JP5423937B2 - 絶縁膜形成用組成物の製造方法、ポリマーの製造方法 - Google Patents
絶縁膜形成用組成物の製造方法、ポリマーの製造方法 Download PDFInfo
- Publication number
- JP5423937B2 JP5423937B2 JP2006080991A JP2006080991A JP5423937B2 JP 5423937 B2 JP5423937 B2 JP 5423937B2 JP 2006080991 A JP2006080991 A JP 2006080991A JP 2006080991 A JP2006080991 A JP 2006080991A JP 5423937 B2 JP5423937 B2 JP 5423937B2
- Authority
- JP
- Japan
- Prior art keywords
- group
- polymer
- acyloxy
- halogen atom
- groups
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 229920000642 polymer Polymers 0.000 title claims description 79
- 238000004519 manufacturing process Methods 0.000 title claims description 49
- 239000000203 mixture Substances 0.000 title claims description 46
- -1 silane compound Chemical class 0.000 claims description 45
- 125000005843 halogen group Chemical group 0.000 claims description 37
- 238000000034 method Methods 0.000 claims description 37
- 125000000217 alkyl group Chemical group 0.000 claims description 36
- 125000003545 alkoxy group Chemical group 0.000 claims description 34
- 125000004423 acyloxy group Chemical group 0.000 claims description 31
- 125000003118 aryl group Chemical group 0.000 claims description 31
- 125000004432 carbon atom Chemical group C* 0.000 claims description 30
- 239000000178 monomer Substances 0.000 claims description 28
- 229910000077 silane Inorganic materials 0.000 claims description 28
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 24
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 22
- 239000003054 catalyst Substances 0.000 claims description 21
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 18
- 125000003342 alkenyl group Chemical group 0.000 claims description 17
- 125000000304 alkynyl group Chemical group 0.000 claims description 16
- 230000015572 biosynthetic process Effects 0.000 claims description 15
- 239000003960 organic solvent Substances 0.000 claims description 15
- 125000001174 sulfone group Chemical group 0.000 claims description 15
- 229920003257 polycarbosilane Polymers 0.000 claims description 14
- 229910052731 fluorine Inorganic materials 0.000 claims description 13
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 claims description 12
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 claims description 12
- 229910052799 carbon Inorganic materials 0.000 claims description 11
- 125000001153 fluoro group Chemical group F* 0.000 claims description 11
- 125000004450 alkenylene group Chemical group 0.000 claims description 10
- 125000002947 alkylene group Chemical group 0.000 claims description 10
- 125000004419 alkynylene group Chemical group 0.000 claims description 10
- 125000000732 arylene group Chemical group 0.000 claims description 10
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Natural products C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 10
- 125000001570 methylene group Chemical group [H]C([H])([*:1])[*:2] 0.000 claims description 7
- 230000008569 process Effects 0.000 claims description 6
- 150000001923 cyclic compounds Chemical class 0.000 claims description 4
- XPDWGBQVDMORPB-UHFFFAOYSA-N trifluoromethane acid Natural products FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 claims description 4
- 125000003710 aryl alkyl group Chemical group 0.000 claims description 3
- 125000002768 hydroxyalkyl group Chemical group 0.000 claims description 3
- 230000000379 polymerizing effect Effects 0.000 claims 2
- 239000010408 film Substances 0.000 description 107
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 73
- 239000000243 solution Substances 0.000 description 48
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 42
- 239000000377 silicon dioxide Substances 0.000 description 33
- 239000000126 substance Substances 0.000 description 24
- 239000002904 solvent Substances 0.000 description 22
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 21
- 238000006243 chemical reaction Methods 0.000 description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 17
- 238000000576 coating method Methods 0.000 description 16
- 229910052757 nitrogen Inorganic materials 0.000 description 16
- 239000011248 coating agent Substances 0.000 description 14
- 230000000052 comparative effect Effects 0.000 description 14
- 238000005530 etching Methods 0.000 description 14
- 150000001875 compounds Chemical class 0.000 description 13
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 12
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 12
- 239000004094 surface-active agent Substances 0.000 description 12
- 239000004065 semiconductor Substances 0.000 description 11
- JOLQKTGDSGKSKJ-UHFFFAOYSA-N 1-ethoxypropan-2-ol Chemical compound CCOCC(C)O JOLQKTGDSGKSKJ-UHFFFAOYSA-N 0.000 description 10
- LDMRLRNXHLPZJN-UHFFFAOYSA-N 3-propoxypropan-1-ol Chemical compound CCCOCCCO LDMRLRNXHLPZJN-UHFFFAOYSA-N 0.000 description 10
- LPSKDVINWQNWFE-UHFFFAOYSA-M tetrapropylazanium;hydroxide Chemical compound [OH-].CCC[N+](CCC)(CCC)CCC LPSKDVINWQNWFE-UHFFFAOYSA-M 0.000 description 9
- 239000007864 aqueous solution Substances 0.000 description 8
- 238000003786 synthesis reaction Methods 0.000 description 8
- 229940125904 compound 1 Drugs 0.000 description 7
- 239000011229 interlayer Substances 0.000 description 7
- 229920000620 organic polymer Polymers 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- LFQCEHFDDXELDD-UHFFFAOYSA-N tetramethyl orthosilicate Chemical compound CO[Si](OC)(OC)OC LFQCEHFDDXELDD-UHFFFAOYSA-N 0.000 description 7
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 6
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 6
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 6
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 6
- 239000005456 alcohol based solvent Substances 0.000 description 6
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 6
- 239000003759 ester based solvent Substances 0.000 description 6
- 238000001704 evaporation Methods 0.000 description 6
- 230000008020 evaporation Effects 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- BFXIKLCIZHOAAZ-UHFFFAOYSA-N methyltrimethoxysilane Chemical compound CO[Si](C)(OC)OC BFXIKLCIZHOAAZ-UHFFFAOYSA-N 0.000 description 6
- 239000011259 mixed solution Substances 0.000 description 6
- 229920001296 polysiloxane Polymers 0.000 description 6
- 239000010453 quartz Substances 0.000 description 6
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 6
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 5
- BLFRQYKZFKYQLO-UHFFFAOYSA-N 4-aminobutan-1-ol Chemical compound NCCCCO BLFRQYKZFKYQLO-UHFFFAOYSA-N 0.000 description 5
- WUGQZFFCHPXWKQ-UHFFFAOYSA-N Propanolamine Chemical compound NCCCO WUGQZFFCHPXWKQ-UHFFFAOYSA-N 0.000 description 5
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 5
- 239000012298 atmosphere Substances 0.000 description 5
- 238000009835 boiling Methods 0.000 description 5
- 238000009833 condensation Methods 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 239000005453 ketone based solvent Substances 0.000 description 5
- XMYQHJDBLRZMLW-UHFFFAOYSA-N methanolamine Chemical compound NCO XMYQHJDBLRZMLW-UHFFFAOYSA-N 0.000 description 5
- 229940087646 methanolamine Drugs 0.000 description 5
- 239000003002 pH adjusting agent Substances 0.000 description 5
- FYGHSUNMUKGBRK-UHFFFAOYSA-N 1,2,3-trimethylbenzene Chemical compound CC1=CC=CC(C)=C1C FYGHSUNMUKGBRK-UHFFFAOYSA-N 0.000 description 4
- QQZOPKMRPOGIEB-UHFFFAOYSA-N 2-Oxohexane Chemical compound CCCCC(C)=O QQZOPKMRPOGIEB-UHFFFAOYSA-N 0.000 description 4
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Chemical compound CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 4
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 4
- 150000001408 amides Chemical class 0.000 description 4
- 239000012295 chemical reaction liquid Substances 0.000 description 4
- 229940125782 compound 2 Drugs 0.000 description 4
- 229940126214 compound 3 Drugs 0.000 description 4
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Chemical compound CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 4
- 239000004210 ether based solvent Substances 0.000 description 4
- 235000019000 fluorine Nutrition 0.000 description 4
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 4
- TVMXDCGIABBOFY-UHFFFAOYSA-N n-Octanol Natural products CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 4
- 239000011148 porous material Substances 0.000 description 4
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 4
- 125000005372 silanol group Chemical group 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- VDZOOKBUILJEDG-UHFFFAOYSA-M tetrabutylammonium hydroxide Chemical compound [OH-].CCCC[N+](CCCC)(CCCC)CCCC VDZOOKBUILJEDG-UHFFFAOYSA-M 0.000 description 4
- QWOZZTWBWQMEPD-UHFFFAOYSA-N 1-(2-ethoxypropoxy)propan-2-ol Chemical compound CCOC(C)COCC(C)O QWOZZTWBWQMEPD-UHFFFAOYSA-N 0.000 description 3
- RWNUSVWFHDHRCJ-UHFFFAOYSA-N 1-butoxypropan-2-ol Chemical compound CCCCOCC(C)O RWNUSVWFHDHRCJ-UHFFFAOYSA-N 0.000 description 3
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 description 3
- DMFAHCVITRDZQB-UHFFFAOYSA-N 1-propoxypropan-2-yl acetate Chemical compound CCCOCC(C)OC(C)=O DMFAHCVITRDZQB-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 3
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- WWZKQHOCKIZLMA-UHFFFAOYSA-N Caprylic acid Natural products CCCCCCCC(O)=O WWZKQHOCKIZLMA-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 3
- RWRDLPDLKQPQOW-UHFFFAOYSA-N Pyrrolidine Chemical compound C1CCNC1 RWRDLPDLKQPQOW-UHFFFAOYSA-N 0.000 description 3
- 239000006087 Silane Coupling Agent Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- DTQVDTLACAAQTR-UHFFFAOYSA-N Trifluoroacetic acid Chemical group OC(=O)C(F)(F)F DTQVDTLACAAQTR-UHFFFAOYSA-N 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 3
- 125000004202 aminomethyl group Chemical group [H]N([H])C([H])([H])* 0.000 description 3
- 229910021529 ammonia Inorganic materials 0.000 description 3
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical group [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 238000005227 gel permeation chromatography Methods 0.000 description 3
- 229910052736 halogen Inorganic materials 0.000 description 3
- 150000002367 halogens Chemical class 0.000 description 3
- 238000007654 immersion Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 239000012299 nitrogen atmosphere Substances 0.000 description 3
- 150000007524 organic acids Chemical class 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- PGMYKACGEOXYJE-UHFFFAOYSA-N pentyl acetate Chemical compound CCCCCOC(C)=O PGMYKACGEOXYJE-UHFFFAOYSA-N 0.000 description 3
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 3
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 description 3
- 229920006254 polymer film Polymers 0.000 description 3
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 description 3
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 3
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 3
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 3
- PUPZLCDOIYMWBV-UHFFFAOYSA-N (+/-)-1,3-Butanediol Chemical compound CC(O)CCO PUPZLCDOIYMWBV-UHFFFAOYSA-N 0.000 description 2
- VPBZZPOGZPKYKX-UHFFFAOYSA-N 1,2-diethoxypropane Chemical compound CCOCC(C)OCC VPBZZPOGZPKYKX-UHFFFAOYSA-N 0.000 description 2
- KVNYFPKFSJIPBJ-UHFFFAOYSA-N 1,2-diethylbenzene Chemical compound CCC1=CC=CC=C1CC KVNYFPKFSJIPBJ-UHFFFAOYSA-N 0.000 description 2
- LEEANUDEDHYDTG-UHFFFAOYSA-N 1,2-dimethoxypropane Chemical compound COCC(C)OC LEEANUDEDHYDTG-UHFFFAOYSA-N 0.000 description 2
- PVMMVWNXKOSPRB-UHFFFAOYSA-N 1,2-dipropoxypropane Chemical compound CCCOCC(C)OCCC PVMMVWNXKOSPRB-UHFFFAOYSA-N 0.000 description 2
- GDXHBFHOEYVPED-UHFFFAOYSA-N 1-(2-butoxyethoxy)butane Chemical compound CCCCOCCOCCCC GDXHBFHOEYVPED-UHFFFAOYSA-N 0.000 description 2
- FUWDFGKRNIDKAE-UHFFFAOYSA-N 1-butoxypropan-2-yl acetate Chemical compound CCCCOCC(C)OC(C)=O FUWDFGKRNIDKAE-UHFFFAOYSA-N 0.000 description 2
- OJVAMHKKJGICOG-UHFFFAOYSA-N 2,5-hexanedione Chemical compound CC(=O)CCC(C)=O OJVAMHKKJGICOG-UHFFFAOYSA-N 0.000 description 2
- CKCGJBFTCUCBAJ-UHFFFAOYSA-N 2-(2-ethoxypropoxy)propyl acetate Chemical compound CCOC(C)COC(C)COC(C)=O CKCGJBFTCUCBAJ-UHFFFAOYSA-N 0.000 description 2
- ZKCAGDPACLOVBN-UHFFFAOYSA-N 2-(2-ethylbutoxy)ethanol Chemical compound CCC(CC)COCCO ZKCAGDPACLOVBN-UHFFFAOYSA-N 0.000 description 2
- GZMAAYIALGURDQ-UHFFFAOYSA-N 2-(2-hexoxyethoxy)ethanol Chemical compound CCCCCCOCCOCCO GZMAAYIALGURDQ-UHFFFAOYSA-N 0.000 description 2
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 2
- DRLRGHZJOQGQEC-UHFFFAOYSA-N 2-(2-methoxypropoxy)propyl acetate Chemical compound COC(C)COC(C)COC(C)=O DRLRGHZJOQGQEC-UHFFFAOYSA-N 0.000 description 2
- XYVAYAJYLWYJJN-UHFFFAOYSA-N 2-(2-propoxypropoxy)propan-1-ol Chemical compound CCCOC(C)COC(C)CO XYVAYAJYLWYJJN-UHFFFAOYSA-N 0.000 description 2
- NOMOPRKYOOSZKV-UHFFFAOYSA-N 2-(diethoxymethylsilyl)ethyl-triethoxysilane Chemical compound CCOC(OCC)[SiH2]CC[Si](OCC)(OCC)OCC NOMOPRKYOOSZKV-UHFFFAOYSA-N 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- AFABGHUZZDYHJO-UHFFFAOYSA-N 2-Methylpentane Chemical compound CCCC(C)C AFABGHUZZDYHJO-UHFFFAOYSA-N 0.000 description 2
- 125000000022 2-aminoethyl group Chemical group [H]C([*])([H])C([H])([H])N([H])[H] 0.000 description 2
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 2
- YIWUKEYIRIRTPP-UHFFFAOYSA-N 2-ethylhexan-1-ol Chemical compound CCCCC(CC)CO YIWUKEYIRIRTPP-UHFFFAOYSA-N 0.000 description 2
- UPGSWASWQBLSKZ-UHFFFAOYSA-N 2-hexoxyethanol Chemical compound CCCCCCOCCO UPGSWASWQBLSKZ-UHFFFAOYSA-N 0.000 description 2
- QPRQEDXDYOZYLA-UHFFFAOYSA-N 2-methylbutan-1-ol Chemical compound CCC(C)CO QPRQEDXDYOZYLA-UHFFFAOYSA-N 0.000 description 2
- QCDWFXQBSFUVSP-UHFFFAOYSA-N 2-phenoxyethanol Chemical compound OCCOC1=CC=CC=C1 QCDWFXQBSFUVSP-UHFFFAOYSA-N 0.000 description 2
- QCAHUFWKIQLBNB-UHFFFAOYSA-N 3-(3-methoxypropoxy)propan-1-ol Chemical compound COCCCOCCCO QCAHUFWKIQLBNB-UHFFFAOYSA-N 0.000 description 2
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 2
- ALYNCZNDIQEVRV-UHFFFAOYSA-N 4-aminobenzoic acid Chemical compound NC1=CC=C(C(O)=O)C=C1 ALYNCZNDIQEVRV-UHFFFAOYSA-N 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical group [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 2
- DLFVBJFMPXGRIB-UHFFFAOYSA-N Acetamide Chemical compound CC(N)=O DLFVBJFMPXGRIB-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical group [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 2
- ATYUKIGQFAGPOB-UHFFFAOYSA-N CCOC(OCC)[SiH2]C[Si](OCC)(OCC)OCC Chemical compound CCOC(OCC)[SiH2]C[Si](OCC)(OCC)OCC ATYUKIGQFAGPOB-UHFFFAOYSA-N 0.000 description 2
- YSSSBLWXPKRDTH-UHFFFAOYSA-N COC(OC)[SiH2]CC[Si](OC)(OC)OC Chemical compound COC(OC)[SiH2]CC[Si](OC)(OC)OC YSSSBLWXPKRDTH-UHFFFAOYSA-N 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 2
- NIQCNGHVCWTJSM-UHFFFAOYSA-N Dimethyl phthalate Chemical compound COC(=O)C1=CC=CC=C1C(=O)OC NIQCNGHVCWTJSM-UHFFFAOYSA-N 0.000 description 2
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
- YNQLUTRBYVCPMQ-UHFFFAOYSA-N Ethylbenzene Chemical compound CCC1=CC=CC=C1 YNQLUTRBYVCPMQ-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 2
- YNAVUWVOSKDBBP-UHFFFAOYSA-N Morpholine Chemical compound C1COCCN1 YNAVUWVOSKDBBP-UHFFFAOYSA-N 0.000 description 2
- OKIZCWYLBDKLSU-UHFFFAOYSA-M N,N,N-Trimethylmethanaminium chloride Chemical compound [Cl-].C[N+](C)(C)C OKIZCWYLBDKLSU-UHFFFAOYSA-M 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- AMQJEAYHLZJPGS-UHFFFAOYSA-N N-Pentanol Chemical compound CCCCCO AMQJEAYHLZJPGS-UHFFFAOYSA-N 0.000 description 2
- ATHHXGZTWNVVOU-UHFFFAOYSA-N N-methylformamide Chemical compound CNC=O ATHHXGZTWNVVOU-UHFFFAOYSA-N 0.000 description 2
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- GLUUGHFHXGJENI-UHFFFAOYSA-N Piperazine Chemical compound C1CNCCN1 GLUUGHFHXGJENI-UHFFFAOYSA-N 0.000 description 2
- NQRYJNQNLNOLGT-UHFFFAOYSA-N Piperidine Chemical compound C1CCNCC1 NQRYJNQNLNOLGT-UHFFFAOYSA-N 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- DKGAVHZHDRPRBM-UHFFFAOYSA-N Tert-Butanol Chemical compound CC(C)(C)O DKGAVHZHDRPRBM-UHFFFAOYSA-N 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- VPLIEAVLKBXZCM-UHFFFAOYSA-N [diethoxy(methyl)silyl]-diethoxy-methylsilane Chemical compound CCO[Si](C)(OCC)[Si](C)(OCC)OCC VPLIEAVLKBXZCM-UHFFFAOYSA-N 0.000 description 2
- BOXVSHDJQLZMFJ-UHFFFAOYSA-N [dimethoxy(methyl)silyl]-dimethoxy-methylsilane Chemical compound CO[Si](C)(OC)[Si](C)(OC)OC BOXVSHDJQLZMFJ-UHFFFAOYSA-N 0.000 description 2
- ZEJSBRIMTYSOIH-UHFFFAOYSA-N [dimethoxy(phenyl)silyl]-dimethoxy-phenylsilane Chemical compound C=1C=CC=CC=1[Si](OC)(OC)[Si](OC)(OC)C1=CC=CC=C1 ZEJSBRIMTYSOIH-UHFFFAOYSA-N 0.000 description 2
- 229940022663 acetate Drugs 0.000 description 2
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 description 2
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 2
- OBETXYAYXDNJHR-UHFFFAOYSA-N alpha-ethylcaproic acid Natural products CCCCC(CC)C(O)=O OBETXYAYXDNJHR-UHFFFAOYSA-N 0.000 description 2
- RDOXTESZEPMUJZ-UHFFFAOYSA-N anisole Chemical compound COC1=CC=CC=C1 RDOXTESZEPMUJZ-UHFFFAOYSA-N 0.000 description 2
- YZXBAPSDXZZRGB-DOFZRALJSA-N arachidonic acid Chemical compound CCCCC\C=C/C\C=C/C\C=C/C\C=C/CCCC(O)=O YZXBAPSDXZZRGB-DOFZRALJSA-N 0.000 description 2
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 2
- QUKGYYKBILRGFE-UHFFFAOYSA-N benzyl acetate Chemical compound CC(=O)OCC1=CC=CC=C1 QUKGYYKBILRGFE-UHFFFAOYSA-N 0.000 description 2
- BTANRVKWQNVYAZ-UHFFFAOYSA-N butan-2-ol Chemical compound CCC(C)O BTANRVKWQNVYAZ-UHFFFAOYSA-N 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N butyl acetate Chemical compound CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 2
- KBPLFHHGFOOTCA-UHFFFAOYSA-N caprylic alcohol Natural products CCCCCCCCO KBPLFHHGFOOTCA-UHFFFAOYSA-N 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 125000001309 chloro group Chemical group Cl* 0.000 description 2
- MVPPADPHJFYWMZ-UHFFFAOYSA-N chlorobenzene Chemical compound ClC1=CC=CC=C1 MVPPADPHJFYWMZ-UHFFFAOYSA-N 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000006482 condensation reaction Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- RWGFKTVRMDUZSP-UHFFFAOYSA-N cumene Chemical compound CC(C)C1=CC=CC=C1 RWGFKTVRMDUZSP-UHFFFAOYSA-N 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- BGTOWKSIORTVQH-UHFFFAOYSA-N cyclopentanone Chemical compound O=C1CCCC1 BGTOWKSIORTVQH-UHFFFAOYSA-N 0.000 description 2
- MWKFXSUHUHTGQN-UHFFFAOYSA-N decan-1-ol Chemical compound CCCCCCCCCCO MWKFXSUHUHTGQN-UHFFFAOYSA-N 0.000 description 2
- JXTHNDFMNIQAHM-UHFFFAOYSA-N dichloroacetic acid Chemical compound OC(=O)C(Cl)Cl JXTHNDFMNIQAHM-UHFFFAOYSA-N 0.000 description 2
- ZMAPKOCENOWQRE-UHFFFAOYSA-N diethoxy(diethyl)silane Chemical compound CCO[Si](CC)(CC)OCC ZMAPKOCENOWQRE-UHFFFAOYSA-N 0.000 description 2
- ZZNQQQWFKKTOSD-UHFFFAOYSA-N diethoxy(diphenyl)silane Chemical compound C=1C=CC=CC=1[Si](OCC)(OCC)C1=CC=CC=C1 ZZNQQQWFKKTOSD-UHFFFAOYSA-N 0.000 description 2
- NYROPPYCYUGLLK-UHFFFAOYSA-N diethoxymethyl(diethoxymethylsilylmethyl)silane Chemical compound CCOC(OCC)[SiH2]C[SiH2]C(OCC)OCC NYROPPYCYUGLLK-UHFFFAOYSA-N 0.000 description 2
- FLKPEMZONWLCSK-UHFFFAOYSA-N diethyl phthalate Chemical compound CCOC(=O)C1=CC=CC=C1C(=O)OCC FLKPEMZONWLCSK-UHFFFAOYSA-N 0.000 description 2
- VSYLGGHSEIWGJV-UHFFFAOYSA-N diethyl(dimethoxy)silane Chemical compound CC[Si](CC)(OC)OC VSYLGGHSEIWGJV-UHFFFAOYSA-N 0.000 description 2
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 2
- 229940075557 diethylene glycol monoethyl ether Drugs 0.000 description 2
- JJQZDUKDJDQPMQ-UHFFFAOYSA-N dimethoxy(dimethyl)silane Chemical compound CO[Si](C)(C)OC JJQZDUKDJDQPMQ-UHFFFAOYSA-N 0.000 description 2
- AHUXYBVKTIBBJW-UHFFFAOYSA-N dimethoxy(diphenyl)silane Chemical compound C=1C=CC=CC=1[Si](OC)(OC)C1=CC=CC=C1 AHUXYBVKTIBBJW-UHFFFAOYSA-N 0.000 description 2
- ZPILIIPBPKDNTR-UHFFFAOYSA-N dimethoxymethyl(dimethoxymethylsilylmethyl)silane Chemical compound COC(OC)[SiH2]C[SiH2]C(OC)OC ZPILIIPBPKDNTR-UHFFFAOYSA-N 0.000 description 2
- CNMKFNVCPOVSIU-UHFFFAOYSA-N dimethoxymethyl-[2-(dimethoxymethylsilyl)ethyl]silane Chemical compound COC(OC)[SiH2]CC[SiH2]C(OC)OC CNMKFNVCPOVSIU-UHFFFAOYSA-N 0.000 description 2
- YYLGKUPAFFKGRQ-UHFFFAOYSA-N dimethyldiethoxysilane Chemical compound CCO[Si](C)(C)OCC YYLGKUPAFFKGRQ-UHFFFAOYSA-N 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 2
- USIUVYZYUHIAEV-UHFFFAOYSA-N diphenyl ether Chemical compound C=1C=CC=CC=1OC1=CC=CC=C1 USIUVYZYUHIAEV-UHFFFAOYSA-N 0.000 description 2
- SZXQTJUDPRGNJN-UHFFFAOYSA-N dipropylene glycol Chemical compound OCCCOCCCO SZXQTJUDPRGNJN-UHFFFAOYSA-N 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- FKRCODPIKNYEAC-UHFFFAOYSA-N ethyl propionate Chemical compound CCOC(=O)CC FKRCODPIKNYEAC-UHFFFAOYSA-N 0.000 description 2
- SBRXLTRZCJVAPH-UHFFFAOYSA-N ethyl(trimethoxy)silane Chemical compound CC[Si](OC)(OC)OC SBRXLTRZCJVAPH-UHFFFAOYSA-N 0.000 description 2
- 239000001530 fumaric acid Substances 0.000 description 2
- LNTHITQWFMADLM-UHFFFAOYSA-N gallic acid Chemical compound OC(=O)C1=CC(O)=C(O)C(O)=C1 LNTHITQWFMADLM-UHFFFAOYSA-N 0.000 description 2
- GAEKPEKOJKCEMS-UHFFFAOYSA-N gamma-valerolactone Chemical compound CC1CCC(=O)O1 GAEKPEKOJKCEMS-UHFFFAOYSA-N 0.000 description 2
- KWIUHFFTVRNATP-UHFFFAOYSA-N glycine betaine Chemical compound C[N+](C)(C)CC([O-])=O KWIUHFFTVRNATP-UHFFFAOYSA-N 0.000 description 2
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 2
- NGAZZOYFWWSOGK-UHFFFAOYSA-N heptan-3-one Chemical compound CCCCC(=O)CC NGAZZOYFWWSOGK-UHFFFAOYSA-N 0.000 description 2
- ZSIAUFGUXNUGDI-UHFFFAOYSA-N hexan-1-ol Chemical compound CCCCCCO ZSIAUFGUXNUGDI-UHFFFAOYSA-N 0.000 description 2
- SHFJWMWCIHQNCP-UHFFFAOYSA-M hydron;tetrabutylazanium;sulfate Chemical compound OS([O-])(=O)=O.CCCC[N+](CCCC)(CCCC)CCCC SHFJWMWCIHQNCP-UHFFFAOYSA-M 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 229910052740 iodine Inorganic materials 0.000 description 2
- GJRQTCIYDGXPES-UHFFFAOYSA-N isobutyl acetate Chemical compound CC(C)COC(C)=O GJRQTCIYDGXPES-UHFFFAOYSA-N 0.000 description 2
- JMMWKPVZQRWMSS-UHFFFAOYSA-N isopropyl acetate Chemical compound CC(C)OC(C)=O JMMWKPVZQRWMSS-UHFFFAOYSA-N 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- CWGBHCIGKSXFED-UHFFFAOYSA-N methoxy-[methoxy(dimethyl)silyl]-dimethylsilane Chemical compound CO[Si](C)(C)[Si](C)(C)OC CWGBHCIGKSXFED-UHFFFAOYSA-N 0.000 description 2
- CEXMDIMEZILRLH-UHFFFAOYSA-N methoxy-[methoxy(diphenyl)silyl]-diphenylsilane Chemical compound C=1C=CC=CC=1[Si]([Si](OC)(C=1C=CC=CC=1)C=1C=CC=CC=1)(OC)C1=CC=CC=C1 CEXMDIMEZILRLH-UHFFFAOYSA-N 0.000 description 2
- ARYZCSRUUPFYMY-UHFFFAOYSA-N methoxysilane Chemical compound CO[SiH3] ARYZCSRUUPFYMY-UHFFFAOYSA-N 0.000 description 2
- RJMRIDVWCWSWFR-UHFFFAOYSA-N methyl(tripropoxy)silane Chemical compound CCCO[Si](C)(OCCC)OCCC RJMRIDVWCWSWFR-UHFFFAOYSA-N 0.000 description 2
- HLXDKGBELJJMHR-UHFFFAOYSA-N methyl-tri(propan-2-yloxy)silane Chemical compound CC(C)O[Si](C)(OC(C)C)OC(C)C HLXDKGBELJJMHR-UHFFFAOYSA-N 0.000 description 2
- NQMRYBIKMRVZLB-UHFFFAOYSA-N methylamine hydrochloride Chemical compound [Cl-].[NH3+]C NQMRYBIKMRVZLB-UHFFFAOYSA-N 0.000 description 2
- UAEPNZWRGJTJPN-UHFFFAOYSA-N methylcyclohexane Chemical compound CC1CCCCC1 UAEPNZWRGJTJPN-UHFFFAOYSA-N 0.000 description 2
- 150000007522 mineralic acids Chemical class 0.000 description 2
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 2
- ZWRUINPWMLAQRD-UHFFFAOYSA-N nonan-1-ol Chemical compound CCCCCCCCCO ZWRUINPWMLAQRD-UHFFFAOYSA-N 0.000 description 2
- FBUKVWPVBMHYJY-UHFFFAOYSA-N nonanoic acid Chemical compound CCCCCCCCC(O)=O FBUKVWPVBMHYJY-UHFFFAOYSA-N 0.000 description 2
- GJQIMXVRFNLMTB-UHFFFAOYSA-N nonyl acetate Chemical compound CCCCCCCCCOC(C)=O GJQIMXVRFNLMTB-UHFFFAOYSA-N 0.000 description 2
- 235000006408 oxalic acid Nutrition 0.000 description 2
- 125000004430 oxygen atom Chemical group O* 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- XNLICIUVMPYHGG-UHFFFAOYSA-N pentan-2-one Chemical compound CCCC(C)=O XNLICIUVMPYHGG-UHFFFAOYSA-N 0.000 description 2
- FDPIMTJIUBPUKL-UHFFFAOYSA-N pentan-3-one Chemical compound CCC(=O)CC FDPIMTJIUBPUKL-UHFFFAOYSA-N 0.000 description 2
- 229960005323 phenoxyethanol Drugs 0.000 description 2
- VPLNCHFJAOKWBT-UHFFFAOYSA-N phenyl-tri(propan-2-yloxy)silane Chemical compound CC(C)O[Si](OC(C)C)(OC(C)C)C1=CC=CC=C1 VPLNCHFJAOKWBT-UHFFFAOYSA-N 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- 229920000233 poly(alkylene oxides) Polymers 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- YKYONYBAUNKHLG-UHFFFAOYSA-N propyl acetate Chemical compound CCCOC(C)=O YKYONYBAUNKHLG-UHFFFAOYSA-N 0.000 description 2
- WGYKZJWCGVVSQN-UHFFFAOYSA-N propylamine Chemical compound CCCN WGYKZJWCGVVSQN-UHFFFAOYSA-N 0.000 description 2
- ODLMAHJVESYWTB-UHFFFAOYSA-N propylbenzene Chemical compound CCCC1=CC=CC=C1 ODLMAHJVESYWTB-UHFFFAOYSA-N 0.000 description 2
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 2
- 238000007151 ring opening polymerisation reaction Methods 0.000 description 2
- YGSDEFSMJLZEOE-UHFFFAOYSA-N salicylic acid Chemical compound OC(=O)C1=CC=CC=C1O YGSDEFSMJLZEOE-UHFFFAOYSA-N 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- CXMXRPHRNRROMY-UHFFFAOYSA-N sebacic acid Chemical compound OC(=O)CCCCCCCCC(O)=O CXMXRPHRNRROMY-UHFFFAOYSA-N 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 150000005846 sugar alcohols Polymers 0.000 description 2
- DDFYFBUWEBINLX-UHFFFAOYSA-M tetramethylammonium bromide Chemical compound [Br-].C[N+](C)(C)C DDFYFBUWEBINLX-UHFFFAOYSA-M 0.000 description 2
- BGQMOFGZRJUORO-UHFFFAOYSA-M tetrapropylammonium bromide Chemical compound [Br-].CCC[N+](CCC)(CCC)CCC BGQMOFGZRJUORO-UHFFFAOYSA-M 0.000 description 2
- FBEVECUEMUUFKM-UHFFFAOYSA-M tetrapropylazanium;chloride Chemical compound [Cl-].CCC[N+](CCC)(CCC)CCC FBEVECUEMUUFKM-UHFFFAOYSA-M 0.000 description 2
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 2
- IZRJPHXTEXTLHY-UHFFFAOYSA-N triethoxy(2-triethoxysilylethyl)silane Chemical compound CCO[Si](OCC)(OCC)CC[Si](OCC)(OCC)OCC IZRJPHXTEXTLHY-UHFFFAOYSA-N 0.000 description 2
- DENFJSAFJTVPJR-UHFFFAOYSA-N triethoxy(ethyl)silane Chemical compound CCO[Si](CC)(OCC)OCC DENFJSAFJTVPJR-UHFFFAOYSA-N 0.000 description 2
- CPUDPFPXCZDNGI-UHFFFAOYSA-N triethoxy(methyl)silane Chemical compound CCO[Si](C)(OCC)OCC CPUDPFPXCZDNGI-UHFFFAOYSA-N 0.000 description 2
- AKYUXYJGXHZKLL-UHFFFAOYSA-N triethoxy(triethoxysilyl)silane Chemical compound CCO[Si](OCC)(OCC)[Si](OCC)(OCC)OCC AKYUXYJGXHZKLL-UHFFFAOYSA-N 0.000 description 2
- NIINUVYELHEORX-UHFFFAOYSA-N triethoxy(triethoxysilylmethyl)silane Chemical compound CCO[Si](OCC)(OCC)C[Si](OCC)(OCC)OCC NIINUVYELHEORX-UHFFFAOYSA-N 0.000 description 2
- MRBRVZDGOJHHFZ-UHFFFAOYSA-N triethoxy-(3-triethoxysilylphenyl)silane Chemical compound CCO[Si](OCC)(OCC)C1=CC=CC([Si](OCC)(OCC)OCC)=C1 MRBRVZDGOJHHFZ-UHFFFAOYSA-N 0.000 description 2
- YYJNCOSWWOMZHX-UHFFFAOYSA-N triethoxy-(4-triethoxysilylphenyl)silane Chemical compound CCO[Si](OCC)(OCC)C1=CC=C([Si](OCC)(OCC)OCC)C=C1 YYJNCOSWWOMZHX-UHFFFAOYSA-N 0.000 description 2
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 2
- JCGDCINCKDQXDX-UHFFFAOYSA-N trimethoxy(2-trimethoxysilylethyl)silane Chemical compound CO[Si](OC)(OC)CC[Si](OC)(OC)OC JCGDCINCKDQXDX-UHFFFAOYSA-N 0.000 description 2
- ZNOCGWVLWPVKAO-UHFFFAOYSA-N trimethoxy(phenyl)silane Chemical compound CO[Si](OC)(OC)C1=CC=CC=C1 ZNOCGWVLWPVKAO-UHFFFAOYSA-N 0.000 description 2
- LMQGXNPPTQOGDG-UHFFFAOYSA-N trimethoxy(trimethoxysilyl)silane Chemical compound CO[Si](OC)(OC)[Si](OC)(OC)OC LMQGXNPPTQOGDG-UHFFFAOYSA-N 0.000 description 2
- DJYGUVIGOGFJOF-UHFFFAOYSA-N trimethoxy(trimethoxysilylmethyl)silane Chemical compound CO[Si](OC)(OC)C[Si](OC)(OC)OC DJYGUVIGOGFJOF-UHFFFAOYSA-N 0.000 description 2
- KNYWDHFOQZZIDQ-UHFFFAOYSA-N trimethoxy-(2-trimethoxysilylphenyl)silane Chemical compound CO[Si](OC)(OC)C1=CC=CC=C1[Si](OC)(OC)OC KNYWDHFOQZZIDQ-UHFFFAOYSA-N 0.000 description 2
- KBFAHPBJNNSTGX-UHFFFAOYSA-N trimethoxy-(3-trimethoxysilylphenyl)silane Chemical compound CO[Si](OC)(OC)C1=CC=CC([Si](OC)(OC)OC)=C1 KBFAHPBJNNSTGX-UHFFFAOYSA-N 0.000 description 2
- YIRZROVNUPFFNZ-UHFFFAOYSA-N trimethoxy-(4-trimethoxysilylphenyl)silane Chemical compound CO[Si](OC)(OC)C1=CC=C([Si](OC)(OC)OC)C=C1 YIRZROVNUPFFNZ-UHFFFAOYSA-N 0.000 description 2
- PYOKUURKVVELLB-UHFFFAOYSA-N trimethyl orthoformate Chemical compound COC(OC)OC PYOKUURKVVELLB-UHFFFAOYSA-N 0.000 description 2
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 2
- 125000000026 trimethylsilyl group Chemical group [H]C([H])([H])[Si]([*])(C([H])([H])[H])C([H])([H])[H] 0.000 description 2
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- LHXDLQBQYFFVNW-OIBJUYFYSA-N (-)-Fenchone Chemical compound C1C[C@@]2(C)C(=O)C(C)(C)[C@@H]1C2 LHXDLQBQYFFVNW-OIBJUYFYSA-N 0.000 description 1
- OBETXYAYXDNJHR-SSDOTTSWSA-M (2r)-2-ethylhexanoate Chemical compound CCCC[C@@H](CC)C([O-])=O OBETXYAYXDNJHR-SSDOTTSWSA-M 0.000 description 1
- WYTZZXDRDKSJID-UHFFFAOYSA-N (3-aminopropyl)triethoxysilane Chemical compound CCO[Si](OCC)(OCC)CCCN WYTZZXDRDKSJID-UHFFFAOYSA-N 0.000 description 1
- OYHQOLUKZRVURQ-NTGFUMLPSA-N (9Z,12Z)-9,10,12,13-tetratritiooctadeca-9,12-dienoic acid Chemical compound C(CCCCCCC\C(=C(/C\C(=C(/CCCCC)\[3H])\[3H])\[3H])\[3H])(=O)O OYHQOLUKZRVURQ-NTGFUMLPSA-N 0.000 description 1
- WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 description 1
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 description 1
- CFCRODHVHXGTPC-UHFFFAOYSA-N 1,1,2,2,3,3,4,4,5,5,6,6,7,7,8,8,9,9,10,10,11,11,12,12,12-pentacosafluorododecane-1-sulfonic acid Chemical compound OS(=O)(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F CFCRODHVHXGTPC-UHFFFAOYSA-N 0.000 description 1
- KMMOLDZBACYVIN-UHFFFAOYSA-N 1,1,2,2,3,3-hexafluoro-1-[2-[2-[2-[2-[2-[2-(1,1,2,2,3,3-hexafluoropentoxy)propoxy]propoxy]propoxy]propoxy]propoxy]propoxy]pentane Chemical compound CCC(F)(F)C(F)(F)C(F)(F)OCC(C)OCC(C)OCC(C)OCC(C)OCC(C)OCC(C)OC(F)(F)C(F)(F)C(F)(F)CC KMMOLDZBACYVIN-UHFFFAOYSA-N 0.000 description 1
- FWFUGQANHCJOAR-UHFFFAOYSA-N 1,1,2,2,3,3-hexafluorodecane Chemical compound CCCCCCCC(F)(F)C(F)(F)C(F)F FWFUGQANHCJOAR-UHFFFAOYSA-N 0.000 description 1
- NHMQIIWXKSTTCZ-UHFFFAOYSA-N 1,1,2,2,8,8,9,9,10,10-decafluorododecane Chemical compound CCC(F)(F)C(F)(F)C(F)(F)CCCCCC(F)(F)C(F)F NHMQIIWXKSTTCZ-UHFFFAOYSA-N 0.000 description 1
- MKNKAWHZNOFVLS-UHFFFAOYSA-N 1,1,2,2-tetrafluoro-1-(1,1,2,2-tetrafluoropropoxy)octane Chemical compound CCCCCCC(F)(F)C(F)(F)OC(F)(F)C(C)(F)F MKNKAWHZNOFVLS-UHFFFAOYSA-N 0.000 description 1
- GCCPAVALGCCVQZ-UHFFFAOYSA-N 1,1,2,2-tetrafluoro-1-[2-[2-[2-[2-[2-[2-[2-[2-(1,1,2,2-tetrafluorobutoxy)ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]butane Chemical compound CCC(F)(F)C(F)(F)OCCOCCOCCOCCOCCOCCOCCOCCOC(F)(F)C(F)(F)CC GCCPAVALGCCVQZ-UHFFFAOYSA-N 0.000 description 1
- RIZMPBJZAHNFGY-UHFFFAOYSA-N 1,1,2,2-tetrafluoro-1-hexoxyoctane Chemical compound CCCCCCOC(F)(F)C(F)(F)CCCCCC RIZMPBJZAHNFGY-UHFFFAOYSA-N 0.000 description 1
- VIDOPANCAUPXNH-UHFFFAOYSA-N 1,2,3-triethylbenzene Chemical compound CCC1=CC=CC(CC)=C1CC VIDOPANCAUPXNH-UHFFFAOYSA-N 0.000 description 1
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 1
- LZDKZFUFMNSQCJ-UHFFFAOYSA-N 1,2-diethoxyethane Chemical compound CCOCCOCC LZDKZFUFMNSQCJ-UHFFFAOYSA-N 0.000 description 1
- 229940058015 1,3-butylene glycol Drugs 0.000 description 1
- OQZAQBGJENJMHT-UHFFFAOYSA-N 1,3-dibromo-5-methoxybenzene Chemical compound COC1=CC(Br)=CC(Br)=C1 OQZAQBGJENJMHT-UHFFFAOYSA-N 0.000 description 1
- WNXJIVFYUVYPPR-UHFFFAOYSA-N 1,3-dioxolane Chemical compound C1COCO1 WNXJIVFYUVYPPR-UHFFFAOYSA-N 0.000 description 1
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- OCJBOOLMMGQPQU-UHFFFAOYSA-N 1,4-dichlorobenzene Chemical compound ClC1=CC=C(Cl)C=C1 OCJBOOLMMGQPQU-UHFFFAOYSA-N 0.000 description 1
- CUVLMZNMSPJDON-UHFFFAOYSA-N 1-(1-butoxypropan-2-yloxy)propan-2-ol Chemical compound CCCCOCC(C)OCC(C)O CUVLMZNMSPJDON-UHFFFAOYSA-N 0.000 description 1
- QMGJMGFZLXYHCR-UHFFFAOYSA-N 1-(2-butoxypropoxy)butane Chemical compound CCCCOCC(C)OCCCC QMGJMGFZLXYHCR-UHFFFAOYSA-N 0.000 description 1
- KZVBBTZJMSWGTK-UHFFFAOYSA-N 1-[2-(2-butoxyethoxy)ethoxy]butane Chemical compound CCCCOCCOCCOCCCC KZVBBTZJMSWGTK-UHFFFAOYSA-N 0.000 description 1
- MQGIBEAIDUOVOH-UHFFFAOYSA-N 1-[2-[2-[2-(2-butoxyethoxy)ethoxy]ethoxy]ethoxy]butane Chemical compound CCCCOCCOCCOCCOCCOCCCC MQGIBEAIDUOVOH-UHFFFAOYSA-N 0.000 description 1
- ROTQATPBCXREFU-UHFFFAOYSA-N 1-[dimethoxy(methyl)silyl]propyl 2-methylprop-2-enoate Chemical compound CO[Si](C)(OC)C(CC)OC(=O)C(C)=C ROTQATPBCXREFU-UHFFFAOYSA-N 0.000 description 1
- GYSCBCSGKXNZRH-UHFFFAOYSA-N 1-benzothiophene-2-carboxamide Chemical compound C1=CC=C2SC(C(=O)N)=CC2=C1 GYSCBCSGKXNZRH-UHFFFAOYSA-N 0.000 description 1
- DURPTKYDGMDSBL-UHFFFAOYSA-N 1-butoxybutane Chemical compound CCCCOCCCC DURPTKYDGMDSBL-UHFFFAOYSA-N 0.000 description 1
- ALNDIBLAORBEAX-UHFFFAOYSA-N 1-butyl-2-ethylhydrazine Chemical compound CCCCNNCC ALNDIBLAORBEAX-UHFFFAOYSA-N 0.000 description 1
- PPNCOQHHSGMKGI-UHFFFAOYSA-N 1-cyclononyldiazonane Chemical compound C1CCCCCCCC1N1NCCCCCCC1 PPNCOQHHSGMKGI-UHFFFAOYSA-N 0.000 description 1
- RRQYJINTUHWNHW-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxyethoxy)ethane Chemical compound CCOCCOCCOCC RRQYJINTUHWNHW-UHFFFAOYSA-N 0.000 description 1
- ZIKLJUUTSQYGQI-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxypropoxy)propane Chemical compound CCOCC(C)OCC(C)OCC ZIKLJUUTSQYGQI-UHFFFAOYSA-N 0.000 description 1
- HYFLWBNQFMXCPA-UHFFFAOYSA-N 1-ethyl-2-methylbenzene Chemical compound CCC1=CC=CC=C1C HYFLWBNQFMXCPA-UHFFFAOYSA-N 0.000 description 1
- BPIUIOXAFBGMNB-UHFFFAOYSA-N 1-hexoxyhexane Chemical compound CCCCCCOCCCCCC BPIUIOXAFBGMNB-UHFFFAOYSA-N 0.000 description 1
- RTBFRGCFXZNCOE-UHFFFAOYSA-N 1-methylsulfonylpiperidin-4-one Chemical compound CS(=O)(=O)N1CCC(=O)CC1 RTBFRGCFXZNCOE-UHFFFAOYSA-N 0.000 description 1
- HXJZEGBVQCRLOD-UHFFFAOYSA-N 1-triethoxysilylpropan-2-amine Chemical compound CCO[Si](CC(C)N)(OCC)OCC HXJZEGBVQCRLOD-UHFFFAOYSA-N 0.000 description 1
- KBRVQAUYZUFKAJ-UHFFFAOYSA-N 1-trimethoxysilylpropan-2-amine Chemical compound CO[Si](OC)(OC)CC(C)N KBRVQAUYZUFKAJ-UHFFFAOYSA-N 0.000 description 1
- LTMRRSWNXVJMBA-UHFFFAOYSA-L 2,2-diethylpropanedioate Chemical compound CCC(CC)(C([O-])=O)C([O-])=O LTMRRSWNXVJMBA-UHFFFAOYSA-L 0.000 description 1
- AWBIJARKDOFDAN-UHFFFAOYSA-N 2,5-dimethyl-1,4-dioxane Chemical compound CC1COC(C)CO1 AWBIJARKDOFDAN-UHFFFAOYSA-N 0.000 description 1
- FLPPEMNGWYFRSK-UHFFFAOYSA-N 2-(2-acetyloxypropoxy)propyl acetate Chemical compound CC(=O)OCC(C)OCC(C)OC(C)=O FLPPEMNGWYFRSK-UHFFFAOYSA-N 0.000 description 1
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 1
- JONNRYNDZVEZFH-UHFFFAOYSA-N 2-(2-butoxypropoxy)propyl acetate Chemical compound CCCCOC(C)COC(C)COC(C)=O JONNRYNDZVEZFH-UHFFFAOYSA-N 0.000 description 1
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 1
- BJINVQNEBGOMCR-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethyl acetate Chemical compound COCCOCCOC(C)=O BJINVQNEBGOMCR-UHFFFAOYSA-N 0.000 description 1
- DJCYDDALXPHSHR-UHFFFAOYSA-N 2-(2-propoxyethoxy)ethanol Chemical compound CCCOCCOCCO DJCYDDALXPHSHR-UHFFFAOYSA-N 0.000 description 1
- UFBBZQDFWTVNGP-UHFFFAOYSA-N 2-(2-propoxypropoxy)propyl acetate Chemical compound CCCOC(C)COC(C)COC(C)=O UFBBZQDFWTVNGP-UHFFFAOYSA-N 0.000 description 1
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 1
- FJAOJVGLIUIDIX-UHFFFAOYSA-N 2-(4-aminobutylamino)ethanol Chemical compound NCCCCNCCO FJAOJVGLIUIDIX-UHFFFAOYSA-N 0.000 description 1
- NWTYCFFQLWYXHG-UHFFFAOYSA-N 2-(aminomethylamino)ethanol Chemical compound NCNCCO NWTYCFFQLWYXHG-UHFFFAOYSA-N 0.000 description 1
- LJDSTRZHPWMDPG-UHFFFAOYSA-N 2-(butylamino)ethanol Chemical compound CCCCNCCO LJDSTRZHPWMDPG-UHFFFAOYSA-N 0.000 description 1
- GVNVAWHJIKLAGL-UHFFFAOYSA-N 2-(cyclohexen-1-yl)cyclohexan-1-one Chemical compound O=C1CCCCC1C1=CCCCC1 GVNVAWHJIKLAGL-UHFFFAOYSA-N 0.000 description 1
- IWSZDQRGNFLMJS-UHFFFAOYSA-N 2-(dibutylamino)ethanol Chemical compound CCCCN(CCO)CCCC IWSZDQRGNFLMJS-UHFFFAOYSA-N 0.000 description 1
- VIKZXMQZDHWCNW-UHFFFAOYSA-N 2-(dipropoxymethylsilyl)ethyl-tripropoxysilane Chemical compound CCCOC(OCCC)[SiH2]CC[Si](OCCC)(OCCC)OCCC VIKZXMQZDHWCNW-UHFFFAOYSA-N 0.000 description 1
- SWKPGMVENNYLFK-UHFFFAOYSA-N 2-(dipropylamino)ethanol Chemical compound CCCN(CCC)CCO SWKPGMVENNYLFK-UHFFFAOYSA-N 0.000 description 1
- MIJDSYMOBYNHOT-UHFFFAOYSA-N 2-(ethylamino)ethanol Chemical compound CCNCCO MIJDSYMOBYNHOT-UHFFFAOYSA-N 0.000 description 1
- BCLSJHWBDUYDTR-UHFFFAOYSA-N 2-(propylamino)ethanol Chemical compound CCCNCCO BCLSJHWBDUYDTR-UHFFFAOYSA-N 0.000 description 1
- HQLKZWRSOHTERR-UHFFFAOYSA-N 2-Ethylbutyl acetate Chemical compound CCC(CC)COC(C)=O HQLKZWRSOHTERR-UHFFFAOYSA-N 0.000 description 1
- GQKZRWSUJHVIPE-UHFFFAOYSA-N 2-Pentanol acetate Chemical compound CCCC(C)OC(C)=O GQKZRWSUJHVIPE-UHFFFAOYSA-N 0.000 description 1
- WFSMVVDJSNMRAR-UHFFFAOYSA-N 2-[2-(2-ethoxyethoxy)ethoxy]ethanol Chemical compound CCOCCOCCOCCO WFSMVVDJSNMRAR-UHFFFAOYSA-N 0.000 description 1
- LCZVSXRMYJUNFX-UHFFFAOYSA-N 2-[2-(2-hydroxypropoxy)propoxy]propan-1-ol Chemical compound CC(O)COC(C)COC(C)CO LCZVSXRMYJUNFX-UHFFFAOYSA-N 0.000 description 1
- WAEVWDZKMBQDEJ-UHFFFAOYSA-N 2-[2-(2-methoxypropoxy)propoxy]propan-1-ol Chemical compound COC(C)COC(C)COC(C)CO WAEVWDZKMBQDEJ-UHFFFAOYSA-N 0.000 description 1
- GLUOGZCHYVWCAK-UHFFFAOYSA-N 2-[2-(3-triethoxysilylpropylamino)ethylamino]ethyl acetate Chemical compound CCO[Si](OCC)(OCC)CCCNCCNCCOC(C)=O GLUOGZCHYVWCAK-UHFFFAOYSA-N 0.000 description 1
- CYPTUSHYKRVMKI-UHFFFAOYSA-N 2-[2-(3-trimethoxysilylpropylamino)ethylamino]ethyl acetate Chemical compound CO[Si](OC)(OC)CCCNCCNCCOC(C)=O CYPTUSHYKRVMKI-UHFFFAOYSA-N 0.000 description 1
- MAUGGXUAHNSMKF-UHFFFAOYSA-N 2-[2-[2-[2-[2-[2-(1,1,2,2,3,3-hexafluoropentoxy)ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethanol Chemical compound CCC(F)(F)C(F)(F)C(F)(F)OCCOCCOCCOCCOCCOCCO MAUGGXUAHNSMKF-UHFFFAOYSA-N 0.000 description 1
- ZZEANNAZZVVPKU-UHFFFAOYSA-N 2-[2-[2-[2-[2-[2-[2-(2-hydroxypropoxy)propoxy]propoxy]propoxy]propoxy]propoxy]propoxy]propan-1-ol Chemical compound CC(O)COC(C)COC(C)COC(C)COC(C)COC(C)COC(C)COC(C)CO ZZEANNAZZVVPKU-UHFFFAOYSA-N 0.000 description 1
- ZSHXCNNCEOGSAN-UHFFFAOYSA-N 2-[bis[(2-methylpropan-2-yl)oxy]methylsilyl]ethyl-tris[(2-methylpropan-2-yl)oxy]silane Chemical compound CC(C)(C)OC(OC(C)(C)C)[SiH2]CC[Si](OC(C)(C)C)(OC(C)(C)C)OC(C)(C)C ZSHXCNNCEOGSAN-UHFFFAOYSA-N 0.000 description 1
- GVNHOISKXMSMPX-UHFFFAOYSA-N 2-[butyl(2-hydroxyethyl)amino]ethanol Chemical compound CCCCN(CCO)CCO GVNHOISKXMSMPX-UHFFFAOYSA-N 0.000 description 1
- CXRJGVVJTXIJML-UHFFFAOYSA-N 2-[di(propan-2-yloxy)methylsilyl]ethyl-tri(propan-2-yloxy)silane Chemical compound CC(C)OC(OC(C)C)[SiH2]CC[Si](OC(C)C)(OC(C)C)OC(C)C CXRJGVVJTXIJML-UHFFFAOYSA-N 0.000 description 1
- JTXMVXSTHSMVQF-UHFFFAOYSA-N 2-acetyloxyethyl acetate Chemical compound CC(=O)OCCOC(C)=O JTXMVXSTHSMVQF-UHFFFAOYSA-N 0.000 description 1
- BFBKUYFMLNOLOQ-UHFFFAOYSA-N 2-butoxyethanamine Chemical compound CCCCOCCN BFBKUYFMLNOLOQ-UHFFFAOYSA-N 0.000 description 1
- BFSVOASYOCHEOV-UHFFFAOYSA-N 2-diethylaminoethanol Chemical compound CCN(CC)CCO BFSVOASYOCHEOV-UHFFFAOYSA-N 0.000 description 1
- BPGIOCZAQDIBPI-UHFFFAOYSA-N 2-ethoxyethanamine Chemical compound CCOCCN BPGIOCZAQDIBPI-UHFFFAOYSA-N 0.000 description 1
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 1
- TZYRSLHNPKPEFV-UHFFFAOYSA-N 2-ethyl-1-butanol Chemical compound CCC(CC)CO TZYRSLHNPKPEFV-UHFFFAOYSA-N 0.000 description 1
- WOYWLLHHWAMFCB-UHFFFAOYSA-N 2-ethylhexyl acetate Chemical compound CCCCC(CC)COC(C)=O WOYWLLHHWAMFCB-UHFFFAOYSA-N 0.000 description 1
- CETWDUZRCINIHU-UHFFFAOYSA-N 2-heptanol Chemical compound CCCCCC(C)O CETWDUZRCINIHU-UHFFFAOYSA-N 0.000 description 1
- ASUDFOJKTJLAIK-UHFFFAOYSA-N 2-methoxyethanamine Chemical compound COCCN ASUDFOJKTJLAIK-UHFFFAOYSA-N 0.000 description 1
- PFNHSEQQEPMLNI-UHFFFAOYSA-N 2-methyl-1-pentanol Chemical compound CCCC(C)CO PFNHSEQQEPMLNI-UHFFFAOYSA-N 0.000 description 1
- MSXVEPNJUHWQHW-UHFFFAOYSA-N 2-methylbutan-2-ol Chemical compound CCC(C)(C)O MSXVEPNJUHWQHW-UHFFFAOYSA-N 0.000 description 1
- VAFKLGXCWUIIOZ-UHFFFAOYSA-N 2-methylpropylazanium;hydroxide Chemical compound [OH-].CC(C)C[NH3+] VAFKLGXCWUIIOZ-UHFFFAOYSA-N 0.000 description 1
- BSKHPKMHTQYZBB-UHFFFAOYSA-N 2-methylpyridine Chemical compound CC1=CC=CC=N1 BSKHPKMHTQYZBB-UHFFFAOYSA-N 0.000 description 1
- JWUJQDFVADABEY-UHFFFAOYSA-N 2-methyltetrahydrofuran Chemical compound CC1CCCO1 JWUJQDFVADABEY-UHFFFAOYSA-N 0.000 description 1
- HMWXCSCBUXKXSA-UHFFFAOYSA-N 2-propoxyethanamine Chemical compound CCCOCCN HMWXCSCBUXKXSA-UHFFFAOYSA-N 0.000 description 1
- YEYKMVJDLWJFOA-UHFFFAOYSA-N 2-propoxyethanol Chemical compound CCCOCCO YEYKMVJDLWJFOA-UHFFFAOYSA-N 0.000 description 1
- 125000001494 2-propynyl group Chemical group [H]C#CC([H])([H])* 0.000 description 1
- LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 description 1
- BRRVXFOKWJKTGG-UHFFFAOYSA-N 3,3,5-trimethylcyclohexanol Chemical compound CC1CC(O)CC(C)(C)C1 BRRVXFOKWJKTGG-UHFFFAOYSA-N 0.000 description 1
- PKNKULBDCRZSBT-UHFFFAOYSA-N 3,4,5-trimethylnonan-2-one Chemical compound CCCCC(C)C(C)C(C)C(C)=O PKNKULBDCRZSBT-UHFFFAOYSA-N 0.000 description 1
- YHCCCMIWRBJYHG-UHFFFAOYSA-N 3-(2-ethylhexoxymethyl)heptane Chemical compound CCCCC(CC)COCC(CC)CCCC YHCCCMIWRBJYHG-UHFFFAOYSA-N 0.000 description 1
- WADSJYLPJPTMLN-UHFFFAOYSA-N 3-(cycloundecen-1-yl)-1,2-diazacycloundec-2-ene Chemical compound C1CCCCCCCCC=C1C1=NNCCCCCCCC1 WADSJYLPJPTMLN-UHFFFAOYSA-N 0.000 description 1
- DMPODMBXLRMZSP-UHFFFAOYSA-N 3-(dibutylamino)propan-1-ol Chemical compound CCCCN(CCCC)CCCO DMPODMBXLRMZSP-UHFFFAOYSA-N 0.000 description 1
- PYSGFFTXMUWEOT-UHFFFAOYSA-N 3-(dimethylamino)propan-1-ol Chemical compound CN(C)CCCO PYSGFFTXMUWEOT-UHFFFAOYSA-N 0.000 description 1
- KRGXWTOLFOPIKV-UHFFFAOYSA-N 3-(methylamino)propan-1-ol Chemical compound CNCCCO KRGXWTOLFOPIKV-UHFFFAOYSA-N 0.000 description 1
- CFEJDOAXJGDWAQ-UHFFFAOYSA-N 3-bromoprop-1-enyl(dichloro)silane Chemical compound BrCC=C[SiH](Cl)Cl CFEJDOAXJGDWAQ-UHFFFAOYSA-N 0.000 description 1
- GIRPPJJOPBKDLV-UHFFFAOYSA-N 3-bromoprop-1-enyl(diethoxy)silane Chemical compound BrCC=C[SiH](OCC)OCC GIRPPJJOPBKDLV-UHFFFAOYSA-N 0.000 description 1
- QDQFFNSCRDFLTD-UHFFFAOYSA-N 3-bromoprop-1-enyl(dimethoxy)silane Chemical compound BrCC=C[SiH](OC)OC QDQFFNSCRDFLTD-UHFFFAOYSA-N 0.000 description 1
- 125000004975 3-butenyl group Chemical group C(CC=C)* 0.000 description 1
- LPUBRQWGZPPVBS-UHFFFAOYSA-N 3-butoxypropan-1-amine Chemical compound CCCCOCCCN LPUBRQWGZPPVBS-UHFFFAOYSA-N 0.000 description 1
- 125000000474 3-butynyl group Chemical group [H]C#CC([H])([H])C([H])([H])* 0.000 description 1
- SEIPPNILOGRBQM-UHFFFAOYSA-N 3-chloroprop-1-enyl(diethoxy)silane Chemical compound ClCC=C[SiH](OCC)OCC SEIPPNILOGRBQM-UHFFFAOYSA-N 0.000 description 1
- RNUMKVKPTDSHDA-UHFFFAOYSA-N 3-chloroprop-1-enyl(dimethoxy)silane Chemical compound ClCC=C[SiH](OC)OC RNUMKVKPTDSHDA-UHFFFAOYSA-N 0.000 description 1
- SOYBEXQHNURCGE-UHFFFAOYSA-N 3-ethoxypropan-1-amine Chemical compound CCOCCCN SOYBEXQHNURCGE-UHFFFAOYSA-N 0.000 description 1
- 125000006041 3-hexenyl group Chemical group 0.000 description 1
- JSGVZVOGOQILFM-UHFFFAOYSA-N 3-methoxy-1-butanol Chemical compound COC(C)CCO JSGVZVOGOQILFM-UHFFFAOYSA-N 0.000 description 1
- QMYGFTJCQFEDST-UHFFFAOYSA-N 3-methoxybutyl acetate Chemical compound COC(C)CCOC(C)=O QMYGFTJCQFEDST-UHFFFAOYSA-N 0.000 description 1
- FAXDZWQIWUSWJH-UHFFFAOYSA-N 3-methoxypropan-1-amine Chemical compound COCCCN FAXDZWQIWUSWJH-UHFFFAOYSA-N 0.000 description 1
- VATRWWPJWVCZTA-UHFFFAOYSA-N 3-oxo-n-[2-(trifluoromethyl)phenyl]butanamide Chemical compound CC(=O)CC(=O)NC1=CC=CC=C1C(F)(F)F VATRWWPJWVCZTA-UHFFFAOYSA-N 0.000 description 1
- UTOXFQVLOTVLSD-UHFFFAOYSA-N 3-propoxypropan-1-amine Chemical compound CCCOCCCN UTOXFQVLOTVLSD-UHFFFAOYSA-N 0.000 description 1
- LVNLBBGBASVLLI-UHFFFAOYSA-N 3-triethoxysilylpropylurea Chemical compound CCO[Si](OCC)(OCC)CCCNC(N)=O LVNLBBGBASVLLI-UHFFFAOYSA-N 0.000 description 1
- SJECZPVISLOESU-UHFFFAOYSA-N 3-trimethoxysilylpropan-1-amine Chemical compound CO[Si](OC)(OC)CCCN SJECZPVISLOESU-UHFFFAOYSA-N 0.000 description 1
- XDLMVUHYZWKMMD-UHFFFAOYSA-N 3-trimethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C(C)=C XDLMVUHYZWKMMD-UHFFFAOYSA-N 0.000 description 1
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- PVNNOLUAMRODAC-UHFFFAOYSA-N 4-(ethylamino)butan-1-ol Chemical compound CCNCCCCO PVNNOLUAMRODAC-UHFFFAOYSA-N 0.000 description 1
- WISMMKARALUELI-UHFFFAOYSA-N 4-butoxybutan-1-amine Chemical compound CCCCOCCCCN WISMMKARALUELI-UHFFFAOYSA-N 0.000 description 1
- GDELFUQKNPLION-UHFFFAOYSA-N 4-ethoxybutan-1-amine Chemical compound CCOCCCCN GDELFUQKNPLION-UHFFFAOYSA-N 0.000 description 1
- YUUFAJOXLZUDJG-UHFFFAOYSA-N 4-methoxybutan-1-amine Chemical compound COCCCCN YUUFAJOXLZUDJG-UHFFFAOYSA-N 0.000 description 1
- MQWCXKGKQLNYQG-UHFFFAOYSA-N 4-methylcyclohexan-1-ol Chemical compound CC1CCC(O)CC1 MQWCXKGKQLNYQG-UHFFFAOYSA-N 0.000 description 1
- VGVHNLRUAMRIEW-UHFFFAOYSA-N 4-methylcyclohexan-1-one Chemical compound CC1CCC(=O)CC1 VGVHNLRUAMRIEW-UHFFFAOYSA-N 0.000 description 1
- LBKMJZAKWQTTHC-UHFFFAOYSA-N 4-methyldioxolane Chemical compound CC1COOC1 LBKMJZAKWQTTHC-UHFFFAOYSA-N 0.000 description 1
- BAQNAQUBYJGZAP-UHFFFAOYSA-N 4-propoxybutan-1-amine Chemical compound CCCOCCCCN BAQNAQUBYJGZAP-UHFFFAOYSA-N 0.000 description 1
- AWQSAIIDOMEEOD-UHFFFAOYSA-N 5,5-Dimethyl-4-(3-oxobutyl)dihydro-2(3H)-furanone Chemical compound CC(=O)CCC1CC(=O)OC1(C)C AWQSAIIDOMEEOD-UHFFFAOYSA-N 0.000 description 1
- LPEKGGXMPWTOCB-UHFFFAOYSA-N 8beta-(2,3-epoxy-2-methylbutyryloxy)-14-acetoxytithifolin Natural products COC(=O)C(C)O LPEKGGXMPWTOCB-UHFFFAOYSA-N 0.000 description 1
- QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- 239000005711 Benzoic acid Substances 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 description 1
- MRABAEUHTLLEML-UHFFFAOYSA-N Butyl lactate Chemical compound CCCCOC(=O)C(C)O MRABAEUHTLLEML-UHFFFAOYSA-N 0.000 description 1
- ZGZWBQABLRAPTC-UHFFFAOYSA-N C(C)(CC)OC(OC(C)CC)[SiH2]CC[SiH2]C(OC(C)CC)OC(C)CC.C(CCC)OC(OCCCC)[SiH2]CC[SiH2]C(OCCCC)OCCCC Chemical compound C(C)(CC)OC(OC(C)CC)[SiH2]CC[SiH2]C(OC(C)CC)OC(C)CC.C(CCC)OC(OCCCC)[SiH2]CC[SiH2]C(OCCCC)OCCCC ZGZWBQABLRAPTC-UHFFFAOYSA-N 0.000 description 1
- GKKNDUZKLIUOMH-UHFFFAOYSA-N C(CC)[Si](OCCC)(OCCC)CCC.C(CC)[Si](OCC)(OCC)CCC Chemical compound C(CC)[Si](OCCC)(OCCC)CCC.C(CC)[Si](OCC)(OCC)CCC GKKNDUZKLIUOMH-UHFFFAOYSA-N 0.000 description 1
- ZERCUTVCTOPMRB-UHFFFAOYSA-N C(CCC)O[Si](C1=CC(=CC=C1)[Si](OCCCC)(OCCCC)OCCCC)(OCCCC)OCCCC.C(C)(C)O[Si](C1=CC(=CC=C1)[Si](OC(C)C)(OC(C)C)OC(C)C)(OC(C)C)OC(C)C Chemical compound C(CCC)O[Si](C1=CC(=CC=C1)[Si](OCCCC)(OCCCC)OCCCC)(OCCCC)OCCCC.C(C)(C)O[Si](C1=CC(=CC=C1)[Si](OC(C)C)(OC(C)C)OC(C)C)(OC(C)C)OC(C)C ZERCUTVCTOPMRB-UHFFFAOYSA-N 0.000 description 1
- IQEPMPJAMCGYHL-UHFFFAOYSA-M C1(=CC=CC=C1)[N+](C)(C)C.[Br-].C(CCC)[NH+](CCCC)CCCC.C(C1=CC=CC=C1)Br.[Br-] Chemical compound C1(=CC=CC=C1)[N+](C)(C)C.[Br-].C(CCC)[NH+](CCCC)CCCC.C(C1=CC=CC=C1)Br.[Br-] IQEPMPJAMCGYHL-UHFFFAOYSA-M 0.000 description 1
- YLFWBWMXGDKFKN-UHFFFAOYSA-N CC(C)(C)OC(OC(C)(C)C)[SiH2]C[SiH2]C(OC(C)(C)C)OC(C)(C)C Chemical compound CC(C)(C)OC(OC(C)(C)C)[SiH2]C[SiH2]C(OC(C)(C)C)OC(C)(C)C YLFWBWMXGDKFKN-UHFFFAOYSA-N 0.000 description 1
- FTSXNQAMKOCDOV-UHFFFAOYSA-N CCCCOC(OCCCC)[SiH2]CC[Si](OCCCC)(OCCCC)OCCCC Chemical compound CCCCOC(OCCCC)[SiH2]CC[Si](OCCCC)(OCCCC)OCCCC FTSXNQAMKOCDOV-UHFFFAOYSA-N 0.000 description 1
- YRUQEAHQMALSGC-UHFFFAOYSA-N CCCOC(OCCC)[SiH2]C[Si](OCCC)(OCCC)OCCC Chemical compound CCCOC(OCCC)[SiH2]C[Si](OCCC)(OCCC)OCCC YRUQEAHQMALSGC-UHFFFAOYSA-N 0.000 description 1
- VFDIRKSKTBWSQY-UHFFFAOYSA-N CCO[Si](OCC)(OCC)CCC(N)OCC1CO1 Chemical compound CCO[Si](OCC)(OCC)CCC(N)OCC1CO1 VFDIRKSKTBWSQY-UHFFFAOYSA-N 0.000 description 1
- CIIJRLAWZSHSKX-UHFFFAOYSA-N CO[Si]([Si](C)(C)OC)(C)OC.O(C1=CC=CC=C1)[Si]([Si](C1=CC=CC=C1)(OC1=CC=CC=C1)OC1=CC=CC=C1)(C1=CC=CC=C1)OC1=CC=CC=C1 Chemical compound CO[Si]([Si](C)(C)OC)(C)OC.O(C1=CC=CC=C1)[Si]([Si](C1=CC=CC=C1)(OC1=CC=CC=C1)OC1=CC=CC=C1)(C1=CC=CC=C1)OC1=CC=CC=C1 CIIJRLAWZSHSKX-UHFFFAOYSA-N 0.000 description 1
- 101150065749 Churc1 gene Proteins 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- YYLLIJHXUHJATK-UHFFFAOYSA-N Cyclohexyl acetate Chemical compound CC(=O)OC1CCCCC1 YYLLIJHXUHJATK-UHFFFAOYSA-N 0.000 description 1
- GHVNFZFCNZKVNT-UHFFFAOYSA-N Decanoic acid Natural products CCCCCCCCCC(O)=O GHVNFZFCNZKVNT-UHFFFAOYSA-N 0.000 description 1
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 description 1
- RUPBZQFQVRMKDG-UHFFFAOYSA-M Didecyldimethylammonium chloride Chemical compound [Cl-].CCCCCCCCCC[N+](C)(C)CCCCCCCCCC RUPBZQFQVRMKDG-UHFFFAOYSA-M 0.000 description 1
- OIFBSDVPJOWBCH-UHFFFAOYSA-N Diethyl carbonate Chemical compound CCOC(=O)OCC OIFBSDVPJOWBCH-UHFFFAOYSA-N 0.000 description 1
- HXQPUEQDBSPXTE-UHFFFAOYSA-N Diisobutylcarbinol Chemical compound CC(C)CC(O)CC(C)C HXQPUEQDBSPXTE-UHFFFAOYSA-N 0.000 description 1
- ZAFNJMIOTHYJRJ-UHFFFAOYSA-N Diisopropyl ether Chemical compound CC(C)OC(C)C ZAFNJMIOTHYJRJ-UHFFFAOYSA-N 0.000 description 1
- LCGLNKUTAGEVQW-UHFFFAOYSA-N Dimethyl ether Chemical compound COC LCGLNKUTAGEVQW-UHFFFAOYSA-N 0.000 description 1
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 1
- RZKSECIXORKHQS-UHFFFAOYSA-N Heptan-3-ol Chemical compound CCCCC(O)CC RZKSECIXORKHQS-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- NHTMVDHEPJAVLT-UHFFFAOYSA-N Isooctane Chemical compound CC(C)CC(C)(C)C NHTMVDHEPJAVLT-UHFFFAOYSA-N 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- WRQNANDWMGAFTP-UHFFFAOYSA-N Methylacetoacetic acid Chemical compound COC(=O)CC(C)=O WRQNANDWMGAFTP-UHFFFAOYSA-N 0.000 description 1
- KWYHDKDOAIKMQN-UHFFFAOYSA-N N,N,N',N'-tetramethylethylenediamine Chemical compound CN(C)CCN(C)C KWYHDKDOAIKMQN-UHFFFAOYSA-N 0.000 description 1
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 1
- SUAKHGWARZSWIH-UHFFFAOYSA-N N,N‐diethylformamide Chemical compound CCN(CC)C=O SUAKHGWARZSWIH-UHFFFAOYSA-N 0.000 description 1
- SJRJJKPEHAURKC-UHFFFAOYSA-N N-Methylmorpholine Chemical compound CN1CCOCC1 SJRJJKPEHAURKC-UHFFFAOYSA-N 0.000 description 1
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 1
- UEEJHVSXFDXPFK-UHFFFAOYSA-N N-dimethylaminoethanol Chemical compound CN(C)CCO UEEJHVSXFDXPFK-UHFFFAOYSA-N 0.000 description 1
- AKNUHUCEWALCOI-UHFFFAOYSA-N N-ethyldiethanolamine Chemical compound OCCN(CC)CCO AKNUHUCEWALCOI-UHFFFAOYSA-N 0.000 description 1
- OHLUUHNLEMFGTQ-UHFFFAOYSA-N N-methylacetamide Chemical compound CNC(C)=O OHLUUHNLEMFGTQ-UHFFFAOYSA-N 0.000 description 1
- OPKOKAMJFNKNAS-UHFFFAOYSA-N N-methylethanolamine Chemical compound CNCCO OPKOKAMJFNKNAS-UHFFFAOYSA-N 0.000 description 1
- RMIVMBYMDISYFZ-UHFFFAOYSA-N N-methylputrescine Chemical compound CNCCCCN RMIVMBYMDISYFZ-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- GNUGENRABCVFJI-UHFFFAOYSA-N O(C1=CC=CC=C1)[Si]([Si](C1=CC=CC=C1)(C1=CC=CC=C1)OC1=CC=CC=C1)(C1=CC=CC=C1)C1=CC=CC=C1.C(C)O[Si]([Si](C1=CC=CC=C1)(C1=CC=CC=C1)OCC)(C1=CC=CC=C1)C1=CC=CC=C1 Chemical compound O(C1=CC=CC=C1)[Si]([Si](C1=CC=CC=C1)(C1=CC=CC=C1)OC1=CC=CC=C1)(C1=CC=CC=C1)C1=CC=CC=C1.C(C)O[Si]([Si](C1=CC=CC=C1)(C1=CC=CC=C1)OCC)(C1=CC=CC=C1)C1=CC=CC=C1 GNUGENRABCVFJI-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 239000005642 Oleic acid Substances 0.000 description 1
- ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 description 1
- JKRZOJADNVOXPM-UHFFFAOYSA-N Oxalic acid dibutyl ester Chemical compound CCCCOC(=O)C(=O)OCCCC JKRZOJADNVOXPM-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 1
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 1
- 102100038239 Protein Churchill Human genes 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 235000021355 Stearic acid Nutrition 0.000 description 1
- VBIIFPGSPJYLRR-UHFFFAOYSA-M Stearyltrimethylammonium chloride Chemical compound [Cl-].CCCCCCCCCCCCCCCCCC[N+](C)(C)C VBIIFPGSPJYLRR-UHFFFAOYSA-M 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 1
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- FYTPGBJPTDQJCG-UHFFFAOYSA-N Trichloro(chloromethyl)silane Chemical compound ClC[Si](Cl)(Cl)Cl FYTPGBJPTDQJCG-UHFFFAOYSA-N 0.000 description 1
- CAGQGWQXRKAJFX-UHFFFAOYSA-N [diethoxy(ethyl)silyl]-diethoxy-ethylsilane Chemical compound CCO[Si](CC)(OCC)[Si](CC)(OCC)OCC CAGQGWQXRKAJFX-UHFFFAOYSA-N 0.000 description 1
- DCEBXHSHURUJAY-UHFFFAOYSA-N [diethoxy(phenyl)silyl]-diethoxy-phenylsilane Chemical compound C=1C=CC=CC=1[Si](OCC)(OCC)[Si](OCC)(OCC)C1=CC=CC=C1 DCEBXHSHURUJAY-UHFFFAOYSA-N 0.000 description 1
- KVOXQFWXJQZCJO-UHFFFAOYSA-N [diethyl(methoxy)silyl]-diethyl-methoxysilane Chemical compound CC[Si](CC)(OC)[Si](CC)(CC)OC KVOXQFWXJQZCJO-UHFFFAOYSA-N 0.000 description 1
- ZXTUPVQBBCBASF-UHFFFAOYSA-N [diethyl(phenoxy)silyl]-diethyl-phenoxysilane Chemical compound C=1C=CC=CC=1O[Si](CC)(CC)[Si](CC)(CC)OC1=CC=CC=C1 ZXTUPVQBBCBASF-UHFFFAOYSA-N 0.000 description 1
- FJBYKPPJPGSLFX-UHFFFAOYSA-N [dimethyl(phenoxy)silyl]-dimethyl-phenoxysilane Chemical compound C=1C=CC=CC=1O[Si](C)(C)[Si](C)(C)OC1=CC=CC=C1 FJBYKPPJPGSLFX-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- KXKVLQRXCPHEJC-UHFFFAOYSA-N acetic acid trimethyl ester Natural products COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 description 1
- 125000003668 acetyloxy group Chemical group [H]C([H])([H])C(=O)O[*] 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 125000002252 acyl group Chemical group 0.000 description 1
- 239000001361 adipic acid Substances 0.000 description 1
- 235000011037 adipic acid Nutrition 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 1
- DTOSIQBPPRVQHS-PDBXOOCHSA-N alpha-linolenic acid Chemical compound CC\C=C/C\C=C/C\C=C/CCCCCCCC(O)=O DTOSIQBPPRVQHS-PDBXOOCHSA-N 0.000 description 1
- 235000020661 alpha-linolenic acid Nutrition 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 229960004050 aminobenzoic acid Drugs 0.000 description 1
- LHIJANUOQQMGNT-UHFFFAOYSA-N aminoethylethanolamine Chemical compound NCCNCCO LHIJANUOQQMGNT-UHFFFAOYSA-N 0.000 description 1
- 239000002280 amphoteric surfactant Substances 0.000 description 1
- JFCQEDHGNNZCLN-UHFFFAOYSA-N anhydrous glutaric acid Natural products OC(=O)CCCC(O)=O JFCQEDHGNNZCLN-UHFFFAOYSA-N 0.000 description 1
- 125000000129 anionic group Chemical group 0.000 description 1
- 239000003945 anionic surfactant Substances 0.000 description 1
- 229940114079 arachidonic acid Drugs 0.000 description 1
- 235000021342 arachidonic acid Nutrition 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 239000003849 aromatic solvent Substances 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- RQPZNWPYLFFXCP-UHFFFAOYSA-L barium dihydroxide Chemical compound [OH-].[OH-].[Ba+2] RQPZNWPYLFFXCP-UHFFFAOYSA-L 0.000 description 1
- 229910001863 barium hydroxide Inorganic materials 0.000 description 1
- SRSXLGNVWSONIS-UHFFFAOYSA-N benzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=CC=C1 SRSXLGNVWSONIS-UHFFFAOYSA-N 0.000 description 1
- 229940092714 benzenesulfonic acid Drugs 0.000 description 1
- QOAJCSFSLUUCDS-UHFFFAOYSA-N benzhydryloxy(chloromethyl)silane Chemical compound ClC[SiH2]OC(C1=CC=CC=C1)C1=CC=CC=C1 QOAJCSFSLUUCDS-UHFFFAOYSA-N 0.000 description 1
- 235000010233 benzoic acid Nutrition 0.000 description 1
- 229960004365 benzoic acid Drugs 0.000 description 1
- 125000001231 benzoyloxy group Chemical group C(C1=CC=CC=C1)(=O)O* 0.000 description 1
- 229940007550 benzyl acetate Drugs 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- GONOPSZTUGRENK-UHFFFAOYSA-N benzyl(trichloro)silane Chemical compound Cl[Si](Cl)(Cl)CC1=CC=CC=C1 GONOPSZTUGRENK-UHFFFAOYSA-N 0.000 description 1
- KXHPPCXNWTUNSB-UHFFFAOYSA-M benzyl(trimethyl)azanium;chloride Chemical compound [Cl-].C[N+](C)(C)CC1=CC=CC=C1 KXHPPCXNWTUNSB-UHFFFAOYSA-M 0.000 description 1
- NDKBVBUGCNGSJJ-UHFFFAOYSA-M benzyltrimethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)CC1=CC=CC=C1 NDKBVBUGCNGSJJ-UHFFFAOYSA-M 0.000 description 1
- 229960003237 betaine Drugs 0.000 description 1
- GEVFICDEOWFKDU-UHFFFAOYSA-N bis[(2-methylpropan-2-yl)oxy]-di(propan-2-yl)silane Chemical compound CC(C)(C)O[Si](C(C)C)(OC(C)(C)C)C(C)C GEVFICDEOWFKDU-UHFFFAOYSA-N 0.000 description 1
- NZJRLFDIDIUMPD-UHFFFAOYSA-N bis[(2-methylpropan-2-yl)oxy]-dipropylsilane Chemical compound CCC[Si](CCC)(OC(C)(C)C)OC(C)(C)C NZJRLFDIDIUMPD-UHFFFAOYSA-N 0.000 description 1
- DMAVYNCFCVFOQF-UHFFFAOYSA-N bis[(2-methylpropan-2-yl)oxy]methyl-[2-[bis[(2-methylpropan-2-yl)oxy]methylsilyl]ethyl]silane Chemical compound CC(C)(C)OC(OC(C)(C)C)[SiH2]CC[SiH2]C(OC(C)(C)C)OC(C)(C)C DMAVYNCFCVFOQF-UHFFFAOYSA-N 0.000 description 1
- ZYFYSGNGFCIFNT-UHFFFAOYSA-N bis[(2-methylpropan-2-yl)oxy]methylsilylmethyl-tris[(2-methylpropan-2-yl)oxy]silane Chemical compound CC(C)(C)OC(OC(C)(C)C)[SiH2]C[Si](OC(C)(C)C)(OC(C)(C)C)OC(C)(C)C ZYFYSGNGFCIFNT-UHFFFAOYSA-N 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- BKAQKQAIAZTYQA-UHFFFAOYSA-N bromomethyl(trichloro)silane Chemical compound Cl[Si](Cl)(Cl)CBr BKAQKQAIAZTYQA-UHFFFAOYSA-N 0.000 description 1
- QGHLTGVNDIVBDK-UHFFFAOYSA-N bromomethyl(triethoxy)silane Chemical compound CCO[Si](CBr)(OCC)OCC QGHLTGVNDIVBDK-UHFFFAOYSA-N 0.000 description 1
- SPQZWICZZVMTBO-UHFFFAOYSA-N bromomethyl(trimethoxy)silane Chemical compound CO[Si](CBr)(OC)OC SPQZWICZZVMTBO-UHFFFAOYSA-N 0.000 description 1
- CAURZYXCQQWBJO-UHFFFAOYSA-N bromomethyl-chloro-dimethylsilane Chemical compound C[Si](C)(Cl)CBr CAURZYXCQQWBJO-UHFFFAOYSA-N 0.000 description 1
- YGVZXZYIKIYSDZ-UHFFFAOYSA-N bromomethyl-dichloro-methylsilane Chemical compound C[Si](Cl)(Cl)CBr YGVZXZYIKIYSDZ-UHFFFAOYSA-N 0.000 description 1
- AOIHZRBXZRWRBG-UHFFFAOYSA-N bromomethyl-diethoxy-methylsilane Chemical compound CCO[Si](C)(CBr)OCC AOIHZRBXZRWRBG-UHFFFAOYSA-N 0.000 description 1
- JEFOTZCFGJHGGX-UHFFFAOYSA-N bromomethyl-diethoxy-phenylsilane Chemical compound CCO[Si](CBr)(OCC)C1=CC=CC=C1 JEFOTZCFGJHGGX-UHFFFAOYSA-N 0.000 description 1
- LRHAJOGWNWDFPH-UHFFFAOYSA-N bromomethyl-dimethoxy-methylsilane Chemical compound CO[Si](C)(CBr)OC LRHAJOGWNWDFPH-UHFFFAOYSA-N 0.000 description 1
- OOTYXUYBOQGTCY-UHFFFAOYSA-N bromomethyl-dimethoxy-phenylsilane Chemical compound CO[Si](CBr)(OC)C1=CC=CC=C1 OOTYXUYBOQGTCY-UHFFFAOYSA-N 0.000 description 1
- FKYUNOGVWJPFCX-UHFFFAOYSA-N bromomethyl-methoxy-di(propan-2-yl)silane Chemical compound CO[Si](CBr)(C(C)C)C(C)C FKYUNOGVWJPFCX-UHFFFAOYSA-N 0.000 description 1
- SGEIZEOCYMDFJP-UHFFFAOYSA-N bromomethyl-methoxy-dimethylsilane Chemical compound CO[Si](C)(C)CBr SGEIZEOCYMDFJP-UHFFFAOYSA-N 0.000 description 1
- NIRMFZFVNYILNK-UHFFFAOYSA-N bromomethyl-tri(propan-2-yloxy)silane Chemical compound CC(C)O[Si](CBr)(OC(C)C)OC(C)C NIRMFZFVNYILNK-UHFFFAOYSA-N 0.000 description 1
- MWZAJEMJQMTNKM-UHFFFAOYSA-N bromomethylbenzene;n,n-diethylethanamine Chemical compound CCN(CC)CC.BrCC1=CC=CC=C1 MWZAJEMJQMTNKM-UHFFFAOYSA-N 0.000 description 1
- 125000004799 bromophenyl group Chemical group 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- DGLQEVNKXXQZKE-UHFFFAOYSA-N butan-1-amine;n-methylmethanamine Chemical compound CNC.CCCCN DGLQEVNKXXQZKE-UHFFFAOYSA-N 0.000 description 1
- LVTRKEHNNCDSFT-UHFFFAOYSA-N butan-2-yl(tributoxy)silane Chemical compound CCCCO[Si](OCCCC)(OCCCC)C(C)CC LVTRKEHNNCDSFT-UHFFFAOYSA-N 0.000 description 1
- AMSAPKJTBARTTR-UHFFFAOYSA-N butan-2-yl(trimethoxy)silane Chemical compound CCC(C)[Si](OC)(OC)OC AMSAPKJTBARTTR-UHFFFAOYSA-N 0.000 description 1
- RONSXPITPXQAOB-UHFFFAOYSA-N butan-2-yl(triphenoxy)silane Chemical compound C=1C=CC=CC=1O[Si](OC=1C=CC=CC=1)(C(C)CC)OC1=CC=CC=C1 RONSXPITPXQAOB-UHFFFAOYSA-N 0.000 description 1
- DNYVMXJXGNLANE-UHFFFAOYSA-N butan-2-yl(tripropoxy)silane Chemical compound CCCO[Si](OCCC)(OCCC)C(C)CC DNYVMXJXGNLANE-UHFFFAOYSA-N 0.000 description 1
- WZOUXCVLNZOLFT-UHFFFAOYSA-N butan-2-yl-tri(butan-2-yloxy)silane Chemical compound CCC(C)O[Si](OC(C)CC)(OC(C)CC)C(C)CC WZOUXCVLNZOLFT-UHFFFAOYSA-N 0.000 description 1
- TWWATCWHACTGNY-UHFFFAOYSA-N butan-2-yl-tri(propan-2-yloxy)silane Chemical compound CCC(C)[Si](OC(C)C)(OC(C)C)OC(C)C TWWATCWHACTGNY-UHFFFAOYSA-N 0.000 description 1
- MTJISXQZLVVFLZ-UHFFFAOYSA-N butan-2-yl-tris[(2-methylpropan-2-yl)oxy]silane Chemical compound CCC(C)[Si](OC(C)(C)C)(OC(C)(C)C)OC(C)(C)C MTJISXQZLVVFLZ-UHFFFAOYSA-N 0.000 description 1
- 235000019437 butane-1,3-diol Nutrition 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- 125000004106 butoxy group Chemical group [*]OC([H])([H])C([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- JHIWVOJDXOSYLW-UHFFFAOYSA-N butyl 2,2-difluorocyclopropane-1-carboxylate Chemical compound CCCCOC(=O)C1CC1(F)F JHIWVOJDXOSYLW-UHFFFAOYSA-N 0.000 description 1
- BTMVHUNTONAYDX-UHFFFAOYSA-N butyl propionate Chemical compound CCCCOC(=O)CC BTMVHUNTONAYDX-UHFFFAOYSA-N 0.000 description 1
- XGZGKDQVCBHSGI-UHFFFAOYSA-N butyl(triethoxy)silane Chemical compound CCCC[Si](OCC)(OCC)OCC XGZGKDQVCBHSGI-UHFFFAOYSA-N 0.000 description 1
- SXPLZNMUBFBFIA-UHFFFAOYSA-N butyl(trimethoxy)silane Chemical compound CCCC[Si](OC)(OC)OC SXPLZNMUBFBFIA-UHFFFAOYSA-N 0.000 description 1
- OGCNPMTZBJEZKT-UHFFFAOYSA-N butyl(triphenoxy)silane Chemical compound C=1C=CC=CC=1O[Si](OC=1C=CC=CC=1)(CCCC)OC1=CC=CC=C1 OGCNPMTZBJEZKT-UHFFFAOYSA-N 0.000 description 1
- GNRBSDIBKIHSJH-UHFFFAOYSA-N butyl(tripropoxy)silane Chemical compound CCCC[Si](OCCC)(OCCC)OCCC GNRBSDIBKIHSJH-UHFFFAOYSA-N 0.000 description 1
- OOWHVJAPAMPBEX-UHFFFAOYSA-N butyl-tri(propan-2-yloxy)silane Chemical compound CCCC[Si](OC(C)C)(OC(C)C)OC(C)C OOWHVJAPAMPBEX-UHFFFAOYSA-N 0.000 description 1
- ZOKYFXXILHWZHP-UHFFFAOYSA-N butyl-tris[(2-methylpropan-2-yl)oxy]silane Chemical compound CCCC[Si](OC(C)(C)C)(OC(C)(C)C)OC(C)(C)C ZOKYFXXILHWZHP-UHFFFAOYSA-N 0.000 description 1
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 description 1
- 239000000920 calcium hydroxide Substances 0.000 description 1
- 229910001861 calcium hydroxide Inorganic materials 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 239000003093 cationic surfactant Substances 0.000 description 1
- WOWHHFRSBJGXCM-UHFFFAOYSA-M cetyltrimethylammonium chloride Chemical compound [Cl-].CCCCCCCCCCCCCCCC[N+](C)(C)C WOWHHFRSBJGXCM-UHFFFAOYSA-M 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- KYKAJFCTULSVSH-UHFFFAOYSA-N chloro(fluoro)methane Chemical compound F[C]Cl KYKAJFCTULSVSH-UHFFFAOYSA-N 0.000 description 1
- SOKTZNMKXXQIFS-UHFFFAOYSA-N chloro-(chloromethyl)-bis(ethenyl)silane Chemical compound ClC[Si](Cl)(C=C)C=C SOKTZNMKXXQIFS-UHFFFAOYSA-N 0.000 description 1
- ITKVLPYNJQOCPW-UHFFFAOYSA-N chloro-(chloromethyl)-dimethylsilane Chemical compound C[Si](C)(Cl)CCl ITKVLPYNJQOCPW-UHFFFAOYSA-N 0.000 description 1
- FOCAUTSVDIKZOP-UHFFFAOYSA-N chloroacetic acid Chemical compound OC(=O)CCl FOCAUTSVDIKZOP-UHFFFAOYSA-N 0.000 description 1
- PIJQBRGKTBSLFM-UHFFFAOYSA-N chloromethyl(penta-1,4-dien-3-yloxy)silane Chemical compound ClC[SiH2]OC(C=C)C=C PIJQBRGKTBSLFM-UHFFFAOYSA-N 0.000 description 1
- ZDOBWJOCPDIBRZ-UHFFFAOYSA-N chloromethyl(triethoxy)silane Chemical compound CCO[Si](CCl)(OCC)OCC ZDOBWJOCPDIBRZ-UHFFFAOYSA-N 0.000 description 1
- FPOSCXQHGOVVPD-UHFFFAOYSA-N chloromethyl(trimethoxy)silane Chemical compound CO[Si](CCl)(OC)OC FPOSCXQHGOVVPD-UHFFFAOYSA-N 0.000 description 1
- MLJHGPJYDGBIFS-UHFFFAOYSA-N chloromethyl-diethoxy-ethylsilane Chemical compound CCO[Si](CC)(CCl)OCC MLJHGPJYDGBIFS-UHFFFAOYSA-N 0.000 description 1
- XGLLBUISUZEUMW-UHFFFAOYSA-N chloromethyl-diethoxy-methylsilane Chemical compound CCO[Si](C)(CCl)OCC XGLLBUISUZEUMW-UHFFFAOYSA-N 0.000 description 1
- WHVOPZVHCPLYOG-UHFFFAOYSA-N chloromethyl-diethoxy-phenylsilane Chemical compound CCO[Si](CCl)(OCC)C1=CC=CC=C1 WHVOPZVHCPLYOG-UHFFFAOYSA-N 0.000 description 1
- ZXZMFKUGAPMMCJ-UHFFFAOYSA-N chloromethyl-dimethoxy-methylsilane Chemical compound CO[Si](C)(CCl)OC ZXZMFKUGAPMMCJ-UHFFFAOYSA-N 0.000 description 1
- QMBUWQNAJVPKHS-UHFFFAOYSA-N chloromethyl-dimethoxy-phenylsilane Chemical compound CO[Si](CCl)(OC)C1=CC=CC=C1 QMBUWQNAJVPKHS-UHFFFAOYSA-N 0.000 description 1
- HPNKKQGYJBEYFT-UHFFFAOYSA-N chloromethyl-ethoxy-diethylsilane Chemical compound CCO[Si](CC)(CC)CCl HPNKKQGYJBEYFT-UHFFFAOYSA-N 0.000 description 1
- IGMQAYXTTRYCPZ-UHFFFAOYSA-N chloromethyl-ethoxy-dimethylsilane Chemical compound CCO[Si](C)(C)CCl IGMQAYXTTRYCPZ-UHFFFAOYSA-N 0.000 description 1
- ZCSLOBFDVTWIBL-UHFFFAOYSA-N chloromethyl-methoxy-dimethylsilane Chemical compound CO[Si](C)(C)CCl ZCSLOBFDVTWIBL-UHFFFAOYSA-N 0.000 description 1
- SAKYAANYXZKYEK-UHFFFAOYSA-N chloromethyl-tri(propan-2-yloxy)silane Chemical compound CC(C)O[Si](CCl)(OC(C)C)OC(C)C SAKYAANYXZKYEK-UHFFFAOYSA-N 0.000 description 1
- 125000000068 chlorophenyl group Chemical group 0.000 description 1
- OEYIOHPDSNJKLS-UHFFFAOYSA-N choline Chemical compound C[N+](C)(C)CCO OEYIOHPDSNJKLS-UHFFFAOYSA-N 0.000 description 1
- 229960001231 choline Drugs 0.000 description 1
- HNEGQIOMVPPMNR-IHWYPQMZSA-N citraconic acid Chemical compound OC(=O)C(/C)=C\C(O)=O HNEGQIOMVPPMNR-IHWYPQMZSA-N 0.000 description 1
- 229940018557 citraconic acid Drugs 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 150000004696 coordination complex Chemical class 0.000 description 1
- CGZZMOTZOONQIA-UHFFFAOYSA-N cycloheptanone Chemical compound O=C1CCCCCC1 CGZZMOTZOONQIA-UHFFFAOYSA-N 0.000 description 1
- HPXRVTGHNJAIIH-UHFFFAOYSA-N cyclohexanol Chemical compound OC1CCCCC1 HPXRVTGHNJAIIH-UHFFFAOYSA-N 0.000 description 1
- IIRFCWANHMSDCG-UHFFFAOYSA-N cyclooctanone Chemical compound O=C1CCCCCCC1 IIRFCWANHMSDCG-UHFFFAOYSA-N 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- HQDFXHKYURDVIO-UHFFFAOYSA-M decyl(trimethyl)azanium;hydroxide Chemical compound [OH-].CCCCCCCCCC[N+](C)(C)C HQDFXHKYURDVIO-UHFFFAOYSA-M 0.000 description 1
- 239000012024 dehydrating agents Substances 0.000 description 1
- 239000000412 dendrimer Substances 0.000 description 1
- 229920000736 dendritic polymer Polymers 0.000 description 1
- VTYMPZNKHJYGEH-UHFFFAOYSA-N di(butan-2-yl)-bis[(2-methylpropan-2-yl)oxy]silane Chemical compound CCC(C)[Si](OC(C)(C)C)(OC(C)(C)C)C(C)CC VTYMPZNKHJYGEH-UHFFFAOYSA-N 0.000 description 1
- SNEGIHORRGJSED-UHFFFAOYSA-N di(butan-2-yl)-di(propan-2-yloxy)silane Chemical compound CCC(C)[Si](OC(C)C)(OC(C)C)C(C)CC SNEGIHORRGJSED-UHFFFAOYSA-N 0.000 description 1
- RHPPDKHKHGQLHP-UHFFFAOYSA-N di(butan-2-yl)-dibutoxysilane Chemical compound CCCCO[Si](C(C)CC)(C(C)CC)OCCCC RHPPDKHKHGQLHP-UHFFFAOYSA-N 0.000 description 1
- VSLASQQLPGVYSK-UHFFFAOYSA-N di(butan-2-yl)-diethoxysilane Chemical compound CCO[Si](OCC)(C(C)CC)C(C)CC VSLASQQLPGVYSK-UHFFFAOYSA-N 0.000 description 1
- HVHRIKGOFGJBFM-UHFFFAOYSA-N di(butan-2-yl)-dimethoxysilane Chemical compound CCC(C)[Si](OC)(OC)C(C)CC HVHRIKGOFGJBFM-UHFFFAOYSA-N 0.000 description 1
- CUNCIGAMQTWZFC-UHFFFAOYSA-N di(butan-2-yl)-diphenoxysilane Chemical compound C=1C=CC=CC=1O[Si](C(C)CC)(C(C)CC)OC1=CC=CC=C1 CUNCIGAMQTWZFC-UHFFFAOYSA-N 0.000 description 1
- LAGUJICBGGFHSR-UHFFFAOYSA-N di(butan-2-yl)-dipropoxysilane Chemical compound CCCO[Si](C(C)CC)(C(C)CC)OCCC LAGUJICBGGFHSR-UHFFFAOYSA-N 0.000 description 1
- NTABREFATMHOMD-UHFFFAOYSA-N di(butan-2-yloxy)-di(propan-2-yl)silane Chemical compound CCC(C)O[Si](C(C)C)(C(C)C)OC(C)CC NTABREFATMHOMD-UHFFFAOYSA-N 0.000 description 1
- BRUBSFJFECVMDK-UHFFFAOYSA-N di(butan-2-yloxy)-dibutylsilane Chemical compound CCCC[Si](CCCC)(OC(C)CC)OC(C)CC BRUBSFJFECVMDK-UHFFFAOYSA-N 0.000 description 1
- UMFDNQISZRRQHX-UHFFFAOYSA-N di(butan-2-yloxy)-diethylsilane Chemical compound CCC(C)O[Si](CC)(CC)OC(C)CC UMFDNQISZRRQHX-UHFFFAOYSA-N 0.000 description 1
- DERJYZOBOMCDCS-UHFFFAOYSA-N di(butan-2-yloxy)-dimethylsilane Chemical compound CCC(C)O[Si](C)(C)OC(C)CC DERJYZOBOMCDCS-UHFFFAOYSA-N 0.000 description 1
- MCTLKEGMWAHKOY-UHFFFAOYSA-N di(butan-2-yloxy)-diphenylsilane Chemical compound C=1C=CC=CC=1[Si](OC(C)CC)(OC(C)CC)C1=CC=CC=C1 MCTLKEGMWAHKOY-UHFFFAOYSA-N 0.000 description 1
- VMIHKBXLARWWKA-UHFFFAOYSA-N di(butan-2-yloxy)-dipropylsilane Chemical compound CCC(C)O[Si](CCC)(CCC)OC(C)CC VMIHKBXLARWWKA-UHFFFAOYSA-N 0.000 description 1
- RLSUVIXGIBHTCN-UHFFFAOYSA-N di(butan-2-yloxy)-ditert-butylsilane Chemical compound CCC(C)O[Si](C(C)(C)C)(C(C)(C)C)OC(C)CC RLSUVIXGIBHTCN-UHFFFAOYSA-N 0.000 description 1
- DQVIFXQWYJRMSX-UHFFFAOYSA-N di(butan-2-yloxy)methyl-[di(butan-2-yloxy)methylsilylmethyl]silane Chemical compound CCC(C)OC(OC(C)CC)[SiH2]C[SiH2]C(OC(C)CC)OC(C)CC DQVIFXQWYJRMSX-UHFFFAOYSA-N 0.000 description 1
- XVCNAZQXIVBYAD-UHFFFAOYSA-N di(propan-2-yl)-di(propan-2-yloxy)silane Chemical compound CC(C)O[Si](C(C)C)(C(C)C)OC(C)C XVCNAZQXIVBYAD-UHFFFAOYSA-N 0.000 description 1
- LLBLHAHQBJSHED-UHFFFAOYSA-N di(propan-2-yl)-dipropoxysilane Chemical compound CCCO[Si](C(C)C)(C(C)C)OCCC LLBLHAHQBJSHED-UHFFFAOYSA-N 0.000 description 1
- SHZPQCKUFYRFBI-UHFFFAOYSA-N di(propan-2-yloxy)-dipropylsilane Chemical compound CCC[Si](CCC)(OC(C)C)OC(C)C SHZPQCKUFYRFBI-UHFFFAOYSA-N 0.000 description 1
- QSUGBLDUNQGBMH-UHFFFAOYSA-N di(propan-2-yloxy)methyl-[2-[di(propan-2-yloxy)methylsilyl]ethyl]silane Chemical compound CC(C)OC(OC(C)C)[SiH2]CC[SiH2]C(OC(C)C)OC(C)C QSUGBLDUNQGBMH-UHFFFAOYSA-N 0.000 description 1
- WCKWJLIMZRUXDP-UHFFFAOYSA-N di(propan-2-yloxy)methyl-[di(propan-2-yloxy)methylsilylmethyl]silane Chemical compound CC(C)OC(OC(C)C)[SiH2]C[SiH2]C(OC(C)C)OC(C)C WCKWJLIMZRUXDP-UHFFFAOYSA-N 0.000 description 1
- BYDYSWDFDXFNJR-UHFFFAOYSA-N di(propan-2-yloxy)methylsilylmethyl-tri(propan-2-yloxy)silane Chemical compound CC(C)OC(OC(C)C)[SiH2]C[Si](OC(C)C)(OC(C)C)OC(C)C BYDYSWDFDXFNJR-UHFFFAOYSA-N 0.000 description 1
- URSLNVMUSKPBTL-UHFFFAOYSA-N dibutoxy(dibutyl)silane Chemical compound CCCCO[Si](CCCC)(CCCC)OCCCC URSLNVMUSKPBTL-UHFFFAOYSA-N 0.000 description 1
- MGQFVQQCNPBJKC-UHFFFAOYSA-N dibutoxy(diethyl)silane Chemical compound CCCCO[Si](CC)(CC)OCCCC MGQFVQQCNPBJKC-UHFFFAOYSA-N 0.000 description 1
- GQNWJCQWBFHQAO-UHFFFAOYSA-N dibutoxy(dimethyl)silane Chemical compound CCCCO[Si](C)(C)OCCCC GQNWJCQWBFHQAO-UHFFFAOYSA-N 0.000 description 1
- OSMIWEAIYFILPL-UHFFFAOYSA-N dibutoxy(diphenyl)silane Chemical compound C=1C=CC=CC=1[Si](OCCCC)(OCCCC)C1=CC=CC=C1 OSMIWEAIYFILPL-UHFFFAOYSA-N 0.000 description 1
- BKGSSPASYNBWRR-UHFFFAOYSA-N dibutoxy(dipropyl)silane Chemical compound CCCCO[Si](CCC)(CCC)OCCCC BKGSSPASYNBWRR-UHFFFAOYSA-N 0.000 description 1
- JKCIXCWGOYSFPF-UHFFFAOYSA-N dibutoxy(ditert-butyl)silane Chemical compound CCCCO[Si](C(C)(C)C)(C(C)(C)C)OCCCC JKCIXCWGOYSFPF-UHFFFAOYSA-N 0.000 description 1
- WOMDWSFYXGEOTE-UHFFFAOYSA-N dibutoxy-di(propan-2-yl)silane Chemical compound CCCCO[Si](C(C)C)(C(C)C)OCCCC WOMDWSFYXGEOTE-UHFFFAOYSA-N 0.000 description 1
- DGPFXVBYDAVXLX-UHFFFAOYSA-N dibutyl(diethoxy)silane Chemical compound CCCC[Si](OCC)(OCC)CCCC DGPFXVBYDAVXLX-UHFFFAOYSA-N 0.000 description 1
- YPENMAABQGWRBR-UHFFFAOYSA-N dibutyl(dimethoxy)silane Chemical compound CCCC[Si](OC)(OC)CCCC YPENMAABQGWRBR-UHFFFAOYSA-N 0.000 description 1
- QDMXGHLVHDTPAA-UHFFFAOYSA-N dibutyl(diphenoxy)silane Chemical compound C=1C=CC=CC=1O[Si](CCCC)(CCCC)OC1=CC=CC=C1 QDMXGHLVHDTPAA-UHFFFAOYSA-N 0.000 description 1
- ZDJARFQAQIQMOG-UHFFFAOYSA-N dibutyl(dipropoxy)silane Chemical compound CCCC[Si](CCCC)(OCCC)OCCC ZDJARFQAQIQMOG-UHFFFAOYSA-N 0.000 description 1
- PYWGKTHCDIBIGL-UHFFFAOYSA-N dibutyl-bis[(2-methylpropan-2-yl)oxy]silane Chemical compound CCCC[Si](OC(C)(C)C)(OC(C)(C)C)CCCC PYWGKTHCDIBIGL-UHFFFAOYSA-N 0.000 description 1
- VNIJTNBFIJHUCJ-UHFFFAOYSA-N dibutyl-di(propan-2-yloxy)silane Chemical compound CCCC[Si](OC(C)C)(OC(C)C)CCCC VNIJTNBFIJHUCJ-UHFFFAOYSA-N 0.000 description 1
- JQVDAXLFBXTEQA-UHFFFAOYSA-N dibutylamine Chemical compound CCCCNCCCC JQVDAXLFBXTEQA-UHFFFAOYSA-N 0.000 description 1
- OMDLIAQYEYTYAT-UHFFFAOYSA-N dichloro(3-chloroprop-1-enyl)silane Chemical compound ClCC=C[SiH](Cl)Cl OMDLIAQYEYTYAT-UHFFFAOYSA-N 0.000 description 1
- KTQYJQFGNYHXMB-UHFFFAOYSA-N dichloro(methyl)silicon Chemical compound C[Si](Cl)Cl KTQYJQFGNYHXMB-UHFFFAOYSA-N 0.000 description 1
- RFDRHLPSLJEXSY-UHFFFAOYSA-N dichloro-(chloromethyl)-ethylsilane Chemical compound CC[Si](Cl)(Cl)CCl RFDRHLPSLJEXSY-UHFFFAOYSA-N 0.000 description 1
- JAYBZWYBCUJLNQ-UHFFFAOYSA-N dichloro-(chloromethyl)-methylsilane Chemical compound C[Si](Cl)(Cl)CCl JAYBZWYBCUJLNQ-UHFFFAOYSA-N 0.000 description 1
- OEQIEAZLCJWDRM-UHFFFAOYSA-N dichloro-(chloromethyl)-phenylsilane Chemical compound ClC[Si](Cl)(Cl)C1=CC=CC=C1 OEQIEAZLCJWDRM-UHFFFAOYSA-N 0.000 description 1
- 229960005215 dichloroacetic acid Drugs 0.000 description 1
- 229940117389 dichlorobenzene Drugs 0.000 description 1
- 229960004670 didecyldimethylammonium chloride Drugs 0.000 description 1
- ORLLLMPDVVUYCB-UHFFFAOYSA-N diethoxy-[ethoxy(diethyl)silyl]-ethylsilane Chemical compound CCO[Si](CC)(CC)[Si](CC)(OCC)OCC ORLLLMPDVVUYCB-UHFFFAOYSA-N 0.000 description 1
- XWXBXCRTPJXEEE-UHFFFAOYSA-N diethoxy-[ethoxy(dimethyl)silyl]-methylsilane Chemical compound CCO[Si](C)(C)[Si](C)(OCC)OCC XWXBXCRTPJXEEE-UHFFFAOYSA-N 0.000 description 1
- ONVNYOKOCHEBLL-UHFFFAOYSA-N diethoxy-[ethoxy(diphenyl)silyl]-phenylsilane Chemical compound C=1C=CC=CC=1[Si](OCC)(C=1C=CC=CC=1)[Si](OCC)(OCC)C1=CC=CC=C1 ONVNYOKOCHEBLL-UHFFFAOYSA-N 0.000 description 1
- VVKJJEAEVBNODX-UHFFFAOYSA-N diethoxy-di(propan-2-yl)silane Chemical compound CCO[Si](C(C)C)(C(C)C)OCC VVKJJEAEVBNODX-UHFFFAOYSA-N 0.000 description 1
- DJLPTEGQDXDGQC-UHFFFAOYSA-N diethoxy-methyl-triethoxysilylsilane Chemical compound CCO[Si](C)(OCC)[Si](OCC)(OCC)OCC DJLPTEGQDXDGQC-UHFFFAOYSA-N 0.000 description 1
- ZKIPWOVPMGZJAE-UHFFFAOYSA-N diethoxy-phenyl-triethoxysilylsilane Chemical compound CCO[Si](OCC)(OCC)[Si](OCC)(OCC)C1=CC=CC=C1 ZKIPWOVPMGZJAE-UHFFFAOYSA-N 0.000 description 1
- CTVMEMAHWVFNPU-UHFFFAOYSA-N diethoxymethyl-[2-(diethoxymethylsilyl)ethyl]silane Chemical compound CCOC(OCC)[SiH2]CC[SiH2]C(OCC)OCC CTVMEMAHWVFNPU-UHFFFAOYSA-N 0.000 description 1
- WYACBZDAHNBPPB-UHFFFAOYSA-N diethyl oxalate Chemical compound CCOC(=O)C(=O)OCC WYACBZDAHNBPPB-UHFFFAOYSA-N 0.000 description 1
- UFWOWQYGXPYINE-UHFFFAOYSA-N diethyl(diphenoxy)silane Chemical compound C=1C=CC=CC=1O[Si](CC)(CC)OC1=CC=CC=C1 UFWOWQYGXPYINE-UHFFFAOYSA-N 0.000 description 1
- SVEAHWYNNUEDST-UHFFFAOYSA-N diethyl-[ethyl(dimethoxy)silyl]-methoxysilane Chemical compound CC[Si](CC)(OC)[Si](CC)(OC)OC SVEAHWYNNUEDST-UHFFFAOYSA-N 0.000 description 1
- IBJXDSONJWUISJ-UHFFFAOYSA-N diethyl-[ethyl(diphenoxy)silyl]-phenoxysilane Chemical compound C=1C=CC=CC=1O[Si](CC)(OC=1C=CC=CC=1)[Si](CC)(CC)OC1=CC=CC=C1 IBJXDSONJWUISJ-UHFFFAOYSA-N 0.000 description 1
- HKAGYJNZCWXVCS-UHFFFAOYSA-N diethyl-bis[(2-methylpropan-2-yl)oxy]silane Chemical compound CC(C)(C)O[Si](CC)(CC)OC(C)(C)C HKAGYJNZCWXVCS-UHFFFAOYSA-N 0.000 description 1
- ZWPNXHXXRLYCHZ-UHFFFAOYSA-N diethyl-di(propan-2-yloxy)silane Chemical compound CC(C)O[Si](CC)(CC)OC(C)C ZWPNXHXXRLYCHZ-UHFFFAOYSA-N 0.000 description 1
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 1
- 229940019778 diethylene glycol diethyl ether Drugs 0.000 description 1
- 229940028356 diethylene glycol monobutyl ether Drugs 0.000 description 1
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 1
- UYAAVKFHBMJOJZ-UHFFFAOYSA-N diimidazo[1,3-b:1',3'-e]pyrazine-5,10-dione Chemical compound O=C1C2=CN=CN2C(=O)C2=CN=CN12 UYAAVKFHBMJOJZ-UHFFFAOYSA-N 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- JVUVKQDVTIIMOD-UHFFFAOYSA-N dimethoxy(dipropyl)silane Chemical compound CCC[Si](OC)(OC)CCC JVUVKQDVTIIMOD-UHFFFAOYSA-N 0.000 description 1
- UFVKUKOQUJOABJ-UHFFFAOYSA-N dimethoxy-[methoxy(diphenyl)silyl]-phenylsilane Chemical compound C=1C=CC=CC=1[Si](OC)(C=1C=CC=CC=1)[Si](OC)(OC)C1=CC=CC=C1 UFVKUKOQUJOABJ-UHFFFAOYSA-N 0.000 description 1
- VHPUZTHRFWIGAW-UHFFFAOYSA-N dimethoxy-di(propan-2-yl)silane Chemical compound CO[Si](OC)(C(C)C)C(C)C VHPUZTHRFWIGAW-UHFFFAOYSA-N 0.000 description 1
- WHGNXNCOTZPEEK-UHFFFAOYSA-N dimethoxy-methyl-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](C)(OC)CCCOCC1CO1 WHGNXNCOTZPEEK-UHFFFAOYSA-N 0.000 description 1
- ISRAHSWMKHSHAG-UHFFFAOYSA-N dimethoxy-methyl-trimethoxysilylsilane Chemical compound CO[Si](C)(OC)[Si](OC)(OC)OC ISRAHSWMKHSHAG-UHFFFAOYSA-N 0.000 description 1
- BRCDYPNDQTUZSL-UHFFFAOYSA-N dimethoxy-phenyl-trimethoxysilylsilane Chemical compound CO[Si](OC)(OC)[Si](OC)(OC)C1=CC=CC=C1 BRCDYPNDQTUZSL-UHFFFAOYSA-N 0.000 description 1
- AKPOQTZQHIWYJM-UHFFFAOYSA-N dimethoxymethylsilylmethyl(trimethoxy)silane Chemical compound COC(OC)[SiH2]C[Si](OC)(OC)OC AKPOQTZQHIWYJM-UHFFFAOYSA-N 0.000 description 1
- FBSAITBEAPNWJG-UHFFFAOYSA-N dimethyl phthalate Natural products CC(=O)OC1=CC=CC=C1OC(C)=O FBSAITBEAPNWJG-UHFFFAOYSA-N 0.000 description 1
- SWLVAJXQIOKFSJ-UHFFFAOYSA-N dimethyl(diphenoxy)silane Chemical compound C=1C=CC=CC=1O[Si](C)(C)OC1=CC=CC=C1 SWLVAJXQIOKFSJ-UHFFFAOYSA-N 0.000 description 1
- ZIDTUTFKRRXWTK-UHFFFAOYSA-N dimethyl(dipropoxy)silane Chemical compound CCCO[Si](C)(C)OCCC ZIDTUTFKRRXWTK-UHFFFAOYSA-N 0.000 description 1
- BGPNEHJZZDIFND-UHFFFAOYSA-N dimethyl-bis[(2-methylpropan-2-yl)oxy]silane Chemical compound CC(C)(C)O[Si](C)(C)OC(C)(C)C BGPNEHJZZDIFND-UHFFFAOYSA-N 0.000 description 1
- BPXCAJONOPIXJI-UHFFFAOYSA-N dimethyl-di(propan-2-yloxy)silane Chemical compound CC(C)O[Si](C)(C)OC(C)C BPXCAJONOPIXJI-UHFFFAOYSA-N 0.000 description 1
- REZZEXDLIUJMMS-UHFFFAOYSA-M dimethyldioctadecylammonium chloride Chemical compound [Cl-].CCCCCCCCCCCCCCCCCC[N+](C)(C)CCCCCCCCCCCCCCCCCC REZZEXDLIUJMMS-UHFFFAOYSA-M 0.000 description 1
- 229960001826 dimethylphthalate Drugs 0.000 description 1
- YLDKQPMORVEBRU-UHFFFAOYSA-N diphenoxy(diphenyl)silane Chemical compound C=1C=CC=CC=1O[Si](C=1C=CC=CC=1)(C=1C=CC=CC=1)OC1=CC=CC=C1 YLDKQPMORVEBRU-UHFFFAOYSA-N 0.000 description 1
- JFCVQVCWZYWWPV-UHFFFAOYSA-N diphenoxy(dipropyl)silane Chemical compound C=1C=CC=CC=1O[Si](CCC)(CCC)OC1=CC=CC=C1 JFCVQVCWZYWWPV-UHFFFAOYSA-N 0.000 description 1
- ZCLLMMBZLXTPCO-UHFFFAOYSA-N diphenoxy-[phenoxy(diphenyl)silyl]-phenylsilane Chemical compound C=1C=CC=CC=1O[Si]([Si](OC=1C=CC=CC=1)(C=1C=CC=CC=1)C=1C=CC=CC=1)(C=1C=CC=CC=1)OC1=CC=CC=C1 ZCLLMMBZLXTPCO-UHFFFAOYSA-N 0.000 description 1
- JPKFEPIUGPNLAR-UHFFFAOYSA-N diphenoxy-di(propan-2-yl)silane Chemical compound C=1C=CC=CC=1O[Si](C(C)C)(C(C)C)OC1=CC=CC=C1 JPKFEPIUGPNLAR-UHFFFAOYSA-N 0.000 description 1
- MKRWTGXFGXJSKZ-UHFFFAOYSA-N diphenoxy-phenyl-triphenoxysilylsilane Chemical compound C=1C=CC=CC=1O[Si]([Si](OC=1C=CC=CC=1)(OC=1C=CC=CC=1)C=1C=CC=CC=1)(OC=1C=CC=CC=1)OC1=CC=CC=C1 MKRWTGXFGXJSKZ-UHFFFAOYSA-N 0.000 description 1
- SLAYMDSSGGBWQB-UHFFFAOYSA-N diphenyl(dipropoxy)silane Chemical compound C=1C=CC=CC=1[Si](OCCC)(OCCC)C1=CC=CC=C1 SLAYMDSSGGBWQB-UHFFFAOYSA-N 0.000 description 1
- QAPWZQHBOVKNHP-UHFFFAOYSA-N diphenyl-di(propan-2-yloxy)silane Chemical compound C=1C=CC=CC=1[Si](OC(C)C)(OC(C)C)C1=CC=CC=C1 QAPWZQHBOVKNHP-UHFFFAOYSA-N 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- PCCKJULOKAICID-UHFFFAOYSA-N dipropoxymethyl-[2-(dipropoxymethylsilyl)ethyl]silane Chemical compound CCCOC(OCCC)[SiH2]CC[SiH2]C(OCCC)OCCC PCCKJULOKAICID-UHFFFAOYSA-N 0.000 description 1
- WEHWNAOGRSTTBQ-UHFFFAOYSA-N dipropylamine Chemical compound CCCNCCC WEHWNAOGRSTTBQ-UHFFFAOYSA-N 0.000 description 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 1
- 239000004664 distearyldimethylammonium chloride (DHTDMAC) Substances 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- GWCASPKBFBALDG-UHFFFAOYSA-N ditert-butyl(diethoxy)silane Chemical compound CCO[Si](C(C)(C)C)(C(C)(C)C)OCC GWCASPKBFBALDG-UHFFFAOYSA-N 0.000 description 1
- OANIYCQMEVXZCJ-UHFFFAOYSA-N ditert-butyl(dimethoxy)silane Chemical compound CO[Si](OC)(C(C)(C)C)C(C)(C)C OANIYCQMEVXZCJ-UHFFFAOYSA-N 0.000 description 1
- WOMHHBWXYINIPW-UHFFFAOYSA-N ditert-butyl(diphenoxy)silane Chemical compound C=1C=CC=CC=1O[Si](C(C)(C)C)(C(C)(C)C)OC1=CC=CC=C1 WOMHHBWXYINIPW-UHFFFAOYSA-N 0.000 description 1
- AUSJIUIFKLDCQZ-UHFFFAOYSA-N ditert-butyl(dipropoxy)silane Chemical compound CCCO[Si](C(C)(C)C)(C(C)(C)C)OCCC AUSJIUIFKLDCQZ-UHFFFAOYSA-N 0.000 description 1
- KDYNFDMKJXYFHQ-UHFFFAOYSA-N ditert-butyl-bis[(2-methylpropan-2-yl)oxy]silane Chemical compound CC(C)(C)O[Si](C(C)(C)C)(C(C)(C)C)OC(C)(C)C KDYNFDMKJXYFHQ-UHFFFAOYSA-N 0.000 description 1
- HZTYWQHBJNMFSW-UHFFFAOYSA-N ditert-butyl-di(propan-2-yloxy)silane Chemical compound CC(C)O[Si](C(C)(C)C)(C(C)(C)C)OC(C)C HZTYWQHBJNMFSW-UHFFFAOYSA-N 0.000 description 1
- ODQWQRRAPPTVAG-GZTJUZNOSA-N doxepin Chemical compound C1OC2=CC=CC=C2C(=C/CCN(C)C)/C2=CC=CC=C21 ODQWQRRAPPTVAG-GZTJUZNOSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- XWBDWHCCBGMXKG-UHFFFAOYSA-N ethanamine;hydron;chloride Chemical compound Cl.CCN XWBDWHCCBGMXKG-UHFFFAOYSA-N 0.000 description 1
- 125000005678 ethenylene group Chemical group [H]C([*:1])=C([H])[*:2] 0.000 description 1
- 125000005677 ethinylene group Chemical group [*:2]C#C[*:1] 0.000 description 1
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 1
- OFZOXQUFSGKMDQ-UHFFFAOYSA-N ethoxy-[ethoxy(diethyl)silyl]-diethylsilane Chemical compound CCO[Si](CC)(CC)[Si](CC)(CC)OCC OFZOXQUFSGKMDQ-UHFFFAOYSA-N 0.000 description 1
- GWIVSKPSMYHUAK-UHFFFAOYSA-N ethoxy-[ethoxy(dimethyl)silyl]-dimethylsilane Chemical compound CCO[Si](C)(C)[Si](C)(C)OCC GWIVSKPSMYHUAK-UHFFFAOYSA-N 0.000 description 1
- GPCIFOPQYZCLTR-UHFFFAOYSA-N ethoxy-[ethoxy(diphenyl)silyl]-diphenylsilane Chemical compound C=1C=CC=CC=1[Si]([Si](OCC)(C=1C=CC=CC=1)C=1C=CC=CC=1)(OCC)C1=CC=CC=C1 GPCIFOPQYZCLTR-UHFFFAOYSA-N 0.000 description 1
- QSCNLGHKALSYKF-UHFFFAOYSA-N ethoxymethanamine Chemical compound CCOCN QSCNLGHKALSYKF-UHFFFAOYSA-N 0.000 description 1
- XYIBRDXRRQCHLP-UHFFFAOYSA-N ethyl acetoacetate Chemical compound CCOC(=O)CC(C)=O XYIBRDXRRQCHLP-UHFFFAOYSA-N 0.000 description 1
- 229940116333 ethyl lactate Drugs 0.000 description 1
- MVUXVDIFQSGECB-UHFFFAOYSA-N ethyl n-(3-triethoxysilylpropyl)carbamate Chemical compound CCOC(=O)NCCC[Si](OCC)(OCC)OCC MVUXVDIFQSGECB-UHFFFAOYSA-N 0.000 description 1
- MHBPZEDIFIPGSX-UHFFFAOYSA-N ethyl n-(3-trimethoxysilylpropyl)carbamate Chemical compound CCOC(=O)NCCC[Si](OC)(OC)OC MHBPZEDIFIPGSX-UHFFFAOYSA-N 0.000 description 1
- HGWSCXYVBZYYDK-UHFFFAOYSA-N ethyl(triphenoxy)silane Chemical compound C=1C=CC=CC=1O[Si](OC=1C=CC=CC=1)(CC)OC1=CC=CC=C1 HGWSCXYVBZYYDK-UHFFFAOYSA-N 0.000 description 1
- KUCGHDUQOVVQED-UHFFFAOYSA-N ethyl(tripropoxy)silane Chemical compound CCCO[Si](CC)(OCCC)OCCC KUCGHDUQOVVQED-UHFFFAOYSA-N 0.000 description 1
- IFIOAMBFOHEANZ-UHFFFAOYSA-N ethyl-[ethyl(dimethoxy)silyl]-dimethoxysilane Chemical compound CC[Si](OC)(OC)[Si](CC)(OC)OC IFIOAMBFOHEANZ-UHFFFAOYSA-N 0.000 description 1
- ZNKNMONNHUJINA-UHFFFAOYSA-N ethyl-[ethyl(diphenoxy)silyl]-diphenoxysilane Chemical compound C=1C=CC=CC=1O[Si]([Si](CC)(OC=1C=CC=CC=1)OC=1C=CC=CC=1)(CC)OC1=CC=CC=C1 ZNKNMONNHUJINA-UHFFFAOYSA-N 0.000 description 1
- WTPUCDKHSSJFKA-UHFFFAOYSA-N ethyl-dimethoxy-trimethoxysilylsilane Chemical compound CC[Si](OC)(OC)[Si](OC)(OC)OC WTPUCDKHSSJFKA-UHFFFAOYSA-N 0.000 description 1
- CJEBOFHQMBHCKC-UHFFFAOYSA-N ethyl-diphenoxy-triphenoxysilylsilane Chemical compound C=1C=CC=CC=1O[Si]([Si](OC=1C=CC=CC=1)(OC=1C=CC=CC=1)OC=1C=CC=CC=1)(CC)OC1=CC=CC=C1 CJEBOFHQMBHCKC-UHFFFAOYSA-N 0.000 description 1
- MYEJNNDSIXAGNK-UHFFFAOYSA-N ethyl-tri(propan-2-yloxy)silane Chemical compound CC(C)O[Si](CC)(OC(C)C)OC(C)C MYEJNNDSIXAGNK-UHFFFAOYSA-N 0.000 description 1
- ZVQNVYMTWXEMSF-UHFFFAOYSA-N ethyl-tris[(2-methylpropan-2-yl)oxy]silane Chemical compound CC(C)(C)O[Si](CC)(OC(C)(C)C)OC(C)(C)C ZVQNVYMTWXEMSF-UHFFFAOYSA-N 0.000 description 1
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 125000003709 fluoroalkyl group Chemical group 0.000 description 1
- 125000001207 fluorophenyl group Chemical group 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 229940074391 gallic acid Drugs 0.000 description 1
- 235000004515 gallic acid Nutrition 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000001879 gelation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- WJLUBOLDZCQZEV-UHFFFAOYSA-M hexadecyl(trimethyl)azanium;hydroxide Chemical compound [OH-].CCCCCCCCCCCCCCCC[N+](C)(C)C WJLUBOLDZCQZEV-UHFFFAOYSA-M 0.000 description 1
- 125000004836 hexamethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[*:1] 0.000 description 1
- QNVRIHYSUZMSGM-UHFFFAOYSA-N hexan-2-ol Chemical compound CCCCC(C)O QNVRIHYSUZMSGM-UHFFFAOYSA-N 0.000 description 1
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000003456 ion exchange resin Substances 0.000 description 1
- 229920003303 ion-exchange polymer Polymers 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- QWTDNUCVQCZILF-UHFFFAOYSA-N iso-pentane Natural products CCC(C)C QWTDNUCVQCZILF-UHFFFAOYSA-N 0.000 description 1
- ZXEKIIBDNHEJCQ-UHFFFAOYSA-N isobutanol Chemical compound CC(C)CO ZXEKIIBDNHEJCQ-UHFFFAOYSA-N 0.000 description 1
- KXUHSQYYJYAXGZ-UHFFFAOYSA-N isobutylbenzene Chemical compound CC(C)CC1=CC=CC=C1 KXUHSQYYJYAXGZ-UHFFFAOYSA-N 0.000 description 1
- WFKAJVHLWXSISD-UHFFFAOYSA-N isobutyramide Chemical compound CC(C)C(N)=O WFKAJVHLWXSISD-UHFFFAOYSA-N 0.000 description 1
- QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- KQQKGWQCNNTQJW-UHFFFAOYSA-N linolenic acid Natural products CC=CCCC=CCC=CCCCCCCCC(O)=O KQQKGWQCNNTQJW-UHFFFAOYSA-N 0.000 description 1
- 229960004488 linolenic acid Drugs 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 239000001630 malic acid Substances 0.000 description 1
- 235000011090 malic acid Nutrition 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000008155 medical solution Substances 0.000 description 1
- HNEGQIOMVPPMNR-NSCUHMNNSA-N mesaconic acid Chemical compound OC(=O)C(/C)=C/C(O)=O HNEGQIOMVPPMNR-NSCUHMNNSA-N 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- RMIODHQZRUFFFF-UHFFFAOYSA-M methoxyacetate Chemical compound COCC([O-])=O RMIODHQZRUFFFF-UHFFFAOYSA-M 0.000 description 1
- UZKWTJUDCOPSNM-UHFFFAOYSA-N methoxybenzene Substances CCCCOC=C UZKWTJUDCOPSNM-UHFFFAOYSA-N 0.000 description 1
- IMXBRVLCKXGWSS-UHFFFAOYSA-N methyl 2-cyclohexylacetate Chemical compound COC(=O)CC1CCCCC1 IMXBRVLCKXGWSS-UHFFFAOYSA-N 0.000 description 1
- CRVGTESFCCXCTH-UHFFFAOYSA-N methyl diethanolamine Chemical compound OCCN(C)CCO CRVGTESFCCXCTH-UHFFFAOYSA-N 0.000 description 1
- 229940057867 methyl lactate Drugs 0.000 description 1
- YQRNTVUSJHYLNZ-UHFFFAOYSA-N methyl(tridecyl)azanium;chloride Chemical compound [Cl-].CCCCCCCCCCCCC[NH2+]C YQRNTVUSJHYLNZ-UHFFFAOYSA-N 0.000 description 1
- DRXHEPWCWBIQFJ-UHFFFAOYSA-N methyl(triphenoxy)silane Chemical compound C=1C=CC=CC=1O[Si](OC=1C=CC=CC=1)(C)OC1=CC=CC=C1 DRXHEPWCWBIQFJ-UHFFFAOYSA-N 0.000 description 1
- PFAPVFASCCOTID-UHFFFAOYSA-N methyl-[methyl(diphenoxy)silyl]-diphenoxysilane Chemical compound C=1C=CC=CC=1O[Si]([Si](C)(OC=1C=CC=CC=1)OC=1C=CC=CC=1)(C)OC1=CC=CC=C1 PFAPVFASCCOTID-UHFFFAOYSA-N 0.000 description 1
- GYNNXHKOJHMOHS-UHFFFAOYSA-N methyl-cycloheptane Natural products CC1CCCCCC1 GYNNXHKOJHMOHS-UHFFFAOYSA-N 0.000 description 1
- MFSRIWJYYDYFOH-UHFFFAOYSA-N methyl-diphenoxy-triphenoxysilylsilane Chemical compound C=1C=CC=CC=1O[Si]([Si](OC=1C=CC=CC=1)(OC=1C=CC=CC=1)OC=1C=CC=CC=1)(C)OC1=CC=CC=C1 MFSRIWJYYDYFOH-UHFFFAOYSA-N 0.000 description 1
- 239000005048 methyldichlorosilane Substances 0.000 description 1
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 1
- HNEGQIOMVPPMNR-UHFFFAOYSA-N methylfumaric acid Natural products OC(=O)C(C)=CC(O)=O HNEGQIOMVPPMNR-UHFFFAOYSA-N 0.000 description 1
- ZIYVHBGGAOATLY-UHFFFAOYSA-N methylmalonic acid Chemical compound OC(=O)C(C)C(O)=O ZIYVHBGGAOATLY-UHFFFAOYSA-N 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- PHQOGHDTIVQXHL-UHFFFAOYSA-N n'-(3-trimethoxysilylpropyl)ethane-1,2-diamine Chemical compound CO[Si](OC)(OC)CCCNCCN PHQOGHDTIVQXHL-UHFFFAOYSA-N 0.000 description 1
- VNRDAMBPFDPXSM-UHFFFAOYSA-N n'-[2-(3-triethoxysilylpropylamino)ethyl]ethane-1,2-diamine Chemical compound CCO[Si](OCC)(OCC)CCCNCCNCCN VNRDAMBPFDPXSM-UHFFFAOYSA-N 0.000 description 1
- NHBRUUFBSBSTHM-UHFFFAOYSA-N n'-[2-(3-trimethoxysilylpropylamino)ethyl]ethane-1,2-diamine Chemical compound CO[Si](OC)(OC)CCCNCCNCCN NHBRUUFBSBSTHM-UHFFFAOYSA-N 0.000 description 1
- MQWFLKHKWJMCEN-UHFFFAOYSA-N n'-[3-[dimethoxy(methyl)silyl]propyl]ethane-1,2-diamine Chemical compound CO[Si](C)(OC)CCCNCCN MQWFLKHKWJMCEN-UHFFFAOYSA-N 0.000 description 1
- RYPNVAIMJHBIQS-UHFFFAOYSA-N n'-butylbutane-1,4-diamine Chemical compound CCCCNCCCCN RYPNVAIMJHBIQS-UHFFFAOYSA-N 0.000 description 1
- DFPGBRPWDZFIPP-UHFFFAOYSA-N n'-butylethane-1,2-diamine Chemical compound CCCCNCCN DFPGBRPWDZFIPP-UHFFFAOYSA-N 0.000 description 1
- WXGKHEPWMCJHQE-UHFFFAOYSA-N n'-butylmethanediamine Chemical compound CCCCNCN WXGKHEPWMCJHQE-UHFFFAOYSA-N 0.000 description 1
- MIFWXJNZWLWCGL-UHFFFAOYSA-N n'-butylpropane-1,3-diamine Chemical compound CCCCNCCCN MIFWXJNZWLWCGL-UHFFFAOYSA-N 0.000 description 1
- SCZVXVGZMZRGRU-UHFFFAOYSA-N n'-ethylethane-1,2-diamine Chemical compound CCNCCN SCZVXVGZMZRGRU-UHFFFAOYSA-N 0.000 description 1
- JJRGWIVWXMEKCL-UHFFFAOYSA-N n'-ethylmethanediamine Chemical compound CCNCN JJRGWIVWXMEKCL-UHFFFAOYSA-N 0.000 description 1
- ODGYWRBCQWKSSH-UHFFFAOYSA-N n'-ethylpropane-1,3-diamine Chemical compound CCNCCCN ODGYWRBCQWKSSH-UHFFFAOYSA-N 0.000 description 1
- KFIGICHILYTCJF-UHFFFAOYSA-N n'-methylethane-1,2-diamine Chemical compound CNCCN KFIGICHILYTCJF-UHFFFAOYSA-N 0.000 description 1
- XOTDURGROKNGTI-UHFFFAOYSA-N n'-methylmethanediamine Chemical compound CNCN XOTDURGROKNGTI-UHFFFAOYSA-N 0.000 description 1
- QHJABUZHRJTCAR-UHFFFAOYSA-N n'-methylpropane-1,3-diamine Chemical compound CNCCCN QHJABUZHRJTCAR-UHFFFAOYSA-N 0.000 description 1
- GHQFRBNLAGNQOE-UHFFFAOYSA-N n'-propylbutane-1,4-diamine Chemical compound CCCNCCCCN GHQFRBNLAGNQOE-UHFFFAOYSA-N 0.000 description 1
- CFNHVUGPXZUTRR-UHFFFAOYSA-N n'-propylethane-1,2-diamine Chemical compound CCCNCCN CFNHVUGPXZUTRR-UHFFFAOYSA-N 0.000 description 1
- NTHFGDLJWMNYJT-UHFFFAOYSA-N n'-propylmethanediamine Chemical compound CCCNCN NTHFGDLJWMNYJT-UHFFFAOYSA-N 0.000 description 1
- OWKYZAGJTTTXOK-UHFFFAOYSA-N n'-propylpropane-1,3-diamine Chemical compound CCCNCCCN OWKYZAGJTTTXOK-UHFFFAOYSA-N 0.000 description 1
- DNJDQMRARVPSHZ-UHFFFAOYSA-N n,n,n',n'-tetrabutylethane-1,2-diamine Chemical compound CCCCN(CCCC)CCN(CCCC)CCCC DNJDQMRARVPSHZ-UHFFFAOYSA-N 0.000 description 1
- DIHKMUNUGQVFES-UHFFFAOYSA-N n,n,n',n'-tetraethylethane-1,2-diamine Chemical compound CCN(CC)CCN(CC)CC DIHKMUNUGQVFES-UHFFFAOYSA-N 0.000 description 1
- HVBXZPOGJMBMLN-UHFFFAOYSA-N n,n,n',n'-tetrapropylethane-1,2-diamine Chemical compound CCCN(CCC)CCN(CCC)CCC HVBXZPOGJMBMLN-UHFFFAOYSA-N 0.000 description 1
- KRKPYFLIYNGWTE-UHFFFAOYSA-N n,o-dimethylhydroxylamine Chemical compound CNOC KRKPYFLIYNGWTE-UHFFFAOYSA-N 0.000 description 1
- KBJFYLLAMSZSOG-UHFFFAOYSA-N n-(3-trimethoxysilylpropyl)aniline Chemical compound CO[Si](OC)(OC)CCCNC1=CC=CC=C1 KBJFYLLAMSZSOG-UHFFFAOYSA-N 0.000 description 1
- ILRLVKWBBFWKTN-UHFFFAOYSA-N n-benzyl-3-triethoxysilylpropan-1-amine Chemical compound CCO[Si](OCC)(OCC)CCCNCC1=CC=CC=C1 ILRLVKWBBFWKTN-UHFFFAOYSA-N 0.000 description 1
- CLYWMXVFAMGARU-UHFFFAOYSA-N n-benzyl-3-trimethoxysilylpropan-1-amine Chemical compound CO[Si](OC)(OC)CCCNCC1=CC=CC=C1 CLYWMXVFAMGARU-UHFFFAOYSA-N 0.000 description 1
- ROHAJWIUPFLJJM-UHFFFAOYSA-N n-butoxymethanamine Chemical compound CCCCONC ROHAJWIUPFLJJM-UHFFFAOYSA-N 0.000 description 1
- 229940017144 n-butyl lactate Drugs 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N n-hexanoic acid Natural products CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 125000001624 naphthyl group Chemical group 0.000 description 1
- 125000004957 naphthylene group Chemical group 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- WSGCRAOTEDLMFQ-UHFFFAOYSA-N nonan-5-one Chemical compound CCCCC(=O)CCCC WSGCRAOTEDLMFQ-UHFFFAOYSA-N 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- SJWFXCIHNDVPSH-UHFFFAOYSA-N octan-2-ol Chemical compound CCCCCCC(C)O SJWFXCIHNDVPSH-UHFFFAOYSA-N 0.000 description 1
- ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 description 1
- 229960002969 oleic acid Drugs 0.000 description 1
- 235000021313 oleic acid Nutrition 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 125000000962 organic group Chemical group 0.000 description 1
- 125000001181 organosilyl group Chemical group [SiH3]* 0.000 description 1
- JCGNDDUYTRNOFT-UHFFFAOYSA-N oxolane-2,4-dione Chemical compound O=C1COC(=O)C1 JCGNDDUYTRNOFT-UHFFFAOYSA-N 0.000 description 1
- FJKROLUGYXJWQN-UHFFFAOYSA-N papa-hydroxy-benzoic acid Natural products OC(=O)C1=CC=C(O)C=C1 FJKROLUGYXJWQN-UHFFFAOYSA-N 0.000 description 1
- JYVLIDXNZAXMDK-UHFFFAOYSA-N pentan-2-ol Chemical compound CCCC(C)O JYVLIDXNZAXMDK-UHFFFAOYSA-N 0.000 description 1
- GTCCGKPBSJZVRZ-UHFFFAOYSA-N pentane-2,4-diol Chemical compound CC(O)CC(C)O GTCCGKPBSJZVRZ-UHFFFAOYSA-N 0.000 description 1
- GXOHBWLPQHTYPF-UHFFFAOYSA-N pentyl 2-hydroxypropanoate Chemical compound CCCCCOC(=O)C(C)O GXOHBWLPQHTYPF-UHFFFAOYSA-N 0.000 description 1
- 238000005191 phase separation Methods 0.000 description 1
- WVDDGKGOMKODPV-ZQBYOMGUSA-N phenyl(114C)methanol Chemical compound O[14CH2]C1=CC=CC=C1 WVDDGKGOMKODPV-ZQBYOMGUSA-N 0.000 description 1
- FABOKLHQXVRECE-UHFFFAOYSA-N phenyl(tripropoxy)silane Chemical compound CCCO[Si](OCCC)(OCCC)C1=CC=CC=C1 FABOKLHQXVRECE-UHFFFAOYSA-N 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 229920005575 poly(amic acid) Polymers 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000412 polyarylene Polymers 0.000 description 1
- 238000012643 polycondensation polymerization Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000000710 polymer precipitation Methods 0.000 description 1
- 229920000193 polymethacrylate Polymers 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- SZEGZMUSBCXNLO-UHFFFAOYSA-N propan-2-yl(tripropoxy)silane Chemical compound CCCO[Si](OCCC)(OCCC)C(C)C SZEGZMUSBCXNLO-UHFFFAOYSA-N 0.000 description 1
- YHNFWGSEMSWPBF-UHFFFAOYSA-N propan-2-yl-tri(propan-2-yloxy)silane Chemical compound CC(C)O[Si](OC(C)C)(OC(C)C)C(C)C YHNFWGSEMSWPBF-UHFFFAOYSA-N 0.000 description 1
- 125000004368 propenyl group Chemical group C(=CC)* 0.000 description 1
- 125000006410 propenylene group Chemical group 0.000 description 1
- 235000019260 propionic acid Nutrition 0.000 description 1
- 125000002572 propoxy group Chemical group [*]OC([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- QLGGKSSLRJWNNV-UHFFFAOYSA-N propoxymethanamine Chemical compound CCCOCN QLGGKSSLRJWNNV-UHFFFAOYSA-N 0.000 description 1
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 1
- 229940116423 propylene glycol diacetate Drugs 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 229960004889 salicylic acid Drugs 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- JXOHGGNKMLTUBP-HSUXUTPPSA-N shikimic acid Chemical compound O[C@@H]1CC(C(O)=O)=C[C@@H](O)[C@H]1O JXOHGGNKMLTUBP-HSUXUTPPSA-N 0.000 description 1
- JXOHGGNKMLTUBP-JKUQZMGJSA-N shikimic acid Natural products O[C@@H]1CC(C(O)=O)=C[C@H](O)[C@@H]1O JXOHGGNKMLTUBP-JKUQZMGJSA-N 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 229960004274 stearic acid Drugs 0.000 description 1
- 125000005156 substituted alkylene group Chemical group 0.000 description 1
- 239000011975 tartaric acid Substances 0.000 description 1
- 235000002906 tartaric acid Nutrition 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- MNGOKIKZIAKVME-UHFFFAOYSA-N tert-butyl(propoxy)silane Chemical compound CCCO[SiH2]C(C)(C)C MNGOKIKZIAKVME-UHFFFAOYSA-N 0.000 description 1
- ASEHKQZNVUOPRW-UHFFFAOYSA-N tert-butyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C(C)(C)C ASEHKQZNVUOPRW-UHFFFAOYSA-N 0.000 description 1
- HXLWJGIPGJFBEZ-UHFFFAOYSA-N tert-butyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C(C)(C)C HXLWJGIPGJFBEZ-UHFFFAOYSA-N 0.000 description 1
- YBCWQJZHAOTDLY-UHFFFAOYSA-N tert-butyl(triphenoxy)silane Chemical compound C=1C=CC=CC=1O[Si](OC=1C=CC=CC=1)(C(C)(C)C)OC1=CC=CC=C1 YBCWQJZHAOTDLY-UHFFFAOYSA-N 0.000 description 1
- HVEXJEOBOQONBC-UHFFFAOYSA-N tert-butyl-tri(propan-2-yloxy)silane Chemical compound CC(C)O[Si](OC(C)C)(OC(C)C)C(C)(C)C HVEXJEOBOQONBC-UHFFFAOYSA-N 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- BIMIJXSZMVGEJR-UHFFFAOYSA-M tetra(nonyl)azanium;hydroxide Chemical compound [OH-].CCCCCCCCC[N+](CCCCCCCCC)(CCCCCCCCC)CCCCCCCCC BIMIJXSZMVGEJR-UHFFFAOYSA-M 0.000 description 1
- DVDPRLCDQQNFKT-UHFFFAOYSA-M tetra(undecyl)azanium;hydroxide Chemical compound [OH-].CCCCCCCCCCC[N+](CCCCCCCCCCC)(CCCCCCCCCCC)CCCCCCCCCCC DVDPRLCDQQNFKT-UHFFFAOYSA-M 0.000 description 1
- OQTSOKXAWXRIAC-UHFFFAOYSA-N tetrabutan-2-yl silicate Chemical compound CCC(C)O[Si](OC(C)CC)(OC(C)CC)OC(C)CC OQTSOKXAWXRIAC-UHFFFAOYSA-N 0.000 description 1
- UQMOLLPKNHFRAC-UHFFFAOYSA-N tetrabutyl silicate Chemical compound CCCCO[Si](OCCCC)(OCCCC)OCCCC UQMOLLPKNHFRAC-UHFFFAOYSA-N 0.000 description 1
- JRMUNVKIHCOMHV-UHFFFAOYSA-M tetrabutylammonium bromide Chemical compound [Br-].CCCC[N+](CCCC)(CCCC)CCCC JRMUNVKIHCOMHV-UHFFFAOYSA-M 0.000 description 1
- NHGXDBSUJJNIRV-UHFFFAOYSA-M tetrabutylammonium chloride Chemical compound [Cl-].CCCC[N+](CCCC)(CCCC)CCCC NHGXDBSUJJNIRV-UHFFFAOYSA-M 0.000 description 1
- BRGJIIMZXMWMCC-UHFFFAOYSA-N tetradecan-2-ol Chemical compound CCCCCCCCCCCCC(C)O BRGJIIMZXMWMCC-UHFFFAOYSA-N 0.000 description 1
- WRNABFFKQDPPOM-UHFFFAOYSA-M tetradodecylazanium;hydroxide Chemical compound [OH-].CCCCCCCCCCCC[N+](CCCCCCCCCCCC)(CCCCCCCCCCCC)CCCCCCCCCCCC WRNABFFKQDPPOM-UHFFFAOYSA-M 0.000 description 1
- HWCKGOZZJDHMNC-UHFFFAOYSA-M tetraethylammonium bromide Chemical compound [Br-].CC[N+](CC)(CC)CC HWCKGOZZJDHMNC-UHFFFAOYSA-M 0.000 description 1
- YMBCJWGVCUEGHA-UHFFFAOYSA-M tetraethylammonium chloride Chemical compound [Cl-].CC[N+](CC)(CC)CC YMBCJWGVCUEGHA-UHFFFAOYSA-M 0.000 description 1
- FNSGKPBAZVBJRX-UHFFFAOYSA-M tetraheptylazanium;hydroxide Chemical compound [OH-].CCCCCCC[N+](CCCCCCC)(CCCCCCC)CCCCCCC FNSGKPBAZVBJRX-UHFFFAOYSA-M 0.000 description 1
- ZYSDERHSJJEJDS-UHFFFAOYSA-M tetrakis-decylazanium;hydroxide Chemical compound [OH-].CCCCCCCCCC[N+](CCCCCCCCCC)(CCCCCCCCCC)CCCCCCCCCC ZYSDERHSJJEJDS-UHFFFAOYSA-M 0.000 description 1
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 1
- DCFYRBLFVWYBIJ-UHFFFAOYSA-M tetraoctylazanium;hydroxide Chemical compound [OH-].CCCCCCCC[N+](CCCCCCCC)(CCCCCCCC)CCCCCCCC DCFYRBLFVWYBIJ-UHFFFAOYSA-M 0.000 description 1
- JVOPCCBEQRRLOJ-UHFFFAOYSA-M tetrapentylazanium;hydroxide Chemical compound [OH-].CCCCC[N+](CCCCC)(CCCCC)CCCCC JVOPCCBEQRRLOJ-UHFFFAOYSA-M 0.000 description 1
- ADLSSRLDGACTEX-UHFFFAOYSA-N tetraphenyl silicate Chemical compound C=1C=CC=CC=1O[Si](OC=1C=CC=CC=1)(OC=1C=CC=CC=1)OC1=CC=CC=C1 ADLSSRLDGACTEX-UHFFFAOYSA-N 0.000 description 1
- ZUEKXCXHTXJYAR-UHFFFAOYSA-N tetrapropan-2-yl silicate Chemical compound CC(C)O[Si](OC(C)C)(OC(C)C)OC(C)C ZUEKXCXHTXJYAR-UHFFFAOYSA-N 0.000 description 1
- ZQZCOBSUOFHDEE-UHFFFAOYSA-N tetrapropyl silicate Chemical compound CCCO[Si](OCCC)(OCCC)OCCC ZQZCOBSUOFHDEE-UHFFFAOYSA-N 0.000 description 1
- BCLLLHFGVQKVKL-UHFFFAOYSA-N tetratert-butyl silicate Chemical compound CC(C)(C)O[Si](OC(C)(C)C)(OC(C)(C)C)OC(C)(C)C BCLLLHFGVQKVKL-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 125000003944 tolyl group Chemical group 0.000 description 1
- FTWJZZHBSKNAPN-UHFFFAOYSA-N tri(butan-2-yloxy)-[2-[di(butan-2-yloxy)methylsilyl]ethyl]silane Chemical compound CCC(C)OC(OC(C)CC)[SiH2]CC[Si](OC(C)CC)(OC(C)CC)OC(C)CC FTWJZZHBSKNAPN-UHFFFAOYSA-N 0.000 description 1
- KLPWIDSFARMZQW-UHFFFAOYSA-N tri(butan-2-yloxy)-[2-tri(butan-2-yloxy)silylethyl]silane Chemical compound CCC(C)O[Si](OC(C)CC)(OC(C)CC)CC[Si](OC(C)CC)(OC(C)CC)OC(C)CC KLPWIDSFARMZQW-UHFFFAOYSA-N 0.000 description 1
- IVRXTRZVBJSOLZ-UHFFFAOYSA-N tri(butan-2-yloxy)-[2-tri(butan-2-yloxy)silylphenyl]silane Chemical compound CCC(C)O[Si](OC(C)CC)(OC(C)CC)C1=CC=CC=C1[Si](OC(C)CC)(OC(C)CC)OC(C)CC IVRXTRZVBJSOLZ-UHFFFAOYSA-N 0.000 description 1
- SGZJOYFOVHWDFY-UHFFFAOYSA-N tri(butan-2-yloxy)-[3-tri(butan-2-yloxy)silylphenyl]silane Chemical compound CCC(C)O[Si](OC(C)CC)(OC(C)CC)C1=CC=CC([Si](OC(C)CC)(OC(C)CC)OC(C)CC)=C1 SGZJOYFOVHWDFY-UHFFFAOYSA-N 0.000 description 1
- OHGMZEITXQWDLR-UHFFFAOYSA-N tri(butan-2-yloxy)-[4-tri(butan-2-yloxy)silylphenyl]silane Chemical compound CCC(C)O[Si](OC(C)CC)(OC(C)CC)C1=CC=C([Si](OC(C)CC)(OC(C)CC)OC(C)CC)C=C1 OHGMZEITXQWDLR-UHFFFAOYSA-N 0.000 description 1
- FURAZISLABARIL-UHFFFAOYSA-N tri(butan-2-yloxy)-[di(butan-2-yloxy)methylsilylmethyl]silane Chemical compound CCC(C)OC(OC(C)CC)[SiH2]C[Si](OC(C)CC)(OC(C)CC)OC(C)CC FURAZISLABARIL-UHFFFAOYSA-N 0.000 description 1
- IKCSBNRFPJTRMT-UHFFFAOYSA-N tri(butan-2-yloxy)-[tri(butan-2-yloxy)silylmethyl]silane Chemical compound CCC(C)O[Si](OC(C)CC)(OC(C)CC)C[Si](OC(C)CC)(OC(C)CC)OC(C)CC IKCSBNRFPJTRMT-UHFFFAOYSA-N 0.000 description 1
- SGHZCASSRKVVCL-UHFFFAOYSA-N tri(butan-2-yloxy)-ethylsilane Chemical compound CCC(C)O[Si](CC)(OC(C)CC)OC(C)CC SGHZCASSRKVVCL-UHFFFAOYSA-N 0.000 description 1
- RJNDDRZGJNVASH-UHFFFAOYSA-N tri(butan-2-yloxy)-methylsilane Chemical compound CCC(C)O[Si](C)(OC(C)CC)OC(C)CC RJNDDRZGJNVASH-UHFFFAOYSA-N 0.000 description 1
- PCDRXIBYKFIRQR-UHFFFAOYSA-N tri(butan-2-yloxy)-phenylsilane Chemical compound CCC(C)O[Si](OC(C)CC)(OC(C)CC)C1=CC=CC=C1 PCDRXIBYKFIRQR-UHFFFAOYSA-N 0.000 description 1
- QSQGFMKPTBYFTM-UHFFFAOYSA-N tri(butan-2-yloxy)-propan-2-ylsilane Chemical compound CCC(C)O[Si](OC(C)CC)(OC(C)CC)C(C)C QSQGFMKPTBYFTM-UHFFFAOYSA-N 0.000 description 1
- ZARIZDBUWOPYMT-UHFFFAOYSA-N tri(butan-2-yloxy)-propylsilane Chemical compound CCC(C)O[Si](CCC)(OC(C)CC)OC(C)CC ZARIZDBUWOPYMT-UHFFFAOYSA-N 0.000 description 1
- JKJUOACCVYNCDI-UHFFFAOYSA-N tri(butan-2-yloxy)-tert-butylsilane Chemical compound CCC(C)O[Si](OC(C)CC)(OC(C)CC)C(C)(C)C JKJUOACCVYNCDI-UHFFFAOYSA-N 0.000 description 1
- NJLVRMVLOPLQPN-UHFFFAOYSA-N tri(propan-2-yloxy)-[2-tri(propan-2-yloxy)silylethyl]silane Chemical compound CC(C)O[Si](OC(C)C)(OC(C)C)CC[Si](OC(C)C)(OC(C)C)OC(C)C NJLVRMVLOPLQPN-UHFFFAOYSA-N 0.000 description 1
- DWZGQVYXDVZBBB-UHFFFAOYSA-N tributoxy(2-tributoxysilylethyl)silane Chemical compound CCCCO[Si](OCCCC)(OCCCC)CC[Si](OCCCC)(OCCCC)OCCCC DWZGQVYXDVZBBB-UHFFFAOYSA-N 0.000 description 1
- DEKZKCDJQLBBRA-UHFFFAOYSA-N tributoxy(butyl)silane Chemical compound CCCCO[Si](CCCC)(OCCCC)OCCCC DEKZKCDJQLBBRA-UHFFFAOYSA-N 0.000 description 1
- CQLAZINSWMHWAQ-UHFFFAOYSA-N tributoxy(dibutoxymethylsilylmethyl)silane Chemical compound CCCCOC(OCCCC)[SiH2]C[Si](OCCCC)(OCCCC)OCCCC CQLAZINSWMHWAQ-UHFFFAOYSA-N 0.000 description 1
- GIHPVQDFBJMUAO-UHFFFAOYSA-N tributoxy(ethyl)silane Chemical compound CCCCO[Si](CC)(OCCCC)OCCCC GIHPVQDFBJMUAO-UHFFFAOYSA-N 0.000 description 1
- GYZQBXUDWTVJDF-UHFFFAOYSA-N tributoxy(methyl)silane Chemical compound CCCCO[Si](C)(OCCCC)OCCCC GYZQBXUDWTVJDF-UHFFFAOYSA-N 0.000 description 1
- INUOIYMEJLOQFN-UHFFFAOYSA-N tributoxy(phenyl)silane Chemical compound CCCCO[Si](OCCCC)(OCCCC)C1=CC=CC=C1 INUOIYMEJLOQFN-UHFFFAOYSA-N 0.000 description 1
- LEZQEMOONYYJBM-UHFFFAOYSA-N tributoxy(propan-2-yl)silane Chemical compound CCCCO[Si](OCCCC)(OCCCC)C(C)C LEZQEMOONYYJBM-UHFFFAOYSA-N 0.000 description 1
- WAAWAIHPWOJHJJ-UHFFFAOYSA-N tributoxy(propyl)silane Chemical compound CCCCO[Si](CCC)(OCCCC)OCCCC WAAWAIHPWOJHJJ-UHFFFAOYSA-N 0.000 description 1
- MVXBTESZGSNIIB-UHFFFAOYSA-N tributoxy(tert-butyl)silane Chemical compound CCCCO[Si](OCCCC)(OCCCC)C(C)(C)C MVXBTESZGSNIIB-UHFFFAOYSA-N 0.000 description 1
- JXXQPVMVSMWLGZ-UHFFFAOYSA-N tributoxy(tributoxysilylmethyl)silane Chemical compound CCCCO[Si](OCCCC)(OCCCC)C[Si](OCCCC)(OCCCC)OCCCC JXXQPVMVSMWLGZ-UHFFFAOYSA-N 0.000 description 1
- ZYXLOEAJFSQDQG-UHFFFAOYSA-N tributoxy-(2-tributoxysilylphenyl)silane Chemical compound CCCCO[Si](OCCCC)(OCCCC)C1=CC=CC=C1[Si](OCCCC)(OCCCC)OCCCC ZYXLOEAJFSQDQG-UHFFFAOYSA-N 0.000 description 1
- YBNXDKRALACDIA-UHFFFAOYSA-N tributoxy-(4-tributoxysilylphenyl)silane Chemical compound CCCCO[Si](OCCCC)(OCCCC)C1=CC=C([Si](OCCCC)(OCCCC)OCCCC)C=C1 YBNXDKRALACDIA-UHFFFAOYSA-N 0.000 description 1
- DHAWHVVWUNNONG-UHFFFAOYSA-M tributyl(methyl)azanium;bromide Chemical compound [Br-].CCCC[N+](C)(CCCC)CCCC DHAWHVVWUNNONG-UHFFFAOYSA-M 0.000 description 1
- IMFACGCPASFAPR-UHFFFAOYSA-N tributylamine Chemical compound CCCCN(CCCC)CCCC IMFACGCPASFAPR-UHFFFAOYSA-N 0.000 description 1
- CAPIMQICDAJXSB-UHFFFAOYSA-N trichloro(1-chloroethyl)silane Chemical compound CC(Cl)[Si](Cl)(Cl)Cl CAPIMQICDAJXSB-UHFFFAOYSA-N 0.000 description 1
- SNYHRPNTNQYJMD-UHFFFAOYSA-N trichloro(1-chloropropyl)silane Chemical compound CCC(Cl)[Si](Cl)(Cl)Cl SNYHRPNTNQYJMD-UHFFFAOYSA-N 0.000 description 1
- YNJBWRMUSHSURL-UHFFFAOYSA-N trichloroacetic acid Chemical compound OC(=O)C(Cl)(Cl)Cl YNJBWRMUSHSURL-UHFFFAOYSA-N 0.000 description 1
- JCVQKRGIASEUKR-UHFFFAOYSA-N triethoxy(phenyl)silane Chemical compound CCO[Si](OCC)(OCC)C1=CC=CC=C1 JCVQKRGIASEUKR-UHFFFAOYSA-N 0.000 description 1
- BJDLPDPRMYAOCM-UHFFFAOYSA-N triethoxy(propan-2-yl)silane Chemical compound CCO[Si](OCC)(OCC)C(C)C BJDLPDPRMYAOCM-UHFFFAOYSA-N 0.000 description 1
- NBXZNTLFQLUFES-UHFFFAOYSA-N triethoxy(propyl)silane Chemical compound CCC[Si](OCC)(OCC)OCC NBXZNTLFQLUFES-UHFFFAOYSA-N 0.000 description 1
- JIOGKDWMNMIDEY-UHFFFAOYSA-N triethoxy-(2-triethoxysilylphenyl)silane Chemical compound CCO[Si](OCC)(OCC)C1=CC=CC=C1[Si](OCC)(OCC)OCC JIOGKDWMNMIDEY-UHFFFAOYSA-N 0.000 description 1
- QQQSFSZALRVCSZ-UHFFFAOYSA-N triethoxysilane Chemical compound CCO[SiH](OCC)OCC QQQSFSZALRVCSZ-UHFFFAOYSA-N 0.000 description 1
- LGROXJWYRXANBB-UHFFFAOYSA-N trimethoxy(propan-2-yl)silane Chemical compound CO[Si](OC)(OC)C(C)C LGROXJWYRXANBB-UHFFFAOYSA-N 0.000 description 1
- HQYALQRYBUJWDH-UHFFFAOYSA-N trimethoxy(propyl)silane Chemical compound CCC[Si](OC)(OC)OC HQYALQRYBUJWDH-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- FZGRTEYZSVFFSE-UHFFFAOYSA-L trimethyl(octadecyl)azanium dibromide Chemical compound [Br-].C(CCCCCCCCCCCCCCCCC)[N+](C)(C)C.[Br-].C(CCCCCCCCCCCCCCCCC)[N+](C)(C)C FZGRTEYZSVFFSE-UHFFFAOYSA-L 0.000 description 1
- FLXZVVQJJIGXRS-UHFFFAOYSA-M trimethyl(octadecyl)azanium;hydroxide Chemical compound [OH-].CCCCCCCCCCCCCCCCCC[N+](C)(C)C FLXZVVQJJIGXRS-UHFFFAOYSA-M 0.000 description 1
- IXJNGXCZSCHDFE-UHFFFAOYSA-N triphenoxy(phenyl)silane Chemical compound C=1C=CC=CC=1O[Si](C=1C=CC=CC=1)(OC=1C=CC=CC=1)OC1=CC=CC=C1 IXJNGXCZSCHDFE-UHFFFAOYSA-N 0.000 description 1
- FNNJGIKXHZZGCV-UHFFFAOYSA-N triphenoxy(propan-2-yl)silane Chemical compound C=1C=CC=CC=1O[Si](OC=1C=CC=CC=1)(C(C)C)OC1=CC=CC=C1 FNNJGIKXHZZGCV-UHFFFAOYSA-N 0.000 description 1
- AMUIJRKZTXWCEA-UHFFFAOYSA-N triphenoxy(propyl)silane Chemical compound C=1C=CC=CC=1O[Si](OC=1C=CC=CC=1)(CCC)OC1=CC=CC=C1 AMUIJRKZTXWCEA-UHFFFAOYSA-N 0.000 description 1
- MUCRQDBOUNQJFE-UHFFFAOYSA-N triphenoxy(triphenoxysilyl)silane Chemical compound C=1C=CC=CC=1O[Si]([Si](OC=1C=CC=CC=1)(OC=1C=CC=CC=1)OC=1C=CC=CC=1)(OC=1C=CC=CC=1)OC1=CC=CC=C1 MUCRQDBOUNQJFE-UHFFFAOYSA-N 0.000 description 1
- QDOHRQCMIFOPEY-UHFFFAOYSA-N tripropoxy(2-tripropoxysilylethyl)silane Chemical compound CCCO[Si](OCCC)(OCCC)CC[Si](OCCC)(OCCC)OCCC QDOHRQCMIFOPEY-UHFFFAOYSA-N 0.000 description 1
- VUWVDNLZJXLQPT-UHFFFAOYSA-N tripropoxy(propyl)silane Chemical compound CCCO[Si](CCC)(OCCC)OCCC VUWVDNLZJXLQPT-UHFFFAOYSA-N 0.000 description 1
- BZIXIRYKSIMLOB-UHFFFAOYSA-N tripropoxy(tripropoxysilylmethyl)silane Chemical compound CCCO[Si](OCCC)(OCCC)C[Si](OCCC)(OCCC)OCCC BZIXIRYKSIMLOB-UHFFFAOYSA-N 0.000 description 1
- NBAPKCYEEBMZDW-UHFFFAOYSA-N tripropoxy-(2-tripropoxysilylphenyl)silane Chemical compound CCCO[Si](OCCC)(OCCC)C1=CC=CC=C1[Si](OCCC)(OCCC)OCCC NBAPKCYEEBMZDW-UHFFFAOYSA-N 0.000 description 1
- YMAKWPVRMIUZBP-UHFFFAOYSA-N tripropoxy-(3-tripropoxysilylphenyl)silane Chemical compound CCCO[Si](OCCC)(OCCC)C1=CC=CC([Si](OCCC)(OCCC)OCCC)=C1 YMAKWPVRMIUZBP-UHFFFAOYSA-N 0.000 description 1
- FOUOZDXPXSKVEL-UHFFFAOYSA-N tripropoxy-(4-tripropoxysilylphenyl)silane Chemical compound CCCO[Si](OCCC)(OCCC)C1=CC=C([Si](OCCC)(OCCC)OCCC)C=C1 FOUOZDXPXSKVEL-UHFFFAOYSA-N 0.000 description 1
- YFTHZRPMJXBUME-UHFFFAOYSA-N tripropylamine Chemical compound CCCN(CCC)CCC YFTHZRPMJXBUME-UHFFFAOYSA-N 0.000 description 1
- ZZEMYLNHCSTIPH-UHFFFAOYSA-N tris[(2-methylpropan-2-yl)oxy]-[2-[tris[(2-methylpropan-2-yl)oxy]silyl]phenyl]silane Chemical compound CC(C)(C)O[Si](OC(C)(C)C)(OC(C)(C)C)C1=CC=CC=C1[Si](OC(C)(C)C)(OC(C)(C)C)OC(C)(C)C ZZEMYLNHCSTIPH-UHFFFAOYSA-N 0.000 description 1
- NNKMRNUOGTXRCM-UHFFFAOYSA-N tris[(2-methylpropan-2-yl)oxy]-[3-[tris[(2-methylpropan-2-yl)oxy]silyl]phenyl]silane Chemical compound CC(C)(C)O[Si](OC(C)(C)C)(OC(C)(C)C)C1=CC=CC([Si](OC(C)(C)C)(OC(C)(C)C)OC(C)(C)C)=C1 NNKMRNUOGTXRCM-UHFFFAOYSA-N 0.000 description 1
- QJJZQRNPNLTSNS-UHFFFAOYSA-N tris[(2-methylpropan-2-yl)oxy]-[tris[(2-methylpropan-2-yl)oxy]silylmethyl]silane Chemical compound CC(C)(C)O[Si](OC(C)(C)C)(OC(C)(C)C)C[Si](OC(C)(C)C)(OC(C)(C)C)OC(C)(C)C QJJZQRNPNLTSNS-UHFFFAOYSA-N 0.000 description 1
- KGOOITCIBGXHJO-UHFFFAOYSA-N tris[(2-methylpropan-2-yl)oxy]-phenylsilane Chemical compound CC(C)(C)O[Si](OC(C)(C)C)(OC(C)(C)C)C1=CC=CC=C1 KGOOITCIBGXHJO-UHFFFAOYSA-N 0.000 description 1
- MJIHPVLPZKWFBL-UHFFFAOYSA-N tris[(2-methylpropan-2-yl)oxy]-propan-2-ylsilane Chemical compound CC(C)(C)O[Si](C(C)C)(OC(C)(C)C)OC(C)(C)C MJIHPVLPZKWFBL-UHFFFAOYSA-N 0.000 description 1
- DIZPPYBTFPZSGK-UHFFFAOYSA-N tris[(2-methylpropan-2-yl)oxy]-propylsilane Chemical compound CCC[Si](OC(C)(C)C)(OC(C)(C)C)OC(C)(C)C DIZPPYBTFPZSGK-UHFFFAOYSA-N 0.000 description 1
- XMUJIPOFTAHSOK-UHFFFAOYSA-N undecan-2-ol Chemical compound CCCCCCCCCC(C)O XMUJIPOFTAHSOK-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000003643 water by type Substances 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Landscapes
- Compositions Of Macromolecular Compounds (AREA)
- Paints Or Removers (AREA)
- Silicon Polymers (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
Description
(式中、RおよびR1〜R3は同一または異なり、アルキル基、アルケニル基、アルキニル基またはアリール基を示し、Xはハロゲン原子、ヒドロキシ基、アルコキシ基、またはアシロキシ基を示し、nは0〜2の整数を示す。)
(式中、RおよびR1〜R3は同一または異なり、アルキル基、アルケニル基、アルキニル基またはアリール基を示し、Xはハロゲン原子、ヒドロキシ基、アルコキシ基、またはアシロキシ基を示し、nは0〜2の整数を示す。)
(式中、R4は、水素原子、フッ素原子、アルキル基、アルケニル基、アルキニル基、またはアリール基を示し、X’はハロゲン原子、アルコキシ基、またはアシロキシ基を示し、aは0〜3の整数を示す。)
R5 bY’3−bSi−(R7)d−SiZ’3−cR6 c ・・・・・(3)
〔式中、R5およびR6は同一または異なり、アルキル基、アルケニル基、アルキニル基、またはアリール基を示し、bおよびcは同一または異なり、0〜2の整数を示し、R7は酸素原子,フェニレン基、または−(CH2)x−で表される基(ここで、xは1〜6の整数である。)を示し、Y’およびZ’は同一または異なり、ハロゲン原子、アルコキシ基、またはアシロキシ基を示し、dは0または1を示す。〕
(式中、R8は、水素原子、ハロゲン原子、ヒドロキシ基、アルコキシ基、アシロキシ基、スルホン基、メタンスルホン基、トリフルオロメタンスルホン基、アルキル基、アリール基、アリル基、およびグリシジル基からなる群より選ばれる基を示し、R9はハロゲン原子、ヒドロキシ基、アルコキシ基、アシロキシ基、スルホン基、メタンスルホン基、トリフルオロメタンスルホン基、アルキル基、アリール基、アリル基、およびグリシジル基からなる群より選ばれる基を示し、R10,R11は同一または異なり、ハロゲン原子、ヒドロキシ基、アルコキシ基、アシロキシ基、スルホン基、メタンスルホン基、トリフルオロメタンスルホン基、炭素数2〜6のアルキル基、アリール基、アリル基、およびグリシジル基からなる群より選ばれる基を示し、R12〜R14は同一または異なり、置換または非置換のメチレン基、アルキレン基、アルケニレン基、アルキニレン基、アリーレン基を示し、e,f,gは、それぞれ0〜10,000の数を示し、10<e+f+g<10,000の条件を満たす。)
(X1X2X3X4N)aY ・・・・・(5)
(式中、X1,X2,X3,X4は同一または異なり、水素原子、炭素数1〜20のアルキル基、ヒドロキシアルキル基、アリール基、またはアリールアルキル基を示し、Yはハロゲン原子または1〜4価のアニオン性基を示し、aは1〜4の整数を示す。)
本発明の一実施形態に係るポリマーの製造方法は、(A)下記一般式(1)で表される少なくとも1種のシランモノマー(以下、「(A)成分」ともいう。)と、(B)加水分解性基含有シランモノマー(以下、「(B)成分」ともいう。)と、(C)加水分解性基含有カルボシラン(以下、「(C)成分」ともいう。)とを、塩基性触媒の存在下で共縮合することを含む。
(式中、RおよびR1〜R3は同一または異なり、アルキル基、アルケニル基、アルキニル基またはアリール基を示し、Xはハロゲン原子、ヒドロキシ基、アルコキシ基、またはアシロキシ基を示し、nは0〜2の整数を示す。)
(A)成分は、前記一般式(1)で表される少なくとも1種のシランモノマーである。
(B)成分は、加水分解性基含有シランモノマーである。(B)加水分解性基含有シランモノマーは、下記一般式(2)で表される化合物(以下、「化合物1」という)および下記一般式(3)で表される化合物(以下、「化合物2」という)から選ばれた少なくとも1種のシラン化合物であることができる。
R4 aSiX’4−a ・・・・・(2)
(式中、R4は、水素原子、フッ素原子、アルキル基、アルケニル基、アルキニル基、またはアリール基を示し、X’はハロゲン原子、アルコキシ基、またはアシロキシ基を示し、aは0〜3の整数を示す。)
R5 bY’3−bSi−(R7)d−SiZ’3−cR6 c ・・・・・(3)
〔式中、R5およびR6は同一または異なり、アルキル基、アルケニル基、アルキニル基、またはアリール基を示し、bおよびcは同一または異なり、0〜2の整数を示し、R7は酸素原子,フェニレン基、または−(CH2)x−で表される基(ここで、xは1〜6の整数である。)を示し、Y’およびZ’は同一または異なり、ハロゲン原子、アルコキシ基、またはアシロキシ基を示し、dは0または1を示す。〕
化合物1の具体例としては、例えば、メチルトリメトキシシラン、メチルトリエトキシシラン、メチルトリ−n−プロポキシシラン、メチルトリイソプロポキシシラン、メチルトリ−n−ブトキシシラン、メチルトリ−sec−ブトキシシラン、メチルトリ−tert−ブトキシシラン、メチルトリフェノキシシラン、エチルトリメトキシシラン、エチルトリエトキシシラン、エチルトリ−n−プロポキシシラン、エチルトリイソプロポキシシラン、エチルトリ−n−ブトキシシラン、エチルトリ−sec−ブトキシシラン、エチルトリ−tert−ブトキシシラン、エチルトリフェノキシシラン、n−プロピルトリメトキシシラン、n−プロピルトリエトキシシラン、n−プロピルトリ−n−プロポキシシラン、n−プロピルトリイソプロポキシシラン、n−プロピルトリ−n−ブトキシシラン、n−プロピルトリ−sec−ブトキシシラン、n−プロピルトリ−tert−ブトキシシラン、n−プロピルトリフェノキシシラン、イソプロピルトリメトキシシラン、イソプロピルトリエトキシシラン、イソプロピルトリ−n−プロポキシシラン、イソプロピルトリイソプロポキシシラン、イソプロピルトリ−n−ブトキシシラン、イソプロピルトリ−sec−ブトキシシラン、イソプロピルトリ−tert−ブトキシシラン、イソプロピルトリフェノキシシラン、n−ブチルトリメトキシシラン、n−ブチルトリエトキシシラン、n−ブチルトリ−n−プロポキシシラン、n−ブチルトリイソプロポキシシラン、n−ブチルトリ−n−ブトキシシラン、n−ブチルトリ−sec−ブトキシシラン、n−ブチルトリ−tert−ブトキシシラン、n−ブチルトリフェノキシシラン、sec−ブチルトリメトキシシラン、sec−ブチルイソトリエトキシシラン、sec−ブチルトリ−n−プロポキシシラン、sec−ブチルトリイソプロポキシシラン、sec−ブチルトリ−n−ブトキシシラン、sec−ブチルトリ−sec−ブトキシシラン、sec−ブチルトリ−tert−ブトキシシラン、sec−ブチルトリフェノキシシラン、tert−ブチルトリメトキシシラン、tert−ブチルトリエトキシシラン、tert−ブチルト−n−プロポキシシラン、tert−ブチルトリイソプロポキシシラン、tert−ブチルトリ−n−ブトキシシラン、tert−ブチルトリ−sec−ブトキシシラン、tert−ブチルトリ−tert−ブトキシシラン、tert−ブチルトリフェノキシシラン、フェニルトリメトキシシラン、フェニルトリエトキシシラン、フェニルトリ−n−プロポキシシラン、フェニルトリイソプロポキシシラン、フェニルトリ−n−ブトキシシラン、フェニルトリ−sec−ブトキシシラン、フェニルトリ−tert−ブトキシシラン、フェニルトリフェノキシシラン、ジメチルジメトキシシラン、ジメチルジエトキシシラン、ジメチルジ−n−プロポキシシラン、ジメチルジイソプロポキシシラン、ジメチルジ−n−ブトキシシラン、ジメチルジ−sec−ブトキシシラン、ジメチルジ−tert−ブトキシシラン、ジメチルジフェノキシシラン、ジエチルジメトキシシラン、ジエチルジエトキシシラン、ジエチルジ−n−プロポキシシラン、ジエチルジイソプロポキシシラン、ジエチルジ−n−ブトキシシラン、ジエチルジ−sec−ブトキシシラン、ジエチルジ−tert−ブトキシシラン、ジエチルジフェノキシシラン、ジ−n−プロピルジメトキシシラン、ジ−n−プロピルジエトキシシラン、ジ−n−プロピルジ−n−プロポキシシラン、ジ−n−プロピルジイソプロポキシシラン、ジ−n−プロピルジ−n−ブトキシシラン、ジ−n−プロピルジ−sec−ブトキシシラン、ジ−n−プロピルジ−tert−ブトキシシラン、ジ−n−プロピルジ−フェノキシシラン、ジイソプロピルジメトキシシラン、ジイソプロピルジエトキシシラン、ジイソプロピルジ−n−プロポキシシラン、ジイソプロピルジイソプロポキシシラン、ジイソプロピルジ−n−ブトキシシラン、ジイソプロピルジ−sec−ブトキシシラン、ジイソプロピルジ−tert−ブトキシシラン、ジイソプロピルジフェノキシシラン、ジ−n−ブチルジメトキシシラン、ジ−n−ブチルジエトキシシラン、ジ−n−ブチルジ−n−プロポキシシラン、ジ−n−ブチルジイソプロポキシシラン、ジ−n−ブチルジ−n−ブトキシシラン、ジ−n−ブチルジ−sec−ブトキシシラン、ジ−n−ブチルジ−tert−ブトキシシラン、ジ−n−ブチルジ−フェノキシシラン、ジ−sec−ブチルジメトキシシラン、ジ−sec−ブチルジエトキシシラン、ジ−sec−ブチルジ−n−プロポキシシラン、ジ−sec−ブチルジイソプロポキシシラン、ジ−sec−ブチルジ−n−ブトキシシラン、ジ−sec−ブチルジ−sec−ブトキシシラン、ジ−sec−ブチルジ−tert−ブトキシシラン、ジ−sec−ブチルジ−フェノキシシラン、ジ−tert−ブチルジメトキシシラン、ジ−tert−ブチルジエトキシシラン、ジ−tert−ブチルジ−n−プロポキシシラン、ジ−tert−ブチルジイソプロポキシシラン、ジ−tert−ブチルジ−n−ブトキシシラン、ジ−tert−ブチルジ−sec−ブトキシシラン、ジ−tert−ブチルジ−tert−ブトキシシラン、ジ−tert−ブチルジ−フェノキシシラン、ジフェニルジメトキシシラン、ジフェニルジエトキシシラン、ジフェニルジ−n−プロポキシシラン、ジフェニルジイソプロポキシシラン、ジフェニルジ−n−ブトキシシラン、ジフェニルジ−sec−ブトキシシラン、ジフェニルジ−tert−ブトキシシラン、ジフェニルジフェノキシシラン、テトラメトキシシラン、テトラエトキシシラン、テトラ−n−プロポキシシラン、テトラ−iso−プロポキシシラン、テトラ−n−ブトキシラン、テトラ−sec−ブトキシシラン、テトラ−tert−ブトキシシラン、テトラフェノキシシランなどを挙げることができる。化合物1は1種あるいは2種以上を同時に使用してもよい。
前記一般式(3)において、R5およびR6としては、前記一般式(1)のRおよびR1〜R3として例示したものと同様の基を挙げることができる。
(C)成分は、加水分解性基含有カルボシランである。(C)加水分解性基含有カルボシランは、下記一般式(4)で表される少なくとも1種のポリカルボシラン(以下、「化合物3」ともいう。)であることができる。
(式中、R8は、水素原子、ハロゲン原子、ヒドロキシ基、アルコキシ基、アシロキシ基、スルホン基、メタンスルホン基、トリフルオロメタンスルホン基、アルキル基、アリール基、アリル基、およびグリシジル基からなる群より選ばれる基を示し、R9はハロゲン原子、ヒドロキシ基、アルコキシ基、アシロキシ基、スルホン基、メタンスルホン基、トリフルオロメタンスルホン基、アルキル基、アリール基、アリル基、およびグリシジル基からなる群より選ばれる基を示し、R10,R11は同一または異なり、ハロゲン原子、ヒドロキシ基、アルコキシ基、アシロキシ基、スルホン基、メタンスルホン基、トリフルオロメタンスルホン基、炭素数2〜6のアルキル基、アリール基、アリル基、およびグリシジル基からなる群より選ばれる基を示し、R12〜R14は同一または異なり、置換または非置換のメチレン基、アルキレン基、アルケニレン基、アルキニレン基、アリーレン基を示し、e,f,gは、それぞれ0〜10,000の数を示し、10<e+f+g<10,000の条件を満たす。)
(式中、RaおよびRbは同一または異なり、水素原子、ハロゲン原子、ヒドロキシ基、アルコキシ基、スルホン基、メタンスルホン基、トリフルオロメタンスルホン基、アルキル基、アルケニル基、アルキニル基またはアリール基を示し、Rcは置換のアルキレン基、アルケニレン基、アルキニレン基、またはアリーレン基を示し、Xはハロゲン原子、ヒドロキシ基、アルコキシ基、またはアシロキシ基を示し、Yはハロゲン原子を示す)
(式中、RdおよびReは同一または異なり、水素原子、ハロゲン原子、ヒドロキシル基、アルコキシ基、スルホン基、メタンスルホン基、トリフルオロメタンスルホン基、アルキル基、アルケニル基、アルキニル基またはアリール基を示し、Rfは置換のメチレン基、アルキレン基、アルケニレン基、アルキニレン基、またはアリーレン基を示し、nは2〜4の整数を示す。)
本発明の一実施形態に係るポリマーの製造において、塩基性触媒の存在下で(A)〜(C)成分を共縮合することにより、得られるポリマーの分子構造に存在する分子鎖の分岐度を高くすることができ、かつ、その分子量をより大きくすることができる。これにより、上述した構造を有するポリマーを得ることができる。
(X1X2X3X4N)aY・・・・・(5)
前記ポリマーの製造においては、有機溶剤中で(A)〜(C)成分の共縮合を行なうことができる。ここで、有機溶剤としては、後述する有機溶剤の中でも下記一般式(8)で表される溶剤を単独でまたは他の溶剤と組み合わせて用いることが好ましい。
R15O(CHCH3CH2O)γR16 ・・・・・(8)
〔R15およびR16は、それぞれ独立して水素原子、炭素数1〜4のアルキル基またはCH3CO−から選ばれる1価の有機基を示し、γは1〜2の整数を表す。〕
炭素原子の含有量(%)=(ポリマーの炭素原子数)/(ポリマーの総原子数)×100
本発明の一実施形態に係る絶縁膜形成用組成物(以下、単に「膜形成用組成物」ともいう。)は、前記製造方法によって得られたポリマーおよび有機溶剤を含有する。
本発明の一実施形態に係る膜形成用組成物に用いることができる有機溶剤としては、例えば、アルコール系溶媒、ケトン系溶媒、アミド系溶媒、エーテル系溶媒、エステル系溶媒、脂肪族炭化水素系溶媒、芳香族系溶媒および含ハロゲン溶媒の群から選ばれた少なくとも1種が挙げられる。
エチレングリコール、1,2−プロピレングリコール、1,3−ブチレングリコール、ペンタンジオール−2,4、2−メチルペンタンジオール−2,4、ヘキサンジオール−2,5、ヘプタンジオール−2,4、2−エチルヘキサンジオール−1,3、ジエチレングリコール、ジプロピレングリコール、トリエチレングリコール、トリプロピレングリコールなどの多価アルコール系溶媒;
エチレングリコールモノメチルエーテル、エチレングリコールモノエチルエーテル、エチレングリコールモノプロピルエーテル、エチレングリコールモノブチルエーテル、エチレングリコールモノヘキシルエーテル、エチレングリコールモノフェニルエーテル、エチレングリコールモノ−2−エチルブチルエーテル、ジエチレングリコールモノメチルエーテル、ジエチレングリコールモノエチルエーテル、ジエチレングリコールモノプロピルエーテル、ジエチレングリコールモノブチルエーテル、ジエチレングリコールモノヘキシルエーテル、プロピレングリコールモノメチルエーテル、プロピレングリコールモノエチルエーテル、プロピレングリコールモノプロピルエーテル、プロピレングリコールモノブチルエーテル、ジプロピレングリコールモノメチルエーテル、ジプロピレングリコールモノエチルエーテル、ジプロピレングリコールモノプロピルエーテルなどの多価アルコール部分エーテル系溶媒;などを挙げることができる。これらのアルコール系溶媒は、1種あるいは2種以上を同時に使用してもよい。
本発明の一実施形態に係る膜形成用組成物は、前記製造方法で得られたポリマーとは別の有機ポリマー(以下、「他の有機ポリマー」という。)、界面活性剤、シランカップリング剤などの成分をさらに含有してもよい。また、これらの添加物は、本発明の一実施形態に係る膜形成用組成物を製造する前の、各成分が溶解もしくは分散された溶剤中に添加されていてもよい。
本発明の一実施形態に係る膜形成用組成物で使用可能な他の有機ポリマーは、シリカ系膜中に空孔を形成するための易分解成分として添加することができる。このような有機ポリマーを添加することは、特開2000−290590号公報、特開2000−313612号公報、Hedrick, J.L.,et al. "Templating Nanoporosity in Thin Film Dielectric Insulators". Adv. Mater., 10 (13), 1049, 1998.等の参考文献で記述されており、同様な有機ポリマーを添加してもよい。
本発明の一実施形態に係る膜形成用組成物で使用可能な界面活性剤としては、たとえば、ノニオン系界面活性剤、アニオン系界面活性剤、カチオン系界面活性剤、両性界面活性剤などが挙げられ、さらには、フッ素系界面活性剤、シリコーン系界面活性剤、ポリアルキレンオキシド系界面活性剤、ポリ(メタ)アクリレート系界面活性剤などを挙げることができ、好ましくはフッ素系界面活性剤、シリコーン系界面活性剤を挙げることができる。
本発明の一実施形態に係る膜形成用組成物で使用可能なシランカップリング剤としては、例えば、3−グリシジロキシプロピルトリメトキシシラン、3−アミノグリシジロキシプロピルトリエトキシシラン、3−メタクリロキシプロピルトリメトキシシラン、3−グリシジロキシプロピルメチルジメトキシシラン、1−メタクリロキシプロピルメチルジメトキシシラン、3−アミノプロピルトリメトキシシラン、3−アミノプロピルトリエトキシシラン、2−アミノプロピルトリメトキシシラン、2−アミノプロピルトリエトキシシラン、N−(2−アミノエチル)−3−アミノプロピルトリメトキシシラン、N−(2−アミノエチル)−3−アミノプロピルメチルジメトキシシラン、3−ウレイドプロピルトリメトキシシラン、3−ウレイドプロピルトリエトキシシラン、N−エトキシカルボニル−3−アミノプロピルトリメトキシシラン、N−エトキシカルボニル−3−アミノプロピルトリエトキシシラン、N−トリエトキシシリルプロピルトリエチレントリアミン、N−トリエトキシシリルプロピルトリエチレントリアミン、10−トリメトキシシリル−1,4,7−トリアザデカン、10−トリエトキシシリル−1,4,7−トリアザデカン、9−トリメトキシシリル−3,6−ジアザノニルアセテート、9−トリエトキシシリル−3,6−ジアザノニルアセテート、N−ベンジル−3−アミノプロピルトリメトキシシラン、N−ベンジル−3−アミノプロピルトリエトキシシラン、N−フェニル−3−アミノプロピルトリメトキシシラン、N−フェニル−3−アミノプロピルトリエトキシシラン、N−ビス(オキシエチレン)−3−アミノプロピルトリメトキシシラン、N−ビス(オキシエチレン)−3−アミノプロピルトリエトキシシランなどが挙げられる。これらは、1種あるいは2種以上を同時に使用しても良い。
本発明の一実施形態に係る絶縁膜の製造方法は、前記本発明の一実施形態に係る膜形成用組成物を基板に塗布し、30〜450℃に加熱することを含む。
本発明の一実施形態に係るシリカ系絶縁膜は、上記絶縁膜の製造方法により得られる。
(a)RIEなどの半導体プロセスによるトランジスタ構造へのダメージが極めて少ないことから、エッチング耐性(例えば、ドライエッチング耐性)に優れていること、
(b)薬液耐性(例えば、ウエットエッチング耐性)に優れていること、
(c)膜形成用組成物が特定の組成および炭素原子の含有量を有するので、比誘電率、弾性率などの絶縁膜特性に優れていること、
(d)疎水性が高く、吸湿性が低いため、低い比誘電率を維持できること、
(e)弾性率などの機械的強度が優れており、例えば銅ダマシン構造の形成に耐えうること、
などの特徴を有する。
以下、本発明を、実施例を挙げてさらに具体的に説明する。本発明は以下の実施例に限定されるものではない。なお、実施例および比較例中の「部」および「%」は特記しない限り、それぞれ重量部および重量%であることを示している。
以下の方法にて、ポリマーの製造、該ポリマーを用いた膜形成用組成物の製造、ならびにシリカ系膜の形成を行った。
5.1.1−1.合成例1
石英製セパラブルフラスコ中で、ジメトキシポリカルボシラン(C−1)15.8g((C)成分)と、[(トリメチルシリル)メチル]トリエトキシシラン50.1g((A)成分)と、メチルトリメトキシシラン68.1gおよびテトラメトキシシラン45.7g((B)成分)と、テトラプロピルアンモニウムハイドロオキサイドの25重量%水溶液29.1gとをメタノール1,000gに溶解させたのち、スリーワンモーターで攪拌させ、溶液温度を55℃に安定させた。次に、イオン交換水124.2gとプロピレングリコールモノエチルエーテル203.2gとの混合溶液を1時間かけて溶液に添加した。
石英製セパラブルフラスコ中で、ジメトキシポリカルボシラン(C−1)15.8g((C)成分)と、メチルトリメトキシシラン115.1gおよびテトラメトキシシラン55.3g((B)成分)と、テトラプロピルアンモニウムハイドロオキサイドの25重量%水溶液37.4gとをメタノール1000gに溶解させたのち、スリーワンモーターで攪拌させ、溶液温度を55℃に安定させた。次に、イオン交換水137.7gとプロピレングリコールモノエチルエーテル213.3gとの混合溶液を1時間かけて溶液に添加した。
石英製セパラブルフラスコ中で、ジメトキシポリカルボシラン(C−1)15.7g((C)成分)と、メチルトリメトキシシラン159.8g((B)成分)と、テトラプロピルアンモニウムハイドロオキサイドの25重量%水溶液33.5gとをメタノール1000gに溶解させたのち、スリーワンモーターで攪拌させ、溶液温度を55℃に安定させた。次に、イオン交換水123.4gとプロピレングリコールモノエチルエーテル201.4gとの混合溶液を1時間かけて溶液に添加した。
石英製セパラブルフラスコ中で、ジメトキシポリカルボシラン(C−1)86.3g((C)成分)と、メチルトリメトキシシラン57.8gおよびテトラメトキシシラン27.6g((B)成分)と、テトラプロピルアンモニウムハイドロオキサイドの25重量%水溶液43.2gとをメタノール1000gに溶解させたのち、スリーワンモーターで攪拌させ、溶液温度を55℃に安定させた。次に、イオン交換水159.1gとプロピレングリコールモノエチルエーテル243.7gとの混合溶液を1時間かけて溶液に添加した。
石英製セパラブルフラスコ中で、[(トリメチルシリル)メチル]メチルジクロロシラン10.0g((A)成分)と、ジメトキシポリカルボシラン(C−1)9.0g((C)成分)と、メチルトリメトキシシラン16.9gおよびテトラメトキシシラン11.3g((B)成分)とをメタノール300gに溶解させたのち、スリーワンモーターで攪拌させ、溶液温度を55℃に安定させた。次に、イオン交換水33.2gと、プロピレングリコールモノエチルエーテル50.2gと、テトラプロピルアンモニウムハイドロオキサイドの25重量%水溶液9.1gとの混合溶液を溶液に一度に添加した。その後、55℃で4時間反応させたのち、酢酸の10%プロピレングリコールモノプロピルエーテル溶液15gを添加し、さらに30分間反応させ、反応液を室温まで冷却した。メタノールおよび水を含む溶液を50℃にてエバポレーションで反応液から除去し、反応液(V)を得た。このようにして得られた縮合物(ポリマー)の重量平均分子量は、42,000であった。
石英製セパラブルフラスコ中で、ジメトキシポリカルボシラン(C−1)26.8g((C)成分)と、メチルトリメトキシシラン18.5gおよびテトラメトキシシラン2.3g((B)成分)と、テトラプロピルアンモニウムハイドロオキサイドの25重量%水溶液12.1gとをメタノール300gに溶解させたのち、スリーワンモーターで攪拌させ、溶液温度を55℃に安定させた。次に、イオン交換水45.1gとプロピレングリコールモノエチルエーテル50.7gとの混合溶液を1時間かけて溶液に添加した。
上記合成例および比較合成例で得られた反応液(I)〜(VI)を0.2μm孔径のテフロン(登録商標)製フィルターでろ過を行ない、実施例1,2および比較例1〜4の膜形成用組成物をそれぞれ得た。
前記5.1.1.で得られた縮合物(ポリマー)および前記5.1.2.で得られたシリカ系膜に関する各種の評価を以下の方法により行なった。
下記条件によるゲルパーミエーションクロマトグラフィー(GPC)法により測定した。
カラム:昭和電工(株)製のSHODEX A−80M(長さ50cm)
測定温度:40℃
流速:1cc/分
0.1Ω・cm以下の抵抗率を有する8インチのN型シリコンウエハ上に、上述の方法にて形成されたシリカ系膜に、蒸着法によりアルミニウム電極パターンを形成させ比誘電率測定用サンプルを作成した。該サンプルを周波数100kHzの周波数で、アリジェント社製、HP16451B電極およびHP4284AプレシジョンLCRメータを用いてCV法によりシリカ系膜の比誘電率を測定した。
上述の方法にて形成されたシリカ系膜について、ナノインデンターXP(ナノインスツルメント社製)を用いて、連続剛性測定法により機械的強度(弾性率・硬度)を測定した。
ハイブリッドポリマー膜が形成された8インチウエハーを、室温で0.2%の希フッ酸水溶液中に1分間および3分間浸漬し、上述の方法にて形成されたシリカ系膜の浸漬前後の膜厚変化を観察した。下記に定義する残膜率が99%以上であれば、薬液耐性が良好であると判断し、残膜率が99%未満である場合、薬液耐性が不良であると判断した。表1において、薬液耐性が良好であるものを「A」で示し、薬液耐性が不良であるものを「B」で示した。
残膜率(%)=(浸漬後の膜の膜厚)÷(浸漬前の膜の膜厚)×100
実施例1で得られたシリカ系膜は、薬液耐性試験が良好であり、かつ、吸湿性の目安であるΔkも適当な値であった。これに対して、比較例1,2では、ポリマーを製造する際において、ポリカルボシランの配合量は実施例1と同一であるが、(A)成分を使用しなかった。このため、比較例1で得られたシリカ系膜を希フッ酸水溶液中に3分間浸すと薬液耐性が低下した。また、比較例3では、ポリマーの製造において、炭素原子の含有量が多い(A)成分を用いずに、炭素原子の含有量を実施例1で製造されたポリマーの炭素原子の含有量に合わせるために、モノマー中の(C)成分の配合量を多くした。その結果、比較例3で得られたシリカ系膜は、薬液耐性は良好なものの、Δkが大きい数値となった。
Claims (7)
- (A)下記一般式(1)で表される少なくとも1種のシランモノマーと、(B)下記一般式(2)で表される少なくとも1種のシラン化合物と、(C)下記一般式(4)で表される少なくとも1種のポリカルボシランとを、塩基性触媒の存在下で共縮合して、重量平均分子量が2,000〜200,000かつ炭素原子の含有量が12.5〜22.0原子%のポリマーを得ることを含む、ポリマーの製造方法。
(式中、RおよびR1〜R3は同一または異なり、アルキル基、アルケニル基、アルキニル基またはアリール基を示し、Xはハロゲン原子、ヒドロキシ基、アルコキシ基、またはアシロキシ基を示し、nは0〜2の整数を示す。)
R4 aSiX’4−a ・・・・・(2)
(式中、R4は、水素原子、フッ素原子、アルキル基、アルケニル基、アルキニル基、またはアリール基を示し、X’はハロゲン原子、アルコキシ基、またはアシロキシ基を示し、aは0〜3の整数を示す。)
(式中、R8は、水素原子、ハロゲン原子、ヒドロキシ基、アルコキシ基、アシロキシ基、スルホン基、メタンスルホン基、トリフルオロメタンスルホン基、アルキル基、アリール基、アリル基、およびグリシジル基からなる群より選ばれる基を示し、R9はハロゲ
ン原子、ヒドロキシ基、アルコキシ基、アシロキシ基、スルホン基、メタンスルホン基、トリフルオロメタンスルホン基、アルキル基、アリール基、アリル基、およびグリシジル基からなる群より選ばれる基を示し、R10,R11は同一または異なり、ハロゲン原子、ヒドロキシ基、アルコキシ基、アシロキシ基、スルホン基、メタンスルホン基、トリフルオロメタンスルホン基、炭素数2〜6のアルキル基、アリール基、アリル基、およびグリシジル基からなる群より選ばれる基を示し、かつ、R8〜R11の少なくとも1つはハロゲン原子、アルコキシ基またはアシロキシ基であり、R12〜R14は同一または異なり、置換または非置換のメチレン基、アルキレン基、アルケニレン基、アルキニレン基、アリーレン基を示し、e,f,gは、それぞれ0〜10,000の数を示し、10<e+f+g<10,000の条件を満たす。) - 請求項1または2おいて、
前記塩基性触媒は、下記一般式(5)で表される含窒素化合物である、ポリマーの製造方法。
(X1X2X3X4N)aY ・・・・・(5)
(式中、X1,X2,X3,X4は同一または異なり、水素原子、炭素数1〜20のアルキル基、ヒドロキシアルキル基、アリール基、またはアリールアルキル基を示し、Yはハロゲン原子または1〜4価のアニオン性基を示し、aは1〜4の整数を示す。) - 請求項1ないし3のいずれかにおいて、
前記共縮合を有機溶剤中にて行なう、ポリマーの製造方法。 - 請求項1ないし4のいずれかにおいて、
前記(C)ポリカルボシランの重量平均分子量が300〜100,000である、ポリマーの製造方法。 - (A)下記一般式(1)で表される少なくとも1種のシランモノマーと、(B)下記一般式(2)で表される少なくとも1種のシラン化合物と、(C)下記一般式(4)で表される少なくとも1種のポリカルボシランとを、塩基性触媒の存在下で共縮合して、重量平均分子量が2,000〜200,000かつ炭素原子の含有量が12.5〜22.0原子%のポリマーを得る工程と、
前記ポリマーに有機溶剤を添加する工程と、
を含み、
前記(C)ポリカルボシランの重量平均分子量が300〜100,000である、絶縁膜形成用組成物の製造方法。
(式中、RおよびR1〜R3は同一または異なり、アルキル基、アルケニル基、アルキニル基またはアリール基を示し、Xはハロゲン原子、ヒドロキシ基、アルコキシ基、またはアシロキシ基を示し、nは0〜2の整数を示す。)
R4 aSiX’4−a ・・・・・(2)
(式中、R4は、水素原子、フッ素原子、アルキル基、アルケニル基、アルキニル基、またはアリール基を示し、X’はハロゲン原子、アルコキシ基、またはアシロキシ基を示し、aは0〜3の整数を示す。)
(式中、R8は、水素原子、ハロゲン原子、ヒドロキシ基、アルコキシ基、アシロキシ基、スルホン基、メタンスルホン基、トリフルオロメタンスルホン基、アルキル基、アリール基、アリル基、およびグリシジル基からなる群より選ばれる基を示し、R9はハロゲン原子、ヒドロキシ基、アルコキシ基、アシロキシ基、スルホン基、メタンスルホン基、トリフルオロメタンスルホン基、アルキル基、アリール基、アリル基、およびグリシジル基からなる群より選ばれる基を示し、R10,R11は同一または異なり、ハロゲン原子、ヒドロキシ基、アルコキシ基、アシロキシ基、スルホン基、メタンスルホン基、トリフルオロメタンスルホン基、炭素数2〜6のアルキル基、アリール基、アリル基、およびグリシジル基からなる群より選ばれる基を示し、かつ、R8〜R11の少なくとも1つはハロゲン原子、アルコキシ基またはアシロキシ基であり、R12〜R14は同一または異なり、置換または非置換のメチレン基、アルキレン基、アルケニレン基、アルキニレン基、アリーレン基を示し、e,f,gは、それぞれ0〜10,000の数を示し、10<e+f+g<10,000の条件を満たす。)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006080991A JP5423937B2 (ja) | 2006-03-23 | 2006-03-23 | 絶縁膜形成用組成物の製造方法、ポリマーの製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006080991A JP5423937B2 (ja) | 2006-03-23 | 2006-03-23 | 絶縁膜形成用組成物の製造方法、ポリマーの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007254595A JP2007254595A (ja) | 2007-10-04 |
JP5423937B2 true JP5423937B2 (ja) | 2014-02-19 |
Family
ID=38629150
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006080991A Active JP5423937B2 (ja) | 2006-03-23 | 2006-03-23 | 絶縁膜形成用組成物の製造方法、ポリマーの製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5423937B2 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1305953C (zh) * | 2005-04-06 | 2007-03-21 | 福建师范大学 | 一种具有驱虫功能的塑料农用薄膜母粒的制备方法 |
JP5099302B2 (ja) * | 2006-03-23 | 2012-12-19 | Jsr株式会社 | 絶縁膜形成用組成物、ポリマーおよびその製造方法、絶縁膜の製造方法、ならびにシリカ系絶縁膜 |
JP5099301B2 (ja) * | 2006-03-23 | 2012-12-19 | Jsr株式会社 | 絶縁膜形成用組成物、ポリマーおよびその製造方法、絶縁膜の製造方法、ならびにシリカ系絶縁膜 |
JP2007262255A (ja) * | 2006-03-29 | 2007-10-11 | Jsr Corp | ポリマーおよびその製造方法、絶縁膜形成用組成物、絶縁膜の製造方法、ならびにシリカ系絶縁膜 |
JP5316743B2 (ja) * | 2007-11-01 | 2013-10-16 | Jsr株式会社 | ケイ素含有膜形成用組成物およびケイ素含有絶縁膜の形成方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0284435A (ja) * | 1988-09-20 | 1990-03-26 | Fujitsu Ltd | 有機ケイ素重合体、その製法及び用途 |
JP2803360B2 (ja) * | 1990-11-20 | 1998-09-24 | 信越化学工業株式会社 | ポリシランの製造方法 |
JP5013045B2 (ja) * | 2004-01-16 | 2012-08-29 | Jsr株式会社 | ポリマーの製造方法 |
WO2005108469A1 (ja) * | 2004-05-11 | 2005-11-17 | Jsr Corporation | 有機シリカ系膜の形成方法、有機シリカ系膜、配線構造体、半導体装置、および膜形成用組成物 |
JP2007204626A (ja) * | 2006-02-02 | 2007-08-16 | Jsr Corp | ポリマーの製造方法、ポリマー、絶縁膜形成用組成物、絶縁膜の製造方法、およびシリカ系絶縁膜 |
JP4849219B2 (ja) * | 2006-03-23 | 2012-01-11 | Jsr株式会社 | 表面疎水化用組成物、表面疎水化方法、および半導体装置 |
JP5099302B2 (ja) * | 2006-03-23 | 2012-12-19 | Jsr株式会社 | 絶縁膜形成用組成物、ポリマーおよびその製造方法、絶縁膜の製造方法、ならびにシリカ系絶縁膜 |
JP5099301B2 (ja) * | 2006-03-23 | 2012-12-19 | Jsr株式会社 | 絶縁膜形成用組成物、ポリマーおよびその製造方法、絶縁膜の製造方法、ならびにシリカ系絶縁膜 |
-
2006
- 2006-03-23 JP JP2006080991A patent/JP5423937B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2007254595A (ja) | 2007-10-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5105041B2 (ja) | 絶縁膜形成用組成物およびその製造方法、ならびにシリカ系絶縁膜およびその形成方法 | |
JP5110239B2 (ja) | 有機シリカ系膜の形成方法、膜形成用組成物 | |
JP5120547B2 (ja) | 有機シリカ系膜およびその形成方法、半導体装置の絶縁膜形成用組成物およびその製造方法、ならびに配線構造体および半導体装置 | |
US7736748B2 (en) | Insulating-film-forming composition, method of producing the same, silica-based insulating film, and method of forming the same | |
US20060275614A1 (en) | Insulating film and method for forming the same, and film-forming composition | |
KR20070010011A (ko) | 중합체 및 그의 제조 방법, 절연막 형성용 조성물, 및절연막 및 그의 형성 방법 | |
JP4877486B2 (ja) | 絶縁膜形成用組成物およびその製造方法、ならびにシリカ系絶縁膜およびその形成方法 | |
JPWO2005108469A1 (ja) | 有機シリカ系膜の形成方法、有機シリカ系膜、配線構造体、半導体装置、および膜形成用組成物 | |
JP5099302B2 (ja) | 絶縁膜形成用組成物、ポリマーおよびその製造方法、絶縁膜の製造方法、ならびにシリカ系絶縁膜 | |
JP2005272816A (ja) | ポリマーおよびその製造方法、絶縁膜形成用組成物、ならびに絶縁膜およびその形成方法 | |
JP5218765B2 (ja) | ポリマーの製造方法、ポリマー、ポリマー膜形成用組成物、ポリマー膜の形成方法およびポリマー膜 | |
JP5423937B2 (ja) | 絶縁膜形成用組成物の製造方法、ポリマーの製造方法 | |
JP2010106100A (ja) | 絶縁膜形成用組成物、ならびに絶縁膜およびその形成方法 | |
JP4143845B2 (ja) | 絶縁膜およびその形成方法、ならびに絶縁膜を有する積層体およびその形成方法 | |
JP2007262256A (ja) | ポリマーおよびその製造方法、絶縁膜形成用組成物、絶縁膜の製造方法、ならびにシリカ系絶縁膜 | |
JP2005154723A (ja) | 絶縁膜形成用組成物、絶縁膜形成用組成物の製造方法、絶縁膜およびその形成方法 | |
JP5099301B2 (ja) | 絶縁膜形成用組成物、ポリマーおよびその製造方法、絶縁膜の製造方法、ならびにシリカ系絶縁膜 | |
JP4798330B2 (ja) | 絶縁膜形成用組成物、絶縁膜、およびその形成方法 | |
JP2007262255A (ja) | ポリマーおよびその製造方法、絶縁膜形成用組成物、絶縁膜の製造方法、ならびにシリカ系絶縁膜 | |
JP5152464B2 (ja) | 絶縁膜形成用組成物、ならびにシリカ系膜およびその形成方法 | |
JPWO2008096656A1 (ja) | ケイ素含有ポリマーおよびその合成方法、膜形成用組成物、ならびにシリカ系膜およびその形成方法 | |
JP2009227910A (ja) | 絶縁膜形成用組成物、ならびにシリカ系膜およびその形成方法 | |
JPWO2008066060A1 (ja) | ポリマーの製造方法、絶縁膜形成用組成物、ならびにシリカ系絶縁膜およびその製造方法 | |
JP2008195862A (ja) | 絶縁膜形成用組成物、ならびにシリカ系膜およびその形成方法 | |
JP4716035B2 (ja) | シリカ系膜およびその形成方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20081030 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20111012 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A132 Effective date: 20111221 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120217 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A132 Effective date: 20121205 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20131030 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20131112 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 Ref document number: 5423937 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |