JP4719010B2 - 産業用ロボット - Google Patents

産業用ロボット Download PDF

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Publication number
JP4719010B2
JP4719010B2 JP2006010451A JP2006010451A JP4719010B2 JP 4719010 B2 JP4719010 B2 JP 4719010B2 JP 2006010451 A JP2006010451 A JP 2006010451A JP 2006010451 A JP2006010451 A JP 2006010451A JP 4719010 B2 JP4719010 B2 JP 4719010B2
Authority
JP
Japan
Prior art keywords
arm
support base
parallel link
robot
link
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2006010451A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006224297A5 (zh
JP2006224297A (ja
Inventor
靖典 竹内
隆之 矢澤
弘登 中島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Sankyo Corp
Original Assignee
Nidec Sankyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Sankyo Corp filed Critical Nidec Sankyo Corp
Priority to JP2006010451A priority Critical patent/JP4719010B2/ja
Priority to KR1020060006454A priority patent/KR101209299B1/ko
Priority to TW095102222A priority patent/TWI398334B/zh
Publication of JP2006224297A publication Critical patent/JP2006224297A/ja
Publication of JP2006224297A5 publication Critical patent/JP2006224297A5/ja
Application granted granted Critical
Publication of JP4719010B2 publication Critical patent/JP4719010B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/19—Drive system for arm

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2006010451A 2005-01-21 2006-01-18 産業用ロボット Active JP4719010B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2006010451A JP4719010B2 (ja) 2005-01-21 2006-01-18 産業用ロボット
KR1020060006454A KR101209299B1 (ko) 2005-01-21 2006-01-20 산업용 로봇
TW095102222A TWI398334B (zh) 2005-01-21 2006-01-20 Industrial robots

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005014331 2005-01-21
JP2005014331 2005-01-21
JP2006010451A JP4719010B2 (ja) 2005-01-21 2006-01-18 産業用ロボット

Publications (3)

Publication Number Publication Date
JP2006224297A JP2006224297A (ja) 2006-08-31
JP2006224297A5 JP2006224297A5 (zh) 2008-05-15
JP4719010B2 true JP4719010B2 (ja) 2011-07-06

Family

ID=36986089

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006010451A Active JP4719010B2 (ja) 2005-01-21 2006-01-18 産業用ロボット

Country Status (3)

Country Link
JP (1) JP4719010B2 (zh)
KR (1) KR101209299B1 (zh)
TW (1) TWI398334B (zh)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008254138A (ja) * 2007-04-06 2008-10-23 Yaskawa Electric Corp 多関節ロボット
JP4970128B2 (ja) * 2007-04-27 2012-07-04 日本電産サンキョー株式会社 産業用ロボット及び集合処理装置
KR101321618B1 (ko) 2007-09-13 2013-10-23 가부시키가이샤 야스카와덴키 이송 로봇 및 이의 제어 방법
US8272830B2 (en) * 2008-10-07 2012-09-25 Applied Materials, Inc. Scissor lift transfer robot
US9691650B2 (en) 2009-09-29 2017-06-27 Applied Materials, Inc. Substrate transfer robot with chamber and substrate monitoring capability
JP5563271B2 (ja) * 2009-10-19 2014-07-30 川崎重工業株式会社 基板搬送ロボット
JP5471399B2 (ja) * 2009-12-17 2014-04-16 株式会社安川電機 移送ロボット
TWI480142B (zh) * 2010-08-12 2015-04-11 Hon Hai Prec Ind Co Ltd 機器人臂部件
JP6059156B2 (ja) 2011-03-11 2017-01-11 ブルックス オートメーション インコーポレイテッド 基板処理ツール
CN103029125B (zh) 2011-09-30 2015-05-20 鸿富锦精密工业（深圳）有限公司 机器人
JP5893072B2 (ja) * 2014-04-16 2016-03-23 川崎重工業株式会社 基板搬送ロボット
JP6518037B2 (ja) * 2014-04-28 2019-05-22 川崎重工業株式会社 産業用ロボット
CN105480714A (zh) * 2015-12-29 2016-04-13 天津大学 一种大型lcd玻璃基板搬运机器人

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0446781A (ja) * 1990-06-11 1992-02-17 Seiko Instr Inc 真空内磁気浮上搬送ロボット
JPH10315182A (ja) * 1997-05-21 1998-12-02 Yaskawa Electric Corp 真空ロボット
JPH11238779A (ja) * 1998-02-23 1999-08-31 Mecs Corp 薄型基板搬送多関節ロボット
JPH11267988A (ja) * 1998-03-20 1999-10-05 Kawasaki Heavy Ind Ltd パラレルリンクロボット
JP2001293676A (ja) * 2000-04-14 2001-10-23 Yaskawa Electric Corp パラレルリンクロボット
JP2002210684A (ja) * 2000-11-14 2002-07-30 Daihen Corp トランスファロボット
JP2003524897A (ja) * 2000-02-25 2003-08-19 ウェーハマスターズ・インコーポレイテッド ウェーハ処理システム

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11188669A (ja) * 1997-12-25 1999-07-13 Mitsubishi Electric Corp 搬送装置
JP3806273B2 (ja) * 1999-09-17 2006-08-09 株式会社ジェイテクト 四自由度パラレルロボット
JP2001157974A (ja) * 1999-11-30 2001-06-12 Assist Japan Kk ダブルアーム型基板搬送ロボット

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0446781A (ja) * 1990-06-11 1992-02-17 Seiko Instr Inc 真空内磁気浮上搬送ロボット
JPH10315182A (ja) * 1997-05-21 1998-12-02 Yaskawa Electric Corp 真空ロボット
JPH11238779A (ja) * 1998-02-23 1999-08-31 Mecs Corp 薄型基板搬送多関節ロボット
JPH11267988A (ja) * 1998-03-20 1999-10-05 Kawasaki Heavy Ind Ltd パラレルリンクロボット
JP2003524897A (ja) * 2000-02-25 2003-08-19 ウェーハマスターズ・インコーポレイテッド ウェーハ処理システム
JP2001293676A (ja) * 2000-04-14 2001-10-23 Yaskawa Electric Corp パラレルリンクロボット
JP2002210684A (ja) * 2000-11-14 2002-07-30 Daihen Corp トランスファロボット

Also Published As

Publication number Publication date
TWI398334B (zh) 2013-06-11
TW200631743A (en) 2006-09-16
KR20060085211A (ko) 2006-07-26
KR101209299B1 (ko) 2012-12-06
JP2006224297A (ja) 2006-08-31

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