CN103122932A - Hydrostatic gas bearing and linear motion guide device using thereof - Google Patents
Hydrostatic gas bearing and linear motion guide device using thereof Download PDFInfo
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- CN103122932A CN103122932A CN2012104257487A CN201210425748A CN103122932A CN 103122932 A CN103122932 A CN 103122932A CN 2012104257487 A CN2012104257487 A CN 2012104257487A CN 201210425748 A CN201210425748 A CN 201210425748A CN 103122932 A CN103122932 A CN 103122932A
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- bearing
- face
- recess
- annular recess
- hydrostatic gas
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
- F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/001—Bearings for parts moving only linearly adjustable for alignment or positioning
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
- F16C32/0666—Details of hydrostatic bearings independent of fluid supply or direction of load of bearing pads
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
- F16C32/067—Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/20—Sliding surface consisting mainly of plastics
- F16C33/201—Composition of the plastic
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The aerostatic bearing (1) is provided with: a bearing substrate (2) formed from a thermoplastic synthetic resin or a reinforcing filler-containing thermoplastic synthetic resin comprising 30-50 mass% of glass fiber, glass powder, carbon fiber or inorganic filler in said thermoplastic synthetic resin, or from aluminum or an aluminum alloy; and a synthetic resin bearing body (3), which is glued and united with the bearing substrate (2) using an adhesive and is formed from a thermoplastic synthetic resin.
Description
Technical field
The present invention relates to a kind of hydrostatic gas-lubricated bearing and use the linear guide device of this hydrostatic gas-lubricated bearing.
Background technique
In precision machine tool, semiconductor exposure device, require with machined objects such as hi-Fix machining tool, substrates.For this reason, the positioning device of the mounting table of use and machining tool, machined object does not almost have the linear guide device that hydrostatic gas-lubricated bearing is installed of friction.In this linear guide device, between as the movable table of the mounting table of machined object and the guide rail as guiding elements, pressure fluid is set, so that movable table moves non-contactly with respect to guide rail.
Throttling form as the Air blowing hole of the hydrostatic gas-lubricated bearing that is installed on this linear guide device, porous restriction, surface throttle, orifice restriction are arranged, have throttling etc. of one's own, can be according to different purposes, on one side regulating load capacity and bearing rigidity etc. use on one side.
For example, record in patent documentation 1 in the hydrostatic bearing pad use material granule diameter roughly evenly and a kind of material of graphitic carbon class of isotropism that can obtain open pore as bearing components, wherein, above-mentioned hydrostatic bearing pad is fixed in the either party who is supported in body or supporting mass, and the forced air that supplies to bearing surface via its bearing components utilization is supported to supporting mass can move freely.
In addition, in patent documentation 2, as keeping higher rigidity and can realizing the air bearing devices of higher Decay Rate, proposed a kind of air bearing devices, this air bearing devices has two parallel bearing surfaces of relative essence and reaches at least one gas channel that supplies gas to the bearing play between the diaxon bearing surface by aperture.
In addition, in patent documentation 3, proposed a kind of hydrostatic gas-lubricated bearing, this hydrostatic gas-lubricated bearing comprises: the mother metal that is made of porous plastid; And be bonded on this mother metal, and by in order to realize desired air throughput, the porous slab of adjusting in advance the diameter of through hole and distribution and being made into forms surface throttle hole layer, this hydrostatic gas-lubricated bearing passes through surface throttle hole layer ejection gas, and utilizes its static pressure to support being supported member.
The prior art document
Patent documentation
Patent documentation 1: the clear 63-231020 communique of Japanese Patent Laid-Open
Patent documentation 2: the special table of Japan Patent 2006-510856 communique
Patent documentation 3: Japanese Patent Laid-Open 2001-56027 communique
Patent documentation 4: Japanese Patent Laid-Open 2008-82449 communique
Although above-mentioned hydrostatic gas-lubricated bearing in the past can be realized ultra-low friction, ultra-high precision and ultra high speed running but have following problem: mainly use high-intensity metal, pottery as bearing material, need to carry out high-precision grinding fine finishing etc., therefore, certainly exist the high problem of cost.
Yet, in the situation that do not require ultra-low friction, ultra-high precision and ultra high speed running, such as carrying non-contactly the article such as liquid crystal screen or article being moved horizontally with not producing temperature variation, although advantage that exist to use that the structure of hydrostatic gas-lubricated bearing timer is simplified etc., but then, because hydrostatic gas-lubricated bearing self is more expensive, can not be used widely in such use, this is also actual conditions.
In view of above-mentioned actual conditions, for the hydrostatic gas-lubricated bearing of the cheapness that can use in various fields is provided, at first the applicant has proposed a kind of hydrostatic gas-lubricated bearing, this hydrostatic gas-lubricated bearing comprises: the resin bearing components, this resin bearing components has a plurality of Air blowing mouths that have throttle orifice shape or orifice restriction hole shape of one's own at upper surface, have the air supply trough that is communicated with above-mentioned a plurality of Air blowing mouths at lower surface; And matrix, this matrix is bonded on the lower surface of above-mentioned resin bearing components in the mode that covers above-mentioned air supply trough, and has the air supply opening (patent documentation 4) that is communicated with above-mentioned air supply trough.
The hydrostatic gas-lubricated bearing of putting down in writing according to this patent documentation 4, can form with mould the resin bearing components that consists of hydrostatic gas-lubricated bearing by injection molding, do not need machining, in addition, the structure of matrix also only need form the air supply opening that is communicated with the resin bearing components, only the resin bearing components is just engaged with matrix and can be assembled into hydrostatic gas-lubricated bearing, can carry out a large amount of productions of hydrostatic gas-lubricated bearing, thereby cheap hydrostatic gas-lubricated bearing can be provided.
Yet, because the Air blowing mouth in the hydrostatic gas-lubricated bearing of record in patent documentation 4 forms by injection molding, form diameter and be the diameter of 0.2～0.4mm left and right larger have throttle orifice or hole shape of one's own, the air feed amount of blowing out that existence blows out from this Air blowing mouth too much causes the possibility of self-excited vibration, still needs to improve when actual practicality.
Summary of the invention
The present invention In view of the foregoing does, and its purpose is to provide a kind of and can produces in a large number and cheap hydrostatic gas-lubricated bearing and use the linear guide device of this hydrostatic gas-lubricated bearing.
hydrostatic gas-lubricated bearing of the present invention comprises: the bearing matrix, this bearing matrix has base portion, cylinder protuberance and air feed path, above-mentioned cylinder protuberance is based in a side's of above-mentioned base portion the outer periphery of face, above-mentioned air feed path at one end is opened on a side the face of base portion, is opened at the other end on the outer circumferential face of base portion, and plastic bearing support, this bearing support has circular recess, annular recess and a plurality of Air blowings holes, above-mentioned circular recess is formed on a side the face of the bearing support relative with a side's of base portion face, above-mentioned annular recess is in the opposing party's of bearing support face upper shed, above-mentioned a plurality of Air blowing hole shape becomes and has throttle orifice (Japanese: Zi Cheng Twisted り) of one's own, it at one end is communicated with annular recess, be opened on the circular bottom surface of circular recess at the other end, above-mentioned bearing support makes with the internal surface of the cylinder protuberance of the outer circumferential face of a side face adjacency and base portion chimeric, thereby and carry out bonding integrated with the bearing matrix at this embedding part, annular recess has the width of 0.3mm at least, at least the degree of depth of 0.01mm, the Air blowing hole has the diameter of at least 30 μ m at the one end, form between circular recess and annular recess and have throttle orifice of one's own.
according to hydrostatic gas-lubricated bearing of the present invention, plastic bearing support makes with the internal surface of the cylinder protuberance of the outer circumferential face of a side face adjacency and base portion chimeric, and thereby it is bonding integrated with the bearing matrix to utilize binder to carry out at this embedding part, in addition, the annular recess that plastic bearing support has in the opposing party's face upper shed reaches a plurality of Air blowings hole that at one end is communicated with and is opened at the other end circular recess with annular recess, annular recess has the width of 0.3mm at least, at least the 0.01mm degree of depth, the Air blowing hole has the diameter of at least 30 μ m at the one end, form between circular recess and annular recess and have throttle orifice of one's own, do not carry out machining and just can form above-mentioned annular recess and a plurality of Air blowings holes, therefore, can produce in a large number, and can produce at an easy rate.
In preference, annular recess has the degree of depth of width, 0.01～0.05mm or the 0.01～0.03mm of 0.3～1.0mm or 0.3～0.7mm, and above-mentioned Air blowing hole has the diameter of 30～120 μ m at the one end.
Comparatively it is desirable to, annular recess and Air blowing hole form by laser beam machining respectively.Use laser as processing, can select from carbon dioxide laser, YAG laser, UV laser, excimer laser etc.
Annular recess and Air blowing hole form by laser beam machining respectively, compare with the machining such as cutting etc., can form moment, can not only produce in a large number, can also produce at an easy rate.
In hydrostatic gas-lubricated bearing of the present invention, also can form spheroid pressurized recess on the opposing party's of bearing matrix face.Spheroid pressurized recess is made of frustum of a cone recess or the recessed bulb in above-mentioned the opposing party's face upper shed, and these spheroid pressurized recesses also are formed directly on the opposing party's the face of bearing matrix.
In hydrostatic gas-lubricated bearing of the present invention, be formed with the cylindric recess in this opposing party's face upper shed on the opposing party's of bearing matrix face, the chimeric block that is fixed with in this cylindric recess, spheroid pressurized recess also can have frusto-conical face, and this frusto-conical face is in a side's of the above-mentioned block of the opposing party's who is in the bearing matrix face one side face upper shed and be formed at this block.
In hydrostatic gas-lubricated bearing of the present invention, be formed with the cylindric recess in this opposing party's face upper shed on the opposing party's of bearing matrix face, the chimeric block that is fixed with in this cylindric recess, spheroid pressurized recess also can have concave spherical surface, and this concave spherical surface is in a side's of the above-mentioned block of the opposing party's who is in the bearing matrix face one side face upper shed and be formed at this block.
Have the hydrostatic gas-lubricated bearing of spheroid pressurized recess on the opposing party's of bearing matrix face in, for example by the spheroid of ball pin and this spheroid pressurized recess sliding contact ground are configured, this hydrostatic gas-lubricated bearing has the automatic core-adjusting function around this spheroid.
In hydrostatic gas-lubricated bearing of the present invention, bearing support can also comprise except annular recess: large footpath annular recess, this large footpath annular recess are formed on the opposing party's the face of bearing support, and surround this annular recess in the outside of annular recess; A plurality of the first radial groove, a side's of these the first radial groove is open-ended in above-mentioned annular recess, and the opposing party's is open-ended in above-mentioned large footpath annular recess; The path annular recess, this path annular recess is formed at the inboard of above-mentioned annular recess; And a plurality of the second radial groove, one side's of these the second radial groove is open-ended in above-mentioned annular recess, the opposing party's is open-ended in above-mentioned path annular recess, and these large footpath annular recess, path annular recess, the first radial groove and the second radial groove can be formed on the opposing party's the face of bearing support.
Hydrostatic gas-lubricated bearing with automatic core-adjusting function is applicable to the linear guide device as the positioning device of the mounting table of machined object.namely, the outside of the linear guide device that comprises hydrostatic gas-lubricated bearing of the present invention guiding elements of guide surface and both sides guide surface on having disposes the movable table that cross section is the コ font, this movable table has the upper plate relative with upper guide surface and the pair of side plates relative with the both sides guide surface, each ball pin makes spheroid found lower surface and the side plate internal surface separately of the upper plate of being located at this movable table towards medially, between the upper guide surface and both sides guide surface of this ball pin and guiding elements, dispose above-mentioned hydrostatic gas-lubricated bearing, this hydrostatic gas-lubricated bearing makes the spheroid sliding contact of spheroid pressurized recess and above-mentioned ball pin, and make bearing support relative with upper guide surface and the both sides guide surface of guiding elements.
According to above-mentioned linear guide device, because upper guide surface and the both sides guide surface towards guiding elements sprays pressurized air from a plurality of Air blowings hole of bearing support, therefore, can utilize the air lubricating film that forms between bearing support and upper guide surface and both sides guide surface make movable table with respect on guide surface and both sides guide surface keep contactless state.In addition, if the bearing play between bearing support and upper guide surface and both sides guide surface is inhomogeneous, can produce pressure difference at the bearing play each several part, but due to this pressure difference, hydrostatic gas-lubricated bearing can be on the uniform direction in bearing play automatic core-adjusting, thereby can keep with respect to upper guide surface and the parallel state of both sides guide surface.Therefore, the element precisions such as the parallelism of guiding elements and movable table, squareness can adopt thicker precision, except the cost that can reduce above-mentioned hydrostatic gas-lubricated bearing self, can also provide a kind of linear guide device of cheapness.
In hydrostatic gas-lubricated bearing of the present invention, but bearing support is preferably formed by thermoplastic synthetic resins such as polyacetal resin, polyamide resin, polyphenylene sulfides, in addition, but the bearing matrix is preferably by thermoplastic synthetic resins such as polyacetal resin, polyamide resin, polyphenylene sulfides, but but perhaps contain in these thermoplastic synthetic resins 30～50 quality % glass fibre, glass powder, carbon fiber or inorganic fill material contain the thermoplastic synthetic resin of strengthen filling material, perhaps aluminum or aluminum alloy forms.These plastic bearing suppories and bearing matrix can form by the synthetic resin material is carried out machining, also can use mould to pass through injection molding and form.
According to the present invention, can provide a kind of and can produce in a large number and cheap hydrostatic gas-lubricated bearing and use the linear guide device of this hydrostatic gas-lubricated bearing.
Description of drawings
Fig. 1 be embodiment of the present invention preference overlook explanatory drawing.
Fig. 2 is that the II-II alignment of Fig. 1 is looked and analysed and observe explanatory drawing.
Fig. 3 is the explanatory drawing of looking up of Fig. 1.
Fig. 4 be Fig. 1 bearing support look up explanatory drawing.
Fig. 5 is that explanatory drawing is analysed and observe in the major component amplification of Fig. 1.
Fig. 6 is the explanatory drawing of overlooking of bearing matrix.
Fig. 7 is that the VII-VII alignment of Fig. 6 is looked and analysed and observe explanatory drawing.
Fig. 8 is the explanatory drawing of overlooking of bearing support.
Fig. 9 is that the IX-IX alignment of Fig. 8 is looked and analysed and observe explanatory drawing.
Figure 10 is the explanatory drawing of looking up of Fig. 8.
Figure 11 be bearing support and bearing matrix assemblying body analyse and observe explanatory drawing.
Figure 12 be bearing support other mode of execution overlook explanatory drawing.
Figure 13 be the bearing matrix other mode of execution look up explanatory drawing.
Figure 14 is that the XIV-XIV alignment of Figure 13 is looked and analysed and observe explanatory drawing.
Figure 15 be bearing support and bearing matrix assemblying body analyse and observe explanatory drawing.
Figure 16 be have the automatic core-adjusting function hydrostatic gas-lubricated bearing analyse and observe explanatory drawing.
Figure 17 be the bearing matrix another mode of execution look up explanatory drawing.
Figure 18 is that the XVIII-XVIII alignment of Figure 17 is looked and analysed and observe explanatory drawing.
Figure 19 be bearing support and bearing matrix assemblying body analyse and observe explanatory drawing.
Figure 20 be have the automatic core-adjusting function hydrostatic gas-lubricated bearing analyse and observe explanatory drawing.
Figure 21 be the bearing matrix other mode of execution look up explanatory drawing.
Figure 22 is that the XXII-XXII alignment of Figure 21 is looked and analysed and observe explanatory drawing.
Figure 23 is the explanatory drawing of analysing and observe of block.
Figure 24 is the explanatory drawing of analysing and observe of the chimeric bearing matrix that is fixed with block.
Figure 25 be bearing support and bearing matrix assemblying body analyse and observe explanatory drawing.
Figure 26 be have the automatic core-adjusting function hydrostatic gas-lubricated bearing analyse and observe explanatory drawing.
Figure 27 be block other mode of execution overlook explanatory drawing.
Figure 28 is the explanatory drawing of analysing and observe of the chimeric bearing matrix that is fixed with block.
Figure 29 be bearing support and bearing matrix assemblying body analyse and observe explanatory drawing.
Figure 30 be have the automatic core-adjusting function hydrostatic gas-lubricated bearing analyse and observe explanatory drawing.
Figure 31 is the explanatory drawing of analysing and observe of linear guide device.
(symbol description)
1 static pressure matrix bearing
2 bearing matrixes
3 bearing suppories
4 base portions
6 cylinder protuberances
13 air feed paths
18 circular recesses
20 annular recess
23 outer circumferential faces
25 Air blowing holes
Embodiment
Then, the example according to as shown in the figure preferred implementation is described in more detail the present invention.In addition, the present invention is not limited to these examples.
In Fig. 1 to Fig. 5, hydrostatic gas-lubricated bearing 1 comprises: bearing matrix 2, this bearing matrix 2 preferably by polyacetal resin (POM), polyamide resin (PA), polyphenylene sulfide (PPS) but etc. thermoplastic synthetic resin, but but perhaps contain in these thermoplastic synthetic resins 30～50 quality % glass fibre, glass powder, carbon fiber or inorganic fill material contain the thermoplastic synthetic resin of strengthen filling material, perhaps aluminum or aluminum alloy forms; Plastic bearing support 3, this bearing support 3 is bonding and integrated by binder and bearing matrix 2, but is preferably formed by thermoplastic synthetic resins such as polyacetal resin, polyamide resin, polyphenylene sulfides.
Especially as Figure 6 and Figure 7, bearing matrix 2 comprises: base portion 4; Be based in the cylinder protuberance 6 on a side the outer periphery of overlooking rounded face 5 of base portion 4 towards ground, the top of axial Y one; The opposing party's of base portion 4 the rounded face 7 of overlooking; 8 air vents 10 with the circular open section 9 that is opened on the rounded face of overlooking of base portion 45 at one end; And at one end 11 be communicated with air vent 10 and be opened on air feed path 13 on the outer circumferential face 12 of matrix 4 at the other end.
Be formed with female thread 15 on the end inner peripheral surface 14 of the air feed path 13 on the outer circumferential face 12 that is opened on base portion 4, female thread 15 screws togather with the external screw thread of air feed plug 16, and air feed plug 16 is fixed in the outer circumferential face 12 of the base portion 4 of bearing matrix 2.
Especially as Fig. 8 to shown in Figure 10, bearing support 3 has: the circular recess 18 on rounded face 17 overlooked that is formed at a side relative with a side's of base portion 4 the rounded face 5 of overlooking; Annular recess 20 in rounded face 19 upper sheds of overlooking of the opposing party; At one end 21 are communicated with annular recess 20 and are opened on a plurality of Air blowings hole 25 on the circular bottom surface 24 of circular recess 18 at the other end 22; And with the outer circumferential face 23 of rounded face 17 adjacency of overlooking of a side.
In hydrostatic gas-lubricated bearing 1, can form annular recess 20 and a plurality of Air blowing hole that has the throttle orifice shape of one's own 25 by laser beam machining for example moment, the width W of described annular recess 20 on the face 19 of bearing support 3 is at least 0.3mm, depth d is at least 0.01mm, described Air blowing hole 25 at one end 21 is opened on annular recess 20, be opened on the circular bottom surface 24 of circular recess 18 at the other end 22, its diameter D is at least 30 μ m.
In above-mentioned hydrostatic gas-lubricated bearing 1, due to bearing support 3 utilize binder and bearing matrix 2 integrated, therefore, its making is easy and cheap.In addition, Air blowing hole 25 is minimum diameters that diameter is at least 30 μ m, can suppress because 25 ejecting the generation that a large amount of air causes self-excited vibration from the Air blowing hole.
then, Fig. 1 is described to the example of the manufacture method of hydrostatic gas-lubricated bearing 1 shown in Figure 5, at first, prepare containing of Figure 6 and Figure 7 and strengthen filling the synthetic resin system of material or the bearing matrix 2 of aluminum or aluminum alloy system, the bearing support 3a that there is no annular recess 20 and Air blowing hole 25 at Fig. 8 to the plastic bearing support 3 shown in Figure 10, as shown in figure 11, the opening portion 30 of the circular recess 18 of bearing support 3a is communicated with the opening portion 9 of the air vent 10 of bearing matrix 2, and make with the outer circumferential face 23 of the side's of bearing support 3a face 17 adjacency chimeric with the internal surface of the cylinder protuberance 6 of bearing matrix 2, then, utilize binder that this embedding part is bonding, so that bearing matrix 2 is integrated with bearing support 3a, thereby form assembly body 33.
utilize laer machnie to the opposing party's of the bearing support 3a of integrated assembly body 33 as mentioned above face 19 irradiation laser, to form annular recess 20 and a plurality of Air blowing hole that has the throttle orifice shape of one's own 25, thereby produce hydrostatic gas-lubricated bearing 1, wherein, the width W of above-mentioned annular recess 20 is 0.3～1.0mm, depth d is 0.01～0.05mm, above-mentioned Air blowing hole 25 26 connects bearing support 3a and is opened on the circular bottom surface 24 of circular recess 18 from the ring-type bottom surface in the ring-type bottom surface 26 that forms annular recess 20, its diameter D is at least 30 μ m, be preferably 30～120 μ m.
As the processing laser that uses, can select from carbon dioxide laser, YAG laser, UV laser or excimer laser etc., preferably use carbon dioxide laser.
use laser output power to be the carbon dioxide laser of 9.5W, sweep rate with 1000mm/s is carried out once overlapping stamp, be 2 seconds process time, to form and to process on the face 19 of the bearing support 3a that formed by polyphenylene sulfide centered by the circular arc take diameter as 30mm, width is 0.5mm, the degree of depth is the annular recess 20 of 0.05mm, in addition, on the ring-type bottom surface 26 of annular recess 20, laser output power with 14W, 15 second process time, be processed to form out 10 Air blowing holes that have the throttle orifice shape of one's own 25 on 10 position of halving in a circumferential direction, this Air blowing hole 25 26 connects bearing support 3a and at the circular bottom surface of circular recess 18 24 openings from the ring-type bottom surface, its diameter is 0.06mm.
the bearing support 3 of above-mentioned hydrostatic gas-lubricated bearing 1 has an annular recess 20, but except annular recess 20, bearing support 3 also can be as shown in figure 12, also has large footpath annular recess 34, a plurality of radial groove 37, path annular recess 38 and a plurality of radial groove 41, wherein, above-mentioned annular recess 34 be formed at bearing support 3 the opposing party face 19 and surround annular recess 20 and concentric with annular recess 20 in the outside of annular recess 20, one side's of above-mentioned radial groove 37 end 35 is opened on annular recess 20, the opposing party end 36 is opened on large footpath annular recess 34, above-mentioned path annular recess 38 is formed at the inboard and concentric with annular recess 20 of annular recess 20, one side's of above-mentioned radial groove 41 end 39 is opened on annular recess 20, the opposing party's end 40 is opened on path annular recess 38.
In the hydrostatic gas-lubricated bearing 1 with bearing support shown in Figure 12 3, be supplied to large footpath annular recess 34 and path annular recess 38 to the pressurized air of annular recess 20 via radial slot 37 and 41 by air feed, therefore, supply with area and become large, for example when article float, can carry out stable floating.
Figure 13 to Figure 16 represents other mode of execution of hydrostatic gas-lubricated bearing 1, be formed with at the opposing party's of bearing matrix 2 the central part of overlooking rounded face 7 and have the spheroid pressurized recess 43 of overlooking rounded opening portion 42 on face 7, spheroid pressurized recess 43 has frustum of a cone recess 46, this frustum of a cone recess 46 by overlook rounded bottom surface 44,44 frusto-conical face 45 of extending towards opening portion 42 form with expanding gradually from the bottom surface.
The bearing matrix 2 that comprises the spheroid pressurized recess 43 with frustum of a cone recess 46 is same with hydrostatic gas-lubricated bearing 1, the opening portion 9 of air vent 10 is communicated with the opening portion 30 of the circular recess 18 of bearing support 3, and make chimeric with the internal surface of the cylinder protuberance 6 of bearing matrix 2 with the outer circumferential face 23 of a side's of bearing support 3 face 17 adjacency after, utilize binder to make this embedding part bonding, thereby make bearing matrix 2 and bearing support 3 integrated, form by this assembly body 47.
utilize laer machnie to the opposing party's of the bearing support 3 in integrated assembly body 47 as mentioned above face 19 irradiation laser, to form annular recess 20 and a plurality of Air blowing hole that has the throttle orifice shape of one's own 25, thereby produce hydrostatic gas-lubricated bearing 1, wherein, the width W of above-mentioned annular recess 20 is 0.3～1.0mm, depth d is 0.01～0.05mm, above-mentioned Air blowing hole 25 26 connects bearing suppories 3 and is opened on the circular bottom surface 24 of circular recess 18 from the ring-type bottom surface in the ring-type bottom surface 26 that forms annular recess 20, its diameter D is at least 30 μ m, be preferably 30～120 μ m.
In the hydrostatic gas-lubricated bearing 1 that forms as mentioned above, as shown in figure 16, the spheroid 49 of ball pin 48 by with the frusto-conical face 45 sliding contacts ground configurations of the spheroid pressurized recess 43 of bearing matrix 2, have by this automatic core-adjusting function.
Figure 17 to Figure 20 represents another mode of execution of hydrostatic gas-lubricated bearing 1, be formed with at the opposing party's of bearing matrix 2 the central part of overlooking rounded face 7 and have the spheroid pressurized recess 43 of overlooking rounded opening portion 42 on face 7, spheroid pressurized recess 43 has recessed bulb 51, this recessed bulb 51 by overlook rounded bottom surface 44,44 concave spherical surfaces 50 that expand towards opening portion 42 form from the bottom surface.
The bearing matrix 2 that comprises the spheroid pressurized recess 43 with recessed bulb 51 is same with hydrostatic gas-lubricated bearing 1, the opening portion 9 of air vent 10 is communicated with the opening portion 30 of the circular recess 18 of bearing support 3, and make chimeric with the internal surface of the cylinder protuberance 6 of bearing matrix 2 with the outer circumferential face 23 of a side's of bearing support 3 face 17 adjacency after, utilize binder to make this embedding part bonding, thereby make bearing matrix 2 and bearing support 3 integrated, form by this assembly body 52.
utilize laer machnie to the opposing party's of the bearing support 3 in integrated assembly body 52 as mentioned above face 19 irradiation laser, to form annular recess 20 and a plurality of Air blowing hole that has the throttle orifice shape of one's own 25, thereby produce hydrostatic gas-lubricated bearing 1, wherein, the width W of above-mentioned annular recess 20 is 0.3～1.0mm, depth d is 0.01～0.05mm, above-mentioned Air blowing hole 25 26 connects bearing suppories 3 and is opened on the circular bottom surface 24 of circular recess 18 from the ring-type bottom surface in the ring-type bottom surface 26 that forms annular recess 20, its diameter D is at least 30 μ m, be preferably 30～120 μ m.
In the hydrostatic gas-lubricated bearing 1 that forms as mentioned above, as shown in figure 20, the spheroid 49 of ball pin 48 by with the concave spherical surface 50 sliding contacts ground configurations of the spheroid pressurized recess 43 of bearing matrix 2, have by this automatic core-adjusting function.
Figure 21 to Figure 26 represents to have other mode of execution of the hydrostatic gas-lubricated bearing 1 of automatic core-adjusting function.Be formed with the cylindric recess 55 with rounded bottom surface 54 in face 7 upper sheds at the opposing party's of bearing matrix 2 the central part of overlooking rounded face 7, the face 58 that block 64 makes a side is towards the bottom surface 54 of cylindric recess 55 and the face 61 that makes the opposing party and the opposing party's of bearing matrix 2 face 7 is evenly chimeric is fixed in cylindric recess 55, wherein, as shown in figure 23, above-mentioned block 64 comprises: cylindrical body 56; 57 circular holes 59 of face 58 that are opened on a side of cylindrical body 56 at one end; And have and be connected with the other end 60 of circular hole 59 and extend and at the recess 63 of the frusto-conical face 62 of the opposing party's face 61 openings towards the opposing party's of cylindrical body 56 face 61 from the other end 60 with expanding gradually.Spheroid pressurized recess 43 has above-mentioned frusto-conical face 62.
The chimeric bearing matrix that is fixed with block 64 2 is same with above-mentioned hydrostatic gas-lubricated bearing 1, the opening portion 9 of air vent 10 is communicated with the opening portion 30 of the circular recess 18 of bearing support 3, and make chimeric with the internal surface of the cylinder protuberance 6 of bearing matrix 2 with the outer circumferential face 23 of a side's of bearing support 3 face 17 adjacency after, utilize binder to make this embedding part bonding, thereby make bearing matrix 2 and bearing support 3 integrated, form by this assembly body 65.
utilize laer machnie to the opposing party's of the bearing support 3 in integrated assembly body 65 as mentioned above face 19 irradiation laser, to form annular recess 20 and a plurality of Air blowing hole that has the throttle orifice shape of one's own 25, thereby produce hydrostatic gas-lubricated bearing 1, wherein, the width W of above-mentioned annular recess 20 is 0.3～1.0mm, depth d is 0.01～0.05mm, above-mentioned Air blowing hole 25 26 connects bearing suppories 3 and is opened on the circular bottom surface 24 of circular recess 18 from the ring-type bottom surface in the ring-type bottom surface 26 that forms annular recess 20, its diameter D is at least 30 μ m, be preferably 30～120 μ m.
In the hydrostatic gas-lubricated bearing 1 that forms as mentioned above, as shown in figure 26, the spheroid 49 of ball pin 48 by with the chimeric cylindric recess 55 that is fixed in bearing matrix 2 in the frusto-conical face 62 sliding contacts ground configurations of recess 63 of block 64, have by this automatic core-adjusting function.
Figure 27 to Figure 30 represents to have another mode of execution of the hydrostatic gas-lubricated bearing 1 of automatic core-adjusting function.As shown in figure 22, be formed with the cylindric recess 55 with rounded bottom surface 54 in face 7 upper sheds at the opposing party's of bearing matrix 2 the central part of overlooking rounded face 7, the face 58 that block 64 makes a side is towards the bottom surface 54 of cylindric recess 55 and the face 61 that makes the opposing party and the opposing party's of bearing matrix 2 face 7 is evenly chimeric is fixed in cylindric recess 55, wherein, as shown in figure 27, above-mentioned block 64 comprises: cylindrical body 56; 57 circular holes 59 of face 58 that are opened on a side of cylindrical body 56 at one end; And have and be connected with the other end 60 of circular hole 59 and from the other end 60 towards the opposing party's of cylindrical body 56 face 61 and at the recess 63 of the concave spherical surface 66 of the opposing party's face 61 openings.Spheroid pressurized recess 43 has above-mentioned concave spherical surface 66.
The chimeric bearing matrix that is fixed with block 64 2 is same with above-mentioned hydrostatic gas-lubricated bearing 1, the opening portion 9 of air vent 10 is communicated with the opening portion 30 of the circular recess 18 of bearing support 3, and make chimeric with the internal surface of the cylinder protuberance 6 of bearing matrix 2 with the outer circumferential face 23 of a side's of bearing support 3 face 17 adjacency after, utilize binder to make this embedding part bonding, thereby make bearing matrix 2 and bearing support 3 integrated, form by this assembly body 67.
utilize laer machnie to the opposing party's of the bearing support 3 in integrated assembly body 67 as mentioned above face 19 irradiation laser, to form annular recess 20 and a plurality of Air blowing hole that has the throttle orifice shape of one's own 25, thereby produce hydrostatic gas-lubricated bearing 1, wherein, the width W of above-mentioned annular recess 20 is 0.3～1.0mm, depth d is 0.01～0.05mm, above-mentioned Air blowing hole 25 26 connects bearing suppories 3 and is opened on the circular bottom surface 24 of circular recess 18 from the ring-type bottom surface in the ring-type bottom surface 26 that forms annular recess 20, its diameter D is at least 30 μ m, be preferably 30～120 μ m.
In the hydrostatic gas-lubricated bearing 1 that forms as mentioned above, as shown in figure 30, the spheroid 49 of ball pin 48 by with the chimeric cylindric recess 55 that is fixed in bearing matrix 2 in the concave spherical surface 66 sliding contacts ground configurations of recess 63 of block 64, have by this automatic core-adjusting function.
Utilize the sliding properties excellence, but such as polyacetal resin, polyamide resin, polyester resin etc. have the chimeric fixing block 64 of cylindric recess 55 on the thermoplastic synthetic resin of self lubricity or the formation such as copper or Cuprum alloy and the opposing party's who is formed at bearing matrix 2 the central part of overlooking rounded face 7, therefore, frusto-conical face 62 or the concave spherical surface 66 of the recess 63 of block 64 are carried out swimmingly with the sliding contact of the spheroid 49 of ball pin 48.
Figure 31 has represented to use the linear guide device 68 of hydrostatic gas-lubricated bearing shown in Figure 26 1, linear guide device 68 is by guiding elements 71, cross section is the movable table 74 of コ font, ball pin 48, hydrostatic gas-lubricated bearing 1 forms, wherein, above-mentioned guiding elements 71 has upper guide surface 69 and both sides guide surface 70, 70, above-mentioned movable table 74 is across the outside configuration of guiding elements 71, comprise that the upper plate relative with upper guide surface 69 72 reaches and both sides guide surface 70, 70 relative pair of side plates 73, 73, above-mentioned ball pin 48 makes spheroid 49 found lower surface 75 and the side plate 73 of the upper plate 72 of being located at movable table 74 towards medially, 73 separately internal surfaces 76, above-mentioned hydrostatic gas-lubricated bearing 1 is configured in upper guide surface 59 and the both sides guide surface 70 of ball pin 48 and guiding elements 71, between 70, the frusto-conical face 62 that makes block 64 and spheroid 49 sliding contacts of ball pin 48 also make the opposing party's of bearing support 3 upper guide surface 69 and the both sides guide surface 70 of face 19 and guiding elements 71, 70 is relative.
According to this linear guide device 68, because upper guide surface 69 and both sides guide surface 70,70 from the 25 pairs of guiding elements 71 in a plurality of Air blowings hole of bearing support 3 spray pressurized air, the air lubricating film that forms between the opposing party's that therefore, can utilize at bearing support 3 face 19 and the upper guide surface 69 of guiding elements 71 and both sides guide surface 70,70 make movable table 74 with respect on guide surface 69 and both sides guide surface 70,70 keep contactless states.In addition, if the bearing play between bearing support 3 and upper guide surface 69 and both sides guide surface 70,70 is inhomogeneous, can produce pressure difference at the bearing play each several part, but due to this pressure difference, hydrostatic gas-lubricated bearing 1 can be on the uniform direction in bearing play automatic core-adjusting, thereby can keep with respect to upper guide surface 69 and both sides guide surface 70,70 parallel states.Therefore, the element precisions such as the parallelism of guiding elements 71 and movable table 74, squareness can adopt thicker precision, except the cost that can reduce hydrostatic gas-lubricated bearing 1 self, can also easily produce linear guide device 68 and realize cost.
In linear guide device 68, the hydrostatic gas-lubricated bearing 1 with automatic core-adjusting function has used hydrostatic gas-lubricated bearing 1 as shown in figure 26, but also can replace with Figure 16, Figure 20 and hydrostatic gas-lubricated bearing 1 shown in Figure 30.
as mentioned above, bearing support and bearing matrix make chimeric with the internal surface of the cylinder protuberance of the outer circumferential face of a side's of bearing support face adjacency and bearing matrix after, utilize binder that this embedding part is bonding and integrated, therefore, the mating face of bearing support and bearing matrix is sealed securely, be formed with annular recess and a plurality of Air blowing hole that has the throttle orifice shape of one's own on a side's of bearing support face, wherein, the width W of above-mentioned annular recess is 0.3～1.0mm, depth d is 0.01～0.05mm, above-mentioned Air blowing hole connects bearing support in the ring-type bottom surface that forms annular recess from the ring-type bottom surface and is opened on the ring-type bottom surface of circular recess, its diameter D is at least 30 μ m, owing to just not forming this annular recess and Air blowing hole by machining, therefore, cheap hydrostatic gas-lubricated bearing can not only be provided, can also provide used this hydrostatic gas-lubricated bearing making easily and realized the linear guide device of cost.
Claims (10)
1. a hydrostatic gas-lubricated bearing, is characterized in that, comprising:
The bearing matrix, this bearing matrix has base portion, cylinder protuberance and air feed path, described cylinder protuberance is based in a side's of described base portion the outer periphery of face, and described air feed path at one end is opened on a side the face of base portion, is opened at the other end on the outer circumferential face of base portion; And
Plastic bearing support, this bearing support has circular recess, annular recess and a plurality of Air blowings holes, described circular recess is formed on a side the face of the bearing support relative with a side's of base portion face, described annular recess is in the opposing party's of bearing support face upper shed, described a plurality of Air blowing hole shape becomes and has throttle orifice of one's own, it at one end is communicated with annular recess, is opened on the circular bottom surface of circular recess at the other end
Described bearing support makes with the internal surface of the cylinder protuberance of the outer circumferential face of a side face adjacency and base portion chimeric, thereby and carry out bonding integrated with the bearing matrix at this embedding part, annular recess has the width of 0.3mm at least, the degree of depth of 0.01mm at least, the Air blowing hole has the diameter of at least 30 μ m at the one end, form between circular recess and annular recess and have throttle orifice of one's own.
2. hydrostatic gas-lubricated bearing as claimed in claim 1, is characterized in that,
Annular recess has the degree of depth of width, 0.01～0.05mm or the 0.01～0.03mm of 0.3～1.0mm or 0.3～0.7mm, and described Air blowing hole has the diameter of 30～120 μ m at the one end.
3. hydrostatic gas-lubricated bearing as claimed in claim 1 or 2, is characterized in that,
Annular recess and Air blowing hole form by laser beam machining respectively.
4. hydrostatic gas-lubricated bearing as described in any one in claims 1 to 3, is characterized in that,
Be formed with spheroid pressurized recess on the opposing party's of bearing matrix face.
5. hydrostatic gas-lubricated bearing as claimed in claim 4, is characterized in that,
Spheroid pressurized recess has the frustum of a cone recess in the opposing party's of bearing matrix face upper shed.
6. hydrostatic gas-lubricated bearing as claimed in claim 4, is characterized in that,
Spheroid pressurized recess has the recessed bulb in the opposing party's of bearing matrix face upper shed.
7. hydrostatic gas-lubricated bearing as claimed in claim 4, is characterized in that,
Be formed with the cylindric recess in this opposing party's face upper shed on the opposing party's of bearing matrix face, the chimeric block that is fixed with in this cylindric recess, spheroid pressurized recess has frusto-conical face, and this frusto-conical face is in a side's of the described block of the opposing party's who is in the bearing matrix face one side face upper shed and be formed at this block.
8. hydrostatic gas-lubricated bearing as claimed in claim 4, is characterized in that,
Be formed with the cylindric recess in this opposing party's face upper shed on the opposing party's of bearing matrix face, the chimeric block that is fixed with in this cylindric recess, spheroid pressurized recess has concave spherical surface, and this concave spherical surface is in a side's of the described block of the opposing party's who is in the bearing matrix face one side face upper shed and be formed at this block.
9. hydrostatic gas-lubricated bearing as described in any one in claim 1 to 8, is characterized in that,
Bearing support also comprises except annular recess:
Large footpath annular recess, this large footpath annular recess are formed on the opposing party's the face of bearing support, and surround this annular recess in the outside of annular recess;
A plurality of the first radial groove, a side's of these the first radial groove is open-ended in described annular recess, and the opposing party's is open-ended in described large footpath annular recess;
The path annular recess, this path annular recess is formed at the inboard of described annular recess; And
A plurality of the second radial groove, a side's of these the second radial groove is open-ended in annular recess, and the opposing party's is open-ended in the path annular recess.
10. a linear guide device, is characterized in that,
the outside of the guiding elements of guide surface and both sides guide surface disposes the movable table that cross section is the コ font on having, this movable table has the upper plate relative with upper guide surface and the pair of side plates relative with the both sides guide surface, each ball pin makes spheroid found lower surface and the side plate internal surface separately of the upper plate of being located at this movable table towards medially, between the upper guide surface and both sides guide surface of this ball pin and guiding elements, dispose the described hydrostatic gas-lubricated bearing of any one in claim 1 to 9, this hydrostatic gas-lubricated bearing makes the spheroid sliding contact of spheroid pressurized recess and described ball pin, and make bearing support relative with upper guide surface and the both sides guide surface of guiding elements.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011253340A JP5929117B2 (en) | 2011-11-18 | 2011-11-18 | Static pressure gas bearing and linear motion guide device using the static pressure gas bearing |
| JP2011-253340 | 2011-11-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103122932A true CN103122932A (en) | 2013-05-29 |
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Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012104257487A Pending CN103122932A (en) | 2011-11-18 | 2012-10-30 | Hydrostatic gas bearing and linear motion guide device using thereof |
| CN201280047766.4A Pending CN103842672A (en) | 2011-11-18 | 2012-11-13 | Aerostatic bearing and linear motion guiding device using said aerostatic bearing |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280047766.4A Pending CN103842672A (en) | 2011-11-18 | 2012-11-13 | Aerostatic bearing and linear motion guiding device using said aerostatic bearing |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5929117B2 (en) |
| KR (1) | KR20130055517A (en) |
| CN (2) | CN103122932A (en) |
| TW (1) | TWI491815B (en) |
| WO (1) | WO2013073166A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105683600A (en) * | 2013-08-28 | 2016-06-15 | 盖迪科斯***公司 | Single axis rotational gas bearing with feed-through |
| CN109185339A (en) * | 2018-09-06 | 2019-01-11 | 西安交通大学 | A kind of distribution more piece basin gas static pressure thrust bearing |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10161448B2 (en) | 2015-06-23 | 2018-12-25 | Roller Bearing Company Of America, Inc. | Railway truck having a self-lubricating composite bearing pad disposed therein |
| WO2021101211A1 (en) | 2019-11-18 | 2021-05-27 | 한양대학교 에리카산학협력단 | Hybrid fluid bearing |
| KR102463091B1 (en) * | 2019-11-18 | 2022-11-03 | 한양대학교 에리카산학협력단 | Hybrid Fluid Film Bearing |
| WO2021194782A1 (en) * | 2020-03-27 | 2021-09-30 | Corning Incorporated | Positioning devices for radially positioning substrates with respect to an air bearing device |
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| JPS5419283B2 (en) * | 1974-05-18 | 1979-07-13 | ||
| IT1083098B (en) * | 1977-07-11 | 1985-05-21 | Dea Spa | TOOL MACHINE OR MEASURING MACHINE WITH PNEUMATIC AND MAGNETIC SLIDING |
| JPS61127927U (en) * | 1985-01-29 | 1986-08-11 | ||
| JPH068650B2 (en) * | 1987-03-19 | 1994-02-02 | キヤノン株式会社 | Hydrostatic bearing pad |
| JPH0647135Y2 (en) * | 1988-10-18 | 1994-11-30 | エヌティエヌ株式会社 | Air slide device |
| JPH0510330A (en) * | 1991-06-29 | 1993-01-19 | Canon Inc | Static pressure bearing device |
| JP3609455B2 (en) * | 1994-08-12 | 2005-01-12 | Ｎｔｎ株式会社 | Static pressure gas bearing |
| JP3860253B2 (en) * | 1996-04-30 | 2006-12-20 | 黒田精工株式会社 | Static pressure gas bearing |
| GB0416495D0 (en) * | 2004-07-23 | 2004-08-25 | Westwind Air Bearings Ltd | Air bearing spindles |
| JP2008082449A (en) * | 2006-08-31 | 2008-04-10 | Oiles Ind Co Ltd | Static pressure gas bearing |
| JP5089534B2 (en) * | 2008-09-02 | 2012-12-05 | Ｃｋｄ株式会社 | Levitation unit and non-contact support device having the same |
| JP2010096311A (en) * | 2008-10-17 | 2010-04-30 | Ntn Corp | Hydrostatic bearing pad, linear guide apparatus, and rotation guide apparatus |
| JP2010106927A (en) * | 2008-10-29 | 2010-05-13 | Ntn Corp | Hydrostatic bearing unit |
-
2011
- 2011-11-18 JP JP2011253340A patent/JP5929117B2/en active Active
-
2012
- 2012-10-29 KR KR1020120120450A patent/KR20130055517A/en not_active Application Discontinuation
- 2012-10-29 TW TW101139982A patent/TWI491815B/en not_active IP Right Cessation
- 2012-10-30 CN CN2012104257487A patent/CN103122932A/en active Pending
- 2012-11-13 WO PCT/JP2012/007269 patent/WO2013073166A1/en active Application Filing
- 2012-11-13 CN CN201280047766.4A patent/CN103842672A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105683600A (en) * | 2013-08-28 | 2016-06-15 | 盖迪科斯***公司 | Single axis rotational gas bearing with feed-through |
| CN105683600B (en) * | 2013-08-28 | 2017-11-03 | 盖迪科斯***公司 | Single-shaft-rotation gas bearing with through hole |
| CN109185339A (en) * | 2018-09-06 | 2019-01-11 | 西安交通大学 | A kind of distribution more piece basin gas static pressure thrust bearing |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2013073166A1 (en) | 2013-05-23 |
| TWI491815B (en) | 2015-07-11 |
| CN103842672A (en) | 2014-06-04 |
| TW201326596A (en) | 2013-07-01 |
| KR20130055517A (en) | 2013-05-28 |
| JP2013108557A (en) | 2013-06-06 |
| JP5929117B2 (en) | 2016-06-01 |
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Application publication date: 20130529 |