JP5408873B2 - 座標測定装置におけるx線感知装置の校正方法 - Google Patents
座標測定装置におけるx線感知装置の校正方法 Download PDFInfo
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- JP5408873B2 JP5408873B2 JP2007513786A JP2007513786A JP5408873B2 JP 5408873 B2 JP5408873 B2 JP 5408873B2 JP 2007513786 A JP2007513786 A JP 2007513786A JP 2007513786 A JP2007513786 A JP 2007513786A JP 5408873 B2 JP5408873 B2 JP 5408873B2
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- G01B15/04—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring contours or curvatures
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- Immunology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102004026357.4 | 2004-05-26 | ||
DE102004026357.4A DE102004026357B4 (de) | 2004-05-26 | 2004-05-26 | Vorrichtung und Verfahren zum Messen eines Objektes |
DE102004050257.9 | 2004-10-14 | ||
DE200410050257 DE102004050257A1 (de) | 2004-10-14 | 2004-10-14 | Anordnung und Verfahren zum Messen von Strukturen von Objekten |
DE200510018447 DE102005018447A1 (de) | 2005-04-20 | 2005-04-20 | Verfahren zum Messen eines Objektes |
DE102005018447.2 | 2005-04-20 | ||
PCT/EP2005/005598 WO2005119174A1 (de) | 2004-05-26 | 2005-05-24 | Koordinatenmessgerät und verfahren zum messen eines objektes |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012172753A Division JP2012233919A (ja) | 2004-05-26 | 2012-08-03 | 座標測定装置及び測定物の測定方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008500521A JP2008500521A (ja) | 2008-01-10 |
JP5408873B2 true JP5408873B2 (ja) | 2014-02-05 |
Family
ID=34970088
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007513786A Expired - Fee Related JP5408873B2 (ja) | 2004-05-26 | 2005-05-24 | 座標測定装置におけるx線感知装置の校正方法 |
JP2012172753A Pending JP2012233919A (ja) | 2004-05-26 | 2012-08-03 | 座標測定装置及び測定物の測定方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012172753A Pending JP2012233919A (ja) | 2004-05-26 | 2012-08-03 | 座標測定装置及び測定物の測定方法 |
Country Status (4)
Country | Link |
---|---|
US (2) | US8804905B2 (de) |
EP (3) | EP2192380A3 (de) |
JP (2) | JP5408873B2 (de) |
WO (1) | WO2005119174A1 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10545102B2 (en) | 2016-11-02 | 2020-01-28 | Mitutoyo Corporation | Coordinate alignment tool for coordinate measuring device and measuring X-ray CT apparatus |
US10753887B2 (en) | 2018-01-19 | 2020-08-25 | Mitutoyo Corporation | X-ray CT measuring apparatus and interference prevention method thereof |
Families Citing this family (72)
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DE102004003941A1 (de) * | 2004-01-26 | 2005-08-11 | Carl Zeiss Industrielle Messtechnik Gmbh | Bestimmung von Koordinaten eines Werkstücks |
WO2005119174A1 (de) * | 2004-05-26 | 2005-12-15 | Werth Messtechnik Gmbh | Koordinatenmessgerät und verfahren zum messen eines objektes |
DE102006022104B4 (de) * | 2006-05-11 | 2012-09-06 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung zur dreidimensionalen Vermessung eines Festkörpers |
DE102006022103B4 (de) * | 2006-05-11 | 2013-05-29 | Werth Messtechnik Gmbh | Verfahren zum Vermessen eines Festkörpers |
DE102007021809A1 (de) * | 2007-04-20 | 2008-10-23 | Werth Messtechnik Gmbh | Verfahren und Vorrichtung zum dimensionellen Messen mit Koordinatenmessgeräten |
US8224121B2 (en) * | 2007-06-15 | 2012-07-17 | The Boeing Company | System and method for assembling substantially distortion-free images |
US7639777B2 (en) * | 2008-02-26 | 2009-12-29 | United Technologies Corp. | Computed tomography systems and related methods involving forward collimation |
US20090213984A1 (en) * | 2008-02-26 | 2009-08-27 | United Technologies Corp. | Computed Tomography Systems and Related Methods Involving Post-Target Collimation |
US8238521B2 (en) * | 2008-03-06 | 2012-08-07 | United Technologies Corp. | X-ray collimators, and related systems and methods involving such collimators |
US20090225954A1 (en) * | 2008-03-06 | 2009-09-10 | United Technologies Corp. | X-Ray Collimators, and Related Systems and Methods Involving Such Collimators |
US7876875B2 (en) * | 2008-04-09 | 2011-01-25 | United Technologies Corp. | Computed tomography systems and related methods involving multi-target inspection |
US20090274264A1 (en) * | 2008-04-30 | 2009-11-05 | United Technologies Corp. | Computed Tomography Systems and Related Methods Involving Localized Bias |
US7888647B2 (en) * | 2008-04-30 | 2011-02-15 | United Technologies Corp. | X-ray detector assemblies and related computed tomography systems |
DE102009043823A1 (de) | 2008-08-28 | 2010-07-29 | Werth Messtechnik Gmbh | Verfahren und Anordnung zum Bestimmen von Strukturen oder Geometrien eines Messobjektes |
US7775715B2 (en) * | 2008-08-28 | 2010-08-17 | United Technologies Corporation | Method of calibration for computed tomography scanners utilized in quality control applications |
US8179132B2 (en) * | 2009-02-18 | 2012-05-15 | General Electric Company | Method and system for integrating eddy current inspection with a coordinate measuring device |
EP2399237B1 (de) | 2009-02-20 | 2013-08-14 | Werth Messtechnik GmbH | Verfahren zum messen eines objekts |
DE202009019014U1 (de) * | 2009-04-30 | 2015-08-31 | Wenzel Volumetrik Gmbh | Computertomographische Werkstückmessvorrichtung |
US8020308B2 (en) * | 2009-05-29 | 2011-09-20 | General Electric Company | Non-destructive inspection system having self-aligning probe assembly |
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NL2003840C2 (nl) * | 2009-11-20 | 2011-05-23 | Dirk Peter Leenheer | Werkwijze voor het maken van een numeriek drie-dimensionaal model van een structuur uit zachte en harde delen, drie-dimensionaal model en drager. |
JP5813651B2 (ja) * | 2009-11-26 | 2015-11-17 | ベルス・メステヒニーク・ゲーエムベーハー | 測定オブジェクトの形状を触覚光学式に決定するための方法および装置 |
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AU2012290426A1 (en) * | 2011-07-29 | 2014-02-20 | Hexagon Metrology, Inc. | Coordinate measuring system data reduction |
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JP6147852B2 (ja) * | 2013-05-10 | 2017-06-14 | 株式会社ニコン | X線装置及び構造物の製造方法 |
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JP2019128163A (ja) * | 2018-01-19 | 2019-08-01 | 株式会社ミツトヨ | 計測用x線ct装置、及び、その校正方法 |
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US10545102B2 (en) | 2016-11-02 | 2020-01-28 | Mitutoyo Corporation | Coordinate alignment tool for coordinate measuring device and measuring X-ray CT apparatus |
US10753887B2 (en) | 2018-01-19 | 2020-08-25 | Mitutoyo Corporation | X-ray CT measuring apparatus and interference prevention method thereof |
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EP2282165A2 (de) | 2011-02-09 |
JP2008500521A (ja) | 2008-01-10 |
EP2192380A2 (de) | 2010-06-02 |
EP1749190A1 (de) | 2007-02-07 |
US20150030121A1 (en) | 2015-01-29 |
US9625257B2 (en) | 2017-04-18 |
EP1749190B1 (de) | 2015-05-06 |
WO2005119174A1 (de) | 2005-12-15 |
EP2282165A3 (de) | 2011-02-16 |
JP2012233919A (ja) | 2012-11-29 |
US20080075227A1 (en) | 2008-03-27 |
US8804905B2 (en) | 2014-08-12 |
EP2192380A3 (de) | 2010-06-23 |
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