JP4597508B2 - 半導体ペレットと半導体ペレット取付部材とを接合するためのシリコーン接着剤 - Google Patents
半導体ペレットと半導体ペレット取付部材とを接合するためのシリコーン接着剤 Download PDFInfo
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- JP4597508B2 JP4597508B2 JP2003411502A JP2003411502A JP4597508B2 JP 4597508 B2 JP4597508 B2 JP 4597508B2 JP 2003411502 A JP2003411502 A JP 2003411502A JP 2003411502 A JP2003411502 A JP 2003411502A JP 4597508 B2 JP4597508 B2 JP 4597508B2
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Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49503—Lead-frames or other flat leads characterised by the die pad
- H01L23/49513—Lead-frames or other flat leads characterised by the die pad having bonding material between chip and die pad
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J183/00—Adhesives based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Adhesives based on derivatives of such polymers
- C09J183/04—Polysiloxanes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/52—Mounting semiconductor bodies in containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
-
- H—ELECTRICITY
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Description
(A) 1分子中に2個以上のケイ素原子結合アルケニル基を有するオルガノポリシロキサン;100重量部、
(B) 100℃×1時間の加熱減量が5重量%以下である、1分子中に2個以上のケイ素原子結合水素原子を有するオルガノポリシロキサン;(A) 成分のアルケニル基1個に対し本成分のケイ素原子結合水素原子を0.5〜3個供給し得るに充分な量、
(C) ケイ素原子結合アルコキシ基を有し、且つケイ素原子結合水素原子を有しない接着性付与剤;0.1〜10重量部、
(D) 白金系触媒;触媒量
からなる付加反応硬化型シリコーンゴム組成物(以下、本発明組成物1と言う)、
並びに
(A) 1分子中に2個以上のケイ素原子結合アルケニル基を有するオルガノポリシロキサン;100重量部、
(B) 100℃×1時間の加熱減量が5重量%以下である、1分子中に2個以上のケイ素原子結合水素原子を有するオルガノポリシロキサン;(A) 成分のアルケニル基1個に対し本成分のケイ素原子結合水素原子を0.5〜3個供給し得るに充分な量、
(D) 白金系触媒;触媒量
(E) 接着性付与剤;0.1〜10重量部、
(F) AlあるいはTi化合物;0.05〜10重量部
からなる付加反応硬化型シリコーンゴム組成物(以下、本発明組成物2と言う)が挙げられる。
(式中、R1は互いに同一又は異種の炭素数1〜10の非置換又は置換の一価炭化水素基であり、aは1〜3の正数である。)
上記R1で示されるケイ素原子に結合した非置換又は置換の一価炭化水素基としては、例えばメチル基、エチル基、プロピル基、イソプロピル基、ブチル基、イソブチル基、tert−ブチル基、ペンチル基、ネオペンチル基、ヘキシル基、シクロヘキシル基、オクチル基、ノニル基、デシル基等のアルキル基、フェニル基、トリル基、キシリル基、ナフチル基等のアリール基、ベンジル基、フェニルエチル基、フェニルプロピル基等のアラルキル基、ビニル基、アリル基、プロペニル基、イソプロペニル基、ブテニル基、ヘキセニル基、シクロヘキセニル基、オクテニル基等のアルケニル基や、これらの基の水素原子の一部又は全部をフッ素、臭素、塩素等のハロゲン原子、シアノ基等で置換したもの、例えばクロロメチル基、クロロプロピル基、ブロモエチル基、3,3,3−トリフルオロプロピル基、2−シアノエチル基等が挙げられる。
実施例1〜5、比較例1〜3
・(A) 成分
760部のトリメチルクロロシラン、141部のメチルビニルジクロロシラン、146 部の正ケイ酸エチルをトルエン中で共加水分解し、常法により脱酸、中和、水洗したのちカセイカリ水溶液で処理し、酢酸で中和し、水洗、脱水して、ケイ素原子に結合したヒドロキシ基を実質的に有せず、ケイ素原子に結合せるビニル基を有する樹脂を得た。このビニル基含有樹脂10部と23℃における粘度が3,000cP のα,ω−ジビニルポリジメチルシロキサン90部を配合したオルガノシロキサンを(A) 成分として用いた。
・(B) 成分
MMで示されるジシロキサンと、D4で示される環状シロキサンと、D’4で示される環状シロキサンを硫酸触媒の存在下に重合した後、中和することにより、平均組成式、MD’23D16Mで示されるケイ素原子結合水素原子を有するオルガノシロキサンを得た。このシロキサンを2mmHgの減圧下、温度120℃の加熱条件下、2〜4時間ストリップ処理を行い、100℃、1時間における加熱減量が以下のオルガノシロキサンを得た。
3時間処理 (B) −2(加熱減量3.8重量%)
2時間処理 (B) −3(加熱減量6.5重量%)
未処理 (B) −4(加熱減量10重量%)
尚、M、D、D’と略記したものは以下の構造を示す。
(C) −1
下記式で示されるシラン化合物
下記式で示されるシラン化合物
下記式で示されるシラン化合物
3.8%の白金を含有するラモローの触媒
・(F) 成分
(F) −1
下記式で示されるアルミニウムキレート
(ガラス板上の接触角測定)
50×50×1mmガラス板上に組成物が0.0100〜0.0130gとなるように塗布し、その上へ18×18×0.16mmのカバーガラスを載せ、組成物がカバーガラス全体に広がるように挟み込む。それをガラスシャーレ(内径70mm、深さ19mm)に入れ、蓋をし、150℃、1時間、加熱硬化させた。室温にもどしてから、カバーガラス上の4隅、および中心部の5箇所で、水に対する接触角を測定し、それらの平均値を算出した。
(接着性の評価)
80×25×2mmの2枚の銅板を、長辺を10mmだけ重ねて平行に置き、その重ねた部分の対向する2面に接するように、2枚の銅板の間に1mmの厚さに上記組成物の層を形成せしめ、150℃で1時間加熱し、放冷して試料を作成した。また、セラミック(アルミナ)板も同様に試料を作成した。このようにして得られた試料を引張試験機に装着し、10mm/min の引張速度で接着性の試験を行い、破断面が凝集破壊か界面剥離かを確認した。
(ワイヤボンダビリティの評価)
図1に示した評価用半導体において、接着剤8を半導体ペレット2とタブ1の間に介在させ、150℃で1時間加熱した。アルミニウムパッド3と銅製リードフレーム4とを金製ワイヤ5で接合(ワイヤボンディング)して一体化物を作成した。なお、金製ワイヤ5の接合は超音波熱圧着法により接合した。次いで、この一体化物について、金製ワイヤ5とアルミニウムパッド3または金製ワイヤ5とリードフレーム4との接合点を観察し、併せてこの金製ワイヤ5を引張り、金製ワイヤ5の浮き上がったものを接合不良品とした。1検体に64のリードフレームを10検体作成し、合計640pinにおける不良数を数えた。尚、6はエポキシ樹脂、7は銅製外部リードフレームである。
Claims (2)
- (A) 1分子中に2個以上のケイ素原子結合アルケニル基を有するオルガノポリシロキサン;100重量部、
(B) 100℃×1時間の加熱減量が5重量%以下である、1分子中に2個以上のケイ素原子結合水素原子を有するオルガノポリシロキサン;(A) 成分のアルケニル基1個に対し本成分のケイ素原子結合水素原子を0.5〜3個供給し得るに充分な量、
(C) ケイ素原子結合アルコキシ基を有し、且つケイ素原子結合水素原子を有しない接着性付与剤;0.1〜10重量部、
(D) 白金系触媒;(A) 成分と(B) 成分の合計量に対し白金量で1〜100ppm
からなる付加反応硬化型シリコーンゴム組成物よりなる、半導体ペレットと半導体ペレット取付部材とを接合するためのシリコーン接着剤であって、
上記付加反応硬化型シリコーンゴム組成物は、ガラス板への汚染試験において、加熱硬化時におけるガラス板への汚染が、ガラス板上の水に対する接触角として70°以下を示す、半導体ペレットと半導体ペレット取付部材とを接合するためのシリコーン接着剤。 - (A) 1分子中に2個以上のケイ素原子結合アルケニル基を有するオルガノポリシロキサン;100重量部、
(B) 100℃×1時間の加熱減量が5重量%以下である、1分子中に2個以上のケイ素原子結合水素原子を有するオルガノポリシロキサン;(A) 成分のアルケニル基1個に対し本成分のケイ素原子結合水素原子を0.5〜3個供給し得るに充分な量、
(D) 白金系触媒;(A) 成分と(B) 成分の合計量に対し白金量で1〜100ppm
(E) 接着性付与剤;0.1〜10重量部、
(F) AlあるいはTi化合物;0.05〜10重量部
からなる付加反応硬化型シリコーンゴム組成物よりなる、半導体ペレットと半導体ペレット取付部材とを接合するためのシリコーン接着剤であって、
上記付加反応硬化型シリコーンゴム組成物は、ガラス板への汚染試験において、加熱硬化時におけるガラス板への汚染が、ガラス板上の水に対する接触角として70°以下を示す、半導体ペレットと半導体ペレット取付部材とを接合するためのシリコーン接着剤。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
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JP2003411502A JP4597508B2 (ja) | 2003-12-10 | 2003-12-10 | 半導体ペレットと半導体ペレット取付部材とを接合するためのシリコーン接着剤 |
PCT/JP2004/018766 WO2005057647A1 (ja) | 2003-12-10 | 2004-12-09 | シリコーン接着剤 |
CNB2004800370662A CN100431121C (zh) | 2003-12-10 | 2004-12-09 | 硅氧烷粘接剂及其应用以及将半导体片和安装构件接合的方法 |
EP04807125A EP1693890A1 (en) | 2003-12-10 | 2004-12-09 | Silicone adhesive agent |
US10/577,820 US20070212819A1 (en) | 2003-12-10 | 2004-12-09 | Silicone Adhesive |
KR1020067009141A KR20060126464A (ko) | 2003-12-10 | 2004-12-09 | 실리콘 접착제 |
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JP2003411502A JP4597508B2 (ja) | 2003-12-10 | 2003-12-10 | 半導体ペレットと半導体ペレット取付部材とを接合するためのシリコーン接着剤 |
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JP4597508B2 true JP4597508B2 (ja) | 2010-12-15 |
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US (1) | US20070212819A1 (ja) |
EP (1) | EP1693890A1 (ja) |
JP (1) | JP4597508B2 (ja) |
KR (1) | KR20060126464A (ja) |
CN (1) | CN100431121C (ja) |
WO (1) | WO2005057647A1 (ja) |
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JP4704987B2 (ja) | 2006-09-11 | 2011-06-22 | 信越化学工業株式会社 | 押出成型用シリコ−ンゴム組成物 |
JP4957898B2 (ja) * | 2007-04-05 | 2012-06-20 | 信越化学工業株式会社 | 付加硬化型シリコーンゴム組成物及びその硬化物 |
JP5534640B2 (ja) | 2007-12-27 | 2014-07-02 | 東レ・ダウコーニング株式会社 | シリコーン系感圧接着剤組成物、感圧接着シートおよびシリコーンゴム積層体 |
JP5149022B2 (ja) * | 2008-01-25 | 2013-02-20 | モメンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社 | 光半導体封止用シリコーン組成物及びそれを用いた光半導体装置 |
KR100972565B1 (ko) * | 2008-05-26 | 2010-07-28 | 장암엘에스 주식회사 | 실리콘 코팅제 조성물 |
JP5534837B2 (ja) | 2010-01-28 | 2014-07-02 | 東レ・ダウコーニング株式会社 | 熱伝導性シリコーンゴム組成物 |
US8304991B2 (en) * | 2010-12-17 | 2012-11-06 | Momentive Performance Materials Japan Llc | Organic electroluminescent element sealing composition and organic light-emitting device |
JP5498465B2 (ja) * | 2011-10-19 | 2014-05-21 | 積水化学工業株式会社 | 光半導体装置用ダイボンド材及びそれを用いた光半導体装置 |
KR102268248B1 (ko) | 2014-01-29 | 2021-06-24 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 웨이퍼 가공체, 웨이퍼 가공용 가접착재, 및 박형 웨이퍼의 제조방법 |
CN104479621A (zh) * | 2014-12-08 | 2015-04-01 | 江苏诺飞新材料科技有限公司 | 耐高低温有机硅乳液 |
DE102019132472A1 (de) * | 2018-12-03 | 2020-06-04 | Toyota Boshoku Kabushiki Kaisha | Zweikomponenten-Heißschmelzklebstoff, ein verfestigtes Produkt und ein Verfahren zur Steuerung einer Vernetzungszeit |
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JP2000073041A (ja) * | 1998-09-01 | 2000-03-07 | Ge Toshiba Silicones Co Ltd | 接着性ポリオルガノシロキサン組成物 |
JP2003147189A (ja) * | 2001-08-30 | 2003-05-21 | Teijin Chem Ltd | 難燃性芳香族ポリカーボネート樹脂組成物 |
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JP2974700B2 (ja) * | 1989-11-30 | 1999-11-10 | 東レ・ダウコーニング・シリコーン株式会社 | 導電性接着剤 |
AU6627394A (en) * | 1993-04-28 | 1994-11-21 | Mark Mitchnick | Conductive polymers |
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- 2004-12-09 KR KR1020067009141A patent/KR20060126464A/ko not_active Application Discontinuation
- 2004-12-09 CN CNB2004800370662A patent/CN100431121C/zh not_active Expired - Fee Related
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JP2000073041A (ja) * | 1998-09-01 | 2000-03-07 | Ge Toshiba Silicones Co Ltd | 接着性ポリオルガノシロキサン組成物 |
JP2003147189A (ja) * | 2001-08-30 | 2003-05-21 | Teijin Chem Ltd | 難燃性芳香族ポリカーボネート樹脂組成物 |
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CN100431121C (zh) | 2008-11-05 |
CN1894785A (zh) | 2007-01-10 |
KR20060126464A (ko) | 2006-12-07 |
WO2005057647A1 (ja) | 2005-06-23 |
EP1693890A1 (en) | 2006-08-23 |
US20070212819A1 (en) | 2007-09-13 |
JP2005175119A (ja) | 2005-06-30 |
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