JP4541383B2 - 搬送装置 - Google Patents
搬送装置 Download PDFInfo
- Publication number
- JP4541383B2 JP4541383B2 JP2007130332A JP2007130332A JP4541383B2 JP 4541383 B2 JP4541383 B2 JP 4541383B2 JP 2007130332 A JP2007130332 A JP 2007130332A JP 2007130332 A JP2007130332 A JP 2007130332A JP 4541383 B2 JP4541383 B2 JP 4541383B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- rollers
- pair
- disk
- gear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Gear Transmission (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007130332A JP4541383B2 (ja) | 2007-05-16 | 2007-05-16 | 搬送装置 |
TW096118922A TW200846573A (en) | 2007-05-16 | 2007-05-28 | Transporting apparatus |
KR1020070053147A KR20080101606A (ko) | 2007-05-16 | 2007-05-31 | 반송장치 |
CN2007101269354A CN101309042B (zh) | 2007-05-16 | 2007-07-03 | 输送装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007130332A JP4541383B2 (ja) | 2007-05-16 | 2007-05-16 | 搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008285255A JP2008285255A (ja) | 2008-11-27 |
JP4541383B2 true JP4541383B2 (ja) | 2010-09-08 |
Family
ID=40125312
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007130332A Expired - Fee Related JP4541383B2 (ja) | 2007-05-16 | 2007-05-16 | 搬送装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4541383B2 (ko) |
KR (1) | KR20080101606A (ko) |
CN (1) | CN101309042B (ko) |
TW (1) | TW200846573A (ko) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105438824A (zh) * | 2015-12-24 | 2016-03-30 | 嵊州市意海电机配件厂 | 一种石墨片自动装卸装置 |
JP6697911B2 (ja) * | 2016-03-18 | 2020-05-27 | 日立造船株式会社 | 電子線滅菌設備 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004056875A (ja) * | 2002-07-17 | 2004-02-19 | Noritsu Koki Co Ltd | 非接触伝動機構 |
JP3612978B2 (ja) * | 1998-01-21 | 2005-01-26 | セイコーエプソン株式会社 | 搬送装置、搬送方法、液晶表示装置の製造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2683317B2 (ja) * | 1993-11-19 | 1997-11-26 | マルヤス機械株式会社 | コンベア |
JP2648565B2 (ja) * | 1994-06-16 | 1997-09-03 | カネテック株式会社 | 駆動装置 |
JP2984999B1 (ja) * | 1998-09-08 | 1999-11-29 | 株式会社レヨーン工業 | 基板又はシート表面洗浄における加圧制御機構及びこの機構を具える基板又はシート表面洗浄装置 |
JP4066894B2 (ja) * | 2003-06-25 | 2008-03-26 | 住友金属鉱山株式会社 | 長尺幅広薄板材料の搬送装置及び長尺幅広薄板材料 |
-
2007
- 2007-05-16 JP JP2007130332A patent/JP4541383B2/ja not_active Expired - Fee Related
- 2007-05-28 TW TW096118922A patent/TW200846573A/zh unknown
- 2007-05-31 KR KR1020070053147A patent/KR20080101606A/ko not_active Application Discontinuation
- 2007-07-03 CN CN2007101269354A patent/CN101309042B/zh not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3612978B2 (ja) * | 1998-01-21 | 2005-01-26 | セイコーエプソン株式会社 | 搬送装置、搬送方法、液晶表示装置の製造方法 |
JP2004056875A (ja) * | 2002-07-17 | 2004-02-19 | Noritsu Koki Co Ltd | 非接触伝動機構 |
Also Published As
Publication number | Publication date |
---|---|
KR20080101606A (ko) | 2008-11-21 |
CN101309042B (zh) | 2012-06-13 |
CN101309042A (zh) | 2008-11-19 |
JP2008285255A (ja) | 2008-11-27 |
TW200846573A (en) | 2008-12-01 |
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