JPS61127927U - - Google Patents

Info

Publication number
JPS61127927U
JPS61127927U JP1098485U JP1098485U JPS61127927U JP S61127927 U JPS61127927 U JP S61127927U JP 1098485 U JP1098485 U JP 1098485U JP 1098485 U JP1098485 U JP 1098485U JP S61127927 U JPS61127927 U JP S61127927U
Authority
JP
Japan
Prior art keywords
air
surface plate
table unit
units
guide grooves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1098485U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1098485U priority Critical patent/JPS61127927U/ja
Publication of JPS61127927U publication Critical patent/JPS61127927U/ja
Pending legal-status Critical Current

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  • Machine Tool Units (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例である定盤面移動テ
ーブルの平面図である。第２図は第１図の定盤面
移動テーブルが定盤面上に置かれた状態を示す正
面図である。第３図は第１図の定盤面移動テーブ
ルにおけるテーブルユニツトの底面図である。第
４図は第３図における―断面図である。第５
図は第３図のテーブルユニツトの載荷重量とエア
圧力並びに効率との関係を示す図である。第６図
は本考案の他の実施例に係る定盤面移動テーブル
が定盤面上に置かれた状態を示す平面図である。
第７図は第６図の右側面図である。第８図は本考
案のさらに別の実施例におけるテーブルユニツト
の底面図である。第９図は第８図のテーブルユニ
ツトが定盤面上に置かれた状態を示す断面図であ
る。第１０図は第８図のテーブルユニツトが定盤
面上から浮上した状態を示す断面図である。第１
１図は第８図のテーブルユニツトが定盤面上にお
いて一方の端部のみ浮上した状態を示す断面図で
ある。第１２図は第８図のテーブルユニツトの噴
出口の一つが定盤面の溝上に位置させられた状態
を示す断面図である。 １０，５４：定盤面移動テーブル、１２，５０
，８８：定盤面、１４，５６：被測定物（物体）
、１８，６０：テーブルユニツト、２０：支持板
、２２，６２：下面、２４〜２８，６４〜７０：
案内溝、３０，７２：エア通路、３２〜３６，７
４〜８０：噴出口、４２：支管、４６：主供給管
。 FIG. 1 is a plan view of a surface plate surface moving table which is an embodiment of the present invention. FIG. 2 is a front view showing the surface plate surface moving table of FIG. 1 placed on the surface plate surface. 3 is a bottom view of the table unit in the surface plate surface moving table of FIG. 1. FIG. FIG. 4 is a cross-sectional view of FIG. 3. Fifth
This figure is a diagram showing the relationship between the load capacity, air pressure, and efficiency of the table unit of FIG. 3. FIG. 6 is a plan view showing a surface plate surface moving table according to another embodiment of the present invention placed on a surface plate surface.
FIG. 7 is a right side view of FIG. 6. FIG. 8 is a bottom view of a table unit in yet another embodiment of the present invention. FIG. 9 is a sectional view showing the table unit of FIG. 8 placed on a surface plate. FIG. 10 is a sectional view showing the table unit of FIG. 8 floating above the surface of the surface plate. 1st
FIG. 1 is a sectional view showing the table unit of FIG. 8 with only one end floating above the surface plate. FIG. 12 is a sectional view showing a state in which one of the jet ports of the table unit shown in FIG. 8 is positioned on a groove in the surface plate surface. 10,54: Surface plate surface moving table, 12,50
, 88: surface plate surface, 14, 56: object to be measured (object)
, 18, 60: table unit, 20: support plate, 22, 62: lower surface, 24-28, 64-70:
Guide groove, 30, 72: Air passage, 32-36, 7
4 to 80: spout, 42: branch pipe, 46: main supply pipe.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 所定の物体を載荷して、噴出エアによる浮上状
態下において、定盤面上を軽快に移動し得る移動
テーブルにして、該物体を支持する支持板の平坦
な下面に複数の独立したエア案内溝を設けてなる
テーブルユニツトの複数を有すると共に、該複数
のテーブルユニツトが互いに上下方向に所定量独
立して動き得るように連結されてなり、且つそれ
ら複数のテーブルユニツトのそれぞれに圧力エア
の主供給管から延びる支管が接続され、それぞれ
の支管を通じて供給される圧力エアが各テーブル
ユニツト内のエア通路によつて前記各エア案内溝
に開口する噴出口に導かれ、該噴出口から噴出せ
しめられることにより、前記下面と前記定盤面と
の間にエアの薄膜が形成されるようにしたことを
特徴とする定盤面移動テーブル。 The table is made into a moving table that can be loaded with a predetermined object and easily moved on the surface of the surface plate under the levitation state by jetted air, and a plurality of independent air guide grooves are formed on the flat lower surface of the support plate that supports the object. The table unit has a plurality of table units provided, and the plurality of table units are connected to each other so that they can move independently by a predetermined amount in the vertical direction, and each of the plurality of table units is provided with a main supply pipe for pressurized air. The branch pipes extending from the table unit are connected, and the pressure air supplied through the respective branch pipes is guided by the air passage in each table unit to the outlet opening in each of the air guide grooves, and is ejected from the outlet. . A surface plate surface moving table, characterized in that a thin film of air is formed between the lower surface and the surface plate surface.
JP1098485U 1985-01-29 1985-01-29 Pending JPS61127927U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1098485U JPS61127927U (en) 1985-01-29 1985-01-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1098485U JPS61127927U (en) 1985-01-29 1985-01-29

Publications (1)

Publication Number Publication Date
JPS61127927U true JPS61127927U (en) 1986-08-11

Family

ID=30492671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1098485U Pending JPS61127927U (en) 1985-01-29 1985-01-29

Country Status (1)

Country Link
JP (1) JPS61127927U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013073166A1 (en) * 2011-11-18 2013-05-23 オイレス工業株式会社 Aerostatic bearing and linear motion guiding device using said aerostatic bearing
WO2013150723A1 (en) * 2012-04-02 2013-10-10 オイレス工業株式会社 Hydrostatic gas bearing and linear guide device using said hydrostatic gas bearing
WO2013153753A1 (en) * 2012-04-12 2013-10-17 オイレス工業株式会社 Aerostatic bearing and linear guide apparatus using the aerostatic bearing
CN103842673A (en) * 2011-10-31 2014-06-04 奥依列斯工业株式会社 Aerostatic bearing and linear motion guiding device using said aerostatic bearing

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5419283A (en) * 1977-07-11 1979-02-13 Dea Spa Machine tool or measuring machine having sliding portion by pneumatic shoe and magnetic shoe

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5419283A (en) * 1977-07-11 1979-02-13 Dea Spa Machine tool or measuring machine having sliding portion by pneumatic shoe and magnetic shoe

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103842673A (en) * 2011-10-31 2014-06-04 奥依列斯工业株式会社 Aerostatic bearing and linear motion guiding device using said aerostatic bearing
WO2013073166A1 (en) * 2011-11-18 2013-05-23 オイレス工業株式会社 Aerostatic bearing and linear motion guiding device using said aerostatic bearing
JP2013108557A (en) * 2011-11-18 2013-06-06 Oiles Corp Aerostatic bearing and linear motion guiding device using the same
TWI491815B (en) * 2011-11-18 2015-07-11 Oiles Industry Co Ltd Static pressure gas bearings and the use of the static pressure gas bearing linear motion guide device
WO2013150723A1 (en) * 2012-04-02 2013-10-10 オイレス工業株式会社 Hydrostatic gas bearing and linear guide device using said hydrostatic gas bearing
JP2013213544A (en) * 2012-04-02 2013-10-17 Oiles Corp Hydrostatic gas bearing and linear guide device using the hydrostatic gas bearing
CN104204571A (en) * 2012-04-02 2014-12-10 奥依列斯工业株式会社 Hydrostatic gas bearing and linear guide device using the hydrostatic gas bearing
WO2013153753A1 (en) * 2012-04-12 2013-10-17 オイレス工業株式会社 Aerostatic bearing and linear guide apparatus using the aerostatic bearing
JP2013221529A (en) * 2012-04-12 2013-10-28 Oiles Corp Aerostatic gas bearing and linear motion guiding device using the same
TWI582314B (en) * 2012-04-12 2017-05-11 Oiles Industry Co Ltd Static pressure gas bearings and the use of the static pressure gas bearing linear motion guide device

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