JPH068650B2 - Hydrostatic bearing pad - Google Patents
Hydrostatic bearing padInfo
- Publication number
- JPH068650B2 JPH068650B2 JP62064811A JP6481187A JPH068650B2 JP H068650 B2 JPH068650 B2 JP H068650B2 JP 62064811 A JP62064811 A JP 62064811A JP 6481187 A JP6481187 A JP 6481187A JP H068650 B2 JPH068650 B2 JP H068650B2
- Authority
- JP
- Japan
- Prior art keywords
- bearing member
- air
- bearing
- housing
- pad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明は、静圧軸受パッドに関し、詳しくは工作機械や
測定機械などのテーブルに使用され、支持体との間のす
き間に供給される圧縮空気の静圧によって軸体を支持す
る静圧空気軸受のパッド構造に関する。Description: TECHNICAL FIELD The present invention relates to a hydrostatic bearing pad, and more specifically, to a compression used for a table of a machine tool, a measuring machine, or the like, which is supplied to a gap between the support and the support. The present invention relates to a pad structure of a static pressure air bearing that supports a shaft body by static pressure of air.
［従来の技術］ 従来のこの種の静圧軸受パッドは、例えば第５Ａ図およ
び第５Ｂ図に示すように構成されていた。ここで、11は
多孔質部材、例えば金属系焼結体による多孔質材料の軸
受部材であり、11Aはその軸受面、11Bは圧縮空気が供給
される側の面（以下で受圧面という）である。しかして
ここで、軸受部材11はその外周部を取囲むリング状の固
定部材12に収容されており、外周部と固定部材12とは接
着剤13によって接着されている。また、固定部材12はベ
ース部材14にねじ15によって固定される。このようにし
て構成された静圧軸受パッド10は図示しないスライド部
材等被承体の静圧案内部にねじ孔16を介して締着された
上、ベース部材14に設けられた給気孔17から圧縮空気が
空気室18に供給されるもので、空気は空気室18から多孔
質軸受部材11を経てその軸受面11A側に噴出され、被動
体との間に静圧の空気膜を形成して被動体を浮揚状態に
保つことができる。[Prior Art] A conventional hydrostatic bearing pad of this type is configured as shown in, for example, FIGS. 5A and 5B. Here, 11 is a porous member, for example, a bearing member made of a porous material made of a metal-based sintered body, 11A is a bearing surface thereof, and 11B is a surface to which compressed air is supplied (hereinafter referred to as a pressure receiving surface). is there. Here, the bearing member 11 is housed in the ring-shaped fixing member 12 surrounding the outer peripheral portion thereof, and the outer peripheral portion and the fixing member 12 are bonded by the adhesive 13. The fixing member 12 is fixed to the base member 14 with screws 15. The hydrostatic bearing pad 10 thus configured is fastened to the hydrostatic guide portion of a not-shown slide member such as a slide member through a screw hole 16 and then from an air supply hole 17 provided in the base member 14. Compressed air is supplied to the air chamber 18, and the air is jetted from the air chamber 18 to the bearing surface 11A side through the porous bearing member 11 to form a static pressure air film between the air bearing member and the driven body. The driven body can be kept in a levitated state.
第６Ａ図および第６Ｂ図は従来の別の形態の静圧軸受パ
ッド20を示す。本例は多孔質部材による軸受部材21と非
孔質の固定部材22とを別個に成形後一体焼結したもの
で、同様にして軸受部材21の受圧面11B側空気室18に被
承体静圧案内部から圧縮空気が供給される。6A and 6B show another conventional hydrostatic bearing pad 20. In this example, a bearing member 21 made of a porous member and a non-porous fixing member 22 are separately molded and then integrally sintered, and in the same manner, the pressure receiving surface 11B side air chamber 18 of the bearing member 21 has a stationary member. Compressed air is supplied from the pressure guide portion.
［発明が解決しようとする問題点］ しかしながら、従来の上述したような静圧軸受パッドに
おいては、パッドと支持体との間の支承すき間が通常の
場合僅か数μｍ程度であり、従って軸受部材および固定
部材の軸受面側の平面度，平行度とそのすき間寸法とに
は厳密な精度が要求され、加工が極めて難しい。その
上、軸受部材はその外周面のみが固定部材によって支持
されているので、加圧空気を空気室に供給すると、中央
部が外方に持ち上げられることによって弯曲し、軸受面
の平面度が損なわれてしまう。[Problems to be Solved by the Invention] However, in the conventional hydrostatic bearing pad as described above, the bearing gap between the pad and the support is normally only about several μm, and therefore the bearing member and Strict precision is required for the flatness and parallelism of the fixed member on the bearing surface side and the clearance dimension, and machining is extremely difficult. Moreover, since only the outer peripheral surface of the bearing member is supported by the fixing member, when pressurized air is supplied to the air chamber, the central portion is bent outward to bend and the flatness of the bearing surface is impaired. Get lost.
そこで、すき間寸法も均等性が失われてしまうことにな
り高精度の移動動作を必要とする機器への適用性が問題
となる。また、上述したような構造では１つの剛体とし
て見たときにその剛性が十分でない。Therefore, the clearance dimension is also lost in uniformity, which poses a problem of applicability to equipment that requires highly accurate movement operation. Moreover, in the structure as described above, the rigidity is not sufficient when viewed as one rigid body.
更にまた、軸受部材の多孔質材に多孔質グラファイトを
用いる場合、従来は各粒子の径が不均一であり、従って
後述するように開気孔の分布が一様でなく、また、開気
孔を連続させるために個々の開気孔も大きくなるように
してあった。そこで、開気孔の全体に占める容積割合、
すなわち気孔の分布率が高くなり、軸受面における単位
面積当り透過する気体流量が設計値に対して高くなり勝
ちで、その上、上述したように開気孔の分布も不均一と
なるため適切な均一流量が得られるようにする流量調整
という作業が必要であった。Furthermore, when porous graphite is used as the porous material of the bearing member, conventionally, the diameter of each particle is non-uniform, so that the distribution of open pores is not uniform as described later, and the open pores are continuous. In order to do so, the individual open pores were also made larger. Therefore, the volume ratio of the whole open pores,
That is, the distribution ratio of pores becomes high, the gas flow rate per unit area of the bearing surface tends to be higher than the design value, and in addition, as mentioned above, the distribution of open pores becomes non-uniform, so an appropriate uniform distribution is achieved. It was necessary to adjust the flow rate so that the flow rate could be obtained.
この流量調整作業は切削や研削等の仕上加工工程の後、
軸受面に樹脂等を塗布若しくは含浸させた上で気体透過
流量を測定しながら適切値が得られるまで溶剤により樹
脂を少量ずつ除去して均一化を図るもので、作業者の経
験や熟練度に頼らねばならず、品質の安定化が難しく、
また多くの手間を要し、多量生産する上での障害となっ
ていた。This flow rate adjustment work is performed after finishing processing steps such as cutting and grinding.
By coating or impregnating the bearing surface with resin, etc. and measuring the gas permeation flow rate, the resin is removed little by little with a solvent until a suitable value is obtained, to achieve uniformity. I have to rely on it, it is difficult to stabilize the quality,
In addition, it takes a lot of time and labor, which is an obstacle to mass production.
本発明の目的は、上述従来の問題点に着目し、その解決
を図るべく、均等な透過気体流量が得られ、しかも十分
な剛性が保たれることによってその軸受面に高い精度の
平面度が保たれるようにした高精度スライド機構等にも
好適な静圧軸受パッドを提供することにある。The object of the present invention is to pay attention to the above-mentioned conventional problems, and in order to solve the problems, a uniform permeated gas flow rate is obtained, and moreover, sufficient rigidity is maintained, so that the bearing surface has a high degree of flatness. Another object of the present invention is to provide a hydrostatic bearing pad suitable for a high precision slide mechanism or the like which is kept.
［問題点を解決するための手段］ かかる目的を達成するために、本発明は、被支持体また
は支持体のいずれか一方に固定され、その軸受部材を介
して軸受面に供給される加圧空気により前記支持体を移
動自在に支承するようにした静圧軸受パッドにおいて、
粒子の大きさおよび分布が均一なカーボン系多孔質グラ
ファイトの軸受部材と、前記軸受部材を収納する収納面
を有し、前記軸受部材に前記加圧空気を供給するために
前記収納面のほぼ中心部に設けられた給気孔および前記
給気孔を中心として同心円上に形成され、前記給気孔に
連通する複数の空気溝が配設されたハウジングとを具備
し、前記軸受部材の外周面と前記ハウジングの収納側面
および該ハウジングの前記空気溝間に形成された***面
と該***面に接する前記軸受部材の面との間をそれぞれ
接着剤で接着したことを特徴とするものである。[Means for Solving the Problems] In order to achieve such an object, the present invention provides a pressurizing device which is fixed to either a supported member or a supporting member and is supplied to a bearing surface via a bearing member thereof. In a hydrostatic bearing pad configured to movably support the support by air,
A bearing member of carbon-based porous graphite having a uniform size and distribution of particles, and a storage surface for storing the bearing member, and substantially the center of the storage surface for supplying the pressurized air to the bearing member. And a housing provided with a plurality of air grooves formed concentrically around the air supply hole and communicating with the air supply hole, the outer peripheral surface of the bearing member and the housing. And the surface of the bearing member that is in contact with the raised surface formed between the housing side surface and the air groove of the housing and the surface of the bearing member that is in contact with the raised surface.
［作 用］ 本発明によれば、軸受部材に粒子の大きさおよび分布が
均一なカーボン系多孔質グラファイトを使用し、かつ、
このような軸受部材を加圧空気供給用の給気孔およびこ
の給気孔を中心に同心円上に形成された複数の空気溝が
形成された剛体ハウジングの収納面に収納した上、軸受
部材の外周面とハウジングの収納側面および空気溝間に
形成された***面とこの***面に接する軸受部材の面と
の間をそれぞれ接着剤で接着するので、供給用給気孔か
ら複数の空気溝に導かれた加圧空気を各空気溝からカー
ボン系多孔質グラファイトの軸受部材に均等に分散，浸
透させて、軸受面側にほぼ均等な圧力を保ちつつ噴出さ
せることができる。また、軸受部材の受圧面側がハウジ
ングに適切な間を置いて接着保持されるので、全体とし
ての剛性が高められ、また軸受部材が空気圧によって浮
上がらせられるようなことがない。[Operation] According to the present invention, carbon-based porous graphite having a uniform particle size and distribution is used for the bearing member, and
The bearing member is housed in the housing surface of the rigid housing in which a supply hole for supplying pressurized air and a plurality of air grooves formed concentrically around the supply hole are formed, and the outer peripheral surface of the bearing member. The ridged surface formed between the housing side surface of the housing and the air groove and the surface of the bearing member in contact with the ridged surface are respectively bonded with an adhesive, so that the air is guided from the supply air supply hole to the plurality of air grooves. Pressurized air can be evenly dispersed and permeated from the air grooves into the carbon-based porous graphite bearing member, and can be ejected while maintaining a substantially uniform pressure on the bearing surface side. Further, since the pressure receiving surface side of the bearing member is adhered and held to the housing with an appropriate interval, the rigidity as a whole is enhanced and the bearing member is not floated by air pressure.
［実施例］ 以下に、図面に基づいて本発明の実施例を詳細かつ具体
的に説明する。Embodiments Embodiments of the present invention will be described in detail and specifically below with reference to the drawings.
第１Ａ図〜第１Ｃ図は本発明の一実施例を示す。ここ
で、１は静圧軸受パッドであり、２はその多孔質材料で
形成した軸受部材であるが、本例ではその多孔質材料と
してカーボン系の多孔質グラファイト、例えば商品名セ
ラファイト（（株）東芝セラミックス製）なる多孔質グ
ラファイトが使用される。３は軸受部材２を収納保持す
るハウジングであり、ハウジング３の収納部３Ａには、
例えば第１Ｂ図に示すように、同心円状の空気溝４Ａと
これらの同心円状の空気溝４Ａを連通させる半径方向の
空気溝４Ｂが刻設されていて、その中心部に給気孔５が
設けられている。なお、６は不図示の支持体に固定のた
めの孔または座ぐりねじ孔である。1A to 1C show an embodiment of the present invention. Here, 1 is a hydrostatic bearing pad, and 2 is a bearing member formed of the porous material. In this example, as the porous material, carbon-based porous graphite, for example, trade name CERAPHITE ((shares ) Made by Toshiba Ceramics) porous graphite is used. Reference numeral 3 denotes a housing for accommodating and holding the bearing member 2. In the accommodating portion 3A of the housing 3,
For example, as shown in FIG. 1B, a concentric air groove 4A and a radial air groove 4B which communicates these concentric air grooves 4A are engraved, and an air supply hole 5 is provided at the center thereof. ing. In addition, 6 is a hole or a counterbore screw hole for fixing to a support (not shown).
かくして、上述したような空気溝４Ａおよび４Ｂの刻設
された収納部３Ａに軸受部材２を収納し、接着剤７で接
着する。なおこの場合、接着は第１Ｃ図に示すように収
納部３Ａの内周面のみならず、その底部の空気溝間の隆
起面８にまで実施されるもので、これによって軸受部材
２とハウジング３とは十分強固に接合され、軸受部材２
がその収納部３Ａから加圧空気によって浮上がらされる
ようなことがない。また、空気は第２図に示すように空
気溝４Ａを介して軸受部材２に供給されるので、各溝ご
とに均等した拡散分布が空気が軸受面２Ａ側に噴出され
る。Thus, the bearing member 2 is housed in the housing portion 3A in which the air grooves 4A and 4B are engraved as described above, and is bonded with the adhesive 7. In this case, the bonding is carried out not only on the inner peripheral surface of the housing portion 3A as shown in FIG. 1C but also on the raised surface 8 between the air grooves at the bottom thereof. And the bearing member 2
Is not lifted from the storage portion 3A by the pressurized air. Further, since air is supplied to the bearing member 2 via the air groove 4A as shown in FIG. 2, the air is jetted to the bearing surface 2A side with a uniform diffusion distribution for each groove.
なおここで、軸受部材２を形成する多孔質部材は冷間等
方加工プレスによって加工成形された後、焼成して得ら
れたものであるから素材の粒子径がほぼ均一化されてお
り、また開気孔も均一化した分布状態が得られ、これを
通過する気体流量の均等化を図ることができる。更にま
た、本例のように静圧軸受パッド１を軸受部材２とハウ
ジング３との２つの部品で構成することによって、平面
度および平行度が要求されるのは軸受部材２の軸受面２
Ａおよびハウジング３の下面３Ｂのみであり、加工がそ
れだけ容易になる。また、加圧空気による軸受部材の変
形も上述したように微小ですみ、軸受面２Ａにおける平
面度がくずされるようなことがなく、また、加圧空気の
供給および停止の繰返しによる軸受部材の疲労や形状劣
化を防止することができる。Here, since the porous member forming the bearing member 2 is obtained by firing after being formed by cold isotropic working press, the particle diameter of the raw material is substantially uniform, and The open pores also have a uniform distribution state, and the flow rate of the gas passing therethrough can be made uniform. Furthermore, by constructing the hydrostatic bearing pad 1 with two parts of the bearing member 2 and the housing 3 as in this example, the flatness and the parallelism are required for the bearing surface 2 of the bearing member 2.
It is only A and the lower surface 3B of the housing 3, and the processing becomes easier. Further, the deformation of the bearing member due to the pressurized air is minute as described above, the flatness of the bearing surface 2A is not destroyed, and the fatigue of the bearing member due to the repeated supply and stop of the pressurized air. And shape deterioration can be prevented.
第３Ａ図は従来の多孔質材料による軸受部材11の断面形
状を、また、第３Ｂ図は本実施例に使用した多孔質材料
による軸受部材２の断面形状をそれぞれ模式に示したも
ので、これらの図においてＣはその受圧面側の加工空気
の供給分布を表わしているのに対して、これらの軸受面
側に示す透過空気の流量分布は第３Ａ図の場合は分布
Ｂ′で示すように大きな不均衡が生じる。また、これに
対して第３Ｂ図の方ではほぼ均一化された流量分布Ｂが
得られる。なお、このような現象は本願人が実験によっ
て確認したものであるが、このことは従来の軸受部材11
の場合、その粒子Ｋ′が軸受部材２の粒子Ｋに比して粗
く、しかもその分布密度が粗雑で開気孔が不均一に形成
されていたことによる。更にまた、本実施例に使用した
形態の多孔質材料は、自己潤滑作用を有しているので、
たとえその軸受面２Ａが被承体の面と接触したとしても
損傷したり焼付いたりするのを防止することができる。FIG. 3A schematically shows the cross-sectional shape of the conventional porous material bearing member 11, and FIG. 3B schematically shows the cross-sectional shape of the porous material bearing member 2 used in this embodiment. In the figure, C represents the supply distribution of the working air on the pressure receiving surface side, whereas the flow rate distribution of the permeated air shown on the bearing surface side is as shown by distribution B ′ in the case of FIG. 3A. There will be a large imbalance. On the other hand, in FIG. 3B, a substantially uniform flow rate distribution B is obtained. It should be noted that although such a phenomenon has been confirmed by an experiment by the applicant of the present invention, this is because the conventional bearing member 11
In this case, the particles K ′ are coarser than the particles K of the bearing member 2, and the distribution density is coarse, and the open pores are formed unevenly. Furthermore, since the porous material of the form used in this example has a self-lubricating action,
Even if the bearing surface 2A comes into contact with the surface of the subject, it can be prevented from being damaged or seized.
第４図は本発明静圧軸受パッド１を研削機械の砥石を保
持して移動させるための砥石スライド部材に適用した例
を示す。本例の場合、101が被支持体であるスライド部
材であり、スライド部材101には圧縮空気供給路102が設
けられていて、この空気供給路102を介して静圧軸受パ
ッド１の空気溝に加圧空気が供給されるもので、スライ
ド部材101はこれら三方に配置された複数の静圧軸受パ
ッド１によりその案内部材103上に浮揚状態に保たれ、
図示しない移動手段によって案内部材103に沿って移動
させられる。FIG. 4 shows an example in which the hydrostatic bearing pad 1 of the present invention is applied to a grindstone slide member for holding and moving a grindstone of a grinding machine. In the case of the present example, 101 is a slide member that is a supported body, and the slide member 101 is provided with a compressed air supply path 102, and through this air supply path 102, the air groove of the hydrostatic bearing pad 1 is provided. Pressurized air is supplied, and the slide member 101 is kept floating above the guide member 103 by the plurality of hydrostatic bearing pads 1 arranged on these three sides.
It is moved along the guide member 103 by a moving means (not shown).
［発明の効果］ 以上説明してきたように、本発明によれば、粒子の大き
さおよび分布が均一なカーボン系多孔質グラファイトの
軸受部材と、前記軸受部材を収納する収納面を有し、前
記軸受部材に前記加圧空気を供給するために前記収納面
のほぼ中心部に設けられた給気孔および前記給気孔を中
心として同心円上に形成され、前記給気孔に連通する複
数の空気溝が配設されたハウジングとを具備し、前記軸
受部材の外周面と前記ハウジングの収納側面および該ハ
ウジングの前記空気溝間に形成された***面と該***面
に接する前記軸受部材の面との間をそれぞれ接着剤で接
着したので、軸受部材が加圧空気によって持上げられる
ように変形してその軸受面の平面度が損なわれたり、加
圧空気の繰返しの供給や停止によって疲労劣化するのを
防止することができて、高精度の移動を要する機器等に
好適な静圧軸受パッドの提供が可能となった。[Effects of the Invention] As described above, according to the present invention, a bearing member of carbon-based porous graphite having a uniform particle size and distribution and a storage surface for storing the bearing member are provided. In order to supply the pressurized air to the bearing member, an air supply hole provided substantially in the center of the housing surface and a plurality of air grooves formed concentrically around the air supply hole and communicating with the air supply hole are arranged. A housing provided to the outer peripheral surface of the bearing member, a housing side surface of the housing, a raised surface formed between the air grooves of the housing, and a surface of the bearing member in contact with the raised surface. Since each is bonded with an adhesive, it prevents the bearing member from being deformed so as to be lifted by pressurized air, impairing the flatness of the bearing surface, and fatigue deterioration due to repeated supply and stop of pressurized air. It has become possible to provide a hydrostatic bearing pad that can be stopped and that is suitable for devices that require highly accurate movement.
また、その多孔質材料に素材の粒子系がほぼ均一で開気
孔の均等静が得られる種類のカーボングラファイト系の
ものを使用することにより、適用される複数個のパッド
の製作過程において透過気体流量の均等性が面倒な流量
調整作業を経ることなく得られ、製作工程の簡略化が図
られる。In addition, by using a carbon graphite type of the porous material whose particle system is almost uniform and uniform opening pores can be obtained, the permeated gas flow rate can be increased in the process of manufacturing a plurality of pads to be applied. Uniformity can be obtained without going through troublesome flow rate adjustment work, and the manufacturing process can be simplified.
更にまた、この種の多孔質材料は自己潤滑性を有するた
め、軸受面とその軸受面に対向する部材との間に接触が
生じても損傷したり焼付が生じたりするのを防止する効
果が得られる。Furthermore, since this kind of porous material has self-lubricating property, even if contact occurs between the bearing surface and a member facing the bearing surface, it is not effective in preventing damage or seizure. can get.
第１Ａ図および第１Ｃ図は本発明静圧軸受パッドの構成
の一例を示す上面図および断面図、 第１Ｂ図はそのハウジングの上面図、 第２図はその加圧空気の供給状態を示す説明図、 第３Ａ図および第３Ｂ図は従来の軸受部材および本発明
に適用する軸受部材において得られる加圧空気の透過流
量分布を比較して示すそれぞれ説明図、 第４図は本発明をスライダに適用した例を示す断面図、 第５Ａ図および第５Ｂ図は従来の静圧軸受パッドの構成
の一例を示すそれぞれ上面図および断面図、 第６Ａ図および第６Ｂ図は従来の他の静圧軸受パッドの
構成を示すそれぞれ上面図および断面図である。 １…静圧軸受パッド、 ２…軸受部材、 ２Ａ…軸受面、 ３…ハウジング、 ３Ａ…収納部、 ３Ｂ…下面、 ４Ａ，４Ｂ…空気溝、 ５…給気孔、 ７…接着剤、 ８…***面、 101…スライド部材、 102…空気供給路、 103…案内部材。1A and 1C are a top view and a cross-sectional view showing an example of the structure of the hydrostatic bearing pad of the present invention, FIG. 1B is a top view of the housing, and FIG. 2 is a description showing the supply state of the pressurized air. FIGS. 3A and 3B are explanatory views showing the permeated flow rate distributions of the pressurized air obtained in the conventional bearing member and the bearing member applied to the present invention in comparison, and FIG. 4 shows the present invention as a slider. 5A and 5B are a top view and a sectional view, respectively, showing an example of the configuration of a conventional hydrostatic bearing pad, and FIGS. 6A and 6B are other conventional hydrostatic bearings. FIG. 3 is a top view and a cross-sectional view showing the structure of the pad, respectively. DESCRIPTION OF SYMBOLS 1 ... Hydrostatic bearing pad, 2 ... Bearing member, 2A ... Bearing surface, 3 ... Housing, 3A ... Storage part, 3B ... Lower surface, 4A, 4B ... Air groove, 5 ... Air supply hole, 7 ... Adhesive, 8 ... Protrusion Surface, 101 ... Sliding member, 102 ... Air supply path, 103 ... Guide member.
フロントページの続き (72)発明者 松久 勝 東京都大田区下丸子３丁目30番２号 キヤ ノン株式会社内 (56)参考文献 特開 昭61−197816（ＪＰ，Ａ) 特開 昭54−113745（ＪＰ，Ａ) 実開 昭59−194626（ＪＰ，Ｕ) 米国特許3475065（ＵＳ，Ａ)Front page continuation (72) Inventor Masahisa Matsuhisa 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (56) Reference JP 61-197816 (JP, A) JP 54-113745 ( JP, A) Actual development Sho 59-194626 (JP, U) US patent 3475065 (US, A)
Claims (1)
定され、その軸受部材を介して軸受面に供給される加圧
空気により前記支持体を移動自在に支承するようにした
静圧軸受パッドにおいて、 粒子の大きさおよび分布が均一なカーボン系多孔質グラ
ファイトの軸受部材と、 前記軸受部材を収納する収納面を有し、前記軸受部材に
前記加圧空気を供給するために前記収納面のほぼ中心部
に設けられた給気孔および前記給気孔を中心として同心
円上に形成され、前記給気孔に連通する複数の空気溝が
配設されたハウジングとを具備し、 前記軸受部材の外周面と前記ハウジングの収納側面およ
び該ハウジングの前記空気溝間に形成された***面と該
***面に接する前記軸受部材の面との間をそれぞれ接着
剤で接着したことを特徴とする静圧軸受パッド。1. A hydrostatic bearing which is fixed to one of a supported body and a supporting body, and is movably supported by pressurized air supplied to a bearing surface through a bearing member thereof. The pad has a carbon-based porous graphite bearing member having a uniform particle size and distribution, and a storage surface for storing the bearing member, and the storage surface for supplying the pressurized air to the bearing member. An outer peripheral surface of the bearing member, and a housing provided with a plurality of air grooves formed concentrically around the air supply hole and provided with a plurality of air grooves communicating with the air supply hole. And a housing side surface of the housing and a raised surface formed between the air grooves of the housing and a surface of the bearing member in contact with the raised surface, respectively, are bonded with an adhesive. Head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62064811A JPH068650B2 (en) | 1987-03-19 | 1987-03-19 | Hydrostatic bearing pad |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62064811A JPH068650B2 (en) | 1987-03-19 | 1987-03-19 | Hydrostatic bearing pad |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63231020A JPS63231020A (en) | 1988-09-27 |
| JPH068650B2 true JPH068650B2 (en) | 1994-02-02 |
Family
ID=13269001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62064811A Expired - Fee Related JPH068650B2 (en) | 1987-03-19 | 1987-03-19 | Hydrostatic bearing pad |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH068650B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009014097A (en) | 2007-07-04 | 2009-01-22 | Ntn Corp | Hydrostatic bearing pad |
| JP5915088B2 (en) * | 2011-10-31 | 2016-05-11 | オイレス工業株式会社 | Static pressure gas bearing and linear motion guide device using the static pressure gas bearing |
| JP5929117B2 (en) * | 2011-11-18 | 2016-06-01 | オイレス工業株式会社 | Static pressure gas bearing and linear motion guide device using the static pressure gas bearing |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3475065A (en) | 1967-02-15 | 1969-10-28 | Apex Bearings Co The | Gas bearings of the linear motion single plane type |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54113745A (en) * | 1978-02-24 | 1979-09-05 | Canon Kk | Static pressure gas bearing |
| JPS59194626U (en) * | 1983-06-10 | 1984-12-24 | 日本精工株式会社 | Air spindle thrust unit |
| JPS61197816A (en) * | 1985-02-26 | 1986-09-02 | Canon Inc | Static pressure bearing pad |
-
1987
- 1987-03-19 JP JP62064811A patent/JPH068650B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3475065A (en) | 1967-02-15 | 1969-10-28 | Apex Bearings Co The | Gas bearings of the linear motion single plane type |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63231020A (en) | 1988-09-27 |
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