JP4541383B2 - 搬送装置 - Google Patents

搬送装置 Download PDF

Info

Publication number
JP4541383B2
JP4541383B2 JP2007130332A JP2007130332A JP4541383B2 JP 4541383 B2 JP4541383 B2 JP 4541383B2 JP 2007130332 A JP2007130332 A JP 2007130332A JP 2007130332 A JP2007130332 A JP 2007130332A JP 4541383 B2 JP4541383 B2 JP 4541383B2
Authority
JP
Japan
Prior art keywords
magnetic
rollers
pair
disk
gear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007130332A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008285255A (ja
Inventor
大祐 早坂
欽吾 操谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shoei Engineering Co Ltd
Original Assignee
Shoei Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shoei Engineering Co Ltd filed Critical Shoei Engineering Co Ltd
Priority to JP2007130332A priority Critical patent/JP4541383B2/ja
Priority to TW096118922A priority patent/TW200846573A/zh
Priority to KR1020070053147A priority patent/KR20080101606A/ko
Priority to CN2007101269354A priority patent/CN101309042B/zh
Publication of JP2008285255A publication Critical patent/JP2008285255A/ja
Application granted granted Critical
Publication of JP4541383B2 publication Critical patent/JP4541383B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Gear Transmission (AREA)
JP2007130332A 2007-05-16 2007-05-16 搬送装置 Expired - Fee Related JP4541383B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007130332A JP4541383B2 (ja) 2007-05-16 2007-05-16 搬送装置
TW096118922A TW200846573A (en) 2007-05-16 2007-05-28 Transporting apparatus
KR1020070053147A KR20080101606A (ko) 2007-05-16 2007-05-31 반송장치
CN2007101269354A CN101309042B (zh) 2007-05-16 2007-07-03 输送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007130332A JP4541383B2 (ja) 2007-05-16 2007-05-16 搬送装置

Publications (2)

Publication Number Publication Date
JP2008285255A JP2008285255A (ja) 2008-11-27
JP4541383B2 true JP4541383B2 (ja) 2010-09-08

Family

ID=40125312

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007130332A Expired - Fee Related JP4541383B2 (ja) 2007-05-16 2007-05-16 搬送装置

Country Status (4)

Country Link
JP (1) JP4541383B2 (ko)
KR (1) KR20080101606A (ko)
CN (1) CN101309042B (ko)
TW (1) TW200846573A (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105438824A (zh) * 2015-12-24 2016-03-30 嵊州市意海电机配件厂 一种石墨片自动装卸装置
JP6697911B2 (ja) * 2016-03-18 2020-05-27 日立造船株式会社 電子線滅菌設備

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004056875A (ja) * 2002-07-17 2004-02-19 Noritsu Koki Co Ltd 非接触伝動機構
JP3612978B2 (ja) * 1998-01-21 2005-01-26 セイコーエプソン株式会社 搬送装置、搬送方法、液晶表示装置の製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2683317B2 (ja) * 1993-11-19 1997-11-26 マルヤス機械株式会社 コンベア
JP2648565B2 (ja) * 1994-06-16 1997-09-03 カネテック株式会社 駆動装置
JP2984999B1 (ja) * 1998-09-08 1999-11-29 株式会社レヨーン工業 基板又はシート表面洗浄における加圧制御機構及びこの機構を具える基板又はシート表面洗浄装置
JP4066894B2 (ja) * 2003-06-25 2008-03-26 住友金属鉱山株式会社 長尺幅広薄板材料の搬送装置及び長尺幅広薄板材料

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3612978B2 (ja) * 1998-01-21 2005-01-26 セイコーエプソン株式会社 搬送装置、搬送方法、液晶表示装置の製造方法
JP2004056875A (ja) * 2002-07-17 2004-02-19 Noritsu Koki Co Ltd 非接触伝動機構

Also Published As

Publication number Publication date
KR20080101606A (ko) 2008-11-21
CN101309042B (zh) 2012-06-13
CN101309042A (zh) 2008-11-19
JP2008285255A (ja) 2008-11-27
TW200846573A (en) 2008-12-01

Similar Documents

Publication Publication Date Title
JP4406652B2 (ja) 搬送装置
JP4541383B2 (ja) 搬送装置
WO2012081168A1 (ja) スパッタリング装置
CN101604650A (zh) 基板输送装置和方法以及具有该装置的基板制造设备
KR20080062268A (ko) 기판 이송 장치
JP2009124131A (ja) 駆動磁力部材と、これを利用した基板移送ユニット及び基板処理装置
KR20070090503A (ko) 마그네틱 기어 및 이를 이용한 마그네틱 컨베이어
KR20070045537A (ko) 기판 이송 시스템
JP5189833B2 (ja) 真空搬送装置
JP5535535B2 (ja) ローラコンベヤ装置
JP2008253062A (ja) 駆動力伝達装置および基板処理装置
KR20100059402A (ko) 기판 이송 장치
JPH1155932A (ja) 非接触式動力伝達機構
KR20030072035A (ko) 비접촉 전동기에 의하여 구동되는 로울러 컨베이어
JP2010222125A (ja) ローラコンベヤ装置
JP2009137689A (ja) ローラコンベヤ装置
KR100870147B1 (ko) 기판 처리 장치
JP2009137688A (ja) ローラコンベヤ装置
KR20120076079A (ko) 기판 반송 컨베이어 장치
JP7463222B2 (ja) 磁気カップリング装置
KR20120004136A (ko) 이종영역에서의 마그네트를 이용한 비접촉 회전시스템
JP2005350171A (ja) ローラコンベヤ
JP4605583B2 (ja) ローラコンベヤ
KR100855735B1 (ko) 회전 장치
KR100991101B1 (ko) 기판 이송 장치

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100219

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20100219

A975 Report on accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A971005

Effective date: 20100406

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100413

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100519

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20100608

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20100623

R150 Certificate of patent or registration of utility model

Ref document number: 4541383

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130702

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130702

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130702

Year of fee payment: 3

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130702

Year of fee payment: 3

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130702

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130702

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees