JP4719010B2 - 産業用ロボット - Google Patents
産業用ロボット Download PDFInfo
- Publication number
- JP4719010B2 JP4719010B2 JP2006010451A JP2006010451A JP4719010B2 JP 4719010 B2 JP4719010 B2 JP 4719010B2 JP 2006010451 A JP2006010451 A JP 2006010451A JP 2006010451 A JP2006010451 A JP 2006010451A JP 4719010 B2 JP4719010 B2 JP 4719010B2
- Authority
- JP
- Japan
- Prior art keywords
- arm
- support base
- parallel link
- robot
- link
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
- B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S901/00—Robots
- Y10S901/19—Drive system for arm
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006010451A JP4719010B2 (ja) | 2005-01-21 | 2006-01-18 | 産業用ロボット |
KR1020060006454A KR101209299B1 (ko) | 2005-01-21 | 2006-01-20 | 산업용 로봇 |
TW095102222A TWI398334B (zh) | 2005-01-21 | 2006-01-20 | Industrial robots |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005014331 | 2005-01-21 | ||
JP2005014331 | 2005-01-21 | ||
JP2006010451A JP4719010B2 (ja) | 2005-01-21 | 2006-01-18 | 産業用ロボット |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2006224297A JP2006224297A (ja) | 2006-08-31 |
JP2006224297A5 JP2006224297A5 (zh) | 2008-05-15 |
JP4719010B2 true JP4719010B2 (ja) | 2011-07-06 |
Family
ID=36986089
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006010451A Active JP4719010B2 (ja) | 2005-01-21 | 2006-01-18 | 産業用ロボット |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4719010B2 (zh) |
KR (1) | KR101209299B1 (zh) |
TW (1) | TWI398334B (zh) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008254138A (ja) * | 2007-04-06 | 2008-10-23 | Yaskawa Electric Corp | 多関節ロボット |
JP4970128B2 (ja) * | 2007-04-27 | 2012-07-04 | 日本電産サンキョー株式会社 | 産業用ロボット及び集合処理装置 |
KR101321618B1 (ko) | 2007-09-13 | 2013-10-23 | 가부시키가이샤 야스카와덴키 | 이송 로봇 및 이의 제어 방법 |
US8272830B2 (en) * | 2008-10-07 | 2012-09-25 | Applied Materials, Inc. | Scissor lift transfer robot |
US9691650B2 (en) | 2009-09-29 | 2017-06-27 | Applied Materials, Inc. | Substrate transfer robot with chamber and substrate monitoring capability |
JP5563271B2 (ja) * | 2009-10-19 | 2014-07-30 | 川崎重工業株式会社 | 基板搬送ロボット |
JP5471399B2 (ja) * | 2009-12-17 | 2014-04-16 | 株式会社安川電機 | 移送ロボット |
TWI480142B (zh) * | 2010-08-12 | 2015-04-11 | Hon Hai Prec Ind Co Ltd | 機器人臂部件 |
JP6059156B2 (ja) | 2011-03-11 | 2017-01-11 | ブルックス オートメーション インコーポレイテッド | 基板処理ツール |
CN103029125B (zh) | 2011-09-30 | 2015-05-20 | 鸿富锦精密工业(深圳)有限公司 | 机器人 |
JP5893072B2 (ja) * | 2014-04-16 | 2016-03-23 | 川崎重工業株式会社 | 基板搬送ロボット |
JP6518037B2 (ja) * | 2014-04-28 | 2019-05-22 | 川崎重工業株式会社 | 産業用ロボット |
CN105480714A (zh) * | 2015-12-29 | 2016-04-13 | 天津大学 | 一种大型lcd玻璃基板搬运机器人 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0446781A (ja) * | 1990-06-11 | 1992-02-17 | Seiko Instr Inc | 真空内磁気浮上搬送ロボット |
JPH10315182A (ja) * | 1997-05-21 | 1998-12-02 | Yaskawa Electric Corp | 真空ロボット |
JPH11238779A (ja) * | 1998-02-23 | 1999-08-31 | Mecs Corp | 薄型基板搬送多関節ロボット |
JPH11267988A (ja) * | 1998-03-20 | 1999-10-05 | Kawasaki Heavy Ind Ltd | パラレルリンクロボット |
JP2001293676A (ja) * | 2000-04-14 | 2001-10-23 | Yaskawa Electric Corp | パラレルリンクロボット |
JP2002210684A (ja) * | 2000-11-14 | 2002-07-30 | Daihen Corp | トランスファロボット |
JP2003524897A (ja) * | 2000-02-25 | 2003-08-19 | ウェーハマスターズ・インコーポレイテッド | ウェーハ処理システム |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11188669A (ja) * | 1997-12-25 | 1999-07-13 | Mitsubishi Electric Corp | 搬送装置 |
JP3806273B2 (ja) * | 1999-09-17 | 2006-08-09 | 株式会社ジェイテクト | 四自由度パラレルロボット |
JP2001157974A (ja) * | 1999-11-30 | 2001-06-12 | Assist Japan Kk | ダブルアーム型基板搬送ロボット |
-
2006
- 2006-01-18 JP JP2006010451A patent/JP4719010B2/ja active Active
- 2006-01-20 KR KR1020060006454A patent/KR101209299B1/ko active IP Right Grant
- 2006-01-20 TW TW095102222A patent/TWI398334B/zh active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0446781A (ja) * | 1990-06-11 | 1992-02-17 | Seiko Instr Inc | 真空内磁気浮上搬送ロボット |
JPH10315182A (ja) * | 1997-05-21 | 1998-12-02 | Yaskawa Electric Corp | 真空ロボット |
JPH11238779A (ja) * | 1998-02-23 | 1999-08-31 | Mecs Corp | 薄型基板搬送多関節ロボット |
JPH11267988A (ja) * | 1998-03-20 | 1999-10-05 | Kawasaki Heavy Ind Ltd | パラレルリンクロボット |
JP2003524897A (ja) * | 2000-02-25 | 2003-08-19 | ウェーハマスターズ・インコーポレイテッド | ウェーハ処理システム |
JP2001293676A (ja) * | 2000-04-14 | 2001-10-23 | Yaskawa Electric Corp | パラレルリンクロボット |
JP2002210684A (ja) * | 2000-11-14 | 2002-07-30 | Daihen Corp | トランスファロボット |
Also Published As
Publication number | Publication date |
---|---|
TWI398334B (zh) | 2013-06-11 |
TW200631743A (en) | 2006-09-16 |
KR20060085211A (ko) | 2006-07-26 |
KR101209299B1 (ko) | 2012-12-06 |
JP2006224297A (ja) | 2006-08-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4719010B2 (ja) | 産業用ロボット | |
JP4232795B2 (ja) | 平行リンク機構及び産業用ロボット | |
JP6110636B2 (ja) | 産業用ロボット | |
JP4148280B2 (ja) | 平行リンク機構及び産業用ロボット | |
EP1498228B1 (en) | Articulated robot | |
JP5210878B2 (ja) | 回転導入機構、基板搬送装置、及び真空処理装置 | |
US8434387B2 (en) | Industrial robot | |
TWI433765B (zh) | Industrial robotic arm and collection processing device | |
JP5462064B2 (ja) | 産業用ロボット | |
JP4605560B2 (ja) | 産業用ロボット | |
US20060201275A1 (en) | Link drive mechanism and industrial robot using the same | |
JP5627599B2 (ja) | 搬送アーム、及びこれを備える搬送ロボット | |
JP5434990B2 (ja) | ロボットのアーム構造およびロボット | |
JP2011199121A (ja) | 搬送装置 | |
JP4473075B2 (ja) | 搬送ロボットおよびそのアーム構造体 | |
CN100453276C (zh) | 工业用机械手装置 | |
JP2006239794A (ja) | 産業ロボットのアーム構造 | |
JP2005236218A (ja) | 半導体ウエハの搬送ロボット、及びそれを備えた処理装置 | |
CN116460827A (zh) | 机器人 | |
JPH06134682A (ja) | スカラ−ロボット |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080331 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080331 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20091125 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20091126 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100122 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100901 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20101029 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20110322 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20110401 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140408 Year of fee payment: 3 |