一方の面で開口すると共に当該駒に形成された凹球面を有していてもよい。   In the static pressure gas bearing of the present invention, the other surface of the bearing base is formed with a cylindrical recess that opens on the other surface, and a piece is fitted and fixed to the cylindrical recess. The spherical body pressure-receiving recess may open on one surface of the piece on the other surface side of the bearing base and have a concave spherical surface formed on the piece.

軸受基体の他方の面に球体受圧凹部を備えた静圧気体軸受においては、該球体受圧凹部に、例えばボールスタッドの球体が摺接して配されることにより、静圧気体軸受に該球体回りの自動調芯機能が付加されるようになっていてもよい。   In a static pressure gas bearing having a spherical pressure receiving recess on the other surface of the bearing base, a ball stud sphere, for example, is placed in sliding contact with the spherical pressure receiving recess, so that the static pressure gas bearing is moved around the sphere. An automatic alignment function may be added.

本発明の静圧気体軸受において、軸受体は、環状凹溝に加えて、その他方の面に形成されていると共に、該環状凹溝の外側に該環状凹溝を囲む大径環状凹溝と、一方の端部が該環状凹溝に開口すると共に他方の端部が大径環状凹溝に開口する複数個の第一の放射状凹溝と、該環状凹溝の内側に形成された小径環状凹溝と、一方の端部が環状凹溝に開口すると共に他方の端部が小径環状凹溝に開口する複数個の第二の放射状凹溝とを具備していてもよく、これら大径環状凹溝、小径環状凹溝並びに第一及び第二の放射状凹溝は、軸受体の他方の面に形成されているとよい。   In the hydrostatic gas bearing of the present invention, the bearing body is formed on the other surface in addition to the annular groove, and a large-diameter annular groove surrounding the annular groove outside the annular groove. A plurality of first radial grooves, one end of which opens into the annular groove and the other end of which opens into the large-diameter groove, and a small-diameter annular formed inside the annular groove. And a plurality of second radial grooves having one end opening into the annular groove and the other end opening into the small-diameter annular groove. The groove, the small-diameter annular groove, and the first and second radial grooves are preferably formed on the other surface of the bearing body.

この自動調芯機能が付加された静圧気体軸受は、被加工物の載置台の位置決め装置としての直動案内装置に用いられて好適である。すなわち、本発明の静圧気体軸受を具備した直動案内装置は、上案内面及び両側案内面を有する案内部材の外側に、上案内面に対面する上板及び両側案内面に対面する一対の側板を備えた横断面コの字型の可動テーブルが配されており、該可動テーブルの上板の下面及び側板の夫々の内面には、夫々ボールスタッドが球体を内方に向けて立設されており、該ボールスタッドと案内部材の上案内面及び両側案内面との間には、上記静圧気体軸受が球体受圧凹部を該ボールスタッドの球体に摺接させると共に、軸受体を案内部材の上案内面及び両側案内面に対面させて配されているとよい。   The static pressure gas bearing to which the automatic alignment function is added is suitable for use in a linear motion guide device as a positioning device for a work table. That is, the linear motion guide device having the static pressure gas bearing according to the present invention has a pair of an upper plate facing the upper guide surface and a pair of opposite guide surfaces on the outer side of the guide member having the upper guide surface and the both side guide surfaces. A U-shaped movable table with a side plate is arranged, and ball studs are erected on the lower surface of the upper plate of the movable table and the inner surfaces of the side plates, with the sphere facing inward. Between the ball stud and the upper guide surface and both guide surfaces of the guide member, the static pressure gas bearing slides the spherical pressure receiving recess into the ball stud sphere, and the bearing member is connected to the guide member. It is good to be arranged facing the upper guide surface and the both side guide surfaces.

上記直動案内装置によれば、軸受体の複数個の空気吹出孔から案内部材の上案内面及び両側案内面に圧縮空気を噴射することにより、軸受体と上案内面及び両側案内面との間に形成される空気潤滑膜によって可動テーブルを上案内面及び両側案内面に対して非接触の状態に保持することができる。そして、軸受体と上案内面及び両側案内面との間の軸受隙間が不均一であると、軸受隙間各部に圧力差が発生するが、その圧力差により、軸受隙間が均一となる方向に静圧気体軸受が自動調芯され、上案内面及び両側案内面に対して平行な状態が保持される。このため、案内部材及び可動テーブルの平行度、直角度等の部品精度を比較的粗い精度とすることができ、前記静圧気体軸受自体の低コストに加えて、安価な直動案内装置を提供することができる。   According to the above linear motion guide device, the compressed air is injected from the plurality of air blowing holes of the bearing body onto the upper guide surface and the both side guide surfaces of the guide member, whereby the bearing body and the upper guide surface and the both side guide surfaces are separated. The movable table can be held in a non-contact state with respect to the upper guide surface and both side guide surfaces by the air lubrication film formed therebetween. If the bearing gaps between the bearing body and the upper guide surface and both side guide surfaces are not uniform, a pressure difference will occur in each part of the bearing gap. The pressurized gas bearing is automatically aligned, and a state parallel to the upper guide surface and the both side guide surfaces is maintained. Therefore, the accuracy of parts such as the parallelism and perpendicularity of the guide member and movable table can be made relatively coarse, and in addition to the low cost of the static pressure gas bearing itself, an inexpensive linear motion guide device is provided. can do.

本発明の静圧気体軸受において、軸受体は、ポリアセタール樹脂、ポリアミド樹脂、ポリフェニレンサルファイド樹脂等の熱可塑性合成樹脂から形成されているのが好ましく、また軸受基体は、ポリアセタール樹脂、ポリアミド樹脂、ポリフェニレンサルファイド樹脂等の熱可塑性合成樹脂又はこれらの熱可塑性合成樹脂にガラス繊維、ガラス粉末、炭素繊維もしくは無機充填材を３０〜５０質量％含有した補強充填材含有熱可塑性合成樹脂あるいはアルミニウム又はアルミニウム合金から形成されているのが好ましい。これら合成樹脂製の軸受体及び軸受基体は、合成樹脂素材を機械加工して形成しても、金型を用いて射出成形により形成してもよい。   In the hydrostatic gas bearing of the present invention, the bearing body is preferably formed from a thermoplastic synthetic resin such as polyacetal resin, polyamide resin, polyphenylene sulfide resin, and the bearing base is made of polyacetal resin, polyamide resin, polyphenylene sulfide. Reinforced filler-containing thermoplastic synthetic resin or aluminum or aluminum alloy containing 30-50% by mass of glass fiber, glass powder, carbon fiber or inorganic filler in thermoplastic synthetic resin such as resin or these thermoplastic synthetic resins It is preferable. These synthetic resin bearing bodies and bearing bases may be formed by machining a synthetic resin material or by injection molding using a mold.

本発明によれば、大量生産が可能で安価な静圧気体軸受及びこの静圧気体軸受を用いた直動案内装置を提供することができる。   According to the present invention, it is possible to provide an inexpensive static pressure gas bearing capable of mass production and a linear motion guide device using the static pressure gas bearing.

図１は、本発明の実施の形態の好ましい例の平面説明図である。FIG. 1 is an explanatory plan view of a preferred example of an embodiment of the present invention. 図２は、図１のＩＩ−ＩＩ線矢視断面説明図である。2 is a cross-sectional explanatory view taken along the line II-II in FIG. 図３は、図１の底面説明図である。FIG. 3 is an explanatory bottom view of FIG. 図４は、図１の軸受体の底面説明図である。FIG. 4 is an explanatory bottom view of the bearing body of FIG. 図５は、図１の要部拡大断面説明図である。FIG. 5 is an enlarged cross-sectional explanatory diagram of a main part of FIG. 図６は、軸受基体の平面説明図である。FIG. 6 is an explanatory plan view of the bearing base. 図７は、図６のＶＩＩ−ＶＩＩ線矢視断面説明図である。7 is a cross-sectional explanatory view taken along line VII-VII in FIG. 図８は、軸受体の平面説明図である。FIG. 8 is an explanatory plan view of the bearing body. 図９は、図８のＩＸ−ＩＸ線矢視断面説明図である。9 is a cross-sectional explanatory view taken along line IX-IX in FIG. 図１０は、図８の底面説明図である。FIG. 10 is an explanatory bottom view of FIG. 図１１は、軸受体と軸受基体との組合体の断面説明図である。FIG. 11 is a cross-sectional explanatory view of an assembly of a bearing body and a bearing base. 図１２は、軸受体の他の実施の形態の平面説明図である。FIG. 12 is an explanatory plan view of another embodiment of the bearing body. 図１３は、軸受基体の他の実施の形態の底面説明図である。FIG. 13 is an explanatory bottom view of another embodiment of the bearing base. 図１４は、図１３のＸＩＶ−ＸＩＶ線矢視断面説明図である。14 is a cross-sectional explanatory view taken along the line XIV-XIV in FIG. 13. 図１５は、軸受体と軸受基体との組合体の断面説明図である。FIG. 15 is a cross-sectional explanatory view of an assembly of a bearing body and a bearing base. 図１６は、自動調芯機能を付加した静圧気体軸受の断面説明図である。FIG. 16 is a cross-sectional explanatory view of a static pressure gas bearing to which an automatic alignment function is added. 図１７は、軸受基体の更に他の実施の形態の底面説明図である。FIG. 17 is an explanatory bottom view of still another embodiment of the bearing base. 図１８は、図１７のＸＶＩＩＩ−ＸＶＩＩＩ線矢視断面説明図である。18 is a cross-sectional explanatory view taken along line XVIII-XVIII in FIG. 図１９は、軸受体と軸受基体との組合体の断面説明図である。FIG. 19 is a cross-sectional explanatory view of an assembly of a bearing body and a bearing base. 図２０は、自動調芯機能を付加した静圧気体軸受の断面説明図である。FIG. 20 is a cross-sectional explanatory view of a static pressure gas bearing to which an automatic alignment function is added. 図２１は、軸受基体の他の実施の形態の底面説明図である。FIG. 21 is an explanatory view of the bottom surface of another embodiment of the bearing base. 図２２は、図２１のＸＸＩＩ−ＸＸＩＩ線矢視断面説明図である。22 is a cross-sectional explanatory view taken along the line XXII-XXII in FIG. 図２３は、駒の断面説明図である。FIG. 23 is a cross-sectional explanatory diagram of the piece. 図２４は、駒を嵌合固定した軸受基体の断面説明図である。FIG. 24 is a cross-sectional explanatory view of a bearing base to which a piece is fitted and fixed. 図２５は、軸受体と軸受基体との組合体の断面説明図である。FIG. 25 is a cross-sectional explanatory view of an assembly of a bearing body and a bearing base. 図２６は、自動調芯機能を付加した静圧気体軸受の断面説明図である。FIG. 26 is a cross-sectional explanatory view of a static pressure gas bearing to which an automatic alignment function is added. 図２７は、駒の他の実施の形態の断面説明図である。FIG. 27 is a cross-sectional explanatory view of another embodiment of the piece. 図２８は、駒を嵌合固定した軸受基体の断面説明図である。FIG. 28 is a cross-sectional explanatory view of the bearing base with the pieces fitted and fixed. 図２９は、軸受体と軸受基体との組合体の断面説明図である。FIG. 29 is a cross-sectional explanatory view of an assembly of a bearing body and a bearing base. 図３０は、自動調芯機能を付加した静圧気体軸受の断面説明図である。FIG. 30 is a cross-sectional explanatory view of a static pressure gas bearing to which an automatic alignment function is added. 図３１は、直動案内装置の断面説明図である。FIG. 31 is a cross-sectional explanatory view of the linear motion guide device.

次に本発明を、図に示す好ましい実施の形態の例に基づいて更に詳細に説明する。なお、本発明はこれらの例に何等限定されないのである。   Next, the present invention will be described in more detail based on an example of a preferred embodiment shown in the drawings. The present invention is not limited to these examples.

図１から図５において、静圧気体軸受１は、好ましくは、ポリアセタール樹脂（ＰＯＭ）、ポリアミド樹脂（ＰＡ）、ポリフェニレンサルファイド樹脂（ＰＰＳ）などの熱可塑性合成樹脂、又はこれらの熱可塑性合成樹脂にガラス繊維、ガラス粉末、炭素繊維もしくは無機充填材を３０〜５０質量％含有した補強充填材含有熱可塑性合成樹脂、あるいはアルミニウム又はアルミニウム合金から形成されている軸受基体２と、軸受基体２に接着剤により接着一体化されていると共に好ましくはポリアセタール樹脂、ポリアミド樹脂、ポリフェニレンサルファイド樹脂などの熱可塑性合成樹脂から形成されている合成樹脂製の軸受体３とを具備している。   1 to 5, the static pressure gas bearing 1 is preferably made of a thermoplastic synthetic resin such as polyacetal resin (POM), polyamide resin (PA), polyphenylene sulfide resin (PPS), or these thermoplastic synthetic resins. Glass fiber, glass powder, carbon fiber or bearing filler 2 made of reinforcing filler-containing thermoplastic synthetic resin containing 30 to 50% by mass or aluminum or aluminum alloy, and adhesive to bearing substrate 2 And a bearing body 3 made of a synthetic resin, preferably made of a thermoplastic synthetic resin such as a polyacetal resin, a polyamide resin, or a polyphenylene sulfide resin.

軸受基体２は、特に、図６及び図７に示すように、基部４と、基部４の一方の平面視円形の面５の外周縁に軸方向Ｙの上方に向かって一体的に突設されている円筒突出部６と、基部４の他方の平面視円形の面７と、一端８では基部４の平面視円形の面５で開口している円形の開口部９を有する給気穴１０と、一端１１では給気穴１０に連通すると共に他端では基体４の外周面１２で開口する給気通路１３とを備えている。   As shown in FIGS. 6 and 7, in particular, the bearing base 2 is integrally protruded upward in the axial direction Y at the outer periphery of the base 4 and the circular surface 5 of one of the bases 4 in plan view. A cylindrical projection 6, the other circular surface 7 of the base 4 in plan view, and an air supply hole 10 having a circular opening 9 that is open at one end 8 on the circular surface 5 of the base 4 in plan view. The one end 11 communicates with the air supply hole 10, and the other end includes an air supply passage 13 that opens at the outer peripheral surface 12 of the base 4.

基部４の外周面１２に開口する給気通路１３の端部内周面１４には、雌ねじ１５が形成されており、雌ねじ１５には給気プラグ１６の雄ねじが螺合して、給気プラグ１６は軸受基体２の基部４の外周面１２に固定される。   A female screw 15 is formed on the inner peripheral surface 14 of the end of the air supply passage 13 that opens to the outer peripheral surface 12 of the base 4, and the male screw of the air supply plug 16 is screwed into the female screw 15. Is fixed to the outer peripheral surface 12 of the base 4 of the bearing base 2.

軸受体３は、特に、図８から図１０に示すように、基部４の一方の平面視円形の面５に対面している一方の平面視円形の面１７に形成されている円環状凹部１８と、他方の平面視円形の面１９で開口した環状凹溝２０と、一端２１では環状凹溝２０に連通していると共に他端２２では円環状凹部１８の円環状底面２４に開口した複数個の空気吹出孔２５と、一方の平面視円形の面１７に隣接する外周面２３とを有している。   As shown in FIGS. 8 to 10, the bearing body 3 particularly has an annular recess 18 formed on one planar surface 17 facing the one circular surface 5 of the base 4 facing the planar surface 5. And an annular groove 20 opened on the other circular surface 19 in plan view, and a plurality of one end 21 communicating with the annular groove 20 and the other end 22 opening on the annular bottom surface 24 of the annular recess 18. Air blowing holes 25 and an outer peripheral surface 23 adjacent to one circular surface 17 in plan view.

環状凹溝２０は、環状底面２６と、互いに対面する円筒側面２７とによって規定されており、環状凹溝２０は、少なくとも０．３ｍｍの幅Ｗと、少なくとも０．０１ｍｍの深さｄとを有しており、空気吹出孔２５は、その一端２１で、本例では一端２１から他端２２に亘って少なくとも３０μｍの直径Ｄを有して、円環状凹部１８と環状凹溝２０との間で自成絞りを形成している。   The annular groove 20 is defined by an annular bottom surface 26 and a cylindrical side surface 27 facing each other, and the annular groove 20 has a width W of at least 0.3 mm and a depth d of at least 0.01 mm. The air blowing hole 25 has a diameter D of at least 30 μm at one end 21 in this example from the one end 21 to the other end 22, and between the annular recess 18 and the annular recess 20. A self-contained diaphragm is formed.

円環状凹部１８は、空気吹出孔２５の他端２２が開口する円環状底面２４と、円環状底面２４の外縁に連接されている外周面２８と、円環状底面２４の内縁に連接されている内周面２９とにより規定されており、外周面２８及び内周面２９は、円環状底面２４から円環状凹部１８の開口部３０に向かうにつれて互いに離反して伸びた円環状の傾斜面３１及び３２からなっている。 The annular recess 18 is connected to the annular bottom surface 24 where the other end 22 of the air blowing hole 25 opens, the outer peripheral surface 28 connected to the outer edge of the annular bottom surface 24, and the inner edge of the annular bottom surface 24. The inner peripheral surface 29 defines the outer peripheral surface 28 and the inner peripheral surface 29. The annular inclined surface 31 and the annular inclined surface 31 extend away from each other toward the opening 30 of the annular recess 18 from the annular bottom surface 24. It consists of 32.

軸受体３は、一方の面１７に隣接する外周面２３を、軸受基体２の円筒突出部６の内面に嵌合させ、当該嵌合部において接着剤により接着されて軸受基体２に一体化される。   In the bearing body 3, the outer peripheral surface 23 adjacent to one surface 17 is fitted to the inner surface of the cylindrical protruding portion 6 of the bearing base 2, and is bonded to the bearing base 2 by an adhesive at the fitting portion. The

静圧気体軸受１においては、軸受体３の面１９での幅Ｗが少なくとも０．３ｍｍで、深さｄが少なくとも０．０１ｍｍの環状凹溝２０と、一端２１では環状凹溝２０に開口して他端２２では円環状凹部１８の円環状底面２４に開口する直径Ｄが少なくとも３０μｍの複数個の自成絞り形状の空気吹出孔２５とを例えばレーザー加工により瞬時に形成してもよい。   In the hydrostatic gas bearing 1, an annular groove 20 having a width W on the surface 19 of the bearing body 3 of at least 0.3 mm and a depth d of at least 0.01 mm and an annular groove 20 at one end 21 are opened. At the other end 22, a plurality of self-drawn air blowing holes 25 having a diameter D of at least 30 μm that open to the annular bottom surface 24 of the annular recess 18 may be formed instantaneously by, for example, laser processing.

以上の静圧気体軸受１では、軸受体３は軸受基体２に接着剤により一体化されているので、その製作が容易で、安価とすることができる。また、空気吹出孔２５は、少なくとも３０μｍの直径と極めて小径であり、空気吹出孔２５からの多量の空気噴射に起因する自励振動の発生を抑制することができる。   In the above-described hydrostatic gas bearing 1, since the bearing body 3 is integrated with the bearing base 2 with an adhesive, its manufacture is easy and the cost can be reduced. Further, the air blowing hole 25 has a diameter of at least 30 μm and a very small diameter, and can suppress the occurrence of self-excited vibration caused by a large amount of air injection from the air blowing hole 25.

次に図１から図５に示す静圧気体軸受１の製造方法の例を説明すると、まず、図６及び図７に示す補強充填材含有合成樹脂製あるいはアルミニウム又はアルミニウム合金製の軸受基体２と、図８から図１０に示す合成樹脂製の軸受体３であって、環状凹溝２０及び空気吹出孔２５を有していない軸受体３ａを準備し、図１１に示すように、軸受体３ａの円環状凹部１８の開口部３０を軸受基体２の給気穴１０の開口部９に連通させると共に、軸受体３ａの一方の面１７に隣接する外周面２３を、軸受基体２の円筒突出部６の内面に嵌合させたのち、当該嵌合部を接着剤により接着して軸受基体２と軸受体３ａとを一体化した組立体３３を形成する。   Next, an example of a manufacturing method of the hydrostatic gas bearing 1 shown in FIGS. 1 to 5 will be described. First, a bearing base 2 made of synthetic resin containing reinforcing filler or aluminum or aluminum alloy shown in FIGS. 8 to FIG. 10, a bearing body 3 made of synthetic resin, which does not have the annular groove 20 and the air blowing hole 25, is prepared. As shown in FIG. 11, the bearing body 3a is prepared. The annular recess 18 is communicated with the opening 9 of the air supply hole 10 of the bearing base 2, and the outer peripheral surface 23 adjacent to the one surface 17 of the bearing body 3 a is connected to the cylindrical protrusion of the bearing base 2. 6 is fitted to the inner surface of 6, and the fitting portion is bonded with an adhesive to form an assembly 33 in which the bearing base 2 and the bearing body 3a are integrated.

このように一体化された組立体３３における軸受体３ａの他方の面１９に、レーザー加工機によりレーザー照射し、幅Ｗが０．３〜１．０ｍｍ、深さｄが０．０１〜０．０５ｍｍの環状凹溝２０と、環状凹溝２０を規定する環状底面２６に、環状底面２６から軸受体３ａを貫通して円環状凹部１８の円環状底面２４に開口する直径Ｄが少なくとも３０μｍ、好ましくは３０〜１２０μｍの複数個の自成絞り形状の空気吹出孔２５とを形成し、静圧気体軸受１を作製する。   The other surface 19 of the bearing body 3a in the assembly 33 thus integrated is irradiated with laser by a laser processing machine, the width W is 0.3 to 1.0 mm, and the depth d is 0.01 to 0.00. An annular groove 20 of 05 mm and an annular bottom surface 26 defining the annular groove 20 have a diameter D of at least 30 μm, preferably penetrating the bearing body 3a from the annular bottom surface 26 and opening to the annular bottom surface 24 of the annular recess 18. Forms a plurality of self-drawn air blowing holes 25 of 30 to 120 μm to produce a static pressure gas bearing 1.

用いる加工用レーザーとしては、炭酸ガスレーザー、ＹＡＧレーザー、ＵＶレーザー又はエキシマレーザー等から選択されるが、好ましくは、炭酸ガスレーザーを用いる。   The processing laser to be used is selected from a carbon dioxide laser, a YAG laser, a UV laser, an excimer laser, and the like. Preferably, a carbon dioxide laser is used.

直径３０ｍｍの円弧を中心として幅０．５ｍｍ、深さ０．０５ｍｍの環状凹溝２０は、レーザー出力９．５Ｗの炭酸ガスレーザーを使用して、スキャンスピード１０００ｍｍ／ｓ、重ね印字数１回、加工時間２秒でポリフェニレンサルファイド樹脂から形成された軸受体３ａの面１９に形成、加工することができ、また、環状凹溝２０の環状底面２６に、環状底面２６から軸受体３ａを貫通して円環状凹部１８の円環状底面２４で開口する直径０．０６ｍｍの自成絞り形状の空気吹出孔２５は、レーザー出力１４Ｗ、加工時間１５秒で円周方向に１０等配の位置に１０個加工することができた。   An annular groove 20 having a width of 0.5 mm and a depth of 0.05 mm centered on an arc having a diameter of 30 mm uses a carbon dioxide laser with a laser output of 9.5 W, a scanning speed of 1000 mm / s, and the number of overprints once. It can be formed and processed on the surface 19 of the bearing body 3a formed from polyphenylene sulfide resin in a processing time of 2 seconds, and passes through the bearing body 3a from the annular bottom surface 26 to the annular bottom surface 26 of the annular groove 20. Ten self-drawn air blow holes 25 having a diameter of 0.06 mm opened at the annular bottom surface 24 of the annular recess 18 are machined at 10 equally spaced positions in the circumferential direction with a laser output of 14 W and a machining time of 15 seconds. We were able to.

上記の静圧気体軸受１の軸受体３は、一個の環状凹溝２０を具備しているが、環状凹溝２０に加えて、軸受体３は、図１２に示すように、軸受体３の他方の面１９に形成されていると共に、環状凹溝２０の外側に環状凹溝２０を囲むと共に環状凹溝２０と同心の大径環状凹溝３４と、一方の端部３５が環状凹溝２０に開口すると共に他方の端部３６が大径環状凹溝３４に開口する複数個の放射状凹溝３７と、環状凹溝２０の内側に形成されていると共に環状凹溝２０と同心の小径環状凹溝３８と、一方の端部３９が環状凹溝２０に開口すると共に他方の端部４０が小径環状凹溝３８に開口する複数個の放射状凹溝４１とを具備していてもよい。   The bearing body 3 of the static pressure gas bearing 1 includes one annular groove 20. In addition to the annular groove 20, the bearing body 3 includes a bearing body 3 as shown in FIG. 12. A large-diameter annular groove 34 that is formed on the other surface 19 and surrounds the annular groove 20 outside the annular groove 20 and is concentric with the annular groove 20, and one end 35 is the annular groove 20. And a plurality of radial grooves 37 whose other end 36 opens into the large-diameter annular groove 34 and a small-diameter annular groove formed inside the annular groove 20 and concentric with the annular groove 20. The groove 38 and a plurality of radial grooves 41 whose one end 39 opens into the annular groove 20 and whose other end 40 opens into the small-diameter annular groove 38 may be provided.

図１２に示す軸受体３を有した静圧気体軸受１では、環状凹溝２０に給気された圧縮空気は、放射状溝３７及び４１を介して大径環状凹溝３４及び小径環状凹溝３８に供給されるので、供給面積が大きくなり、例えば物品の浮上において、安定した浮上を行うことができる。   In the hydrostatic gas bearing 1 having the bearing body 3 shown in FIG. 12, the compressed air supplied to the annular groove 20 passes through the radial grooves 37 and 41 and the large diameter annular groove 34 and the small diameter annular groove 38. Therefore, the supply area is increased, and stable levitation can be performed, for example, when the article is levitated.

図１３から図１６は、静圧気体軸受１の他の実施の形態を示すもので、軸受基体２の他方の平面視円形の面７の中央部には、面７に平面視円形の開口部４２を有する球体受圧凹部４３が形成されており、球体受圧凹部４３は、平面視円形の底面４４と、底面４４から開口部４２にかけて末広がりに伸びる截頭円錐面４５とによって規定される截頭円錐凹部４６を有している。   FIGS. 13 to 16 show another embodiment of the static pressure gas bearing 1, and the center portion of the other circular surface 7 of the bearing base 2 has a circular opening on the surface 7. A spherical pressure receiving recess 43 having 42 is formed, and the spherical pressure receiving recess 43 is a truncated cone defined by a circular bottom surface 44 in plan view and a truncated cone surface 45 extending from the bottom surface 44 to the opening 42 in a divergent manner. A recess 46 is provided.

截頭円錐凹部４６を有する球体受圧凹部４３を備えた軸受基体２は、静圧気体軸受１と同様に、給気穴１０の開口部９を、軸受体３の円環状凹部１８の開口部３０に連通させると共に、軸受体３の一方の面１７に隣接する外周面２３を、軸受基体２の円筒突出部６の内面に嵌合させたのち、当該嵌合部を接着剤により接着して軸受基体２と軸受体３とを一体化した組立体４７を形成する。   The bearing base 2 including the spherical pressure receiving recess 43 having the truncated conical recess 46 is similar to the static pressure gas bearing 1 in that the opening 9 of the air supply hole 10 is replaced with the opening 30 of the annular recess 18 of the bearing 3. The outer peripheral surface 23 adjacent to the one surface 17 of the bearing body 3 is fitted to the inner surface of the cylindrical protruding portion 6 of the bearing base 2, and then the fitting portion is bonded with an adhesive. An assembly 47 in which the base body 2 and the bearing body 3 are integrated is formed.

このように一体化された組立体４７における軸受体３の他方の面１９に、レーザー加工機によりレーザー照射し、幅Ｗが０．３〜１．０ｍｍ、深さｄが０．０１〜０．０５ｍｍの環状凹溝２０と、環状凹溝２０を規定する環状底面２６に、環状底面２６から軸受体３を貫通して円環状凹部１８の円環状底面２４で開口する直径Ｄが少なくとも３０μｍ、好ましくは３０〜１２０μｍの複数個の自成絞り形状の空気吹出孔２５を形成し、静圧気体軸受１を作製する。   The other surface 19 of the bearing body 3 in the assembly 47 integrated in this way is irradiated with laser by a laser processing machine, and the width W is 0.3 to 1.0 mm and the depth d is 0.01 to 0.00. An annular groove 20 having a diameter of 05 mm and an annular bottom surface 26 defining the annular groove 20 have a diameter D of at least 30 μm, preferably penetrating the bearing body 3 from the annular bottom surface 26 and opening at the annular bottom surface 24 of the annular recess 18. Forms a plurality of self-drawn air blowing holes 25 of 30 to 120 [mu] m to produce a static pressure gas bearing 1.

このように形成された静圧気体軸受１には、図１６に示すように、軸受基体２の球体受圧凹部４３の截頭円錐面４５にボールスタッド４８の球体４９が摺接して配されることにより、自動調芯機能が付加される。   In the static pressure gas bearing 1 formed in this way, as shown in FIG. 16, a sphere 49 of a ball stud 48 is arranged in sliding contact with a frustoconical surface 45 of a sphere pressure receiving recess 43 of the bearing base 2. Thus, an automatic alignment function is added.

図１７から図２０は、静圧気体軸受１の更に他の実施の形態を示すもので、軸受基体２の他方の平面視円形の面７の中央部には、面７に平面視円形の開口部４２を有する球体受圧凹部４３が形成されており、球体受圧凹部４３は、平面視円形の底面４４と、底面４４から開口部４２にかけて広がる凹球面５０とによって規定される凹球部５１を有している。   FIGS. 17 to 20 show still another embodiment of the static pressure gas bearing 1. In the center portion of the other circular surface 7 in the plan view of the bearing base 2, a circular opening in the plan view is formed in the surface 7. A spherical pressure receiving recess 43 having a portion 42 is formed, and the spherical pressure receiving recess 43 has a concave spherical portion 51 defined by a circular bottom surface 44 and a concave spherical surface 50 extending from the bottom surface 44 to the opening 42. doing.

凹球部５１を有する球体受圧凹部４３を備えた軸受基体２は、静圧気体軸受１と同様に、給気穴１０の開口部９を、軸受体３の円環状凹部１８の開口部３０に連通させると共に、軸受体３の一方の面１７に隣接する外周面２３を、軸受基体２の円筒突出部６の内面に嵌合させたのち、当該嵌合部を接着剤により接着して軸受基体２と軸受体３とを一体化した組立体５２を形成する。   The bearing base 2 provided with the spherical pressure receiving recess 43 having the concave spherical portion 51 has the opening 9 of the air supply hole 10 as the opening 30 of the annular concave portion 18 of the bearing body 3, as in the static pressure gas bearing 1. The outer peripheral surface 23 adjacent to the one surface 17 of the bearing body 3 is fitted to the inner surface of the cylindrical projecting portion 6 of the bearing base 2 and then the fitting portion is adhered with an adhesive. 2 and the bearing body 3 are integrated.

このように一体化された組立体５２における軸受体３の他方の面１９に、レーザー加工機によりレーザー照射し、幅Ｗが０．３〜１．０ｍｍ、深さｄが０．０１〜０．０５ｍｍの環状凹溝２０と、環状凹溝２０を規定する環状底面２６に、環状底面２６から軸受体３を貫通して円環状凹部１８の円環状底面２４で開口する直径Ｄが少なくとも３０μｍ、好ましくは３０〜１２０μｍの複数個の自成絞り形状の空気吹出孔２５を形成し、静圧気体軸受１を作製する。   The other surface 19 of the bearing body 3 in the assembly 52 integrated in this way is irradiated with laser by a laser processing machine, the width W is 0.3 to 1.0 mm, and the depth d is 0.01 to 0.00. An annular groove 20 having a diameter of 05 mm and an annular bottom surface 26 defining the annular groove 20 have a diameter D of at least 30 μm, preferably penetrating the bearing body 3 from the annular bottom surface 26 and opening at the annular bottom surface 24 of the annular recess 18. Forms a plurality of self-drawn air blowing holes 25 of 30 to 120 [mu] m to produce a static pressure gas bearing 1.

このように形成された静圧気体軸受１には、図２０に示すように、軸受基体２の球体受圧凹部４３の凹球面５０にボールスタッド４８の球体４９が摺接して配されることにより、自動調芯機能が付加される。   In the static pressure gas bearing 1 formed in this way, as shown in FIG. 20, the spherical body 49 of the ball stud 48 is arranged in sliding contact with the concave spherical surface 50 of the spherical body pressure-receiving concave portion 43 of the bearing base 2. An automatic alignment function is added.

図２１から図２６は、自動調芯機能が付加された静圧気体軸受１の他の実施の形態を示すものである。軸受基体２の他方の平面視円形の面７の中央部には、面７で開口する円形の底面５４を有した円柱状凹部５５が形成されており、円柱状凹部５５には、図２３に示すように、円柱体５６と、一端５７で円柱体５６の一方の面５８で開口する円孔５９と、円孔５９の他端６０に連接し、他端６０から円柱体５６の他方の面６１に向けて末広がりに伸びると共に他方の面６１で開口する截頭円錐面６２を有する凹部６３を備えた駒６４が一方の面５８を円柱状凹部５５の底面５４に向けて、かつ、他方の面６１が軸受基体２の他方の面７と面一となって嵌合固定されている。球体受圧凹部４３は、斯かる截頭円錐面６２を有している。   21 to 26 show another embodiment of the static pressure gas bearing 1 to which an automatic alignment function is added. A cylindrical recess 55 having a circular bottom surface 54 opened at the surface 7 is formed at the center of the other circular surface 7 of the bearing base 2 in plan view. As shown, a cylindrical body 56, a circular hole 59 that opens at one surface 58 of the cylindrical body 56 at one end 57, and the other surface 60 of the cylindrical body 56 from the other end 60 are connected to the other end 60 of the circular hole 59. A piece 64 provided with a recess 63 having a frustoconical surface 62 extending toward the end 61 and opening at the other surface 61 has one surface 58 directed toward the bottom surface 54 of the cylindrical recess 55 and the other The surface 61 is flush with and fixed to the other surface 7 of the bearing base 2. The spherical pressure receiving recess 43 has such a truncated conical surface 62.

駒６４を嵌合固定した軸受基体２は、前記静圧気体軸受１と同様に、給気穴１０の開口部９を軸受体３の円環状凹部１８の開口部３０に連通させると共に、軸受体３の一方の面１７に隣接する外周面２３を、軸受基体２の円筒突出部６の内面に嵌合させたのち、当該嵌合部を接着剤により接着して軸受基体２と軸受体３とを一体化した組立体６５を形成する。   The bearing base 2 to which the piece 64 is fitted and fixed communicates the opening 9 of the air supply hole 10 to the opening 30 of the annular recess 18 of the bearing body 3 and the bearing body, as in the static pressure gas bearing 1. 3 is fitted to the inner surface of the cylindrical protrusion 6 of the bearing base 2 and the fitting part is bonded with an adhesive to bond the bearing base 2 and the bearing body 3 to each other. To form an integrated assembly 65.

このように一体化された組立体６５における軸受体３の他方の面１９に、レーザー加工機によりレーザー照射し、幅Ｗが０．３〜１．０ｍｍ、深さｄが０．０１〜０．０５ｍｍの環状凹溝２０と、環状凹溝２０を規定する環状底面２６に、環状底面２６から軸受体３を貫通して円環状凹部１８の円環状底面２４で開口する直径Ｄが少なくとも３０μｍ、好ましくは３０〜１２０μｍの複数個の自成絞り形状の空気吹出孔２５を形成し、静圧気体軸受１を作製する。   The other surface 19 of the bearing body 3 in the assembly 65 integrated in this way is irradiated with a laser by a laser processing machine, the width W is 0.3 to 1.0 mm, and the depth d is 0.01 to 0.00. An annular groove 20 having a diameter of 05 mm and an annular bottom surface 26 defining the annular groove 20 have a diameter D of at least 30 μm, preferably penetrating the bearing body 3 from the annular bottom surface 26 and opening at the annular bottom surface 24 of the annular recess 18. Forms a plurality of self-drawn air blowing holes 25 of 30 to 120 [mu] m to produce a static pressure gas bearing 1.

このように形成された静圧気体軸受１には、図２６に示すように、軸受基体２の円柱状凹部５５に嵌合固定された駒６４の凹部６３の截頭円錐面６２にボールスタッド４８の球体４９が摺接して配されることにより、自動調芯機能が付加される。   As shown in FIG. 26, the static pressure gas bearing 1 formed in this way has a ball stud 48 on the truncated conical surface 62 of the recess 63 of the piece 64 fitted and fixed to the cylindrical recess 55 of the bearing base 2. The spherical body 49 is arranged so as to be in sliding contact with each other, whereby an automatic alignment function is added.

図２７から図３０は、自動調芯機能が付加された静圧気体軸受１の更に他の実施の形態を示すものである。図２２に示すように軸受基体２の他方の平面視円形の面７の中央部には、面７で開口する円形の底面５４を有する円柱状凹部５５が形成されており、円柱状凹部５５には、図２７に示すように、円柱体５６と、一端５７で円柱体５６の一方の面５８で開口する円孔５９と、円孔５９の他端６０に連接し、他端６０から円柱体５６の他方の面６１に向けて他方の面６１で開口する凹球面６６を有する凹部６３を備えた駒６４が一方の面５８を円柱状凹部５５の底面５４に向けて、かつ、他方の面６１が軸受基体２の他方の面７と面一となって嵌合固定されている。球体受圧凹部４３は、斯かる凹球面６６を有している。   27 to 30 show still another embodiment of the static pressure gas bearing 1 to which an automatic alignment function is added. As shown in FIG. 22, a cylindrical recess 55 having a circular bottom surface 54 opened at the surface 7 is formed at the center of the other circular surface 7 in plan view of the bearing base 2. 27, a cylindrical body 56, a circular hole 59 opened at one end 58 of the cylindrical body 56 at one end 57, and the other end 60 of the circular hole 59 are connected to each other. A piece 64 having a concave portion 63 having a concave spherical surface 66 that opens at the other surface 61 toward the other surface 61 of 56 has one surface 58 directed toward the bottom surface 54 of the cylindrical concave portion 55 and the other surface. 61 is fitted and fixed to be flush with the other surface 7 of the bearing base 2. The spherical pressure receiving recess 43 has such a concave spherical surface 66.

駒６４を嵌合固定した軸受基体２は、前記静圧気体軸受１と同様に、給気穴１０の開口部９を軸受体３の円環状凹部１８の開口部３０に連通させると共に、軸受体３の一方の面１７に隣接する外周面２３を、軸受基体２の円筒突出部６の内面に嵌合させたのち、当該嵌合部を接着剤により接着して軸受基体２と軸受体３とを一体化した組立体６７を形成する。   The bearing base 2 to which the piece 64 is fitted and fixed communicates the opening 9 of the air supply hole 10 to the opening 30 of the annular recess 18 of the bearing body 3 and the bearing body, as in the static pressure gas bearing 1. 3 is fitted to the inner surface of the cylindrical protrusion 6 of the bearing base 2 and the fitting part is bonded with an adhesive to bond the bearing base 2 and the bearing body 3 to each other. Is formed as an integrated body 67.

このように一体化された組立体６７における軸受体３の他方の面１９に、レーザー加工機によりレーザー照射し、幅Ｗが０．３〜１．０ｍｍ、深さｄが０．０１〜０．０５ｍｍの環状凹溝２０と、環状凹溝２０を規定する環状底面２６に、環状底面２６から軸受体３を貫通して円環状凹部１８の円環状底面２４で開口する直径Ｄが少なくとも３０μｍ、好ましくは３０〜１２０μｍの複数個の自成絞り形状の空気吹出孔２５を形成し、静圧気体軸受１を作製する。   The other surface 19 of the bearing body 3 of the assembly 67 integrated in this way is irradiated with laser by a laser processing machine, and the width W is 0.3 to 1.0 mm and the depth d is 0.01 to 0.00. An annular groove 20 having a diameter of 05 mm and an annular bottom surface 26 defining the annular groove 20 have a diameter D of at least 30 μm, preferably penetrating the bearing body 3 from the annular bottom surface 26 and opening at the annular bottom surface 24 of the annular recess 18. Forms a plurality of self-drawn air blowing holes 25 of 30 to 120 [mu] m to produce a static pressure gas bearing 1.

このように形成された静圧気体軸受１には、図３０に示すように、軸受基体２の円柱状凹部５５に嵌合固定された駒６４の凹部６３の凹球面６６にボールスタッド４８の球体４９が摺接して配されることにより、自動調芯機能が付加される。   As shown in FIG. 30, the static pressure gas bearing 1 formed in this way has a spherical body of a ball stud 48 on a concave spherical surface 66 of a concave portion 63 of a piece 64 fitted and fixed to a cylindrical concave portion 55 of a bearing base 2. When 49 is placed in sliding contact, an automatic alignment function is added.

軸受基体２の他方の平面視円形の面７の中央部に形成された円柱状凹部５５に嵌合固定された駒６４を摺動特性に優れた、例えば、ポリアセタール樹脂、ポリアミド樹脂、ポリエステル樹脂等の自己潤滑性を有する熱可塑性合成樹脂、あるいは銅又は銅合金等で形成することにより、駒６４の凹部６３の截頭円錐面６２あるいは凹球面６６とボールスタッド４８の球体４９との摺接を円滑に行わせることができる。   The piece 64 fitted and fixed in the cylindrical recess 55 formed in the center of the other circular surface 7 of the bearing base 2 in a plan view has excellent sliding characteristics, for example, polyacetal resin, polyamide resin, polyester resin, etc. The self-lubricating thermoplastic synthetic resin, or copper or copper alloy is used to make the sliding contact between the truncated conical surface 62 or the concave spherical surface 66 of the concave portion 63 of the piece 64 and the sphere 49 of the ball stud 48. It can be performed smoothly.

図３１は、図２６に示す静圧気体軸受１を用いた直動案内装置６８を示すもので、直動案内装置６８は、上案内面６９及び両側案内面７０及び７０を有する案内部材７１と、案内部材７１の外側に跨って配された上案内面６９に対面する上板７２及び両側案内面７０及び７０に対面する一対の側板７３及び７３を備えた横断面コの字型の可動テーブル７４と、可動テーブル７４の上板７２の下面７５及び側板７３及び７３の夫々の内面７６に球体４９を内方に向けて立設されたボールスタッド４８と、ボールスタッド４８と案内部材７１の上案内面６９及び両側案内面７０及び７０との間に駒６４の截頭円錐面６２をボールスタッド４８の球体４９に摺接させると共に、軸受体３の他方の面１９を案内部材７１の上案内面６９及び両側案内面７０及び７０に対面させて配された静圧気体軸受１とから形成されている。   FIG. 31 shows a linear motion guide device 68 using the static pressure gas bearing 1 shown in FIG. 26. The linear motion guide device 68 includes an upper guide surface 69 and guide members 71 having both side guide surfaces 70 and 70. Further, a U-shaped movable table having a U-shaped cross section provided with an upper plate 72 facing the upper guide surface 69 and straddling the guide member 71 and a pair of side plates 73 and 73 facing both side guide surfaces 70 and 70. 74, a ball stud 48 erected on the lower surface 75 of the upper plate 72 of the movable table 74 and the inner surfaces 76 of the side plates 73 and 73 with the sphere 49 facing inward, and the ball stud 48 and the guide member 71 The truncated conical surface 62 of the piece 64 is slidably brought into contact with the spherical body 49 of the ball stud 48 between the guide surface 69 and the both side guide surfaces 70 and 70, and the other surface 19 of the bearing body 3 is guided upward of the guide member 71. Surface 69 and both side guide surfaces 0 and is opposed to 70 are formed from the provided a hydrostatic gas bearing 1 Tokyo.

この直動案内装置６８によれば、軸受体３の複数個の空気吹出孔２５から案内部材７１の上案内面６９及び両側案内面７０及び７０に圧縮空気を噴射することにより、軸受体３の他方の面１９と案内部材７１の上案内面６９及び両側案内面７０及び７０との間に形成される空気潤滑膜によって可動テーブル７４を上案内面６９及び両側案内面７０及び７０に対して非接触の状態で保持することができる。そして、軸受体３と上案内面６９及び両側案内面７０及び７０との間の軸受隙間が不均一であると、軸受隙間各部に圧力差が発生するが、その圧力差により、軸受隙間が均一となる方向に静圧気体軸受１が自動調芯され、上案内面６９及び両側案内面７０及び７０に対して平行な状態が保たれる。このため、案内部材７１及び可動テーブル７４の平行度、直角度等の部品精度を比較的粗い精度とすることができ、静圧気体軸受１自体の低コストに加えて、直動案内装置６８の製作の容易化及びコストの低下を図ることができる。   According to this linear motion guide device 68, compressed air is injected from the plurality of air blowing holes 25 of the bearing body 3 to the upper guide surface 69 and the both side guide surfaces 70 and 70 of the guide member 71, thereby The movable table 74 is not moved against the upper guide surface 69 and the both side guide surfaces 70 and 70 by an air lubrication film formed between the other surface 19 and the upper guide surface 69 and both side guide surfaces 70 and 70 of the guide member 71. It can be held in contact. If the bearing gap between the bearing body 3 and the upper guide surface 69 and the both side guide surfaces 70 and 70 is not uniform, a pressure difference is generated in each part of the bearing gap. The bearing gap is uniform due to the pressure difference. In this direction, the static pressure gas bearing 1 is automatically aligned, and a state parallel to the upper guide surface 69 and the both side guide surfaces 70 and 70 is maintained. For this reason, the accuracy of parts such as the parallelism and perpendicularity of the guide member 71 and the movable table 74 can be made relatively coarse, and in addition to the low cost of the static pressure gas bearing 1 itself, Manufacturing can be facilitated and cost can be reduced.

直動案内装置６８においては、自動調芯機能が付加された静圧気体軸受１として、図２６に示すような静圧気体軸受１を使用したが、これに代えて、図１６、図２０及び図３０に示す静圧気体軸受１を使用してもよい。   In the linear motion guide device 68, the static pressure gas bearing 1 as shown in FIG. 26 is used as the static pressure gas bearing 1 to which the automatic alignment function is added. You may use the static pressure gas bearing 1 shown in FIG.

以上のように、軸受体と軸受基体とは、軸受体の一方の面に隣接する外周面を軸受基体の円筒突出部の内面に嵌合させたのち、当該嵌合部を接着剤により接着して一体化されているので、軸受体と軸受基体との接合面は強固に密封されており、軸受体の一方の面には、幅Ｗが０．３〜１．０ｍｍ、深さｄが０．０１〜０．０５ｍｍの環状凹溝と、環状凹溝を規定する環状底面に、環状底面から軸受体を貫通して円環状凹部の環状底面で開口する直径Ｄが少なくとも３０μｍの複数個の自成絞り形状の空気吹出孔が形成されており、当該環状凹溝及び空気吹出孔を機械加工によることなく形成できるので、安価な静圧気体軸受を提供できるばかりでなく、当該静圧気体軸受を用いた製作の容易化及びコストの低下を図ることができる直動案内装置を提供することができる。   As described above, after the outer peripheral surface adjacent to one surface of the bearing body is fitted to the inner surface of the cylindrical protruding portion of the bearing base, the fitting portion is bonded with an adhesive. Therefore, the joint surface between the bearing body and the bearing base is firmly sealed, and the width W is 0.3 to 1.0 mm and the depth d is 0 on one surface of the bearing body. An annular groove having a diameter of 0.01 to 0.05 mm, and an annular bottom surface defining the annular groove, a plurality of self having a diameter D of at least 30 μm that penetrates the bearing body from the annular bottom surface and opens at the annular bottom surface of the annular recess. An air blow hole having an aperture shape is formed, and the annular groove and the air blow hole can be formed without machining, so that not only an inexpensive static pressure gas bearing can be provided, but also the static pressure gas bearing Linear motion guide device that facilitates production and reduces costs It is possible to provide a.

１ 静圧基体軸受
２ 軸受基体
３ 軸受体
４ 基部
６ 円筒突出部
１３ 給気通路
１８ 円環状凹部
２０ 環状凹溝
２３ 外周面
２５ 空気吹出孔 DESCRIPTION OF SYMBOLS 1 Hydrostatic base bearing 2 Bearing base 3 Bearing body 4 Base part 6 Cylindrical protrusion part 13 Supply path 18 Annular recessed part 20 Annular recessed groove 23 Outer peripheral surface 25 Air blowing hole

Claims (9)

基部、該基部の一方の面の外周縁に突設されている円筒突出部及び一端では基部の一方の面で開口している一方、他端では基部の外周面で開口する給気通路を備えた軸受基体と、基部の一方の面に対面している一方の面に形成されていると共に当該基部の一方の面に対面している一方の面に開口部を有した円環状凹部、他方の面で開口した環状凹溝及び一端では環状凹溝に連通していると共に他端では円環状凹部の円環状底面で開口した自成絞りとしての複数個の空気吹出孔を有した合成樹脂製の軸受体とを具備しており、該軸受体は、一方の面に隣接する外周面を基部の円筒突出部の内面に嵌合させ、当該嵌合部において接着されて、軸受基体に一体化されており、環状凹溝は、少なくとも０．３ｍｍの幅と、少なくとも０．０１ｍｍの深さとを有しており、空気吹出孔は、その一端で少なくとも３０μｍの直径を有して、円環状凹部と環状凹溝との間で自成絞りを形成しており、円環状凹部は、円環状底面と、この円環状底面の外縁に連接されている外周面と、円環状底面の内縁に連接されている内周面とにより規定されており、円環状凹部を規定する外周面及び内周面は、円環状底面から円環状凹部の開口部に向かうにつれて互いに離反して伸びている静圧気体軸受。 A base, a cylindrical projecting portion projecting from the outer peripheral edge of one surface of the base, and an air supply passage opening at one end of the base at one end and opening at the outer peripheral surface of the base at the other end A bearing base, an annular recess formed on one surface facing one surface of the base and having an opening on one surface facing one surface of the base , and the other Made of synthetic resin having a plurality of air outlet holes as a self-contained throttle that is open at the annular bottom groove and one end communicating with the annular concave groove at one end and the other bottom opening at the annular bottom face of the annular concave portion The outer peripheral surface adjacent to one surface is fitted to the inner surface of the cylindrical protruding portion of the base, and is bonded to the fitting portion to be integrated with the bearing base. The annular groove is at least 0.3 mm wide and at least 0.01 mm deep. Has bets, air outlet holes have a diameter of at least 30μm at one end thereof, forms a self-formed aperture between the annular recess and the annular groove, the annular recess, a circular An outer peripheral surface and an inner periphery that are defined by an annular bottom surface, an outer peripheral surface that is connected to the outer edge of the annular bottom surface, and an inner peripheral surface that is connected to the inner edge of the annular bottom surface. The surface is a static pressure gas bearing that extends away from each other as it goes from the annular bottom to the opening of the annular recess . 環状凹溝は、０．３〜１．０ｍｍ又は０．３〜０．７ｍｍの幅と、０．０１〜０．０５ｍｍ又は０．０１〜０．０３ｍｍの深さとを有しており、該空気吹出孔は、その一端で３０〜１２０μｍの直径を有している請求項１に記載の静圧気体軸受。   The annular groove has a width of 0.3 to 1.0 mm or 0.3 to 0.7 mm and a depth of 0.01 to 0.05 mm or 0.01 to 0.03 mm. The static pressure gas bearing according to claim 1, wherein the blowout hole has a diameter of 30 to 120 μm at one end thereof. 軸受基体の他方の面には、球体受圧凹部が形成されている請求項１又は２に記載の静圧気体軸受。The static pressure gas bearing according to claim 1, wherein a spherical pressure receiving recess is formed on the other surface of the bearing base. 球体受圧凹部は、軸受基体の他方の面で開口する截頭円錐凹部を有している請求項３に記載の静圧気体軸受。The static pressure gas bearing according to claim 3, wherein the spherical pressure receiving recess has a frustoconical recess that opens on the other surface of the bearing base. 球体受圧凹部は、軸受基体の他方の面で開口する凹球部を有している請求項３に記載の静圧気体軸受。The static pressure gas bearing according to claim 3, wherein the spherical pressure receiving concave portion has a concave spherical portion that opens on the other surface of the bearing base. 軸受基体の他方の面には、当該他方の面で開口する円柱状凹部が形成されており、該円柱状凹部には、駒が嵌合固定されており、球体受圧凹部は、軸受基体の他方の面側の該駒の一方の面で開口すると共に当該駒に形成された截頭円錐面を有している請求項３に記載の静圧気体軸受。The other surface of the bearing base is formed with a cylindrical recess that opens at the other surface, and a piece is fitted and fixed to the cylindrical recess, and the spherical pressure receiving recess is the other of the bearing base. The static pressure gas bearing according to claim 3, wherein the static pressure gas bearing has an opening on one surface of the piece on the surface side and a truncated conical surface formed on the piece. 軸受基体の他方の面には、当該他方の面で開口する円柱状凹部が形成されており、該円柱状凹部には、駒が嵌合固定されており、球体受圧凹部は、軸受基体の他方の面側の該駒の一方の面で開口すると共に当該駒に形成された凹球面を有している請求項３に記載の静圧気体軸受。The other surface of the bearing base is formed with a cylindrical recess that opens at the other surface, and a piece is fitted and fixed to the cylindrical recess, and the spherical pressure receiving recess is the other of the bearing base. The static pressure gas bearing according to claim 3, wherein the static pressure gas bearing has an indented spherical surface formed in the piece and opening in one surface of the piece on the surface side. 軸受体は、環状凹溝に加えて、その他方の面に形成されていると共に、該環状凹溝の外側に該環状凹溝を囲む大径環状凹溝と、一方の端部が該環状凹溝に開口すると共に他方の端部が大径環状凹溝に開口する複数個の第一の放射状凹溝と、該環状凹溝の内側に形成された小径環状凹溝と、一方の端部が環状凹溝に開口すると共に他方の端部が小径環状凹溝に開口する複数個の第二の放射状凹溝とを具備している請求項１から７のいずれか一項に記載の静圧気体軸受。The bearing body is formed on the other surface in addition to the annular groove, and has a large-diameter annular groove surrounding the annular groove on the outside of the annular groove, and one end portion of the annular groove. A plurality of first radial grooves having an opening in the groove and the other end opening in the large-diameter annular groove; a small-diameter annular groove formed inside the annular groove; The static pressure gas according to any one of claims 1 to 7, comprising a plurality of second radial concave grooves that open in the annular groove and have the other end opened in the small-diameter annular groove. bearing. 上案内面及び両側案内面を有する案内部材の外側に、上案内面に対面する上板及び両側案内面に対面する一対の側板を備えた横断面コの字型の可動テーブルが配されており、該可動テーブルの上板の下面及び側板の夫々の内面には、夫々ボールスタッドが球体を内方に向けて立設されており、該ボールスタッドと案内部材の上案内面及び両側案内面との間には、請求項１から請求項８のいずれか一項に記載の静圧気体軸受が球体受圧凹部を該ボールスタッドの球体に摺接させると共に、軸受体を案内部材の上案内面及び両側案内面に対面させて配されていることを特徴とする直動案内装置。On the outside of the guide member having the upper guide surface and the both side guide surfaces, a U-shaped movable table having a U-shaped cross section having an upper plate facing the upper guide surface and a pair of side plates facing the both guide surfaces is arranged. In addition, ball studs are erected on the inner surfaces of the lower surface of the upper plate and the side plates of the movable table with the spheres facing inward, respectively. In the meantime, the static pressure gas bearing according to any one of claims 1 to 8 makes the spherical pressure receiving recess slide in contact with the spherical body of the ball stud, and the bearing body is connected to the upper guide surface of the guide member and A linear motion guide device, characterized in that it is arranged facing both side guide surfaces.
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TW101139982A TWI491815B (en) 2011-11-18 2012-10-29 Static pressure gas bearings and the use of the static pressure gas bearing linear motion guide device
KR1020120120450A KR20130055517A (en) 2011-11-18 2012-10-29 Hydrostatic gas bearing and linear motion guide device using thereof
CN2012104257487A CN103122932A (en) 2011-11-18 2012-10-30 Hydrostatic gas bearing and linear motion guide device using thereof
PCT/JP2012/007269 WO2013073166A1 (en) 2011-11-18 2012-11-13 Aerostatic bearing and linear motion guiding device using said aerostatic bearing
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TWI491815B (en) 2015-07-11
TW201326596A (en) 2013-07-01
CN103122932A (en) 2013-05-29
JP2013108557A (en) 2013-06-06
WO2013073166A1 (en) 2013-05-23
CN103842672A (en) 2014-06-04

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