JP4541383B2 - 搬送装置 - Google Patents
搬送装置 Download PDFInfo
- Publication number
- JP4541383B2 JP4541383B2 JP2007130332A JP2007130332A JP4541383B2 JP 4541383 B2 JP4541383 B2 JP 4541383B2 JP 2007130332 A JP2007130332 A JP 2007130332A JP 2007130332 A JP2007130332 A JP 2007130332A JP 4541383 B2 JP4541383 B2 JP 4541383B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- rollers
- pair
- disk
- gear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Gear Transmission (AREA)
Description
(数1式)
r=h・(θ/θ1)+r11
で表すことができる。
(数2式)
ω2/ω1=θ2/θ1
が成り立つ。さらに、円盤型磁気歯車110の磁気歯の数をp1、円筒型磁気歯車の磁気歯の数をp2とする。このとき、円盤型磁気歯車110においては、磁気歯は、360°/p1の間隔で配置され、円筒型磁気歯車においては、磁気歯は、360°/p2の間隔で配置される。そうすると、円盤型磁気歯車110が360°/p1回転する間に、円筒型磁気歯車は360°/p2回転するから、
(数3式)
ω2/ω1=(360°/p2)/(360°/p1)
が成り立つ。(数2式)と(数3式)とを(数1式)に代入すると、(数1式)は、
(数4式)
r=h・(θ/θ2)・(p1/p2)+r11
と表すことができる。この(数4式)が、円盤型磁気歯車110の磁気歯の外形曲線の式である。
10 動力伝達手段
11 円盤型磁気歯車
12 磁性盤
13 回転軸
15 磁気歯(永久磁石)
16 (円盤型磁気歯車の)端面
17 第1磁気面
21,22 円筒型磁気歯車
23,24 磁性円筒
25,26 回転軸
27 磁気歯(永久磁石)
28 (円筒型磁気歯車の)外周面
29 第2磁気面
30 基板洗浄装置
31 上側クリーニングローラ(ローラ)
32 下側クリーニングローラ(ローラ)
50 基板(被搬送物)
Claims (2)
- 一対のローラに回転を伝達する動力伝達手段を備え、
前記一対のローラ間に被搬送物を挟持させつつ前記一対のローラを回転させることにより被搬送物を搬送する搬送装置において、
前記動力伝達手段は、
駆動源によって軸心回りに回転駆動され、その端面に永久磁石をN極、S極と交互に曲線の放射状となるように異極配列して着設することにより形成した第1磁気面を有する円盤と、
前記一対のローラにそれぞれ連結され、その外周に永久磁石をN極、S極と交互に螺旋状に異極配列して着設することにより形成した第2磁気面を有する一対の円筒とを備え、
前記一対の円筒を、前記円盤との間に所定の空隙を保ち、且つ、前記第2磁気面を前記第1磁気面に対向させるように配置し、
前記永久磁石の磁気の引力及び反発力を利用して、前記円盤から前記一対の円筒へ動力を伝達させることを特徴とする搬送装置。 - 複数対の前記ローラを並設した場合に、前記円盤を同一軸心上に配置したことを特徴とする請求項1に記載の搬送装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007130332A JP4541383B2 (ja) | 2007-05-16 | 2007-05-16 | 搬送装置 |
TW096118922A TW200846573A (en) | 2007-05-16 | 2007-05-28 | Transporting apparatus |
KR1020070053147A KR20080101606A (ko) | 2007-05-16 | 2007-05-31 | 반송장치 |
CN2007101269354A CN101309042B (zh) | 2007-05-16 | 2007-07-03 | 输送装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007130332A JP4541383B2 (ja) | 2007-05-16 | 2007-05-16 | 搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008285255A JP2008285255A (ja) | 2008-11-27 |
JP4541383B2 true JP4541383B2 (ja) | 2010-09-08 |
Family
ID=40125312
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007130332A Expired - Fee Related JP4541383B2 (ja) | 2007-05-16 | 2007-05-16 | 搬送装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4541383B2 (ja) |
KR (1) | KR20080101606A (ja) |
CN (1) | CN101309042B (ja) |
TW (1) | TW200846573A (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105438824A (zh) * | 2015-12-24 | 2016-03-30 | 嵊州市意海电机配件厂 | 一种石墨片自动装卸装置 |
JP6697911B2 (ja) * | 2016-03-18 | 2020-05-27 | 日立造船株式会社 | 電子線滅菌設備 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004056875A (ja) * | 2002-07-17 | 2004-02-19 | Noritsu Koki Co Ltd | 非接触伝動機構 |
JP3612978B2 (ja) * | 1998-01-21 | 2005-01-26 | セイコーエプソン株式会社 | 搬送装置、搬送方法、液晶表示装置の製造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2683317B2 (ja) * | 1993-11-19 | 1997-11-26 | マルヤス機械株式会社 | コンベア |
JP2648565B2 (ja) * | 1994-06-16 | 1997-09-03 | カネテック株式会社 | 駆動装置 |
JP2984999B1 (ja) * | 1998-09-08 | 1999-11-29 | 株式会社レヨーン工業 | 基板又はシート表面洗浄における加圧制御機構及びこの機構を具える基板又はシート表面洗浄装置 |
JP4066894B2 (ja) * | 2003-06-25 | 2008-03-26 | 住友金属鉱山株式会社 | 長尺幅広薄板材料の搬送装置及び長尺幅広薄板材料 |
-
2007
- 2007-05-16 JP JP2007130332A patent/JP4541383B2/ja not_active Expired - Fee Related
- 2007-05-28 TW TW096118922A patent/TW200846573A/zh unknown
- 2007-05-31 KR KR1020070053147A patent/KR20080101606A/ko not_active Application Discontinuation
- 2007-07-03 CN CN2007101269354A patent/CN101309042B/zh not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3612978B2 (ja) * | 1998-01-21 | 2005-01-26 | セイコーエプソン株式会社 | 搬送装置、搬送方法、液晶表示装置の製造方法 |
JP2004056875A (ja) * | 2002-07-17 | 2004-02-19 | Noritsu Koki Co Ltd | 非接触伝動機構 |
Also Published As
Publication number | Publication date |
---|---|
KR20080101606A (ko) | 2008-11-21 |
CN101309042B (zh) | 2012-06-13 |
CN101309042A (zh) | 2008-11-19 |
JP2008285255A (ja) | 2008-11-27 |
TW200846573A (en) | 2008-12-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4406652B2 (ja) | 搬送装置 | |
JP4541383B2 (ja) | 搬送装置 | |
WO2012081168A1 (ja) | スパッタリング装置 | |
CN101604650A (zh) | 基板输送装置和方法以及具有该装置的基板制造设备 | |
KR20080062268A (ko) | 기판 이송 장치 | |
JP2009124131A (ja) | 駆動磁力部材と、これを利用した基板移送ユニット及び基板処理装置 | |
KR20070090503A (ko) | 마그네틱 기어 및 이를 이용한 마그네틱 컨베이어 | |
KR20070045537A (ko) | 기판 이송 시스템 | |
JP5189833B2 (ja) | 真空搬送装置 | |
JP5535535B2 (ja) | ローラコンベヤ装置 | |
JP2008253062A (ja) | 駆動力伝達装置および基板処理装置 | |
KR20100059402A (ko) | 기판 이송 장치 | |
JPH1155932A (ja) | 非接触式動力伝達機構 | |
KR20030072035A (ko) | 비접촉 전동기에 의하여 구동되는 로울러 컨베이어 | |
JP2010222125A (ja) | ローラコンベヤ装置 | |
JP2009137689A (ja) | ローラコンベヤ装置 | |
KR100870147B1 (ko) | 기판 처리 장치 | |
JP2009137688A (ja) | ローラコンベヤ装置 | |
KR20120076079A (ko) | 기판 반송 컨베이어 장치 | |
JP7463222B2 (ja) | 磁気カップリング装置 | |
KR20120004136A (ko) | 이종영역에서의 마그네트를 이용한 비접촉 회전시스템 | |
JP2005350171A (ja) | ローラコンベヤ | |
JP4605583B2 (ja) | ローラコンベヤ | |
KR100855735B1 (ko) | 회전 장치 | |
KR100991101B1 (ko) | 기판 이송 장치 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20100219 |
|
A871 | Explanation of circumstances concerning accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A871 Effective date: 20100219 |
|
A975 | Report on accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A971005 Effective date: 20100406 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100413 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100519 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20100608 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20100623 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4541383 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130702 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130702 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130702 Year of fee payment: 3 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130702 Year of fee payment: 3 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130702 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130702 Year of fee payment: 3 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |