TW201326596A - Hydrostatic gas bearing and linear motion guide device using thereof - Google Patents
Hydrostatic gas bearing and linear motion guide device using thereof Download PDFInfo
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- TW201326596A TW201326596A TW101139982A TW101139982A TW201326596A TW 201326596 A TW201326596 A TW 201326596A TW 101139982 A TW101139982 A TW 101139982A TW 101139982 A TW101139982 A TW 101139982A TW 201326596 A TW201326596 A TW 201326596A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
- F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/001—Bearings for parts moving only linearly adjustable for alignment or positioning
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
- F16C32/0666—Details of hydrostatic bearings independent of fluid supply or direction of load of bearing pads
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
- F16C32/067—Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/20—Sliding surface consisting mainly of plastics
- F16C33/201—Composition of the plastic
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
Description
本發明係關於靜壓氣體軸承及使用該靜壓氣體軸承之直線運動引導裝置。 The present invention relates to a static pressure gas bearing and a linear motion guiding device using the static pressure gas bearing.
精密工作機械或半導體曝光裝置等要求以高精度定位加工工具或基板等被加工物。因此,使用安裝有幾乎不與加工工具或被加工物之載置臺之定位裝置產生摩擦之靜壓氣體軸承之直線運動引導裝置。如此之直線運動引導裝置構成為:於作為被加工物之載置臺之可動平臺與作為引導構件之導軌之間介存加壓流體,該可動平臺可相對導軌非接觸地移動。 A precision working machine or a semiconductor exposure apparatus is required to accurately position a workpiece such as a processing tool or a substrate with high precision. Therefore, a linear motion guiding device that mounts a static pressure gas bearing that generates friction with a positioning device that hardly contacts the processing tool or the workpiece is used. Such a linear motion guiding device is configured to store a pressurized fluid between a movable platform as a mounting table of a workpiece and a guide rail as a guiding member, and the movable platform can be moved in a non-contact manner with respect to the guide rail.
作為安裝於該直線運動引導裝置之靜壓氣體軸承之空氣吹出口之節流形式,有多孔質節流、表面節流、小孔節流、自成節流孔等;根據各用途一面調節負荷容量及軸承剛性等,一面予以使用。 As a throttling form of the air blowing port of the static pressure gas bearing mounted on the linear motion guiding device, there are porous throttling, surface throttling, orifice throttling, self-forming orifice, etc.; the load is adjusted according to each application side. Capacity and bearing rigidity are used on one side.
例如,專利文獻1中,於固定於被支撐體或支撐體之任一者,且利用經由其軸承構件供給至軸承面之加壓空氣移動自如地支承支撐體之靜壓軸承塊中,作為軸承構件,記載有材料粒子之直徑大致均一、可獲得開氣孔之均等性之種類之石墨碳系之材料。 For example, Patent Document 1 is a bearing that is fixed to either a supported body or a support and that is supported by a pressurized bearing that is movably supported by pressurized air supplied to the bearing surface via a bearing member. The member is a graphite carbon-based material in which the diameter of the material particles is substantially uniform and the uniformity of the open pores is obtained.
再者,專利文獻2中,作為一面保持較高之剛性,一面實現高衰減性之氣體軸承裝置,提出有於2個相對向之實質上平行之軸承面及兩軸承面間之軸承間隙具有經由小孔 供給氣體之至少一個氣體管道之氣體軸承裝置。 Further, in Patent Document 2, as a gas bearing device that achieves high attenuation while maintaining high rigidity, it is proposed that two bearing faces that are substantially parallel to each other and a bearing gap between the two bearing faces are provided via Small hole A gas bearing device for supplying at least one gas conduit of a gas.
進而,專利文獻3中提出有一種靜壓氣體軸承,其具備:母材,其包含多孔質體;及表面節流層,其包含接合於該母材上,且預先以成為所期望之空氣通過量之方式調整貫通孔之直徑及分佈而製作之多孔板;其使氣體經由表面節流層噴出,利用其靜壓支撐被支撐構件。 Further, Patent Document 3 proposes a static pressure gas bearing including: a base material including a porous body; and a surface throttle layer including a bonding material to be bonded to the base material and previously passed through the desired air A perforated plate produced by adjusting the diameter and distribution of the through-holes in a volume manner; the gas is ejected through the surface throttling layer, and the supported member is supported by the static pressure.
[專利文獻1]日本特開昭63-231020號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 63-231020
[專利文獻2]日本特表2006-510856號公報 [Patent Document 2] Japanese Patent Publication No. 2006-510856
[專利文獻3]日本特開2001-56027號公報 [Patent Document 3] Japanese Patent Laid-Open Publication No. 2001-56027
[專利文獻4]日本特開2008-82449號公報 [Patent Document 4] Japanese Patent Laid-Open Publication No. 2008-82449
上述先前之靜壓氣體軸承雖可實現超低摩擦、超高精度及超高速運動,但因主要使用高強度之金屬或陶瓷作為軸承材料,且需進行高精度之研磨加工等,故必然有造價昂貴之問題。 Although the above-mentioned static pressure gas bearing can realize ultra-low friction, ultra-high precision and ultra-high-speed motion, it is inevitably costly because it mainly uses high-strength metal or ceramic as a bearing material and requires high-precision grinding processing. Expensive problem.
然而,並非一定要求超低摩擦、超高精度及超高速運動時,例如以非接觸搬運液晶螢幕等物品、或不使溫度產生變化地水平移動物品之情形中,若使用靜壓氣體軸承則有簡化裝置之構成等優點,但另一方面,因靜壓氣體軸承自身高價,故實際情況是其無法充份利用在該用途中。 However, in the case of ultra-low friction, ultra-high precision, and ultra-high-speed motion, for example, in the case of non-contact handling of a liquid crystal screen or the like, or moving the article horizontally without changing the temperature, if a static pressure gas bearing is used, The advantages of the configuration of the device are simplified, but on the other hand, since the static pressure gas bearing itself is expensive, the actual situation is that it cannot be fully utilized in this application.
鑒於上述實際情況,為提供一種可充份利用於各種領域 之廉價之靜壓氣體軸承,本申請人先前提出有一種靜壓氣體軸承,其具備:樹脂製軸承構件,其上表面具有自成節流孔形狀或小孔節流形狀之複數個空氣吹出口且下表面具有與該複數個空氣吹出口連通之供氣槽;及基體,其以覆蓋上述供氣槽地接合於該樹脂製軸承構件之下表面並具有連通於該供氣槽之供氣口(專利文獻4)。 In view of the above actual situation, in order to provide a full use in various fields The present invention has previously proposed a static pressure gas bearing having a resin bearing member having a plurality of air outlets having an orifice shape or a small orifice throttle shape on the upper surface thereof. And a lower surface having an air supply port communicating with the plurality of air blowing ports; and a base body joined to the lower surface of the resin bearing member and covering the air supply port connected to the air supply groove to cover the air supply groove (Patent Document 4).
根據該專利文獻4所揭示之靜壓氣體軸承,因可利用模具經由射出成形形成構成靜壓氣體軸承之樹脂製軸承構件,可無需進行機械加工,且基體之構造亦僅藉由形成連通於樹脂製軸承構件之供氣口,僅經由接合樹脂製軸承構件與基體即可組裝靜壓氣體軸承,故靜壓氣體軸承可進行大量生產,由此可提供廉價之靜壓氣體軸承。 According to the static pressure gas bearing disclosed in Patent Document 4, since the resin bearing member constituting the static pressure gas bearing can be formed by injection molding using a mold, mechanical processing is not required, and the structure of the base body is formed only by connecting the resin. The gas supply port of the bearing member can assemble the static pressure gas bearing only by the joint of the resin bearing member and the base body, so that the static pressure gas bearing can be mass-produced, thereby providing an inexpensive static pressure gas bearing.
然而,因專利文獻4所揭示之靜壓氣體軸承中之空氣吹出口係經由射出成形而形成,故成為其直徑為0.2~0.4 mm左右之直徑較大之自成節流孔或小孔節流形狀,而有因來自該空氣吹出口之供氣吹出量過大以致產生自激振動之虞,故為實用化仍需對其加以改良。 However, since the air blowing port of the static pressure gas bearing disclosed in Patent Document 4 is formed by injection molding, it is a self-forming orifice or orifice orifice having a diameter of about 0.2 to 0.4 mm. The shape is such that the amount of air blown from the air outlet is too large to cause self-excited vibration, so it is still necessary to improve it for practical use.
本發明係鑒於上述諸問題點而完成者,其目的在於提供一種可大量生產且廉價之靜壓氣體軸承及使用該靜壓氣體軸承之直線運動引導裝置。 The present invention has been made in view of the above problems, and an object thereof is to provide a static pressure gas bearing which can be mass-produced and inexpensive, and a linear motion guiding device using the static pressure gas bearing.
本發明之靜壓氣體軸承,其特徵在於具備:軸承基體,其具備基部、突設於該基部之一面之外周緣上之圓筒突出部、及一端於基部之一面上開口而另一端於基部之外周面 上開口之供氣通路;及合成樹脂製軸承體,其具有形成於與基部之一面對向之一面上之圓環狀凹部、於另一面上開口之環狀凹槽、及一端連通於環狀凹槽且另一端於圓環狀凹部之圓環狀底面上開口之作為自成節流孔之複數個空氣吹出孔;且該軸承體使鄰接於一面之外周面嵌合於基部之圓筒突出部之內面,於該嵌合部接著而與軸承基體一體化;環狀凹槽具有至少0.3 mm之寬度與至少0.01 mm之深度;空氣吹出孔在其一端具有至少30 μm之直徑,而於圓環狀凹部與環狀凹槽之間形成自成節流孔。 A static pressure gas bearing according to the present invention is characterized by comprising: a bearing base having a base portion, a cylindrical projecting portion protruding from a peripheral edge of one surface of the base portion, and one end opening on one side of the base portion and the other end at the base portion Outside surface a gas supply passage having an upper opening; and a synthetic resin bearing body having an annular concave portion formed on one surface facing one of the base portions, an annular groove opened on the other surface, and one end connected to the ring a plurality of air blowing holes which are open to the annular bottom surface of the annular recess and which serve as self-forming orifices; and the bearing body is fitted to the cylinder of the base surface adjacent to one outer peripheral surface The inner surface of the protrusion is then integrated with the bearing base at the fitting portion; the annular groove has a width of at least 0.3 mm and a depth of at least 0.01 mm; the air blowing hole has a diameter of at least 30 μm at one end thereof, and A self-forming orifice is formed between the annular recess and the annular groove.
根據本發明之靜壓氣體軸承,合成樹脂製軸承體係使鄰接於一面之外周面嵌合於基部之圓筒突出部之內面,且於該嵌合部利用接著劑接著而與軸承基體一體化;且合成樹脂製軸承體具有於另一面上開口之環狀凹槽及一端連通於環狀凹槽且另一端開口於圓環狀凹部之複數個空氣吹出口;環狀凹槽具有至少0.3 mm之寬度與至少0.01 mm之深度;空氣吹出孔在其一端具有至少30 μm之直徑,而於圓環狀凹部與環狀凹槽之間形成自成節流孔;因無需機械加工即可形成該環狀凹槽及複數個空氣吹出口,故可進行大量生產,可實現廉價之製作。 According to the static pressure gas bearing of the present invention, the synthetic resin bearing system is fitted to the inner surface of the cylindrical projecting portion of the base portion adjacent to the outer peripheral surface of one surface, and is integrated with the bearing base by the adhesive portion in the fitting portion. And the synthetic resin bearing body has an annular groove opened on the other surface and a plurality of air blowing ports having one end communicating with the annular groove and the other end opening in the annular recess; the annular groove having at least 0.3 mm a width and a depth of at least 0.01 mm; the air blowing hole has a diameter of at least 30 μm at one end thereof, and a self-forming orifice is formed between the annular recess and the annular groove; The annular groove and the plurality of air blowing outlets enable mass production and can be produced inexpensively.
較佳之例中:環狀凹槽具有0.3~1.0 mm或0.3~0.7 mm之寬度,與0.01~0.05 mm或0.01~0.03 mm之深度;該空氣吹出孔其一端具有30~120 μm之直徑。 In a preferred embodiment, the annular groove has a width of 0.3 to 1.0 mm or 0.3 to 0.7 mm and a depth of 0.01 to 0.05 mm or 0.01 to 0.03 mm; the air blowing hole has a diameter of 30 to 120 μm at one end.
較佳為,環狀凹槽及空氣吹出孔之各者以雷射加工形成。作為加工用雷射,可自二氧化碳雷射、YAG雷射、 UV雷射、準分子雷射等選擇。 Preferably, each of the annular groove and the air blowing hole is formed by laser processing. As a processing laser, it can be self-contained by carbon dioxide laser, YAG laser, UV laser, excimer laser and other options.
若以雷射加工形成環狀凹槽及空氣吹出孔之各個,則較切削等機械加工等可瞬間形成該等,不僅可大量生產,且可廉價地進行製作。 When each of the annular groove and the air blowing hole is formed by laser processing, it can be formed instantaneously by machining or the like, such as cutting, and can be mass-produced and can be produced at low cost.
本發明之靜壓氣體軸承中,於軸承基體之另一面上亦可形成球體受壓凹部。球體受壓凹部包含於該另一面上開口之截頭圓錐凹部或凹球部;該等球體受壓凹部亦可直接形成於軸承基體之另一面上。 In the static pressure gas bearing of the present invention, a spherical pressure receiving recess may be formed on the other surface of the bearing base. The spherical compression recess includes a frustoconical recess or a concave spherical portion that is open on the other surface; and the spherical recessed portion may be formed directly on the other surface of the bearing base.
本發明之靜壓氣體軸承中,於軸承基體之另一面上亦可形成有於該另一面上開口之圓柱狀凹部,於該圓柱狀凹部嵌合固定有嵌塊;球體受壓凹部亦可具有於軸承基體之另一面側之該嵌塊之一面上開口且形成於該嵌塊上之截頭圓錐面。 In the static pressure gas bearing of the present invention, a cylindrical recess formed on the other surface may be formed on the other surface of the bearing base, and the insert may be fitted and fixed to the cylindrical recess; the spherical recess may also have a recess And a frustoconical surface formed on one side of the insert on the other side of the bearing base and formed on the insert.
本發明之靜壓氣體軸承中,於軸承基體之另一面上形成有於該另一面上開口之圓柱狀凹部;於該圓柱狀凹部嵌合固定有嵌塊;球體受壓凹部亦可具有於軸承基體之另一面側之該嵌塊之一面上開口且形成於該嵌塊上之凹球面。 In the static pressure gas bearing of the present invention, a cylindrical recessed portion that is open on the other surface is formed on the other surface of the bearing base; a fitting block is fitted and fixed to the cylindrical recessed portion; and the spherically pressed recessed portion may also have a bearing A concave spherical surface that is open on one side of the insert on the other side of the base and formed on the insert.
於軸承基體之另一面上具備球體受壓凹部之靜壓氣體軸承中,亦可藉由於該球體受壓凹部滑接配置例如球頭螺栓之球體,對靜壓氣體軸承附加該球體旋轉之自動調芯功能。 In the static pressure gas bearing having the spherical pressure receiving concave portion on the other surface of the bearing base body, the spherical body of the spherical body bolt may be attached by sliding the spherical concave portion of the spherical body, and the automatic rotation of the spherical body may be added to the static pressure gas bearing. Core function.
本發明之靜壓氣體軸承中,軸承體係除環狀凹槽外,亦可具備:形成於其另一面上且於該環狀凹槽之外側包圍該環狀凹槽之大直徑環狀凹槽;一端部於該環狀凹槽開口且 另一端部於大直徑環狀凹槽開口之複數個第一放射狀凹槽;形成於該環狀凹槽之內側之小直徑環狀凹槽;及一端部於環狀凹槽開口且另一端部於小直徑環狀凹槽開口之複數個第二放射狀凹槽;該等大直徑環狀凹槽、小直徑環狀凹槽及第一及第二放射狀凹槽亦可形成於軸承體另一面上。 In the static pressure gas bearing of the present invention, the bearing system may have, in addition to the annular groove, a large-diameter annular groove formed on the other surface thereof and surrounding the annular groove on the outer side of the annular groove. One end is open to the annular groove and The other end is a plurality of first radial grooves opening in the large-diameter annular groove; a small-diameter annular groove formed on the inner side of the annular groove; and one end is open at the annular groove and the other end is a plurality of second radial grooves opening in the small-diameter annular groove; the large-diameter annular grooves, the small-diameter annular grooves, and the first and second radial grooves may also be formed in the bearing body On the other side.
附加有該自動調芯功能之靜壓氣體軸承可適用於作為被加工物之載置台之定位裝置之直線運動引導裝置。即,具備本發明之靜壓氣體軸承之直線運動引導裝置亦可於具有上引導面及兩側引導面之引導構件之外側配置具備與上引導面對向之上板及與兩側引導面對向之一對側板之橫截面為字型之可動平臺;於該可動平臺之上板之下表面及側板之各自之內面上,分別立設有將球體向內側之球頭螺栓;且,於該球頭螺栓與引導構件之上引導面及兩側引導面之間,上述靜壓氣體軸承亦可配置為使球頭受壓凹部滑接於該球頭螺栓之球體,且使軸承體與引導構件之上引導面及兩側引導面對向。 The static pressure gas bearing to which the automatic aligning function is added can be applied to a linear motion guiding device which is a positioning device of a mounting table of a workpiece. In other words, the linear motion guiding device including the static pressure gas bearing of the present invention may be disposed on the outer side of the guiding member having the upper guiding surface and the both side guiding surfaces, and is provided with the upper guiding surface facing the upper plate and the both sides facing each other. The cross section to one of the side plates is a movable platform of a font; a ball stud having an inner side of the ball is respectively disposed on an inner surface of the lower surface of the upper platform and the side plate of the movable platform; and, above the ball stud and the guiding member The static pressure gas bearing may be disposed between the guiding surface and the guiding surfaces of the two sides, so that the spherical recessed portion of the ball head is slidably connected to the ball body of the ball stud, and the guiding surface and the guiding surfaces of the bearing body and the guiding member are guided. Facing the direction.
根據上述直線運動引導裝置,藉由自軸承體之複數個空氣吹出孔對引導構件之上引導面及兩側引導面噴射壓縮空氣,可利用形成於軸承體與上引導面及兩側引導面之間之空氣潤滑膜使可動平臺相對上引導面及兩側引導面保持為非接觸之狀態。又,若軸承體與上引導面及兩側引導面之間之軸承間隙不均一,則軸承間隙各部產生壓力差;利用該壓力差,使靜壓氣體軸承朝使軸承間隙變均一之方向自 動調芯,從而保持相對上引導面及兩側引導面平行之狀態。因此,可將引導構件及可動平臺之平行度、直角度等零件精度設為較粗之精度,除了上述靜壓氣體軸承自身之低成本,可提供一種廉價之直線運動引導裝置。 According to the linear motion guiding device described above, the compressed air is ejected from the upper guiding surface of the guiding member and the guiding surfaces on both sides by a plurality of air blowing holes from the bearing body, and can be formed on the bearing body and the upper guiding surface and the guiding surfaces on both sides. The air lubricating film between the two holds the movable platform in a non-contact state with respect to the upper guiding surface and the side guiding surfaces. Moreover, if the bearing gap between the bearing body and the upper guiding surface and the guiding surfaces on both sides is not uniform, a pressure difference is generated in each part of the bearing gap; by using the pressure difference, the static pressure gas bearing is made to be uniform in the direction of the bearing gap. The core is dynamically adjusted to maintain a state in which the upper guide surface and the guide surfaces on both sides are parallel. Therefore, the accuracy of the parts such as the parallelism and the straight angle of the guiding member and the movable platform can be set to a relatively high precision, and in addition to the low cost of the above-described static pressure gas bearing itself, an inexpensive linear motion guiding device can be provided.
本發明之靜壓氣體軸承中,較佳為,軸承體由聚縮醛樹脂、聚醯胺樹脂、聚苯硫醚樹脂等熱可塑性合成樹脂形成;且,較佳為,軸承基體由聚縮醛樹脂、聚醯胺樹脂、聚苯硫醚樹脂等熱可塑性合成樹脂或於該等熱可塑性合成樹脂中含有30~50質量%之玻璃纖維、玻璃粉末、碳纖維或無機填充材料之含有增強填充材料的熱可塑性合成樹脂,或鋁、或鋁合金形成。該等合成樹脂製之軸承體及軸承基體亦可藉由機械加工合成樹脂材料而形成,亦可使用模具以射出成形形成。 In the static pressure gas bearing of the present invention, preferably, the bearing body is formed of a thermoplastic synthetic resin such as a polyacetal resin, a polyamide resin, or a polyphenylene sulfide resin; and, preferably, the bearing matrix is composed of polyacetal. a thermoplastic synthetic resin such as a resin, a polyamide resin, or a polyphenylene sulfide resin, or a glass-containing fiber, a glass powder, a carbon fiber, or an inorganic filler containing 30 to 50% by mass of the thermoplastic filler; Thermoplastic synthetic resin, or aluminum or aluminum alloy. The bearing body and the bearing base made of the synthetic resin may be formed by mechanically processing a synthetic resin material, or may be formed by injection molding using a mold.
根據本發明,可提供一種可大量生產且廉價之靜壓氣體軸承及使用該靜壓氣體軸承之直線運動引導裝置。 According to the present invention, it is possible to provide a static pressure gas bearing which can be mass-produced and inexpensive, and a linear motion guiding device using the static pressure gas bearing.
接著,基於圖中所示之較佳之實施形態之例,進一步詳細說明本發明。另,本發明並非限定於該等之例。 Next, the present invention will be described in further detail based on examples of preferred embodiments shown in the drawings. In addition, the invention is not limited to the examples.
圖1至圖5中,靜壓氣體軸承1較佳為具備:軸承基體2,其由聚縮醛樹脂(POM)、聚醯胺樹脂(PA)、聚苯硫醚樹脂(PPS)等熱可塑性合成樹脂,或於該等熱可塑性合成樹脂含有30~50質量%之玻璃纖維、玻璃粉末、碳纖維或無機填充材料之含有增強填充材料的熱可塑性合成樹脂、或鋁 或鋁合金形成;及合成樹脂製軸承體3,其利用接著劑接著於軸承基體2而一體化且較佳為由聚縮醛樹脂、聚醯胺樹脂、聚苯硫醚樹脂等熱可塑性合成樹脂形成。 In FIGS. 1 to 5, the static pressure gas bearing 1 preferably includes a bearing base 2 which is made of thermoplasticity such as polyacetal resin (POM), polyamide resin (PA), and polyphenylene sulfide resin (PPS). Synthetic resin, or thermoplastic synthetic resin containing 30 to 50% by mass of glass fiber, glass powder, carbon fiber or inorganic filler containing reinforcing filler, or aluminum Or an aluminum alloy; and a synthetic resin bearing body 3 which is integrally joined to the bearing base 2 by an adhesive and is preferably a thermoplastic synthetic resin such as a polyacetal resin, a polyamide resin or a polyphenylene sulfide resin. form.
尤其圖6及圖7所示,軸承基體2具備:基部4;於基部4之一俯視為圓形之面5之外周緣朝軸向Y之上方一體突設之圓筒突出部6;基部4之另一俯視為圓形之面7;具有一端8於基部4之俯視為圓形之面5上開口之圓形開口部9之供氣孔10;及一端11連通於供氣孔10且另一端於基體4之外周面12上開口之供氣通路13。 In particular, as shown in FIGS. 6 and 7, the bearing base 2 includes a base portion 4, and a cylindrical projecting portion 6 integrally formed above the outer surface Y of the outer peripheral surface of the base portion 4 in a plan view of the circular surface 5; the base portion 4; The other side is a circular surface 7; an air supply opening 10 having a circular opening 9 having an end 8 open to the circular surface 5 of the base 4; and one end 11 communicating with the air supply opening 10 and the other end An air supply passage 13 is formed in the outer peripheral surface 12 of the base body 4.
於基部4之外周面12上開口之供氣通路13之端部內周面14上形成有內螺紋15;對內螺紋15螺合供氣管塞16之外螺紋;供氣管塞16固定於軸承基體2之基部4之外周面12上。 An internal thread 15 is formed on the inner peripheral surface 14 of the end portion of the air supply passage 13 which is open on the outer peripheral surface 12 of the base portion 4; the internal thread 15 is screwed to the external thread of the air supply pipe plug 16; and the air supply pipe plug 16 is fixed to the bearing base body 2 The base portion 4 is on the outer peripheral surface 12.
尤其如圖8至圖10所示,軸承體3具備:形成於與基部4之一俯視為圓形之面5對向之一俯視為圓形之面17上之圓環狀凹部18;於另一俯視為圓形之面19上開口之環狀凹槽20;一端21連通於環狀凹槽20且另一端22於圓環狀凹部18之圓環狀底面24開口之複數個空氣吹出孔25;及鄰接於一俯視為圓形之面17之外周面23。 In particular, as shown in FIGS. 8 to 10, the bearing body 3 is provided with an annular recess 18 formed on a surface 17 which is circular in plan view from a surface 5 of the base portion 4 which is circular in plan view; An annular groove 20 opening in a circular shape on the surface 19; a plurality of air blowing holes 25 having one end 21 communicating with the annular groove 20 and the other end 22 opening in the annular bottom surface 24 of the annular recess 18 And adjacent to a peripheral surface 23 that is a circular surface 17 in plan view.
環狀凹槽20由環狀底面26與相互對向之圓筒側面27所規制;環狀凹槽20具有至少0.3 mm之寬度W與至少0.01 mm之深度d;空氣吹出孔25因其一端21於本例中係自一端21到另一端22至少具有30 μm之直徑D,而於圓環狀凹部18與環狀凹槽20之間形成有自成節流孔。 The annular groove 20 is defined by an annular bottom surface 26 and mutually opposite cylindrical side faces 27; the annular groove 20 has a width W of at least 0.3 mm and a depth d of at least 0.01 mm; the air blowing hole 25 has one end 21 In this example, the diameter D is at least 30 μm from the one end 21 to the other end 22, and a self-forming orifice is formed between the annular recess 18 and the annular groove 20.
圓環狀凹部18由空氣吹出孔25之另一端22所開口之圓環 狀底面24、連接於圓環狀底面24之外緣之外周面28、及連接於圓環狀底面24之內緣之內周面29所規制;外周面28及內周面29分別形成為自圓環狀底面24朝圓環狀凹部18之開口部30逐漸擴展之截頭圓錐面31及32。 The annular recess 18 is opened by the other end 22 of the air blowing hole 25 The bottom surface 24, the outer circumferential surface 28 connected to the outer edge of the annular bottom surface 24, and the inner circumferential surface 29 connected to the inner edge of the annular bottom surface 24 are formed; the outer circumferential surface 28 and the inner circumferential surface 29 are formed as The annular bottom surface 24 gradually expands the frustoconical surfaces 31 and 32 toward the opening 30 of the annular recess 18.
軸承體3使鄰接一面17之外周面23嵌合於軸承基體2之圓筒突出部6之內面,並於該嵌合部藉由接著劑接著而與軸承基體2一體化。 The bearing body 3 is fitted to the inner surface of the cylindrical projecting portion 6 of the bearing base 2 by the outer peripheral surface 23 of the adjacent one surface 17, and is integrated with the bearing base 2 by the adhesive agent in the fitting portion.
靜壓氣體軸承1中,例如亦可利用雷射加工瞬間形成軸承體3之面19之寬度W至少為0.3 mm、深度d至少為0.01 mm之環狀凹槽20,與一端21於環狀凹槽20開口而另一端22於圓環狀凹部18之圓環狀底面24開口之直徑D至少為30 μm之複數個自成節流孔形狀之空氣吹出孔25。 In the static pressure gas bearing 1, for example, an annular groove 20 having a width W of at least 0.3 mm and a depth d of at least 0.01 mm, which is formed on the surface 19 of the bearing body 3, can be formed by laser processing, and the end 21 is annularly concave. The other end 22 is open at the annular bottom surface 24 of the annular recess 18 and has a plurality of air outlet holes 25 having a diameter D of at least 30 μm.
以上之靜壓氣體軸承1因軸承體3利用接著劑而與軸承基體2一體化,故可使其製作容易且廉價。且,空氣吹出孔25若為至少30 μm之直徑則為極小之直徑,故可抑制來自空氣吹出孔25之大量之空氣噴射所引起之自激振動之產生。 Since the above-described static pressure gas bearing 1 is integrated with the bearing base 2 by the bearing body 3 by the adhesive, it can be easily manufactured and inexpensive. Further, if the air blowing hole 25 has a diameter of at least 30 μm, it is a very small diameter, so that generation of self-excited vibration caused by a large amount of air ejection from the air blowing hole 25 can be suppressed.
接著,若說明圖1至圖5所示之靜壓氣體軸承1之製造方法之例,則首先準備圖6及圖7所示之含有增強填充材料的合成樹脂製或鋁、或鋁合金製之軸承基體2,與圖8至圖10所示之合成樹脂製軸承體3之未具有環狀凹槽20及空氣吹出孔25之軸承體3a;如圖11所示,於使軸承體3a之圓環狀凹部18之開口部30連通於軸承基體2之供氣孔10之開口部9,且使鄰接於軸承體3a之一面17之外周面23嵌合於軸承 基體2之圓筒突出部6之內面後,利用接著劑接著該嵌合部從而形成一體化軸承基體2與軸承體3a之組裝體33。 Next, an example of a method of manufacturing the static pressure gas bearing 1 shown in FIGS. 1 to 5 will be described. First, synthetic resin or aluminum or aluminum alloy containing the reinforcing filler shown in FIGS. 6 and 7 is prepared. The bearing base 2 and the bearing body 3 of the synthetic resin bearing body 3 shown in FIGS. 8 to 10 do not have the annular groove 20 and the air blowing hole 25; as shown in FIG. 11, the bearing body 3a is rounded. The opening portion 30 of the annular recessed portion 18 communicates with the opening portion 9 of the air supply hole 10 of the bearing base 2, and the outer peripheral surface 23 adjacent to the one surface 17 of the bearing body 3a is fitted to the bearing. After the inner surface of the cylindrical projecting portion 6 of the base 2, the fitting portion is integrally formed by the adhesive to form the assembled body 33 of the integrated bearing base 2 and the bearing body 3a.
利用雷射加工機對如此地一體化之組裝體33之軸承體3a之另一面19照射雷射,形成寬度W為0.3~1.0 mm、深度d為0.01~0.05 mm之環狀凹槽20,與於規制環狀凹槽20之環狀底面26上自環狀底面26貫通軸承體3a而於圓環狀凹部18之圓環狀底面24開口之直徑D至少為30 μm,較佳為30~120 μm之複數個自成節流孔形狀之空氣吹出孔25,由此製作靜壓氣體軸承1。 The other surface 19 of the bearing body 3a of the assembly 33 thus integrated is irradiated with a laser by a laser processing machine to form an annular groove 20 having a width W of 0.3 to 1.0 mm and a depth d of 0.01 to 0.05 mm. The diameter D of the opening of the annular bottom surface 24 of the annular recess 18 from the annular bottom surface 26 on the annular bottom surface 26 of the annular groove 20 is at least 30 μm, preferably 30 to 120. A plurality of air blowing holes 25 in the shape of an orifice of μm are used to fabricate the static pressure gas bearing 1.
作為所使用之加工用雷射,自二氧化碳雷射、YAG雷射、UV雷射或準分子雷射等中選擇;且較佳為使用二氧化碳雷射。 As the processing laser to be used, it is selected from a carbon dioxide laser, a YAG laser, a UV laser or an excimer laser; and it is preferable to use a carbon dioxide laser.
以直徑30 mm之圓弧為中心、寬0.5 mm深0.05 mm之環狀凹槽20可使用雷射輸出為9.5 W之二氧化碳雷射,以掃描速度為1000 mm/s、重複打字次數為1次、加工時間為2秒之方式形成、加工於由聚苯硫醚樹脂形成之軸承體3a之面19上;且,環狀凹槽20之環狀底面26上,自環狀底面26貫通軸承體3a而於圓環狀凹部18之圓環狀底面24上開口之直徑為0.06 mm之自成節流孔形狀之空氣吹出孔25係可以雷射輸出為14 W、加工時間為15秒地沿圓周方向於10均等配置之位置加工10個。 An annular groove 20 centered on a circular arc with a diameter of 30 mm and a width of 0.5 mm and a depth of 0.05 mm can be used with a 9.5 W laser beam with a laser output of 1000 mm/s and a repeated number of typing times. And processing time is 2 seconds to form and process on the surface 19 of the bearing body 3a formed of polyphenylene sulfide resin; and the annular bottom surface 26 of the annular groove 20 penetrates the bearing body from the annular bottom surface 26 The air blowing hole 25 of the self-forming orifice shape having a diameter of 0.06 mm and opening in the annular bottom surface 24 of the annular recess 18 can have a laser output of 14 W and a processing time of 15 seconds. The direction is processed in 10 positions at 10 equal positions.
雖上述靜壓氣體軸承1之軸承體3具備一個環狀凹槽20,但除環狀凹槽20外,如圖12所示,軸承體3亦可具備:形成於軸承體3之另一面19上且於環狀凹槽20之外側包圍環 狀凹槽20並與環狀凹槽20同心之大直徑環狀凹槽34;一端部35於環狀凹槽20開口且另一端部36於大直徑環狀凹槽34開口之複數個放射狀凹槽37;形成於環狀凹槽20之內側且與環狀凹槽20同心之小直徑環狀凹槽38;及一端部39於環狀凹部20開口且另一端部40於小直徑環狀凹部38開口之複數個放射狀凹槽41。 Although the bearing body 3 of the static pressure gas bearing 1 is provided with an annular groove 20, in addition to the annular groove 20, as shown in FIG. 12, the bearing body 3 may be provided on the other surface 19 of the bearing body 3. And surrounding the ring on the outer side of the annular groove 20 a large-diameter annular groove 34 which is concentric with the annular groove 20; one end portion 35 is opened in the annular groove 20 and the other end portion 36 is opened in a plurality of radial shapes of the large-diameter annular groove 34 a groove 37; a small-diameter annular groove 38 formed on the inner side of the annular groove 20 and concentric with the annular groove 20; and one end portion 39 is open in the annular recess 20 and the other end portion 40 is in a small diameter ring shape A plurality of radial grooves 41 are formed in the recess 38.
具有圖12所示之軸承體3之靜壓氣體軸承1中,因供給環狀凹槽20之壓縮空氣經由放射狀凹槽37及41供給至大直徑環狀凹槽34及小直徑環狀凹槽38,故供給面積變大,由此例如可於物品之上浮中實現穩定之上浮。 In the static pressure gas bearing 1 having the bearing body 3 shown in Fig. 12, compressed air supplied to the annular groove 20 is supplied to the large-diameter annular groove 34 and the small-diameter annular recess via the radial grooves 37 and 41. Since the groove 38 is provided, the supply area becomes large, whereby stable floating can be achieved, for example, in the floating of the article.
圖13至圖16係顯示靜壓氣體軸承1之另一實施形態者;軸承基體2之另一俯視為圓形之面7之中央部形成有於面7上具有俯視為圓形之開口部42之球體受壓凹部43;球體受壓凹部43具有由俯視為圓形之底面44、及自底面44直至開口部42逐漸擴展而延伸之截頭圓錐面45所規制之截頭圓錐凹部46。 13 to 16 show another embodiment of the static pressure gas bearing 1; the other central portion of the bearing base 2 having a circular plan surface 7 is formed with an opening 42 having a circular shape in plan view on the surface 7. The spherical pressure receiving recess 43 has a frustoconical recess 46 that is defined by a bottom surface 44 that is circular in plan view and a frustoconical surface 45 that extends from the bottom surface 44 until the opening 42 extends.
具備具有截頭圓錐凹部46之球體受壓凹部43之軸承基體2係與上述靜壓氣體軸承1同樣地,於使供氣孔10之開口部9連通於軸承體3之圓環狀凹部18之開口部30且使軸承體3之鄰接於一面17之外周面23嵌合於軸承基體2之圓筒突出部6之內面後,利用接著劑接著該嵌合部而形成使軸承基體2與軸承體3一體化之組裝體47。 The bearing base 2 including the spherical recessed portion 43 having the frustoconical recess 46 is connected to the opening of the annular recess 18 of the bearing body 3 in the same manner as the static gas bearing 1 described above. The portion 30 is fitted to the inner surface of the cylindrical projecting portion 6 of the bearing base 2 adjacent to the outer peripheral surface 23 of the bearing body 3, and then the bearing base 2 and the bearing body are formed by an adhesive followed by the fitting portion. 3 integrated assembly 47.
利用雷射加工機對如此地一體化之組裝體47之軸承體3之另一面19進行雷射照射,形成寬度W為0.3~1.0 mm、深 度d為0.01~0.05 mm之環狀凹槽20,與於規制環狀凹槽20之環狀底面26上自環狀底面26貫通軸承體3而於圓環狀凹部18之圓環狀底面24開口之直徑D至少為30 μm,較佳為30~120 μm之複數個自成節流孔形狀之空氣吹口孔25,由此製作靜壓氣體軸承1。 The other surface 19 of the bearing body 3 of the assembly body 47 thus integrated is subjected to laser irradiation by a laser processing machine to form a width W of 0.3 to 1.0 mm and deep. The annular groove 20 having a degree d of 0.01 to 0.05 mm and the annular bottom surface 24 of the annular recessed portion 20 penetrate the bearing body 3 from the annular bottom surface 26 to the annular bottom surface 24 of the annular recess 18 The opening D has a diameter D of at least 30 μm, preferably 30 to 120 μm, and a plurality of air-blowing holes 25 in the shape of an orifice, thereby producing a static pressure gas bearing 1.
如圖16所示,如此地形成之靜壓氣體軸承1中,藉由對軸承基體2之球體受壓凹部43之截頭圓錐面45滑接配置球頭螺栓48之球體49,而附加自動調芯功能。 As shown in Fig. 16, in the static pressure gas bearing 1 thus formed, the spherical body 49 of the ball stud 48 is slidably attached to the frustoconical surface 45 of the spherical pressure receiving recess 43 of the bearing base 2, and an automatic adjustment is added. Core function.
圖17至圖20係顯示靜壓氣體軸承1之另一實施形態者;軸承基體2之另一俯視為圓形之面7之中央部上形成有於面7上具有俯視為圓形之開口部42之球體受壓凹部43;球體受壓凹部43具有由俯視為圓形之底面44與自底面44直至開口部42擴展之凹球面50所規制之凹球部51。 17 to 20 show another embodiment of the static pressure gas bearing 1; the other portion of the bearing base 2 having a circular plan surface 7 is formed on the surface 7 with an opening having a circular shape in plan view. The spherical pressure receiving portion 43 of the spherical body 43 has a concave spherical portion 51 which is defined by a bottom surface 44 having a circular shape in plan view and a concave spherical surface 50 extending from the bottom surface 44 to the opening portion 42.
具備具有凹球部51之球體受壓凹部43之軸承基體2係與上述靜壓氣體軸承1同樣地,於使供氣孔10之開口部9連通於軸承體3之圓環狀凹部18之開口部30且使軸承體3之鄰接於一面17之外周面23嵌合於軸承基體2之圓筒突出部6之內面後,利用接著劑接著該嵌合部而形成使軸承基體2與軸承體3一體化之組裝體52。 The bearing base 2 including the spherical pressure receiving recessed portion 43 having the concave spherical portion 51 is connected to the opening of the annular recessed portion 18 of the bearing body 3 in the same manner as the above-described static pressure gas bearing 1 . 30. The outer peripheral surface 23 of the bearing body 3 adjacent to the one surface 17 is fitted to the inner surface of the cylindrical projecting portion 6 of the bearing base 2, and then the bearing base 2 and the bearing body 3 are formed by an adhesive followed by the fitting portion. Integrated assembly 52.
利用雷射加工機對如此地被一體化之組裝體52之軸承體3之另一面19進行雷射照射,形成寬度W為0.3~1.0 mm、深度d為0.01~0.05 mm之環狀凹槽20,與於規制環狀凹槽20之環狀底面26上自環狀底面26貫通軸承體3而於圓環狀凹部18之圓環狀底面24上開口之直徑D至少為30 μm,較佳為 30~120 μm之複數個自成節流孔形狀之空氣吹出孔25,由此製作靜壓氣體軸承1。 The other surface 19 of the bearing body 3 of the assembly 52 thus integrated is subjected to laser irradiation by a laser processing machine to form an annular groove 20 having a width W of 0.3 to 1.0 mm and a depth d of 0.01 to 0.05 mm. The diameter D of the opening on the annular bottom surface 26 of the annular recess 20 from the annular bottom surface 26 and the annular bottom surface 24 of the annular recess 18 is at least 30 μm, preferably at least 30 μm. A plurality of air blowing holes 25 of a self-forming orifice shape of 30 to 120 μm are used to fabricate the static pressure gas bearing 1.
如圖20所示,如此地形成之靜壓氣體軸承1中,藉由對軸承基體2之球體受壓凹部43之凹球面50滑接配置球頭螺栓48之球體49,而附加自動調芯功能。 As shown in Fig. 20, in the static pressure gas bearing 1 thus formed, the spherical body 49 of the ball stud 48 is slidably attached to the concave spherical surface 50 of the spherical pressure receiving concave portion 43 of the bearing base 2, and an automatic aligning function is added. .
圖21至圖26係顯示附加有自動調芯功能之靜壓氣體軸承1之另一實施形態者。軸承基體2之另一俯視為圓形之面7之中央部上形成有具有於面7上開口之圓形之底面54之圓柱狀凹部55;如圖23所示,於圓柱狀凹部55,嵌塊64以一面58朝向圓柱狀凹部55之底面54且另一面61與軸承基體2之另一面7成為同一平面地嵌合固定,該嵌塊64具備圓柱體56、一端57於圓柱體56之一面58上開口之圓孔59、具有連接於圓孔59之另一端60,自另一端60朝圓柱體56之另一面61逐漸擴展地延伸且於另一面61上開口之截頭圓錐面62之凹部63。球體受壓凹部43具有該截頭圓錐面62。 21 to 26 show another embodiment of the static pressure gas bearing 1 to which the automatic aligning function is added. A cylindrical recess 55 having a circular bottom surface 54 that is open on the surface 7 is formed on the central portion of the bearing base 2 in a plan view of the circular surface 7; as shown in FIG. 23, the cylindrical recess 55 is embedded. The block 64 is fitted and fixed with the one surface 58 facing the bottom surface 54 of the cylindrical recess 55 and the other surface 61 being flush with the other surface 7 of the bearing base 2, the insert 64 having a cylindrical body 56 and one end 57 on one side of the cylindrical body 56. The circular opening 59 of the upper opening 58 has a recessed portion of the frustoconical surface 62 which is connected to the other end 60 of the circular opening 59 and extends from the other end 60 toward the other surface 61 of the cylindrical body 56 and opens on the other surface 61. 63. The spherical pressure receiving recess 43 has the frustoconical surface 62.
嵌合固定有嵌塊64之軸承基體2係與上述靜壓氣體軸承1同樣地,於使供氣孔10之開口部9連通於軸承體3之圓環狀凹部18之開口部30且使軸承體3之鄰接於一面17之外周面23嵌合於軸承基體2之圓筒突出部6之內面後,利用接著劑接著該嵌合部而形成使軸承基體2與軸承體3一體化之組裝體65。 The bearing base 2 to which the insert 64 is fitted and fixed is connected to the opening 30 of the annular recess 18 of the bearing body 3 in the same manner as the above-described static pressure gas bearing 1 and the bearing body is formed. 3, the outer peripheral surface 23 adjacent to the one surface 17 is fitted to the inner surface of the cylindrical projecting portion 6 of the bearing base 2, and then an assembly for integrating the bearing base 2 and the bearing body 3 is formed by an adhesive followed by the fitting portion. 65.
利用雷射加工機對如此地一體化之組裝體65之軸承體3之另一面19進行雷射照射,形成寬度W為0.3~1.0 mm、深度d為0.01~0.05 mm之環狀凹槽20,與於規制環狀凹槽20 之環狀底面26上自環狀底面26貫通軸承體3而於圓環狀凹部18之圓環狀底面24上開口之直徑D至少為30 μm、較佳為30~120 μm之複數個自成節流孔形狀之空氣吹出口25,由此製作靜壓氣體軸承1。 The other surface 19 of the bearing body 3 of the assembly 65 thus integrated is subjected to laser irradiation by a laser processing machine to form an annular groove 20 having a width W of 0.3 to 1.0 mm and a depth d of 0.01 to 0.05 mm. And regulating the annular groove 20 The annular bottom surface 26 penetrates the bearing body 3 from the annular bottom surface 26 and has a diameter D of at least 30 μm, preferably 30 to 120 μm, which is open in the annular bottom surface 24 of the annular recess 18 . The air blowing port 25 of the orifice shape is used to fabricate the static pressure gas bearing 1.
如圖26所示,如此地形成之靜壓氣體軸承1中,藉由對嵌合固定於軸承基體2之圓柱狀凹部55上之嵌塊64之凹部63之截頭圓錐面62滑接配置球頭螺栓48之球體49,而附加自動調芯功能。 As shown in Fig. 26, in the static pressure gas bearing 1 thus formed, the ball is slidably arranged by the frustoconical surface 62 of the concave portion 63 of the insert 64 fitted to the cylindrical recess 55 of the bearing base 2. The ball 49 of the head bolt 48 is attached with a self-aligning function.
圖27至圖30係顯示附加有自動調芯功能之靜壓氣體軸承1之另一實施形態者。如圖22所示般,軸承基體2之另一俯視為圓形之面7之中央部上形成有具有於面7上開口之圓形之底面54之圓柱狀凹部55;如圖27所示,於圓柱狀凹部55,嵌塊64以使一面58朝向圓柱狀凹部55之底面54且另一面61與軸承基體2之另一面7成為同一平面地嵌合固定,該嵌塊64具備圓柱體56、一端57於圓柱體56之一面58上開口之圓孔59、及具有連接於圓孔59之另一端60,自另一端60朝向圓柱體56之另一面61並於另一面61上開口之凹球面66之凹部63。球體受壓凹部43具有該凹球面66。 27 to 30 show another embodiment of the static pressure gas bearing 1 to which the automatic aligning function is added. As shown in Fig. 22, a cylindrical recess 55 having a circular bottom surface 54 that is open on the surface 7 is formed in a central portion of the bearing base 2 which is circular in plan view 7; as shown in Fig. In the cylindrical recess 55, the insert 64 is fitted and fixed to the bottom surface 54 of the cylindrical recess 55 and the other surface 61 is flush with the other surface 7 of the bearing base 2, and the insert 64 is provided with a cylinder 56, A circular hole 59 having an end 57 open to one face 58 of the cylindrical body 56 and a concave spherical surface having the other end 60 connected to the circular hole 59 from the other end 60 toward the other face 61 of the cylindrical body 56 and opening on the other face 61 The recess 63 of 66. The spherical pressure receiving recess 43 has the concave spherical surface 66.
嵌合固定有嵌塊64之軸承基體2係與上述靜壓氣體軸承1同樣地,於使供氣孔10之開口部9連通於軸承體3之圓環狀凹部18之開口部30且使軸承體3之鄰接於一面17之外周面23嵌合於軸承基體2之圓筒突出部6之內面後,利用接著劑接著該嵌合部而形成使軸承基體2與軸承體3一體化之組裝體67。 The bearing base 2 to which the insert 64 is fitted and fixed is connected to the opening 30 of the annular recess 18 of the bearing body 3 in the same manner as the above-described static pressure gas bearing 1 and the bearing body is formed. 3, the outer peripheral surface 23 adjacent to the one surface 17 is fitted to the inner surface of the cylindrical projecting portion 6 of the bearing base 2, and then an assembly for integrating the bearing base 2 and the bearing body 3 is formed by an adhesive followed by the fitting portion. 67.
利用雷射加工機對如此地一體化之組裝體67之軸承體3之另一面19進行雷射照射,形成寬度W為0.3~1.0 mm,深度d為0.01~0.05 mm之環狀凹槽20,與於規制環狀凹槽20之環狀底面26上自環狀底面26貫通軸承體3而於圓環狀凹部18之圓環狀底面24上開口之直徑D至少為30 μm,較佳為30~120 μm之複數個自成節流孔形狀之空氣吹出孔25,由此製作靜壓氣體軸承1。 The other surface 19 of the bearing body 3 of the assembly 67 thus integrated is subjected to laser irradiation by a laser processing machine to form an annular groove 20 having a width W of 0.3 to 1.0 mm and a depth d of 0.01 to 0.05 mm. The diameter D of the opening on the annular bottom surface 26 of the annular recessed portion 18 from the annular bottom surface 26 and the annular bottom surface 24 of the annular recess 18 is at least 30 μm, preferably 30. A plurality of air blowing holes 25 of the shape of the self-forming orifice of ~120 μm are used to fabricate the static pressure gas bearing 1.
如圖30所示,如此地形成之靜壓氣體軸承1中,藉由對嵌合固定於軸承基體2之圓柱狀凹部55之嵌塊64之凹部63之凹球面66滑接配置球頭螺栓48之球體49,而附加自動調芯功能。 As shown in Fig. 30, in the static pressure gas bearing 1 thus formed, the ball stud bolt 48 is disposed by slidingly engaging the concave spherical surface 66 of the concave portion 63 of the insert 64 fixed to the cylindrical recess 55 of the bearing base 2. The ball 49 is attached with an automatic core adjustment function.
藉由由滑動特性優異之例如聚縮醛樹脂、聚醯胺樹脂、聚酯樹脂等具有自我潤滑性之熱可塑性合成樹脂,或者銅或銅合金等而形成嵌合固定於形成於軸承基體2之另一俯視為圓形之面7之中央部之圓柱狀凹部55之嵌塊64,可更順利地進行嵌塊64之凹部63之截頭圓錐面62或凹球面66與球頭螺栓48之球體49之滑接。 It is formed and fixed to the bearing base 2 by a self-lubricating thermoplastic synthetic resin such as a polyacetal resin, a polyamide resin, or a polyester resin, or a copper or copper alloy, which is excellent in sliding properties. Another insert 64 of the cylindrical recess 55 in the central portion of the circular face 7 in a plan view can smoothly perform the frustoconical surface 62 of the recess 63 of the insert 64 or the sphere of the concave spherical surface 66 and the ball stud 48. 49 sliding.
圖31係顯示使用圖26所示之靜壓氣體軸承1之直線運動引導裝置68者,直線運動引導裝置68由以下構件形成:具有上引導面69及兩側引導面70及70之引導構件71;具備跨越引導構件71之外側配置之與上引導面69對向之上板72及與兩側引導面70及70對向之一對側板73及73之橫截面為字型之可動平臺74;使球體49朝內側立設於可動平臺74之上板72之下表面75及側面73及73之各自之內面76上之球頭 螺栓48;於球頭螺栓48與引導構件71之上引導面69及兩側引導面70及70之間使嵌塊64之截頭圓錐面62滑接於球頭螺栓48之球體49,且使軸承體3之另一面19與引導構件71之上引導面69及兩側引導面70及70對向配置之靜壓氣體軸承1。 Fig. 31 shows a linear motion guiding device 68 using the hydrostatic gas bearing 1 shown in Fig. 26. The linear motion guiding device 68 is formed of the following members: a guiding member 71 having an upper guiding surface 69 and both side guiding surfaces 70 and 70 The cross section of the pair of side plates 73 and 73 opposite to the upper plate 72 and the two side guide surfaces 70 and 70 disposed on the outer side of the guide member 71 is opposite to the upper guide surface 69 a movable platform 74 of a font; a ball stud 48 that erects the ball 49 on the inner surface 76 of the lower surface 75 of the upper surface 75 and the side surfaces 73 and 73 of the upper surface 75 of the movable platform 74 toward the inner side; Between the guiding surface 69 of the guiding member 71 and the guiding surfaces 70 and 70 of the two sides, the frustoconical surface 62 of the insert 64 is slidably connected to the ball 49 of the ball stud 48, and the other surface 19 of the bearing body 3 is guided. The guide surface 69 above the member 71 and the static pressure gas bearing 1 disposed opposite to the both side guide surfaces 70 and 70.
根據該直線運動引導裝置68,藉由自軸承體3之複數個空氣吹出孔25對引導構件71之上引導面69及兩側引導面70及70噴射壓縮空氣,可利用形成於軸承體3之另一面19與引導構件71之上引導面69及兩側引導面70及70之間之空氣潤滑膜,將可動平臺74以非接觸之狀態對上引導面69及兩側引導面70及70保持。又,若軸承體3與上引導面69及兩側引導面70及70之間之軸承間隙不均一,會於軸承間隙各部產生壓力差,但藉由該壓力差,可使靜壓氣體軸承1朝使軸承間隙成為均一之方向自動調芯,而可相對於上引導面69及兩側引導面70及70保持平行之狀態。因此,引導構件71及可動平臺74之平行度、直角度等之零件精度可設為較粗之精度,除了靜壓氣體軸承1自身之低成本外,並可謀求直線運動引導裝置68之製作之容易化及成本之降低。 According to the linear motion guiding device 68, compressed air is injected onto the upper guiding surface 69 of the guiding member 71 and the both guiding surfaces 70 and 70 from the plurality of air blowing holes 25 of the bearing body 3, and can be formed in the bearing body 3 The other surface 19 and the air guiding film between the guiding surface 69 of the guiding member 71 and the guiding surfaces 70 and 70 on both sides maintain the movable platform 74 in the non-contact state with respect to the upper guiding surface 69 and the two guiding surfaces 70 and 70. . Moreover, if the bearing gap between the bearing body 3 and the upper guiding surface 69 and the two guiding surfaces 70 and 70 is not uniform, a pressure difference will occur in each part of the bearing gap, but the static pressure gas bearing 1 can be made by the pressure difference. The core is automatically aligned in a direction in which the bearing gap is uniform, and is maintained in a state of being parallel with respect to the upper guide surface 69 and the both side guide surfaces 70 and 70. Therefore, the accuracy of the parts such as the parallelism and the straight angle of the guiding member 71 and the movable stage 74 can be set to a coarser precision, and in addition to the low cost of the static pressure gas bearing 1 itself, the linear motion guiding device 68 can be manufactured. Ease of use and cost reduction.
直線運動引導裝置68中,雖使用如圖26所示般之靜壓氣體軸承1作為附加有自動調芯功能之靜壓氣體軸承1,但亦可代替其而使用圖16、圖20及圖30所示之靜壓氣體軸承1。 In the linear motion guiding device 68, the static pressure gas bearing 1 as shown in FIG. 26 is used as the static pressure gas bearing 1 to which the automatic aligning function is added, but FIG. 16, FIG. 20, and FIG. 30 may be used instead. The hydrostatic gas bearing 1 is shown.
如上,因軸承體與軸承基體係於使軸承體之鄰接於一面之外周面嵌合於軸承基體之圓筒突出部之內面後,利用接 著劑接著該嵌合部而一體化,故軸承體與軸承基體之接合面被牢固密封;於軸承體之一面上形成有寬度W為0.3~1.0 mm、深度d為0.01~0.05 mm之環狀凹槽,與於規制環狀凹槽之環狀底面上自環狀底面貫通軸承體而於圓環狀凹部之環狀底面開口之直徑D至少為30 μm之複數個自成節流孔形狀之空氣吹出孔;因無需機械加工即可形成該環狀凹槽及空氣吹出孔,故不僅可提供一種廉價之靜壓氣體軸承,亦可提供一種使用該靜壓氣體軸承之可謀求製作之容易化及成本之降低之直線運動引導裝置。 As described above, since the bearing body and the bearing base system are fitted to the inner surface of the cylindrical projecting portion of the bearing base by the outer peripheral surface of the bearing body adjacent to one surface, the joint is used. The bonding agent is integrated with the fitting portion, so that the joint surface of the bearing body and the bearing base body is firmly sealed; and a ring having a width W of 0.3 to 1.0 mm and a depth d of 0.01 to 0.05 mm is formed on one surface of the bearing body. a groove, and a plurality of self-formed orifice shapes having a diameter D of at least 30 μm opening from the annular bottom surface to the annular bottom surface of the annular groove on the annular bottom surface of the annular groove The air blows out the hole; since the annular groove and the air blowing hole can be formed without machining, it is possible to provide not only an inexpensive static pressure gas bearing but also an easy to manufacture using the static pressure gas bearing. And a linear motion guiding device with reduced cost.
1‧‧‧靜壓氣體軸承 1‧‧‧Static gas bearing
2‧‧‧軸承基體 2‧‧‧ bearing base
3‧‧‧軸承體 3‧‧‧ bearing body
3a‧‧‧軸承體 3a‧‧‧ bearing body
4‧‧‧基部 4‧‧‧ base
5‧‧‧面 5‧‧‧ Face
6‧‧‧圓筒突出部 6‧‧‧Cylinder protrusion
7‧‧‧面 7‧‧‧ Face
8‧‧‧一端 8‧‧‧End
9‧‧‧開口部 9‧‧‧ openings
10‧‧‧供氣孔 10‧‧‧ Air supply holes
11‧‧‧一端 11‧‧‧End
12‧‧‧基部4之外周面 12‧‧‧ outside the base 4
13‧‧‧供氣通路 13‧‧‧ gas supply path
14‧‧‧端部內周面 14‧‧‧End of the inner circumference of the end
15‧‧‧內螺紋 15‧‧‧ internal thread
16‧‧‧供氣管塞 16‧‧‧ gas supply plug
17‧‧‧面 17‧‧‧ Face
18‧‧‧圓環狀凹部 18‧‧‧Round recess
19‧‧‧面 19‧‧‧ Face
20‧‧‧環狀凹槽 20‧‧‧ annular groove
21‧‧‧一端 21‧‧‧End
22‧‧‧另一端 22‧‧‧The other end
23‧‧‧外周面 23‧‧‧ outer perimeter
24‧‧‧圓環狀底面 24‧‧‧Ringed bottom surface
25‧‧‧空氣吹出孔 25‧‧‧Air blowout hole
26‧‧‧環狀底面 26‧‧‧Ring bottom surface
27‧‧‧圓筒側面 27‧‧‧Cylinder side
28‧‧‧外周面 28‧‧‧ outer perimeter
29‧‧‧內周面 29‧‧‧ inner circumference
30‧‧‧開口部 30‧‧‧ openings
31‧‧‧開口部 31‧‧‧ openings
32‧‧‧截頭圓錐面 32‧‧‧Frustum
33‧‧‧組裝體 33‧‧‧Assembly
34‧‧‧大直徑環狀凹槽 34‧‧‧ Large diameter annular groove
35‧‧‧一端部 35‧‧‧One end
36‧‧‧另一端部 36‧‧‧Other end
37‧‧‧放射狀凹槽 37‧‧‧radial grooves
38‧‧‧小直徑環狀凹槽 38‧‧‧Small diameter annular groove
39‧‧‧一端部 39‧‧‧One end
40‧‧‧另一端部 40‧‧‧Other end
41‧‧‧放射狀凹槽 41‧‧‧radial grooves
42‧‧‧開口部 42‧‧‧ openings
43‧‧‧球體受壓凹部 43‧‧‧Sphere compression recess
44‧‧‧底面 44‧‧‧ bottom
45‧‧‧截頭圓錐面 45‧‧‧Frustum
46‧‧‧截頭圓錐凹部 46‧‧‧Frustum conical recess
47‧‧‧組裝體 47‧‧‧Assembly
48‧‧‧球頭螺栓 48‧‧‧ ball studs
49‧‧‧球體 49‧‧‧ sphere
50‧‧‧凹球面 50‧‧‧ concave spherical surface
51‧‧‧凹球部 51‧‧‧ concave ball
52‧‧‧組裝體 52‧‧‧Assembly
54‧‧‧底面 54‧‧‧ bottom
55‧‧‧圓柱狀凹部 55‧‧‧Cylindrical recess
56‧‧‧圓柱體 56‧‧‧Cylinder
57‧‧‧一端 57‧‧‧End
58‧‧‧一面 58‧‧‧ side
59‧‧‧圓孔 59‧‧‧ round hole
60‧‧‧另一端 60‧‧‧The other end
61‧‧‧另一面 61‧‧‧The other side
62‧‧‧截頭圓錐面 62‧‧‧Frustum
63‧‧‧凹部 63‧‧‧ recess
64‧‧‧嵌塊 64‧‧‧Block
65‧‧‧組裝體 65‧‧‧Assembly
66‧‧‧凹球面 66‧‧‧ concave spherical surface
67‧‧‧凹部 67‧‧‧ recess
68‧‧‧直線運動引導裝置 68‧‧‧Linear motion guiding device
69‧‧‧上引導面 69‧‧‧Upper guide surface
70‧‧‧兩側引導面 70‧‧‧ both sides of the guide surface
71‧‧‧引導構件 71‧‧‧Guiding components
72‧‧‧上板 72‧‧‧Upper board
73‧‧‧一側板 73‧‧‧ side board
74‧‧‧可動平臺 74‧‧‧ movable platform
75‧‧‧下表面 75‧‧‧ lower surface
76‧‧‧內面 76‧‧‧ inside
圖1係本發明之實施形態之較佳例的俯視說明圖。 Fig. 1 is a plan view showing a preferred embodiment of the embodiment of the present invention.
圖2係圖1之II-II線之向視剖面說明圖。 Fig. 2 is a cross-sectional explanatory view taken along line II-II of Fig. 1.
圖3係圖1之仰視說明圖。 Figure 3 is a bottom plan view of Figure 1.
圖4係圖1之軸承體之仰視說明圖。 Figure 4 is a bottom plan view of the bearing body of Figure 1.
圖5係圖1之要部放大剖面說明圖。 Fig. 5 is an enlarged cross-sectional explanatory view of an essential part of Fig. 1.
圖6係軸承基體之俯視說明圖。 Figure 6 is a top plan view of the bearing base.
圖7係圖6之VII-VII線之向視剖面說明圖。 Fig. 7 is a cross-sectional explanatory view taken along line VII-VII of Fig. 6.
圖8係軸承體的俯視說明圖。 Fig. 8 is a plan view of the bearing body.
圖9係圖8之IX-IX線之向視剖面說明圖。 Fig. 9 is a cross-sectional explanatory view taken along line IX-IX of Fig. 8.
圖10係圖8之仰視說明圖。 Figure 10 is a bottom plan view of Figure 8.
圖11係軸承體與軸承基體之組裝體的剖面說明圖。 Fig. 11 is a cross-sectional explanatory view showing an assembly of a bearing body and a bearing base.
圖12係軸承體之另一實施形態的俯視說明圖。 Fig. 12 is a plan explanatory view showing another embodiment of the bearing body.
圖13係軸承基體之另一實施形態的仰視說明圖。 Figure 13 is a bottom plan view showing another embodiment of the bearing base.
圖14係圖13之XIV-XIV線之向視剖面說明圖。 Figure 14 is a cross-sectional explanatory view taken along line XIV-XIV of Figure 13;
圖15係軸承體與軸承基體之組裝體的剖面說明圖。 Fig. 15 is a cross-sectional explanatory view showing an assembly of a bearing body and a bearing base.
圖16係附加有自動調芯功能之靜壓氣體軸承的剖面說明圖。 Fig. 16 is a cross-sectional explanatory view showing a static pressure gas bearing to which an automatic aligning function is added.
圖17係軸承基體之另一實施形態的仰視說明圖。 Figure 17 is a bottom plan view showing another embodiment of the bearing base.
圖18係圖17之XVII-XVIII線之向視剖面說明圖。 Fig. 18 is a cross-sectional explanatory view taken along line XVII-XVIII of Fig. 17;
圖19係軸承體與軸承基體之組裝體的剖面說明圖。 Fig. 19 is a cross-sectional explanatory view showing an assembly of a bearing body and a bearing base.
圖20係附加有自動調芯功能之靜壓氣體軸承的剖面說明圖。 Fig. 20 is a cross-sectional explanatory view showing a static pressure gas bearing to which an automatic aligning function is added.
圖21係軸承基體之另一實施形態的仰視說明圖。 Figure 21 is a bottom plan view showing another embodiment of the bearing base.
圖22係圖21之XXII-XXII線之向視剖面說明圖。 Figure 22 is a cross-sectional explanatory view taken along the line XXII-XXII of Figure 21.
圖23係嵌塊的剖面說明圖。 Figure 23 is a cross-sectional explanatory view of the block.
圖24係嵌合固定有嵌塊之軸承基體的剖面說明圖。 Fig. 24 is a cross-sectional explanatory view showing a bearing base to which a block is fitted and fixed.
圖25係軸承體與軸承基體之組裝體的剖面說明圖。 Fig. 25 is a cross-sectional explanatory view showing an assembly of a bearing body and a bearing base.
圖26係附加有自動調芯功能之靜壓氣體軸承的剖面說明圖。 Fig. 26 is a cross-sectional explanatory view showing a static pressure gas bearing to which an automatic aligning function is added.
圖27係嵌塊之另一實施形態的剖面說明圖。 Figure 27 is a cross-sectional explanatory view showing another embodiment of the block.
圖28係嵌合固定有嵌塊之軸承基體的剖面說明圖。 Fig. 28 is a cross-sectional explanatory view showing a bearing base to which a block is fitted and fixed.
圖29係軸承體與軸承基體之組裝體的剖面說明圖。 Fig. 29 is a cross-sectional explanatory view showing an assembly of a bearing body and a bearing base.
圖30係附加有自動調芯功能之靜壓氣體軸承的剖面說明圖。 Fig. 30 is a cross-sectional explanatory view showing a static pressure gas bearing to which an automatic aligning function is added.
圖31係直線引導裝置的剖面說明圖。 Figure 31 is a cross-sectional explanatory view of the linear guiding device.
1‧‧‧靜壓氣體軸承 1‧‧‧Static gas bearing
2‧‧‧軸承基體 2‧‧‧ bearing base
3‧‧‧軸承體 3‧‧‧ bearing body
5‧‧‧面 5‧‧‧ Face
6‧‧‧圓筒突出部 6‧‧‧Cylinder protrusion
7‧‧‧面 7‧‧‧ Face
9‧‧‧開口部 9‧‧‧ openings
10‧‧‧供氣孔 10‧‧‧ Air supply holes
17‧‧‧面 17‧‧‧ Face
18‧‧‧圓環狀凹部 18‧‧‧Round recess
19‧‧‧面 19‧‧‧ Face
20‧‧‧環狀凹槽 20‧‧‧ annular groove
23‧‧‧外周面 23‧‧‧ outer perimeter
24‧‧‧圓環狀底面 24‧‧‧Ringed bottom surface
25‧‧‧空氣吹出孔 25‧‧‧Air blowout hole
26‧‧‧環狀底面 26‧‧‧Ring bottom surface
28‧‧‧外周面 28‧‧‧ outer perimeter
29‧‧‧內周面 29‧‧‧ inner circumference
30‧‧‧開口部 30‧‧‧ openings
31‧‧‧開口部 31‧‧‧ openings
32‧‧‧截頭圓錐面 32‧‧‧Frustum
Claims (10)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2011253340A JP5929117B2 (en) | 2011-11-18 | 2011-11-18 | Static pressure gas bearing and linear motion guide device using the static pressure gas bearing |
Publications (2)
Publication Number | Publication Date |
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TW201326596A true TW201326596A (en) | 2013-07-01 |
TWI491815B TWI491815B (en) | 2015-07-11 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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TW101139982A TWI491815B (en) | 2011-11-18 | 2012-10-29 | Static pressure gas bearings and the use of the static pressure gas bearing linear motion guide device |
Country Status (5)
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JP (1) | JP5929117B2 (en) |
KR (1) | KR20130055517A (en) |
CN (2) | CN103122932A (en) |
TW (1) | TWI491815B (en) |
WO (1) | WO2013073166A1 (en) |
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Publication number | Priority date | Publication date | Assignee | Title |
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CA2834615C (en) * | 2013-08-28 | 2020-04-28 | Gedex Inc. | Single axis rotational gas bearing with feed-through |
US10161448B2 (en) | 2015-06-23 | 2018-12-25 | Roller Bearing Company Of America, Inc. | Railway truck having a self-lubricating composite bearing pad disposed therein |
CN109185339B (en) * | 2018-09-06 | 2020-03-17 | 西安交通大学 | Distributed multi-watershed aerostatic thrust bearing |
WO2021101211A1 (en) | 2019-11-18 | 2021-05-27 | 한양대학교 에리카산학협력단 | Hybrid fluid bearing |
KR102463091B1 (en) * | 2019-11-18 | 2022-11-03 | 한양대학교 에리카산학협력단 | Hybrid Fluid Film Bearing |
WO2021194782A1 (en) * | 2020-03-27 | 2021-09-30 | Corning Incorporated | Positioning devices for radially positioning substrates with respect to an air bearing device |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS5419283B2 (en) * | 1974-05-18 | 1979-07-13 | ||
IT1083098B (en) * | 1977-07-11 | 1985-05-21 | Dea Spa | TOOL MACHINE OR MEASURING MACHINE WITH PNEUMATIC AND MAGNETIC SLIDING |
JPS61127927U (en) * | 1985-01-29 | 1986-08-11 | ||
JPH068650B2 (en) * | 1987-03-19 | 1994-02-02 | キヤノン株式会社 | Hydrostatic bearing pad |
JPH0647135Y2 (en) * | 1988-10-18 | 1994-11-30 | エヌティエヌ株式会社 | Air slide device |
JPH0510330A (en) * | 1991-06-29 | 1993-01-19 | Canon Inc | Static pressure bearing device |
JP3609455B2 (en) * | 1994-08-12 | 2005-01-12 | Ntn株式会社 | Static pressure gas bearing |
JP3860253B2 (en) * | 1996-04-30 | 2006-12-20 | 黒田精工株式会社 | Static pressure gas bearing |
GB0416495D0 (en) * | 2004-07-23 | 2004-08-25 | Westwind Air Bearings Ltd | Air bearing spindles |
JP2008082449A (en) * | 2006-08-31 | 2008-04-10 | Oiles Ind Co Ltd | Static pressure gas bearing |
JP5089534B2 (en) * | 2008-09-02 | 2012-12-05 | Ckd株式会社 | Levitation unit and non-contact support device having the same |
JP2010096311A (en) * | 2008-10-17 | 2010-04-30 | Ntn Corp | Hydrostatic bearing pad, linear guide apparatus, and rotation guide apparatus |
JP2010106927A (en) * | 2008-10-29 | 2010-05-13 | Ntn Corp | Hydrostatic bearing unit |
-
2011
- 2011-11-18 JP JP2011253340A patent/JP5929117B2/en active Active
-
2012
- 2012-10-29 KR KR1020120120450A patent/KR20130055517A/en not_active Application Discontinuation
- 2012-10-29 TW TW101139982A patent/TWI491815B/en not_active IP Right Cessation
- 2012-10-30 CN CN2012104257487A patent/CN103122932A/en active Pending
- 2012-11-13 WO PCT/JP2012/007269 patent/WO2013073166A1/en active Application Filing
- 2012-11-13 CN CN201280047766.4A patent/CN103842672A/en active Pending
Also Published As
Publication number | Publication date |
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WO2013073166A1 (en) | 2013-05-23 |
TWI491815B (en) | 2015-07-11 |
CN103842672A (en) | 2014-06-04 |
KR20130055517A (en) | 2013-05-28 |
JP2013108557A (en) | 2013-06-06 |
JP5929117B2 (en) | 2016-06-01 |
CN103122932A (en) | 2013-05-29 |
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