JP5915088B2 - Static pressure gas bearing and linear motion guide device using the static pressure gas bearing - Google Patents

Static pressure gas bearing and linear motion guide device using the static pressure gas bearing Download PDF

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JP5915088B2
JP5915088B2 JP2011239832A JP2011239832A JP5915088B2 JP 5915088 B2 JP5915088 B2 JP 5915088B2 JP 2011239832 A JP2011239832 A JP 2011239832A JP 2011239832 A JP2011239832 A JP 2011239832A JP 5915088 B2 JP5915088 B2 JP 5915088B2
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bearing
annular
annular groove
recess
static pressure
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JP2013096502A (en
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佐藤　光
光 佐藤
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Oiles Corp
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Priority to PCT/JP2012/006867 priority patent/WO2013065268A1/en
Priority to CN201280047857.8A priority patent/CN103842673A/en
Priority to KR1020120120441A priority patent/KR20130047644A/en
Priority to CN2012104257237A priority patent/CN103089814A/en
Priority to TW101140180A priority patent/TWI504821B/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/001—Bearings for parts moving only linearly adjustable for alignment or positioning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
    • F16C32/0666—Details of hydrostatic bearings independent of fluid supply or direction of load of bearing pads
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
    • F16C32/067—Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F16C33/04—Brasses; Bushes; Linings
    • F16C33/20—Sliding surface consisting mainly of plastics
    • F16C33/201—Composition of the plastic

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Description

本発明は、静圧気体軸受及びこの静圧気体軸受を用いた直動案内装置に関する。   The present invention relates to a static pressure gas bearing and a linear motion guide device using the static pressure gas bearing.

精密工作機械や半導体露光装置などにおいては、加工工具や基板等の被加工物を高精度で位置決めすることが要求されている。そのため、被加工物の載置台の位置決め装置に摩擦の殆んどない静圧気体軸受を用いた直動案内装置が用いられている。このような直動案内装置では、被加工物の載置台としての可動テーブルと、案内部材としてのガイドレールとの間に圧縮空気の潤滑膜が介在され、この可動テーブルがガイドレールに対して非接触で移動されるように構成されている。   In precision machine tools, semiconductor exposure apparatuses, and the like, it is required to position a workpiece such as a processing tool or a substrate with high accuracy. For this reason, a linear motion guide device using a static pressure gas bearing with little friction is used for a positioning device for a work table. In such a linear motion guide device, a lubricating film of compressed air is interposed between a movable table as a work table and a guide rail as a guide member. It is configured to be moved by contact.

この直動案内装置に用いられる静圧気体軸受の空気吹出口の絞り形式としては、多孔質絞り、表面絞り、オリフィス絞り、自成絞り等があり、これらの絞り形式を備えた静圧気体軸受は、それぞれ用途に応じて負荷容量及び軸受剛性等を調節しながら使用されている。   As the throttle type of the air outlet of the static pressure gas bearing used in this linear motion guide device, there are a porous throttle, a surface throttle, an orifice throttle, a self-contained throttle, etc., and a static pressure gas bearing equipped with these throttle types Are used while adjusting the load capacity, bearing rigidity and the like according to the respective applications.

例えば、特許文献１には、被支持体又は支持体のいずれか一方に固定され、その軸受部材を介して軸受面に供給される加圧空気により支持体を移動自在に支承するようにした静圧軸受パッドにおいて、軸受部材として、素材粒子の径がほぼ均一で開気孔の均等性が得られる種類のカーボングラファイト系の材料が提案されている。   For example, in Patent Document 1, a static body is fixed to either a supported body or a support body, and the support body is movably supported by pressurized air supplied to the bearing surface via the bearing member. In the pressure bearing pad, as a bearing member, a carbon graphite-based material of a type in which the diameter of material particles is almost uniform and the uniformity of open pores is obtained has been proposed.

また、特許文献２には、比較的高い剛性を保ちながら、高い減衰性を実現した気体軸受装置として、２つの相対向する実質的に平行な軸受面及び両軸受面間の軸受隙間に、オリフィスを通じて気体を供給する少なくとも１つの気体ダクトを有する気体軸受装置が提案されている。   Further, in Patent Document 2, as a gas bearing device that realizes a high damping property while maintaining a relatively high rigidity, an orifice is provided between two opposed substantially parallel bearing surfaces and a bearing gap between both bearing surfaces. A gas bearing device having at least one gas duct for supplying gas through is proposed.

さらに、特許文献３には、多孔質体からなる母材と、この母材上に接合され、予め所望の空気透過量になるように、貫通孔の径及び分布を調整して作製された多孔板からなる表面絞り層とを備え、表面絞り層を介して気体を噴出させ、その静圧によって被支持体を支持する静圧気体軸受が提案されている。   Furthermore, Patent Document 3 discloses a porous material prepared by adjusting the diameter and distribution of through holes so that a base material made of a porous body is bonded to the base material and a desired air permeation amount is obtained in advance. There has been proposed a static pressure gas bearing that includes a surface constriction layer made of a plate, ejects gas through the surface constriction layer, and supports the supported body by the static pressure.

特開昭６３−２３１０２０号公報JP 63-23310 A 特表２００６−５１０８５６号公報JP 2006-510856 A 特開２００１−５６０２７号公報JP 2001-56027 A 特開２００８−８２４４９号公報JP 2008-82449 A

上記従来の静圧気体軸受は、超低摩擦、超高精度及び超高速運動を実現できるものの、軸受材料として、主に、高強度の金属やセラミックスが用いられると共に、これら軸受材料からなる軸受面に高精度の研削仕上げ等を施す必要があるため、必然的に高価となるという問題がある。   Although the above-mentioned conventional static pressure gas bearings can achieve ultra-low friction, ultra-high precision and ultra-high-speed motion, high-strength metals and ceramics are mainly used as bearing materials, and bearing surfaces made of these bearing materials Since it is necessary to perform high-precision grinding finish, etc., there is a problem that it is inevitably expensive.

しかしながら、上記した超低摩擦、超高精度及び超高速運動までは要求されないが、例えば、液晶スクリーン等の物品を非接触で搬送したり、温度変化を生じさせることなく物品を水平移動させたりする用途においては、静圧気体軸受を用いると装置の構成が簡略化されるなどの利点を有する反面、静圧気体軸受自体が高価なため、当該用途には広く活用されていないのが実情である。   However, although the above-described ultra-low friction, ultra-high accuracy, and ultra-high-speed motion are not required, for example, an article such as a liquid crystal screen is transported in a non-contact manner, or the article is moved horizontally without causing a temperature change. In applications, the use of static pressure gas bearings has the advantage of simplifying the configuration of the apparatus, but the static pressure gas bearings themselves are expensive and are not widely used in such applications. .

上記実情に鑑み、種々の分野で活用可能な安価な静圧気体軸受を提供するべく本出願人は先に、上面に自成絞り形状又はオリフィス絞り形状の複数個の空気吹出口を、下面に該複数個の空気吹出口と連通する給気溝を有する合成樹脂製の軸受部材と、該軸受部材の下面に前記給気溝を覆うように接合され、該給気溝と連通する給気口を有する軸受基体とが一体化された静圧気体軸受を提案した（特許文献４）。   In view of the above situation, in order to provide an inexpensive static pressure gas bearing that can be used in various fields, the present applicant has firstly provided a plurality of air outlets having a self-contained throttle shape or an orifice throttle shape on the upper surface, and a lower surface. A synthetic resin bearing member having an air supply groove communicating with the plurality of air outlets, and an air supply port joined to the lower surface of the bearing member so as to cover the air supply groove and communicated with the air supply groove A hydrostatic gas bearing in which a bearing base having a diameter is integrated has been proposed (Patent Document 4).

この特許文献４に記載された静圧気体軸受によれば、静圧気体軸受を形成する合成樹脂製の軸受部材を、金型を用いて射出成形によって形成することができ、機械加工を不要とすることができると共に、軸受基体の構造も該軸受体と連通する給気口を形成するのみで、該軸受体と軸受基体とを接合するだけで静圧気体軸受を組み立てることができ、静圧気体軸受の大量生産が可能となり、安価な静圧気体軸受を提供することができるというものである。   According to the static pressure gas bearing described in Patent Document 4, a synthetic resin bearing member that forms the static pressure gas bearing can be formed by injection molding using a mold, and machining is unnecessary. In addition, the structure of the bearing base also forms an air supply port communicating with the bearing body, and a static pressure gas bearing can be assembled by simply joining the bearing body and the bearing base. Mass production of gas bearings is possible, and an inexpensive static pressure gas bearing can be provided.

しかしながら、特許文献４に記載された静圧気体軸受における空気吹出口は、金型を用いた射出成形で形成されるため、その直径が０．２〜０．４ｍｍ程度の比較的大きな直径の自成絞りあるいはオリフィス絞り形状となり、当該空気吹出口からの給気吹出量が多すぎて自励振動を起こす虞があり、実用化するには改良を必要とするものである。   However, since the air outlet in the static pressure gas bearing described in Patent Document 4 is formed by injection molding using a mold, its diameter is about 0.2 to 0.4 mm. There is a possibility that it will be in the shape of an aperture stop or an orifice stop, and there will be a possibility that self-excited vibration will occur due to the excessive amount of air supply from the air outlet, and improvement is required for practical use.

本発明は上記諸点に鑑みてなされたものであり、その目的とするところは、大量生産が可能で安価な静圧気体軸受及びこの静圧気体軸受を用いた直動案内装置を提供することにある。   The present invention has been made in view of the above points, and an object of the present invention is to provide a static pressure gas bearing that can be mass-produced and is inexpensive, and a linear motion guide device that uses the static pressure gas bearing. is there.

本発明の静圧気体軸受は、一方の面に形成された円環状凹部、該円環状凹部の外周壁面に連接していると共に当該外周壁面に対し拡径している環状肩部面、他方の面で開口した環状凹溝及び一端では環状凹溝に開口していると共に他端では円環状凹部の環状底面で開口した自成絞りとしての複数個の空気吹出孔を有した合成樹脂製の軸受体と、環状肩部面に接触して装着された環状シール部材と、軸受体の一方の面に対面している一方の面に、一端では当該軸受体の一方の面に対面している一方の面で開口している一方、他端では外周面で開口する給気通路を備えた軸受基体とを具備しており、軸受体は、円環状凹部の開口部を軸受基体の給気通路に連通させると共に、該軸受基体に複数個の締結部材を介して締結固定されて、軸受基体に一体化されており、環状凹溝は、少なくとも０．３ｍｍの幅と、少なくとも０．０１ｍｍの深さとを有しており、空気吹出孔は、その一端で少なくとも３０μｍの直径を有して、円環状凹部と環状凹溝との間で自成絞りを形成していることを特徴とする。   The hydrostatic gas bearing of the present invention includes an annular recess formed on one surface, an annular shoulder surface connected to the outer peripheral wall surface of the annular recess and having a diameter expanded with respect to the outer peripheral wall surface, A synthetic resin bearing having a plurality of air blowing holes as a self-contained aperture that is open at the surface and an annular groove at one end and an annular bottom surface at the other end. Body, an annular seal member mounted in contact with the annular shoulder surface, one surface facing one surface of the bearing body, and one surface facing one surface of the bearing body at one end A bearing base having an air supply passage opening on the outer peripheral surface at the other end, and the bearing body uses the opening of the annular recess as an air supply passage of the bearing base. In addition, the bearing base is fastened and fixed to the bearing base via a plurality of fastening members. The annular groove has a width of at least 0.3 mm and a depth of at least 0.01 mm, and the air outlet has an annular shape with a diameter of at least 30 μm at one end thereof. A self-contained diaphragm is formed between the recess and the annular groove.

本発明の静圧気体軸受によれば、合成樹脂製の軸受体は、環状肩部面に接触して装着された環状シール部材を介して軸受基体に締結固定されているため、合成樹脂製の軸受体と軸受基体とが高い密封性をもって強固に一体化されており、また、合成樹脂製の軸受体が他方の面で開口した環状凹溝及び一端では環状凹溝に開口していると共に他端では円環状凹部の環状底面で開口した複数個の空気吹出孔を有しており、環状凹溝が少なくとも０．３ｍｍの幅と、少なくとも０．０１ｍｍの深さを有しており、空気吹出孔は、その一端で少なくとも３０μｍの直径を有して、円環状凹部と環状凹溝との間で自成絞りを形成しており、当該環状凹溝及び複数個の空気吹出孔を機械加工によることなく形成されているため、大量生産が可能で、安価な製作が可能となる。   According to the static pressure gas bearing of the present invention, the synthetic resin bearing body is fastened and fixed to the bearing base via the annular seal member mounted in contact with the annular shoulder surface. The bearing body and the bearing base are firmly integrated with high sealing performance, and the synthetic resin bearing body has an annular groove opened on the other surface and an annular groove on one end and the other. At the end, it has a plurality of air blowing holes opened at the annular bottom surface of the annular recess, and the annular groove has a width of at least 0.3 mm and a depth of at least 0.01 mm. The hole has a diameter of at least 30 μm at one end thereof, and forms a self-constriction between the annular recess and the annular recess, and the annular recess and the plurality of air blowing holes are machined. Because it is formed without mass production is possible and inexpensive Work is possible.

好ましい例では、環状凹溝は、０．３〜１．０ｍｍ又は０．３〜０．７ｍｍの幅と、０．０１〜０．０５ｍｍ又は０．０１〜０．０３ｍｍの深さとを有しており、空気吹出孔は、その一端で３０〜１２０μｍの直径を有している。   In a preferred example, the annular groove has a width of 0.3 to 1.0 mm or 0.3 to 0.7 mm and a depth of 0.01 to 0.05 mm or 0.01 to 0.03 mm. The air blowing hole has a diameter of 30 to 120 μm at one end thereof.

環状凹溝及び空気吹出孔の夫々は、好ましくは、レーザー加工により形成されている。加工用レーザーとしては、炭酸ガスレーザー、ＹＡＧレーザー、ＵＶレーザー、エキシマレーザー等から選択される。   Each of the annular concave groove and the air blowing hole is preferably formed by laser processing. The processing laser is selected from a carbon dioxide laser, a YAG laser, a UV laser, an excimer laser, and the like.

環状凹溝及び空気吹出孔の夫々をレーザー加工により形成すると、切削等の機械加工に比較して、瞬時にこれらを形成でき、大量生産が可能となるばかりでなく、安価に製作することができる。   If each of the annular concave groove and the air blowing hole is formed by laser processing, these can be formed instantaneously compared to machining such as cutting, and not only mass production is possible, but also it can be manufactured at low cost. .

本発明の静圧気体軸受において、円環状凹部の内周壁面は、開口部から環状底面にかけて末広がりの截頭円錐面に形成されていてもよい。   In the static pressure gas bearing of the present invention, the inner peripheral wall surface of the annular recess may be formed in a frustoconical surface that spreads from the opening to the annular bottom surface.

本発明の静圧気体軸受において、軸受基体の他方の面には、球体受圧凹部が形成されていてもよい。   In the static pressure gas bearing of the present invention, a spherical pressure receiving recess may be formed on the other surface of the bearing base.

本発明の静圧気体軸受において、球体受圧凹部は、軸受基体の他方の面で開口する截頭円錐凹部又は凹球面部を有していてもよく、これら球体受圧凹部は、該軸受体の他方の面に直接形成されていてもよい。   In the static pressure gas bearing of the present invention, the spherical pressure receiving recess may have a frustoconical concave portion or a concave spherical surface opening on the other surface of the bearing base, and these spherical pressure receiving recesses are the other side of the bearing body. It may be formed directly on the surface.

本発明の静圧気体軸受において、球体受圧凹部は、軸受基体の他方の面に開口部を有して形成された円柱状凹部を具備しており、当該円柱状凹部には、一方の面に截頭円錐凹部を有すると共に該截頭円錐凹部を円柱状凹部の開口部に開口させた駒が嵌合固定されていてもよい。   In the static pressure gas bearing of the present invention, the spherical pressure receiving recess has a cylindrical recess formed with an opening on the other surface of the bearing base, and the cylindrical recess has a surface on one surface. A piece having a frustoconical concave portion and having the frustoconical concave portion opened to the opening of the cylindrical concave portion may be fitted and fixed.

本発明の静圧気体軸受において、球体受圧凹部は、軸受基体の他方の面に開口部を有して形成された円柱状凹部を具備しており、当該円柱状凹部には、一方の面に凹球面部を有すると共に該凹球面部を円柱状凹部の開口部に開口させた駒が嵌合固定されていてもよい。   In the static pressure gas bearing of the present invention, the spherical pressure receiving recess has a cylindrical recess formed with an opening on the other surface of the bearing base, and the cylindrical recess has a surface on one surface. A piece having a concave spherical portion and having the concave spherical portion opened in the opening of the cylindrical concave portion may be fitted and fixed.

軸受基体の他方の面に球体受圧凹部を備えた静圧気体軸受においては、該球体受圧凹部に、例えばボールスタッドの球体が摺接して配されていてもよく、斯かる場合においては静圧気体軸受に該球体回りの自動調芯機能が付加される。   In a static pressure gas bearing having a spherical pressure receiving recess on the other surface of the bearing base, a spherical body of a ball stud, for example, may be disposed in sliding contact with the spherical pressure receiving recess. An automatic alignment function around the sphere is added to the bearing.

斯かる自動調芯機能が付加された静圧気体軸受は、被加工物の載置台の位置決め装置としての直動案内装置に用いられて好適である。   The static pressure gas bearing to which such an automatic alignment function is added is suitable for use in a linear motion guide device as a positioning device for a work table.

本発明の静圧気体軸受において、軸受体は、環状凹溝に加えて、その一方の面に形成されていると共に、該環状凹溝の外側に該環状凹溝を囲む大径環状凹溝と、一方の端部が該環状凹溝に開口すると共に他方の端部が大径環状凹溝に開口する複数個の第一の放射状凹溝と、該環状凹溝の内側に形成された小径環状凹溝と、一方の端部が環状凹溝に開口すると共に他方の端部が小径環状凹溝に開口する複数個の第二の放射状凹溝とを具備していてもよい。   In the hydrostatic gas bearing of the present invention, the bearing body is formed on one surface of the annular groove, in addition to the annular groove, and a large-diameter annular groove surrounding the annular groove on the outside of the annular groove. A plurality of first radial grooves, one end of which opens into the annular groove and the other end of which opens into the large-diameter groove, and a small-diameter annular formed inside the annular groove. You may comprise the ditch | groove and the some 2nd radial ditch | groove which one edge part opens to an annular groove, and the other edge part opens to a small diameter annular groove.

本発明の静圧気体軸受を具備した直動案内装置は、案内面としての上面案内面及び両側案内面を有する案内部材の外側に、上面案内面に対面する上板及び両側案内面に対面する一対の側板を備えた可動テーブルが配されていてもよく、該可動テーブルの上板の下面及び一対の側板の夫々の内面には、夫々ボールスタッドが球体を内方に向けて立設されていてもよく、また、該ボールスタッドとガイド部材の上面及び両側面との間には、該静圧気体軸受が球体受圧凹部を該ボールスタッドの球体に摺接させると共に、軸受体をガイド部材の上面案内面及び両側案内面に対面させて配されていてもよい。   The linear motion guide apparatus provided with the static pressure gas bearing of the present invention faces the upper plate facing the upper surface guide surface and the both side guide surfaces outside the guide member having the upper surface guide surface and the both side guide surfaces as the guide surface. A movable table having a pair of side plates may be arranged, and ball studs are erected on each of the inner surfaces of the lower plate and the pair of side plates of the movable table with the spheres facing inward. Further, between the ball stud and the upper surface and both side surfaces of the guide member, the static pressure gas bearing causes the spherical pressure receiving recess to be in sliding contact with the spherical body of the ball stud, and the bearing body is connected to the guide member. You may distribute | arrange so as to face an upper surface guide surface and a both-sides guide surface.

本発明の直動案内装置によれば、軸受体の複数個の空気吹出孔から案内部材の案内面に圧縮空気を噴射することにより、案内面との間に形成される空気潤滑膜によって可動テーブルを案内面に対して非接触の状態に保持することができる。そして、軸受体と案内面間の軸受隙間（数μｍ〜数十μｍ程度）が不均一であると、軸受隙間各部に圧力差が発生し、その圧力差により、軸受隙間が均一となる方向に軸受体が自動調芯され、案内面に対して平行な状態が保持される。このため、案内部材及び可動テーブルの平行度、直角度等の部品精度を比較的粗い精度とすることができ、前記静圧気体軸受自体の低コストに加えて、安価な直動案内装置を提供することができる。   According to the linear motion guide device of the present invention, the compressed air is injected from the plurality of air blowing holes of the bearing body onto the guide surface of the guide member, so that the movable table is formed by the air lubricating film formed between the guide surface and the guide surface. Can be held in a non-contact state with respect to the guide surface. If the bearing gap between the bearing body and the guide surface (approximately several μm to several tens of μm) is non-uniform, a pressure difference is generated in each part of the bearing gap, and the pressure difference causes the bearing gap to become uniform. The bearing body is automatically aligned, and the state parallel to the guide surface is maintained. Therefore, the accuracy of parts such as the parallelism and perpendicularity of the guide member and movable table can be made relatively coarse, and in addition to the low cost of the static pressure gas bearing itself, an inexpensive linear motion guide device is provided. can do.

本発明の静圧気体軸受において、軸受体は、ポリアセタール樹脂、ポリアミド樹脂、ポリフェニレンサルファイド樹脂等の熱可塑性合成樹脂から形成されているのが好ましく、また軸受基体は、ポリアセタール樹脂、ポリアミド樹脂、ポリフェニレンサルファイド樹脂等の熱可塑性合成樹脂又はこれらの熱可塑性合成樹脂にガラス繊維、ガラス粉末、炭素繊維もしくは無機充填材を３０〜５０質量％含有した補強充填材含有熱可塑性合成樹脂あるいはアルミニウム又はアルミニウム合金から形成されているのが好ましい。これら合成樹脂製の軸受体及び軸受基体は、合成樹脂素材を機械加工して形成しても、金型を用いて射出成形により形成してもよい。   In the hydrostatic gas bearing of the present invention, the bearing body is preferably formed from a thermoplastic synthetic resin such as polyacetal resin, polyamide resin, polyphenylene sulfide resin, and the bearing base is made of polyacetal resin, polyamide resin, polyphenylene sulfide. Reinforced filler-containing thermoplastic synthetic resin or aluminum or aluminum alloy containing 30-50% by mass of glass fiber, glass powder, carbon fiber or inorganic filler in thermoplastic synthetic resin such as resin or these thermoplastic synthetic resins It is preferable. These synthetic resin bearing bodies and bearing bases may be formed by machining a synthetic resin material or by injection molding using a mold.

本発明によれば、大量生産が可能で安価な静圧気体軸受及びこの静圧気体軸受を用いた直動案内装置を提供することができる。   According to the present invention, it is possible to provide an inexpensive static pressure gas bearing capable of mass production and a linear motion guide device using the static pressure gas bearing.

図１は、本発明の実施の形態の好ましい例の平面説明図である。FIG. 1 is an explanatory plan view of a preferred example of an embodiment of the present invention. 図２は、図１のＩＩ−ＩＩ線矢視断面説明図である。2 is a cross-sectional explanatory view taken along the line II-II in FIG. 図３は、図２の底面説明図である。FIG. 3 is a bottom explanatory view of FIG. 図４は、図２の軸受体の底面説明図である。FIG. 4 is an explanatory bottom view of the bearing body of FIG. 図５は、図２の一部拡大断面説明図である。FIG. 5 is a partially enlarged cross-sectional explanatory view of FIG. 図６は、軸受基体の底面説明図である。FIG. 6 is a bottom view of the bearing base. 図７は、図６のＶＩＩ−ＶＩＩ線矢視断面説明図である。7 is a cross-sectional explanatory view taken along line VII-VII in FIG. 図８は、軸受体の底面説明図である。FIG. 8 is an explanatory bottom view of the bearing body. 図９は、図８のＩＸ−ＩＸ線矢視断面説明図である。9 is a cross-sectional explanatory view taken along line IX-IX in FIG. 図１０は、図８の斜視説明図である。FIG. 10 is a perspective explanatory view of FIG. 図１１は、軸受基体と軸受体の組立体の断面説明図である。FIG. 11 is a cross-sectional explanatory view of an assembly of a bearing base and a bearing body. 図１２は、軸受体の他の実施の形態の平面説明図である。FIG. 12 is an explanatory plan view of another embodiment of the bearing body. 図１３は、軸受基体の他の実施の形態の底面説明図である。FIG. 13 is an explanatory bottom view of another embodiment of the bearing base. 図１４は、図１３のＸＩＶ−ＸＩＶ線矢視断面説明図である。14 is a cross-sectional explanatory view taken along the line XIV-XIV in FIG. 13. 図１５は、図１４に示す軸受基体と軸受体の組立体の断面説明図である。FIG. 15 is a cross-sectional explanatory view of the bearing base and bearing assembly shown in FIG. 図１６は、自動調芯機能を付加した静圧気体軸受の断面説明図である。FIG. 16 is a cross-sectional explanatory view of a static pressure gas bearing to which an automatic alignment function is added. 図１７は、軸受基体の更に他の実施の形態の底面説明図である。FIG. 17 is an explanatory bottom view of still another embodiment of the bearing base. 図１８は、図１７のＸＶＩＩＩ−ＸＶＩＩＩ線矢視断面説明図である。18 is a cross-sectional explanatory view taken along line XVIII-XVIII in FIG. 図１９は、図１８に示す軸受基体と軸受体の組立体の断面説明図である。FIG. 19 is a cross-sectional explanatory view of the assembly of the bearing base and the bearing body shown in FIG. 図２０は、自動調芯機能を付加した静圧気体軸受の断面説明図である。FIG. 20 is a cross-sectional explanatory view of a static pressure gas bearing to which an automatic alignment function is added. 図２１は、軸受基体の他の実施の形態の底面説明図である。FIG. 21 is an explanatory view of the bottom surface of another embodiment of the bearing base. 図２２は、図２１のＸＸＩＩ−ＸＸＩＩ線矢視断面説明図である。22 is a cross-sectional explanatory view taken along the line XXII-XXII in FIG. 図２３は、図２１の斜視説明図である。FIG. 23 is an explanatory perspective view of FIG. 図２４は、駒の断面説明図である。FIG. 24 is a cross-sectional explanatory view of the piece. 図２５は、図２１に示す駒を嵌合固定した軸受基体の断面説明図である。FIG. 25 is a cross-sectional explanatory view of the bearing base to which the piece shown in FIG. 21 is fitted and fixed. 図２６は、図２５に示す軸受基体と軸受体の組立体の断面説明図である。FIG. 26 is a cross-sectional explanatory view of the assembly of the bearing base and the bearing body shown in FIG. 図２７は、自動調芯機能を付加した静圧気体軸受の断面説明図である。FIG. 27 is a cross-sectional explanatory view of a static pressure gas bearing to which an automatic alignment function is added. 図２８は、駒の他の実施の形態の断面説明図である。FIG. 28 is an explanatory sectional view of another embodiment of the piece. 図２９は、図２８に示す駒を嵌合固定した軸受基体の断面説明図である。FIG. 29 is a cross-sectional explanatory view of a bearing base to which the piece shown in FIG. 28 is fitted and fixed. 図３０は、図２９に示す軸受基体と軸受体の組立体の断面説明図である。30 is a cross-sectional explanatory view of the assembly of the bearing base and the bearing body shown in FIG. 図３１は、自動調芯機能を付加した静圧気体軸受の断面説明図である。FIG. 31 is a cross-sectional explanatory view of a static pressure gas bearing to which an automatic alignment function is added. 図３２は、静圧気体軸受を用いた直動案内装置の断面説明図である。FIG. 32 is a cross-sectional explanatory view of a linear motion guide device using a static pressure gas bearing.

次に本発明を、図に示す好ましい実施の形態の例に基づいて更に詳細に説明する。なお
、本発明はこれらの例に何等限定されないのである。 Next, the present invention will be described in more detail based on an example of a preferred embodiment shown in the drawings. The present invention is not limited to these examples.

図１から図５において、静圧気体軸受１は、好ましくは、ポリアセタール樹脂（ＰＯＭ）、ポリアミド樹脂（ＰＡ）、ポリフェニレンサルファイド樹脂（ＰＰＳ）などの熱可塑性合成樹脂、又はこれらの熱可塑性合成樹脂にガラス繊維、ガラス粉末、炭素繊維もしくは無機充填材を３０〜５０質量％含有した補強充填材含有熱可塑性合成樹脂、あるいはアルミニウム又はアルミニウム合金から形成されている軸受基体２と、軸受基体２に環状シール部材３を介して締結部材４により締結一体化されていると共に好ましくはポリアセタール樹脂、ポリアミド樹脂、ポリフェニレンサルファイド樹脂などの熱可塑性合成樹脂から形成されている合成樹脂製の軸受体５とを具備している。   1 to 5, the static pressure gas bearing 1 is preferably made of a thermoplastic synthetic resin such as polyacetal resin (POM), polyamide resin (PA), polyphenylene sulfide resin (PPS), or these thermoplastic synthetic resins. Bearing base 2 made of glass fiber, glass powder, carbon fiber or thermoplastic synthetic resin containing reinforcing filler containing 30 to 50% by mass, or aluminum or aluminum alloy, and annular seal on bearing base 2 And a synthetic resin bearing body 5 formed of a thermoplastic synthetic resin such as polyacetal resin, polyamide resin, polyphenylene sulfide resin, and the like. Yes.

軸受基体２は、特に、図６及び図７に示すように、一端６では平面視円形の一方の面７で開口している円形の開口部８を有する給気穴９と、一端１０では給気穴９に連通すると共に他端１１では外周面１２で開口する給気通路１３と、一端１４では一方の面７で開口している一方、他端１５では環状段部１６を介して拡径して他方の面１７で開口すると共に円周方向に沿って等間隔に複数個形成されているボルト挿通孔１８とを具備している。   As shown in FIGS. 6 and 7, the bearing base 2 has an air supply hole 9 having a circular opening 8 that is open at one surface 7 having a circular shape in plan view at one end 6, and a supply at the one end 10. An air supply passage 13 that communicates with the air holes 9 and opens at the outer peripheral surface 12 at the other end 11, and opens at one surface 7 at one end 14, while the other end 15 expands through an annular step 16. And a plurality of bolt insertion holes 18 which are opened at the other surface 17 and formed at equal intervals along the circumferential direction.

給気通路１３の外周面１２で開口する端部１９には、雌ねじ２０が形成されており、雌ねじ２０には給気プラグ（図示せず）が螺合固定される。   A female screw 20 is formed at an end 19 that opens on the outer peripheral surface 12 of the air supply passage 13, and an air supply plug (not shown) is screwed and fixed to the female screw 20.

軸受体５は、特に、図８から図１０に示すように、軸受基体２の一方の面７に対面している一方の平面視円形の面２１に形成された円環状凹部２２と、環状肩部面２４で規定されていると共に一方の面２１で開口する拡径凹部２５と、他方の平面視円形の面２６で開口した無端の円形の環状凹溝２７と、一端２８では環状凹溝２７に連通していると共に他端２９では円環状凹部２２の環状底面３０で開口した複数個の空気吹出孔３１と、一方の面２１に外周縁に円周方向に沿って等間隔に形成された複数個の雌ねじ穴３２とを有している。 As shown in FIGS. 8 to 10, the bearing body 5 includes an annular recess 22 formed in one circular surface 21 facing the one surface 7 of the bearing base 2 and a circular shoulder. A diameter-enlarged recess 25 defined by the part surface 24 and opened at one surface 21, an endless circular annular groove 27 opened at the other circular surface 26 in plan view, and an annular groove 27 at one end 28. The other end 29 is formed with a plurality of air blowing holes 31 opened at the annular bottom surface 30 of the annular recess 22, and is formed on the outer surface of the one surface 21 at equal intervals along the circumferential direction. A plurality of female screw holes 32 are provided.

環状肩部面２４は、円環状凹部２２の円筒状の外周壁面２３に連接していると共に径方向外方に伸びた径方向環状肩部面２４ａと、径方向環状肩部面２４ａに連接していると共に軸方向に伸びた軸方向円筒状肩部面２４ｂとを具備している。   The annular shoulder surface 24 is connected to the cylindrical outer peripheral wall surface 23 of the annular recess 22 and is connected to the radial annular shoulder surface 24a extending radially outward and the radial annular shoulder surface 24a. And an axial cylindrical shoulder surface 24b extending in the axial direction.

軸受体５の環状面３３と互いに対面する円筒面３４とによって規定されていると共に複数個の空気吹出孔３１の一端２８を相互に連通させる環状凹溝２７は、図５に示すように、少なくとも０．３ｍｍの幅Ｗと、少なくともに０．０１ｍｍの深さｄとを有しており、空気吹出孔３１は、その一端２８で、本例では一端２８から他端２９に亘って少なくとも３０μｍの直径Ｄを有して、円環状凹部２２の環状底面３０と環状凹溝２７との間で自成絞りを形成しており、複数個の空気吹出孔３１の一端２８は、環状凹溝２７に沿って等間隔に配列されている。 As shown in FIG. 5, the annular concave groove 27 defined by the annular surface 33 of the bearing body 5 and the cylindrical surface 34 facing each other and communicating with the one ends 28 of the plurality of air blowing holes 31 is at least as shown in FIG. It has a width W of 0.3 mm and a depth d of at least 0.01 mm, and the air blowing hole 31 is at one end 28, in this example from at least one end 28 to the other end 29, at least 30 μm. A self-contained throttle is formed between the annular bottom surface 30 of the annular recess 22 and the annular groove 27 having a diameter D, and one ends 28 of the plurality of air blowing holes 31 are formed in the annular groove 27. It is arranged at equal intervals along.

円環状凹部２２の内周壁面３５は、図８から図１０に示すように、円環状凹部２２の開口部３６から円環状凹部２２の環状底面３０にかけて末広がりに伸びる截頭円錐面３７に形成されており、内周壁面３５を截頭円錐面３７とすることにより、円環状凹部２２の環状底面３０と一方の面２１との間に形成される環状薄肉部３８を径方向に大きくすることなく円環状凹部２２の容積を増大することができるので、環状薄肉部３８を有する軸受体５に強度低下を来たすことはない。   As shown in FIGS. 8 to 10, the inner peripheral wall surface 35 of the annular recess 22 is formed on a frustoconical surface 37 extending from the opening 36 of the annular recess 22 to the annular bottom surface 30 of the annular recess 22. The inner peripheral wall surface 35 is a truncated conical surface 37, so that the annular thin portion 38 formed between the annular bottom surface 30 and the one surface 21 of the annular recess 22 is not enlarged in the radial direction. Since the volume of the annular recess 22 can be increased, the strength of the bearing body 5 having the annular thin portion 38 is not lowered.

円環状凹部２２は、空気吹出孔３１の他端２９が開口する環状底面３０と、環状底面３０の外縁に連接されている円筒状の外周壁面２３と、環状底面３０の内縁に連接されている截頭円錐面３７を有する内周壁面３５とにより規定されている。   The annular recess 22 is connected to the annular bottom surface 30 where the other end 29 of the air blowing hole 31 opens, the cylindrical outer peripheral wall surface 23 connected to the outer edge of the annular bottom surface 30, and the inner edge of the annular bottom surface 30. And an inner peripheral wall surface 35 having a truncated conical surface 37.

軸受体５の拡径凹部２５には、特に図２に示すように、環状シール部材３としてのＯリングがつぶし代をもって円環状凹部２２の開口部３６から突出して装着されており、Ｏリングは軸受体５の一方の面２１と軸受基体２の一方の面７との接合面に押圧されて介在して面２１及び７間を密封する。   As shown in FIG. 2 in particular, the O-ring as the annular seal member 3 is mounted on the diameter-enlarged recess 25 of the bearing body 5 so as to protrude from the opening 36 of the annular recess 22 with a crushing margin. The surface 21 and 7 are sealed by being pressed against the joint surface between the one surface 21 of the bearing body 5 and the one surface 7 of the bearing base 2.

以上の静圧気体軸受１は、軸受体５が、拡径凹部２５に装着されたＯリングを介して締結部材４としての六角穴付きボルトによって軸受基体２と締結一体化されているので安価な製作が可能となる。また、空気吹出孔３１は、少なくとも３０μｍの直径Ｄと極めて小径であるため、空気吹出孔３１からの多量の空気噴射に起因する自励振動の発生を抑制することができる。   The above-described hydrostatic gas bearing 1 is inexpensive because the bearing body 5 is fastened and integrated with the bearing base 2 by a hexagon socket head bolt as a fastening member 4 through an O-ring mounted in the enlarged diameter recess 25. Production is possible. Moreover, since the air blowing hole 31 is extremely small with a diameter D of at least 30 μm, it is possible to suppress the occurrence of self-excited vibration caused by a large amount of air injection from the air blowing hole 31.

次に図１から図５に示す静圧気体軸受１の製造方法の例を説明すると、まず、図６及び図７に示すような補強充填材含有合成樹脂製あるいはアルミニウム又はアルミニウム合金製の軸受基体２と、図８から図１０に示すような合成樹脂製の軸受体５であって、環状凹溝２７及び空気吹出孔３１を有していない軸受体５ａを準備し、図１１に示すように、拡径凹部２５に装着したＯリングを介して軸受体５ａの円環状凹部２２の開口部３６を軸受基体２の給気穴９の開口部８に連通させると共に軸受体５ａの雌ねじ穴３２を軸受基体２のボルト挿通孔１８の一端１４に合致させたのち、ボルト挿通孔１８に締結部材４としての六角穴付きボルトを挿通させると共に六角穴付きボルトの雄ねじ部を軸受体５の雌ねじ穴３２に螺合固定させて軸受基体２と軸受体５とを締結一体化した組立体３９を形成する。   Next, an example of a manufacturing method of the hydrostatic gas bearing 1 shown in FIGS. 1 to 5 will be described. First, a bearing base made of synthetic resin containing reinforcing filler or aluminum or aluminum alloy as shown in FIGS. 2 and a synthetic resin bearing body 5 as shown in FIGS. 8 to 10, and a bearing body 5a having no annular concave groove 27 and air blowing holes 31 is prepared, as shown in FIG. The opening 36 of the annular recess 22 of the bearing body 5a is communicated with the opening 8 of the air supply hole 9 of the bearing base 2 through the O-ring attached to the enlarged diameter recess 25, and the female screw hole 32 of the bearing body 5a is formed. After matching with one end 14 of the bolt insertion hole 18 of the bearing base 2, a hexagon socket head bolt as a fastening member 4 is inserted into the bolt insertion hole 18 and the male screw portion of the hexagon socket head bolt is inserted into the female screw hole 32 of the bearing body 5. Screwed to the bearing base To form a 2 and assembly 39 has concluded integrating the bearing body 5.

このように締結一体化された組立体３９における軸受体５ａの他方の面２６に、レーザー加工機によりレーザーを照射し、幅Ｗ０．３〜１．０ｍｍ、深さｄ０．０１〜０．０５ｍｍの環状凹溝２７と、環状凹溝２７を規定する環状面３３に環状面３３から軸受体５ａを貫通して円環状凹部２２の環状底面３０に開口する直径Ｄが少なくとも３０μｍ、好ましくは３０〜１２０μｍに複数個の自成絞り形状の空気吹出孔３１を形成し、静圧気体軸受１を作製する。   The other surface 26 of the bearing body 5a in the assembly 39 thus fastened and integrated is irradiated with a laser by a laser processing machine, and has a width W of 0.3 to 1.0 mm and a depth of d 0.01 to 0.05 mm. The diameter D of the annular concave groove 27 and the annular surface 33 defining the annular concave groove 27 penetrating from the annular surface 33 through the bearing body 5a to the annular bottom surface 30 of the annular concave portion 22 is at least 30 μm, preferably 30 to 120 μm. A plurality of self-drawn air blowing holes 31 are formed in the slab to produce the static pressure gas bearing 1.

用いる加工用レーザーとしては、炭酸ガスレーザー、ＹＡＧレーザー、ＵＶレーザー又はエキシマレーザー等から選択されるが、好ましくは、炭酸ガスレーザーを用いる。   The processing laser to be used is selected from a carbon dioxide laser, a YAG laser, a UV laser, an excimer laser, and the like. Preferably, a carbon dioxide laser is used.

直径３０ｍｍの円弧を中心として幅０．５ｍｍ、深さ０．０５ｍｍの環状凹溝２７は、レーザー出力９．５Ｗの炭酸ガスレーザーを使用して、スキャンスピード１０００ｍｍ／ｓ、重ね印字回数１回、加工時間２秒でポリフェニレンサルファイド樹脂から形成された軸受体５の面２６に形成、加工することができ、また、環状凹溝２７の環状面３３に、環状面３３から軸受体５を貫通して円環状凹部２２の環状底面３０に開口する直径０．０６ｍｍの自成絞り形状の空気吹出孔３１は、レーザー出力１４Ｗ、加工時間１５秒で円周方向に１０等配の位置に１０個加工することができた。   An annular groove 27 having a width of 0.5 mm and a depth of 0.05 mm centered on an arc of 30 mm in diameter uses a carbon dioxide laser with a laser output of 9.5 W, the scanning speed is 1000 mm / s, the number of times of repeated printing, It can be formed and processed on the surface 26 of the bearing body 5 made of polyphenylene sulfide resin in a processing time of 2 seconds, and passes through the bearing body 5 from the annular surface 33 to the annular surface 33 of the annular groove 27. Ten self-drawn air blow holes 31 having a diameter of 0.06 mm that open on the annular bottom surface 30 of the annular recess 22 are machined at 10 equally spaced positions in the circumferential direction with a laser output of 14 W and a machining time of 15 seconds. I was able to.

上記の静圧気体軸受１の軸受体５は、一個の環状凹溝２７を具備しているが、環状凹溝２７に加えて、軸受体５は、図１２に示すように、軸受体５の一方の面２６に形成されていると共に、環状凹溝２７の外側に環状凹溝２７を囲むと共に環状凹溝２７と同心の大径環状凹溝４０と、一方の端部４１が環状凹溝２７に開口すると共に他方の端部４２が大径環状凹溝４０に開口する複数個の放射状凹溝４３と、環状凹溝２７の内側に形成されていると共に環状凹溝２７と同心の小径環状凹溝４４と、一方の端部４５が環状凹溝２７に開口すると共に他方の端部４６が小径環状凹溝４４に開口する複数個の放射状凹溝４７とを具備していてもよい。   The bearing body 5 of the hydrostatic gas bearing 1 includes one annular groove 27. In addition to the annular groove 27, the bearing body 5 includes the bearing body 5 as shown in FIG. A large-diameter annular groove 40 which is formed on one surface 26 and surrounds the annular groove 27 outside the annular groove 27 and is concentric with the annular groove 27, and one end 41 thereof is the annular groove 27. A plurality of radial grooves 43 whose other end 42 opens into the large-diameter annular groove 40 and a small-diameter annular groove formed inside the annular groove 27 and concentric with the annular groove 27. The groove 44 may include a plurality of radial grooves 47 whose one end 45 opens into the annular groove 27 and whose other end 46 opens into the small-diameter annular groove 44.

図１２に示す軸受体５を有した静圧気体軸受１では、環状凹溝２７に給気された空気は、放射状凹溝４３及び４７を介して大径環状凹溝４０及び小径環状凹溝４４に供給されるので、供給面積が大きくなり、例えば物品の浮上において、安定した浮上を行うことができる。   In the static pressure gas bearing 1 having the bearing body 5 shown in FIG. 12, the air supplied to the annular groove 27 is passed through the radial grooves 43 and 47, and the large-diameter annular groove 40 and the small-diameter annular groove 44. Therefore, the supply area is increased, and stable levitation can be performed, for example, when the article is levitated.

図１３から図１６は、静圧気体軸受１の他の実施の形態を示すもので、軸受基体２の他方の平面視円形の面１７の中央部には、面１７に平面視円形の開口部４８を有する凹部４９が形成されており、凹部４９は、平面視円形の底面５０と、底面５０から開口部４８にかけて末広がりに伸びる截頭円錐面５１を有している。   FIGS. 13 to 16 show another embodiment of the static pressure gas bearing 1, and the center portion of the other circular surface 17 of the bearing base 2 has a circular opening on the surface 17. A recess 49 having 48 is formed, and the recess 49 has a circular bottom surface 50 in plan view and a frustoconical surface 51 extending from the bottom surface 50 to the opening 48 so as to spread outwardly.

凹部４９を有する軸受基体２は、前記静圧気体軸受１と同様に、給気穴９の開口部８を、拡径凹部２５にＯリングを装着した軸受体５の円環状凹部２２の開口部３６に連通させると共に軸受基体２のボルト挿通孔１８の一端１４に軸受体５の雌ねじ穴３２を合致させたのち、ボルト挿通孔１８に締結部材４としての六角穴付きボルトを挿通させると共に六角穴付きボルトの雄ねじ部を軸受体５の雌ねじ穴３２に螺合固定させて軸受基体２と軸受体５とを締結一体化した組立体５２を形成する。   The bearing base 2 having the recess 49 is similar to the static pressure gas bearing 1 in that the opening 8 of the air supply hole 9 is replaced with the opening of the annular recess 22 of the bearing body 5 in which the O-ring is attached to the enlarged diameter recess 25. 36, and the female screw hole 32 of the bearing body 5 is matched with the one end 14 of the bolt insertion hole 18 of the bearing base 2, and then a hexagon socket head bolt as the fastening member 4 is inserted into the bolt insertion hole 18. The assembly 52 in which the bearing base 2 and the bearing body 5 are fastened and integrated is formed by screwing and fixing the male thread portion of the accessory bolt into the female screw hole 32 of the bearing body 5.

このように締結一体化された組立体５２における軸受体５の他方の面２６に、レーザー加工機によりレーザーを照射し、幅Ｗ０．３〜１．０ｍｍ、深さｄ０．０１〜０．０５ｍｍの環状凹溝２７と、環状凹溝２７を規定する環状面３３に環状面３３から軸受体５を貫通して円環状凹部２２の環状底面３０に開口する直径Ｄが少なくとも３０μｍ、好ましくは３０〜１２０μｍに複数個の自成絞り形状の空気吹出孔３１を形成し、静圧気体軸受１を作製する。   The other surface 26 of the bearing body 5 in the assembly 52 thus fastened and integrated is irradiated with a laser by a laser processing machine to have a width W of 0.3 to 1.0 mm and a depth of d 0.01 to 0.05 mm. The diameter D of the annular groove 27 and the annular surface 33 defining the annular groove 27 that penetrates the bearing body 5 from the annular surface 33 and opens to the annular bottom surface 30 of the annular recess 22 is at least 30 μm, preferably 30 to 120 μm. A plurality of self-drawn air blowing holes 31 are formed in the slab to produce the static pressure gas bearing 1.

このように形成された静圧気体軸受１には、図１６に示すように、軸受基体２の凹部４９の截頭円錐面５１にボールスタッド５３の球体５４が摺接して配されることにより、自動調芯機能が付加される。   In the static pressure gas bearing 1 formed in this way, as shown in FIG. 16, the spherical body 54 of the ball stud 53 is arranged in sliding contact with the frustoconical surface 51 of the concave portion 49 of the bearing base 2. An automatic alignment function is added.

図１７及び図２０は、静圧気体軸受１の更に他の実施の形態を示すもので、軸受基体２の他方の平面視円形の面１７の中央部には、面１７に平面視円形の開口部４８を有する凹部４９が形成されており、凹部４９は、底面５０から開口部４８にかけて広がる凹球面５５を有している。   FIGS. 17 and 20 show still another embodiment of the static pressure gas bearing 1, and a circular opening in the plan view is formed in the surface 17 at the center of the other plan view circular surface 17 of the bearing base 2. A recess 49 having a portion 48 is formed, and the recess 49 has a concave spherical surface 55 that extends from the bottom surface 50 to the opening 48.

凹球面５５を有する凹部４９を備えた軸受基体２は、前記静圧気体軸受１と同様に、給気穴９の開口部８を、拡径凹部２５にＯリングを装着した軸受体５の円環状凹部２２の開口部３６に連通させると共に軸受基体２のボルト挿通孔１８の一端１４に軸受体５の雌ねじ穴３２を合致させたのち、ボルト挿通孔１８に締結部材４としての六角穴付きボルトを挿通させると共に六角穴付きボルトの雄ねじ部を軸受体５の雌ねじ穴３２に螺合固定させて軸受基体２と軸受体５とを締結一体化した組立体５６を形成する。   The bearing base 2 including the concave portion 49 having the concave spherical surface 55 is similar to the static pressure gas bearing 1 in that the opening 8 of the air supply hole 9 is formed, and the circle of the bearing body 5 in which the O-ring is attached to the enlarged diameter concave portion 25. After communicating with the opening 36 of the annular recess 22 and the female screw hole 32 of the bearing body 5 with the one end 14 of the bolt insertion hole 18 of the bearing base 2, a bolt with a hexagonal hole as the fastening member 4 is inserted into the bolt insertion hole 18. And the male screw portion of the hexagon socket head bolt is screwed and fixed into the female screw hole 32 of the bearing body 5 to form an assembly 56 in which the bearing base 2 and the bearing body 5 are fastened and integrated.

このように締結一体化された組立体５６における軸受体５の他方の面２６に、前記と同様にしてレーザー加工機によりレーザーを照射し、幅Ｗ０．３〜１．０ｍｍ、深さｄ０．０１〜０．０５ｍｍの環状凹溝２７と、環状凹溝２７を規定する環状面３３に環状面３３から軸受体５を貫通して円環状凹部２２の環状底面３０に開口する直径Ｄが少なくとも３０μｍ、好ましくは３０〜１２０μｍに複数個の自成絞り形状の空気吹出孔３１を形成し、静圧気体軸受１を作製する。   The other surface 26 of the bearing body 5 in the assembly 56 thus fastened and integrated is irradiated with a laser by a laser processing machine in the same manner as described above, and the width W is 0.3 to 1.0 mm and the depth is d0.01. An annular groove 27 having a diameter of about 0.05 mm, and an annular surface 33 that defines the annular groove 27, the diameter D of the annular surface 33 penetrating the bearing body 5 and opening to the annular bottom surface 30 of the annular recess 22 is at least 30 μm; Preferably, a plurality of self-drawn air blowing holes 31 are formed at 30 to 120 μm, and the static pressure gas bearing 1 is manufactured.

このように形成された静圧気体軸受１には、図２０に示すように、軸受基体２の凹部４９の凹球面５５にボールスタッド５３の球体５４が摺接して配されることにより、自動調芯機能が付加される。   As shown in FIG. 20, the static pressure gas bearing 1 formed in this way is automatically adjusted by the spherical body 54 of the ball stud 53 slidably disposed on the concave spherical surface 55 of the concave portion 49 of the bearing base 2. A core function is added.

図２１から図２７は、自動調芯機能が付加され静圧気体軸受１の他の実施の形態を示すものである。軸受基体２の他方の平面視円形の面１７の中央部には、面１７に平面視円形の開口部５７を有すると共に円形の底面５８を有する円柱状凹部５９が形成されており、円柱状凹部５９には、図２４に示すように、円柱体６０と、一端６１で円柱体６０の一方の面６２で開口する円孔６３と、円孔６３の他端６４に連接し、他端６４から他方の面６５に向けて末広がりに伸びると共に円柱体６０の他方の面６５で開口して截頭円錐面６６を有する凹部６７とを備えた駒６８が一方の面６２を円柱状凹部５９の底面５８に向けて嵌合固定されている。   21 to 27 show another embodiment of the static pressure gas bearing 1 to which an automatic alignment function is added. A cylindrical recess 59 having an opening 57 having a circular shape in plan view and a circular bottom surface 58 is formed in the center portion of the other circular surface 17 in plan view of the bearing base 2. 24, a cylindrical body 60, a circular hole 63 opened at one end 61 of the cylindrical body 60 at one end 62, and the other end 64 of the circular hole 63 are connected to the other end 64, as shown in FIG. A piece 68 having a recess 67 having a frustoconical surface 66 that extends toward the other surface 65 and opens toward the other surface 65 of the cylindrical body 60 is formed on the bottom surface of the cylindrical recess 59. It is fitted and fixed toward 58.

駒６８を嵌合固定した軸受基体２は、前記静圧気体軸受１と同様に、給気穴９の開口部８を、拡径凹部２５にＯリングを装着した軸受体５の円環状凹部２２の開口部３６に連通させると共に軸受基体２のボルト挿通孔１８の一端１４を軸受体５の雌ねじ穴３２に合致させたのち、ボルト挿通孔１８に締結部材４としての六角穴付きボルトを挿通させると共に六角穴付きボルトの雄ねじ部を軸受体５の雌ねじ穴３２に螺合させて軸受基体２と軸受体５とを締結一体化した組立体７０を形成する。   The bearing base 2 to which the piece 68 is fitted and fixed is similar to the static pressure gas bearing 1 in that the opening 8 of the air supply hole 9 and the annular recess 22 of the bearing body 5 in which the O-ring is mounted on the enlarged diameter recess 25. After the one end 14 of the bolt insertion hole 18 of the bearing base 2 is matched with the female screw hole 32 of the bearing body 5, a hexagon socket bolt as the fastening member 4 is inserted into the bolt insertion hole 18. At the same time, the male screw portion of the hexagon socket head cap screw is screwed into the female screw hole 32 of the bearing body 5 to form an assembly 70 in which the bearing base 2 and the bearing body 5 are fastened and integrated.

このように締結一体化された組立体７０における軸受体５の他方の面２６に、前記と同様にしてレーザー加工機によりレーザーを照射し、幅Ｗ０．３〜１．０ｍｍ、深さｄ０．０１〜０．０５ｍｍの環状凹溝２７と、環状凹溝２７を規定する環状面３３に環状面３３から軸受体５を貫通して円環状凹部２２の環状底面３０に開口する直径Ｄが少なくとも３０μｍ、好ましくは３０〜１２０μｍに複数個の自成絞り形状の空気吹出孔３１を形成し、静圧気体軸受１を作製する。   The other surface 26 of the bearing body 5 in the assembly 70 thus fastened and integrated is irradiated with a laser by a laser processing machine in the same manner as described above, and has a width W of 0.3 to 1.0 mm and a depth of d0.01. An annular groove 27 having a diameter of about 0.05 mm, and an annular surface 33 that defines the annular groove 27, the diameter D of the annular surface 33 penetrating the bearing body 5 and opening to the annular bottom surface 30 of the annular recess 22 is at least 30 μm; Preferably, a plurality of self-drawn air blowing holes 31 are formed at 30 to 120 μm, and the static pressure gas bearing 1 is manufactured.

このように形成された静圧気体軸受１には、図２７に示すように、軸受基体２の他方の面１７に嵌合固定された駒６８の凹部６７の截頭円錐面６６にボールスタッド５３の球体５４が摺接して配されることにより、自動調芯機能が付加される。   As shown in FIG. 27, the static pressure gas bearing 1 formed in this way has a ball stud 53 on the truncated conical surface 66 of the recess 67 of the piece 68 fitted and fixed to the other surface 17 of the bearing base 2. When the spheres 54 are arranged in sliding contact with each other, an automatic alignment function is added.

図２８から図３１は、自動調芯機能が付加され静圧気体軸受１の更に他の実施の形態を示すものである。軸受基体２の他方の平面視円形の面１７の中央部には、面１７に平面視円形の開口部５７を有すると共に円形の底面５８を有する円柱状凹部５９が形成されており、円柱状凹部５９には、図２８に示すように、円柱体６０と、一端６１で円柱体６０の一方の面６２に開口する円孔６３と、円孔６３の他端６４に連接し、他端６４から他方の面６５に向けて広がる凹球面６９とを有する凹部６７を備えた駒６８が一方の面６２を円柱状凹部５９の底面５８に向けて嵌合固定されている。   FIGS. 28 to 31 show still another embodiment of the static pressure gas bearing 1 to which an automatic alignment function is added. A cylindrical recess 59 having an opening 57 having a circular shape in plan view and a circular bottom surface 58 is formed in the center portion of the other circular surface 17 in plan view of the bearing base 2. 28, as shown in FIG. 28, the cylindrical body 60, a circular hole 63 opened to one surface 62 of the cylindrical body 60 at one end 61, and the other end 64 of the circular hole 63 are connected. A piece 68 having a concave portion 67 having a concave spherical surface 69 extending toward the other surface 65 is fitted and fixed with the one surface 62 facing the bottom surface 58 of the cylindrical concave portion 59.

駒６８を嵌合固定した軸受基体２は、前記静圧気体軸受１と同様に、給気穴９の開口部８を、拡径凹部２５にＯリングを装着した軸受体５の円環状凹部２２の開口部３６に連通させると共に軸受基体２のボルト挿通孔１８の一端１４を軸受体５の雌ねじ穴３２に合致させたのち、ボルト挿通孔１８に締結部材４としての六角穴付きボルトを挿通させると共に六角穴付きボルトの雄ねじ部を軸受体５の雌ねじ穴３２に螺合させて軸受基体２と軸受体５とを締結一体化した組立体７１を形成する。   The bearing base 2 to which the piece 68 is fitted and fixed is similar to the static pressure gas bearing 1 in that the opening 8 of the air supply hole 9 and the annular recess 22 of the bearing body 5 in which the O-ring is mounted on the enlarged diameter recess 25. After the one end 14 of the bolt insertion hole 18 of the bearing base 2 is matched with the female screw hole 32 of the bearing body 5, a hexagon socket bolt as the fastening member 4 is inserted into the bolt insertion hole 18. At the same time, the male thread portion of the hexagon socket head cap screw is screwed into the female thread hole 32 of the bearing body 5 to form an assembly 71 in which the bearing base 2 and the bearing body 5 are fastened and integrated.

このように締結一体化された組立体７１における軸受体５の他方の面２６に、前記と同様にしてレーザー加工機によりレーザーを照射し、幅Ｗ０．３〜１．０ｍｍ、深さｄ０．０１〜０．０５ｍｍの環状凹溝２７と、環状凹溝２７を規定する環状面３３に環状面３３から軸受体５を貫通して円環状凹部２２の環状底面３０に開口する直径Ｄが少なくとも３０μｍ、好ましくは３０〜１２０μｍに複数個の自成絞り形状の空気吹出孔３１を形成し、静圧気体軸受１を作製する。   The other surface 26 of the bearing body 5 in the assembly 71 thus fastened and integrated is irradiated with a laser by a laser processing machine in the same manner as described above, and has a width W of 0.3 to 1.0 mm and a depth of d0.01. An annular groove 27 having a diameter of about 0.05 mm, and an annular surface 33 that defines the annular groove 27, the diameter D of the annular surface 33 penetrating the bearing body 5 and opening to the annular bottom surface 30 of the annular recess 22 is at least 30 μm; Preferably, a plurality of self-drawn air blowing holes 31 are formed at 30 to 120 μm, and the static pressure gas bearing 1 is manufactured.

このように形成された静圧気体軸受１には、図３１に示すように、軸受基体２の円柱状凹部５９に嵌合固定された駒６８の凹部６７の凹球面６９にボールスタッド５３の球体５４が摺接して配されることにより自動調芯機能が付加される。   As shown in FIG. 31, the static pressure gas bearing 1 formed in this way has a spherical body of a ball stud 53 on a concave spherical surface 69 of a concave portion 67 of a piece 68 fitted and fixed to a cylindrical concave portion 59 of a bearing base 2. An automatic alignment function is added by arranging 54 in sliding contact.

軸受基体２の他方の平面視円形の面１７の中央部に形成された円柱状凹部５９に嵌合固定された駒６８を摺動性に優れた材料、例えばポリアセタール樹脂、ポリアミド樹脂、ポリエステル樹脂等の自己潤滑性を有する熱可塑性合成樹脂、あるいは銅又は銅合金等で形成することにより、駒６８の凹部６７の截頭円錐面６６又は凹球面６９とボールスタッド５３の球体５４との摺接をより円滑に行わせることができる。   A material having excellent slidability, such as a polyacetal resin, a polyamide resin, a polyester resin, etc., is used for the piece 68 fitted and fixed to a cylindrical recess 59 formed in the central portion of the other circular surface 17 of the bearing base 2 in plan view. The self-lubricating thermoplastic synthetic resin or copper or copper alloy or the like is used to make the sliding contact between the truncated conical surface 66 or the concave spherical surface 69 of the concave portion 67 of the piece 68 and the sphere 54 of the ball stud 53. It can be performed more smoothly.

図３２は、図２７に示す静圧気体軸受１を用いた直動案内装置７２を示すもので、直動案内装置７２は、案内面としての上面案内面７３及び両側案内面７４及び７４を有する案内部材７５と、案内部材７５の外側に跨って配された上面案内面７３に対面する上板７６及び両側案内面７４及び７４に対面する一対の側板７７及び７７を備えた横断面コの字形の可動テーブル７８と、可動テーブル７８の上板７６の下面７９及び一対の側板７７の夫々の内面８０及び８０に球体５４を内方に向けて固定されたボールスタッド５３と、ボールスタッド５３と案内部材７５の上面案内面７３及び両側案内面７４及び７４の間に駒６８の截頭円錐面６６をボールスタッド５３の球体５４に摺接させると共に、軸受体５の一方の面２６を案内部材７５の上面案内面７３及び両側案内面７４及び７４に対面させて配された静圧気体軸受１とから形成されている。   FIG. 32 shows a linear motion guide device 72 using the static pressure gas bearing 1 shown in FIG. 27, and the linear motion guide device 72 has an upper surface guide surface 73 and both side guide surfaces 74 and 74 as guide surfaces. A U-shaped cross section provided with a guide member 75, an upper plate 76 facing the upper surface guide surface 73 disposed across the outside of the guide member 75, and a pair of side plates 77 and 77 facing both side guide surfaces 74 and 74. The movable table 78, the ball stud 53 in which the sphere 54 is fixed to the inner surfaces 80 and 80 of the upper plate 76 of the movable table 78 and the inner surfaces 80 and 80 of the pair of side plates 77, and the ball stud 53 and the guide. The truncated conical surface 66 of the piece 68 is brought into sliding contact with the sphere 54 of the ball stud 53 between the upper surface guide surface 73 and the both side guide surfaces 74 and 74 of the member 75, and one surface 26 of the bearing body 5 is guided to the guide member 75. upon It is formed from a disposed so as to face the guide surface 73 and the side guide surfaces 74 and 74 externally pressurized gas bearing 1 Tokyo.

この直動案内装置７２によれば、軸受体５の複数個の空気吹出孔３１から案内部材７５の上面案内面７３及び両側案内面７４及び７４に圧縮空気を噴射することにより、上面案内面７３及び両側案内面７４及び７４との間に形成される空気潤滑膜によって可動テーブル７８を上面案内面７３及び両側案内面７４及び７４に対して非接触の状態に保持することができる。そして、軸受体５と上面案内面７３及び両側案内面７４及び７４との間の軸受隙間が不均一であると、軸受隙間各部に圧力差が発生するが、その圧力差により、軸受隙間が均一となる方向に静圧気体軸受１が自動調芯され、上面案内面７３及び両側案内面７４及び７４に対して平行な状態が保持される。このため、案内部材７５及び可動テーブル７８の平行度、直角度等の部品精度を比較的粗い精度とすることができ、静圧気体軸受１自体の低コストに加えて、直動案内装置７２の製作の容易化及びコストの低下を図ることができる。   According to this linear motion guide device 72, the upper surface guide surface 73 is injected by injecting compressed air from the plurality of air blowing holes 31 of the bearing body 5 to the upper surface guide surface 73 and both side guide surfaces 74 and 74 of the guide member 75. In addition, the movable table 78 can be held in a non-contact state with respect to the upper surface guide surface 73 and the both side guide surfaces 74 and 74 by an air lubricating film formed between the both side guide surfaces 74 and 74. If the bearing gap between the bearing body 5 and the upper surface guide surface 73 and the both side guide surfaces 74 and 74 is non-uniform, a pressure difference is generated in each part of the bearing gap, but the bearing gap is uniform due to the pressure difference. In this direction, the static pressure gas bearing 1 is automatically aligned, and the state parallel to the upper surface guide surface 73 and the both side guide surfaces 74 and 74 is maintained. For this reason, the accuracy of parts such as the parallelism and the squareness of the guide member 75 and the movable table 78 can be made relatively coarse, and in addition to the low cost of the static pressure gas bearing 1 itself, Manufacturing can be facilitated and cost can be reduced.

直動案内装置７２においては、自動調芯機能が付加された静圧気体軸受１として、図１６、図２０及び図３１に示す静圧気体軸受１を使用してもよい。   In the linear motion guide device 72, the static pressure gas bearing 1 shown in FIGS. 16, 20, and 31 may be used as the static pressure gas bearing 1 to which an automatic alignment function is added.

以上のように、軸受体と軸受基体とは、環状シール部材を介して締結部材によって締結一体化されているので、軸受体と軸受基体との接合面は強固に密封されており、軸受体の一方の面には、幅Ｗ０．３〜１．０ｍｍ、深さｄ０．０１〜０．０５ｍｍの環状凹溝と、環状凹溝を規定する環状面に環状面から軸受体を貫通して円環状凹部の環状底面に開口する直径Ｄが少なくとも３０μｍの複数個の自成絞り形状の空気吹出孔が形成されており、当該環状凹溝及び空気吹出孔を機械加工によることなく形成できるので、大量生産が可能で、安価な静圧気体軸受を提供できるばかりでなく、当該静圧気体軸受を用いた製作の容易化及びコストの低下を図ることができる直動案内装置を提供することができる。   As described above, since the bearing body and the bearing base are fastened and integrated by the fastening member via the annular seal member, the joint surface between the bearing body and the bearing base is firmly sealed. One surface has an annular groove having a width W of 0.3 to 1.0 mm and a depth of d 0.01 to 0.05 mm, and an annular surface that defines the annular groove, and passes through the bearing body from the annular surface to form an annular shape. A plurality of self-drawn air blow holes with a diameter D of at least 30 μm opening in the annular bottom surface of the recess are formed, and the annular recess and air blow holes can be formed without machining, so mass production In addition, it is possible to provide a linear guide device that can provide an inexpensive static pressure gas bearing and can facilitate the manufacture and cost reduction using the static pressure gas bearing.

１ 静圧気体軸受
２ 軸受基体
３ 環状シール部材
４ 締結部材
５ 軸受体
１３ 給気通路
２２ 円環状凹部
２３ 外周壁面
２４ 環状肩部面
３１ 空気吹出孔 DESCRIPTION OF SYMBOLS 1 Static pressure gas bearing 2 Bearing base | substrate 3 Annular seal member 4 Fastening member 5 Bearing body 13 Air supply path 22 Annular recessed part 23 Outer peripheral wall surface 24 Annular shoulder surface 31 Air blowing hole

Claims (10)

一方の面に形成された円環状凹部、該円環状凹部の外周壁面に連接していると共に当該外周壁面に対し拡径している環状肩部面、他方の面で開口した無端の円形の環状凹溝及び一端では環状凹溝に開口していると共に他端では円環状凹部の環状底面で開口した自成絞りとしての複数個の空気吹出孔を有した合成樹脂製の軸受体と、環状肩部面に接触して装着された環状シール部材と、軸受体の一方の面に対面している一方の面に、一端では当該軸受体の一方の面に対面している一方の面で開口している一方、他端では外周面で開口する給気通路を備えた軸受基体とを具備しており、軸受体は、円環状凹部の開口部を軸受基体の給気通路に連通させると共に、該軸受基体に複数個の締結部材を介して締結固定されて、軸受基体に一体化されており、複数個の空気吹出孔の一端を相互に連通させる環状凹溝は、少なくとも０．３ｍｍの幅と、少なくとも０．０１ｍｍの深さとを有しており、空気吹出孔は、その一端で少なくとも３０μｍの直径を有して、円環状凹部と環状凹溝との間で自成絞りを形成しており、複数個の空気吹出孔の一端は、環状凹溝に沿って等間隔に配列されていることを特徴とする静圧気体軸受。 An annular recess formed on one surface, an annular shoulder surface connected to the outer peripheral wall surface of the annular recess and having a diameter expanded with respect to the outer peripheral wall surface, an endless circular ring opening on the other surface A synthetic resin bearing body having a plurality of air blowing holes as a self-contained aperture that is open to the annular groove at one end and the annular bottom groove at the other end, and an annular shoulder at the other end An annular seal member mounted in contact with the part surface and one surface facing one surface of the bearing body are open at one end facing one surface of the bearing body at one end. On the other hand, the other end is provided with a bearing base provided with an air supply passage opening on the outer peripheral surface. The bearing body communicates the opening of the annular recess with the air supply passage of the bearing base, and Fastened to the bearing base via a plurality of fastening members and integrated with the bearing base. An annular groove communicating the one end of the plurality of air outlet holes each other, the width of at least 0.3 mm, has a depth of at least 0.01 mm, the air blowout hole is at least 30μm at one end And a self-formed throttle is formed between the annular recess and the annular groove, and one ends of the plurality of air blowing holes are arranged at equal intervals along the annular groove . A hydrostatic gas bearing characterized by that. 環状凹溝は、０．３〜１．０ｍｍ又は０．３〜０．７ｍｍの幅と、０．０１〜０．０５ｍｍ又は０．０１〜０．０３ｍｍの深さとを有しており、空気吹出孔は、その一端で３０〜１２０μｍの直径を有している請求項１に記載の静圧気体軸受。   The annular groove has a width of 0.3 to 1.0 mm or 0.3 to 0.7 mm and a depth of 0.01 to 0.05 mm or 0.01 to 0.03 mm, The static pressure gas bearing according to claim 1, wherein the hole has a diameter of 30 to 120 μm at one end thereof. 円環状凹部の内周壁面は、開口部から環状底面にかけて末広がりの截頭円錐面に形成されている請求項１又は２に記載の静圧気体軸受。3. The static pressure gas bearing according to claim 1, wherein an inner peripheral wall surface of the annular recess is formed in a truncated conical surface that widens from the opening to the annular bottom surface. 4. 軸受基体の他方の面には、球体受圧凹部が形成されている請求項１から３のいずれか一項に記載の静圧気体軸受。The hydrostatic gas bearing according to any one of claims 1 to 3, wherein a spherical pressure receiving recess is formed on the other surface of the bearing base. 球体受圧凹部は、軸受基体の他方の面で開口する截頭円錐凹部を有している請求項４に記載の静圧気体軸受。The hydrostatic gas bearing according to claim 4, wherein the spherical pressure receiving recess has a frustoconical recess that opens on the other surface of the bearing base. 球体受圧凹部は、軸受基体の他方の面で開口する凹球面部を有している請求項４に記載の静圧気体軸受。The static pressure gas bearing according to claim 4, wherein the spherical pressure-receiving recess has a concave spherical surface opening on the other surface of the bearing base. 球体受圧凹部は、軸受基体の他方の面に開口部を有して形成された円柱状凹部を具備しており、当該円柱状凹部には、一方の面に截頭円錐凹部を有すると共に該截頭円錐凹部を円柱状凹部の開口部に開口させた駒が嵌合固定されている請求項４に記載の静圧気体軸受。The spherical pressure-receiving recess has a cylindrical recess formed with an opening on the other surface of the bearing base. The cylindrical recess has a frustoconical recess on one surface and the flange. The hydrostatic gas bearing according to claim 4, wherein a piece in which the conical concavity is opened in the opening of the cylindrical concavity is fitted and fixed. 球体受圧凹部は、軸受基体の他方の面に開口部を有して形成された円柱状凹部を具備しており、当該円柱状凹部には、一方の面に凹球面部を有すると共に該凹球面部を円柱状凹部の開口部に開口させた駒が嵌合固定されている請求項４に記載の静圧気体軸受。The spherical pressure-receiving recess has a cylindrical recess formed with an opening on the other surface of the bearing base, and the cylindrical recess has a concave spherical surface on one surface and the concave spherical surface. The static pressure gas bearing according to claim 4, wherein a piece having a portion opened to an opening of a cylindrical recess is fitted and fixed. 軸受体は、環状凹溝に加えて、その一方の面に形成されていると共に、該環状凹溝の外側に該環状凹溝を囲む大径環状凹溝と、一方の端部が該環状凹溝に開口すると共に他方の端部が大径環状凹溝に開口する複数個の第一の放射状凹溝と、該環状凹溝の内側に形成された小径環状凹溝と、一方の端部が環状凹溝に開口すると共に他方の端部が小径環状凹溝に開口する複数個の第二の放射状凹溝とを具備している請求項１から８のいずれか一項に記載の静圧気体軸受。The bearing body is formed on one surface of the annular groove, in addition to the annular groove, a large-diameter annular groove surrounding the annular groove on the outside of the annular groove, and one end portion of the annular groove. A plurality of first radial grooves having an opening in the groove and the other end opening in the large-diameter annular groove; a small-diameter annular groove formed inside the annular groove; The static pressure gas according to any one of claims 1 to 8, further comprising: a plurality of second radial grooves that open in the annular groove and have the other end opening in the small-diameter groove. bearing. 案内面としての上面案内面及び両側案内面を有する案内部材の外側に、上面案内面に対面する上板及び両側案内面に対面する一対の側板を備えた可動テーブルが配されており、該可動テーブルの上板の下面及び一対の側板の夫々の内面には、夫々ボールスタッドが球体を内方に向けて立設されており、該ボールスタッドとガイド部材の上面及び両側面との間には、請求項１から請求項９のいずれか一項に記載の静圧気体軸受が球体受圧凹部を該ボールスタッドの球体に摺接させると共に、軸受体をガイド部材の上面案内面及び両側案内面に対面させて配されていることを特徴とする直動案内装置。A movable table having an upper plate facing the upper surface guide surface and a pair of side plates facing both side guide surfaces is arranged outside the guide member having the upper surface guide surface and the both side guide surfaces as guide surfaces. Ball studs are erected on the lower surface of the upper plate of the table and the inner surfaces of the pair of side plates, with the spheres facing inward, and between the ball stud and the upper surface and both side surfaces of the guide member. The hydrostatic gas bearing according to any one of claims 1 to 9 causes the spherical body pressure receiving recess to slide in contact with the spherical body of the ball stud, and the bearing body to the upper surface guide surface and both side guide surfaces of the guide member. A linear motion guide device characterized by being arranged facing each other.
JP2011239832A 2011-10-31 2011-10-31 Static pressure gas bearing and linear motion guide device using the static pressure gas bearing Active JP5915088B2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2011239832A JP5915088B2 (en) 2011-10-31 2011-10-31 Static pressure gas bearing and linear motion guide device using the static pressure gas bearing
PCT/JP2012/006867 WO2013065268A1 (en) 2011-10-31 2012-10-25 Aerostatic bearing and linear guide employing said aerostatic bearing
CN201280047857.8A CN103842673A (en) 2011-10-31 2012-10-25 Aerostatic bearing and linear motion guiding device using said aerostatic bearing
KR1020120120441A KR20130047644A (en) 2011-10-31 2012-10-29 Hydrostatic gas bearing and linear motion guide device using thereof
CN2012104257237A CN103089814A (en) 2011-10-31 2012-10-30 Aerostatic bearing and linear guide employing said aerostatic bearing
TW101140180A TWI504821B (en) 2011-10-31 2012-10-30 Static pressure gas bearings and the use of the static pressure gas bearing linear motion guide device

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