JP4414387B2 - 導電性光吸収マスクを有する装置及びそれを製作するための方法 - Google Patents
導電性光吸収マスクを有する装置及びそれを製作するための方法 Download PDFInfo
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- JP4414387B2 JP4414387B2 JP2005267944A JP2005267944A JP4414387B2 JP 4414387 B2 JP4414387 B2 JP 4414387B2 JP 2005267944 A JP2005267944 A JP 2005267944A JP 2005267944 A JP2005267944 A JP 2005267944A JP 4414387 B2 JP4414387 B2 JP 4414387B2
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
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- Optics & Photonics (AREA)
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- Mechanical Light Control Or Optical Switches (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
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Description
本発明のシステム、方法、及び装置は、それぞれ複数の態様を有し、そのいずれもが、その好ましい特性に単独で寄与するのではない。本発明の範囲を制限することなく、そのより卓越した特徴が、ここに簡潔に説明される。本明細書を熟考した後で、特に“特定の実施形態の詳細な説明”と題した項を読んだ後で、本発明の特徴が、その他のディスプレイ装置に対する利点をどのようにして提供するかを、理解するであろう。
下記の詳細な説明は、本発明のある特定の実施形態に向けられる。この明細書では、参照符合が、図面に与えられ、全体を通して同様の部分が類似の数字を用いて表される。
Claims (39)
- 光学装置であって、下記を具備する:
透明基板;
該透明基板上に配置された干渉光変調素子、該干渉光変調素子は該干渉光変調素子に印加される電圧に応答して変化する光学的特性を有する;及び
該透明基板上に配置され、該干渉光変調素子の可動鏡及び固定の部分反射層から間隔を置いて配置された電気的に導電性の光学マスク、該光学マスクは該干渉光変調素子への電圧の印加のための1つ又は複数の電気的経路を提供するために該干渉光変調素子に電気的に接続され、そして電気的バスとして機能する、
ここで、該部分反射層は、該光学マスクと該可動鏡との間に配置される。 - 該光学マスクは、黒に見えるように構成される、請求項1の装置。
- 該光学マスクは、黒とは異なる色に見えるように構成される、請求項1の装置。
- 電気的に並列な接続を形成するために該光学マスクに電気的に接続された列電極を更に具備する、請求項1の装置。
- 電気的に並列な接続を形成するために該光学マスクに電気的に接続された行電極を更に具備する、請求項1の装置。
- 該光学マスクは、薄膜の積層を具備する、請求項1の装置。
- 該薄膜の積層は、第1反射層及び第2反射層を具備する、請求項6の装置。
- 該第1反射層は、第1電極に電気的に接続される、及び該第2反射層は、第2電極に電気的に接続される、請求項7の装置。
- 該第1反射層及び該第2反射層は、同じ電極に電気的に接続される、請求項7の装置。
- 該光学マスクは、1つ又は複数の導電性のビアにより該干渉光変調素子に電気的に接続される、請求項1の装置。
- 前記干渉光学調素子及び前記電気的に導電性の光学マスクのうち少なくとも1つと電気的に通信するプロセッサ、前記プロセッサは画像データを処理するように構成される;及び
前記プロセッサと電気的に通信する記憶装置、
を更に具備する、請求項1の装置。 - 前記干渉光変調素子及び前記電気的に導電性の光学マスクのうち少なくとも1つに少なくとも1の信号を送るように構成されたドライバ回路を更に具備する、請求項11の装置。
- 前記画像データの少なくとも一部を前記ドライバ回路に送るように構成されたコントローラを更に具備する、請求項12の装置。
- 前記画像データを前記プロセッサへ送るように構成された画像ソース・モジュールを更に具備する、請求項11の装置。
- 前記画像ソース・モジュールは、受信機、トランシーバ、送信機のうち少なくとも1つを具備する、請求項14の装置。
- 入力データを受信するように及び前記入力データを前記プロセッサに通信するように構成された入力装置を更に具備する、請求項11の装置。
- ディスプレイの複数の干渉光学素子に電気信号を提供する方法、1又は複数の干渉光学素子は導電性の光学マスクに電気的に接続され、かつそれへの電圧の印加により個別にアクチュエートすることが出来る、ここにおいて、該複数の干渉光学素子は、固定の部分的反射層及び可動鏡を具備し、該部分的反射層は該可動鏡と該光学マスクとの間に配置される、該方法は、下記を具備する:
該光学マスクに電圧を印加し、該1つ又は複数の干渉光学素子を作動させること。 - 該光学マスクは、薄膜の積層を具備する、請求項17の方法。
- 該薄膜の積層は、該1つ又は複数の干渉光学素子を作動させるために電圧が印加される導電性反射層を具備する、請求項18の方法。
- 該光学マスクは、1つ又は複数の静的干渉素子を具備する、請求項17の方法。
- 該光学マスクは、光吸収性である、請求項17の方法。
- 干渉光学装置を製作する方法であって、該方法は、下記を具備する:
透明基板上に電気的に導電性の光学マスクを形成すること、ここにおいて、該光学マスクは光を吸収する;
該透明基板上に干渉光変調素子を形成すること、該干渉光変調素子は該光学マスクと可動鏡との間に固定の部分反射層を具備する、ここにおいて、該干渉光変調素子は駆動された状態と駆動されない状態を有し、該干渉光変調素子は印加電圧に応答して該駆動された状態と該駆動されない状態との間で変化し、各状態は入射光に対し特有の光学的応答を有する;及び
少なくとも一部の該光学マスクが該干渉光変調素子に電圧を印加するためのバスを提供するように、該光学マスクを該干渉光変調素子に電気的に接続すること。 - 該光学マスクは、1つ又は複数の静的干渉素子を具備する、請求項22の方法。
- 該光学マスクは、薄膜の積層を具備する、請求項22の方法。
- 該薄膜の積層は、2つの光を反射する材料の間に挟まれた非光吸収性の誘電体材料を具備する、請求項24の方法。
- 該光を反射する材料のうちの1つ又は2つは、銀、アルミニウム、又はクロムを具備する、請求項25の方法。
- 請求項22の方法により形成された、干渉光学装置。
- 透明基板上に形成された少なくとも1つのアクティブな干渉光学部品を具備する光学装置を製作する方法であって、該方法は、下記を具備する:
光吸収性にすべき該透明基板上の領域を特定すること、ここにおいて、該特定された領域は該少なくとも1つのアクティブな干渉光学部品から横方向に外れている;
該少なくとも1つのアクティブな干渉光学部品を製作する前に該特定された領域上に導電性の光吸収性光学マスクを製作すること、及び
固定の部分反射層が該導電性の光吸収性光学マスクと可動鏡との間に配置されるように該少なくとも1つのアクティブな干渉光学部品を製作すること、ここにおいて、該光学マスクは該アクティブな干渉光学部品に接続されて、電気的バスとして機能する。 - 該干渉光学部品は、画素を具備し、該光吸収性の領域は該画素を縁取りする領域である、請求項28の方法。
- 該導電性の光吸収性光学マスクを製作することは、該透明基板上に第1光反射層を堆積すること、該第1光反射層上に非光吸収性誘電体層を堆積すること、及び該非光吸収性誘電体層上に第2光反射層を堆積すること、ここにおいて、1つ又は複数の該第1又は第2光反射層は電気的に導電性である、を具備する、請求項28の方法。
- 該第1及び第2光反射層は、金属材料を具備する、請求項30の方法。
- 該非光吸収性誘電体層は、酸化物層を具備する、請求項30の方法。
- 該光吸収性光学マスクは、1つ又は複数の静的干渉素子を具備する、請求項28の方法。
- 請求項28の方法により形成された、光学装置。
- 光学装置であって、下記を具備する:
光学装置を支持するための透明支持手段;
光を干渉方式により変調するための変調手段、該変調手段は該透明支持手段上に配置され且つ可動反射手段と固定の部分反射手段とを具備し、該変調手段は該変調手段に印加される電圧に応答して変化する光学的特性を有する;及び
光を吸収するための吸収手段、該吸収手段は、該固定の部分反射手段が該可動反射手段と該吸収手段との間に配置されるように該透明支持手段上に配置される、該吸収手段は該変調手段への電圧の印加のための1つ又は複数の電気的経路を提供するために該変調手段に接続され、そして電気的バスとして機能する。 - 該透明支持手段は、基板を具備する、請求項35の光学装置。
- 該変調手段は、光干渉変調器を具備する、請求項35の光学装置。
- 該吸収手段は、電気的に導電性の光学マスクを具備する、請求項35の光学装置。
- 該可動反射手段は、鏡を具備する、請求項35の光学装置。
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US61348004P | 2004-09-27 | 2004-09-27 | |
US11/119,432 US7420725B2 (en) | 2004-09-27 | 2005-04-29 | Device having a conductive light absorbing mask and method for fabricating same |
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JP2006099108A JP2006099108A (ja) | 2006-04-13 |
JP4414387B2 true JP4414387B2 (ja) | 2010-02-10 |
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US (7) | US7420725B2 (ja) |
EP (2) | EP2426541A3 (ja) |
JP (1) | JP4414387B2 (ja) |
KR (2) | KR101168646B1 (ja) |
CN (1) | CN1755492B (ja) |
AT (1) | ATE554417T1 (ja) |
AU (1) | AU2005205782A1 (ja) |
BR (1) | BRPI0503895A (ja) |
CA (1) | CA2519983A1 (ja) |
ES (1) | ES2383996T3 (ja) |
MY (1) | MY140270A (ja) |
RU (1) | RU2389051C2 (ja) |
SG (1) | SG121149A1 (ja) |
TW (3) | TWI503574B (ja) |
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