JP2021510426A - 金属酸化物スイッチを含み小型蓄電コンデンサを備えた薄膜トランジスタ - Google Patents
金属酸化物スイッチを含み小型蓄電コンデンサを備えた薄膜トランジスタ Download PDFInfo
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- 239000003990 capacitor Substances 0.000 title claims abstract description 91
- 239000010409 thin film Substances 0.000 title claims description 8
- 229910044991 metal oxide Inorganic materials 0.000 title description 3
- 150000004706 metal oxides Chemical class 0.000 title description 3
- 229910052751 metal Inorganic materials 0.000 claims description 24
- 239000002184 metal Substances 0.000 claims description 24
- 239000011810 insulating material Substances 0.000 claims description 4
- 239000012212 insulator Substances 0.000 claims 1
- 235000015067 sauces Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 105
- 239000000463 material Substances 0.000 description 31
- 208000036252 interstitial lung disease 1 Diseases 0.000 description 17
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 16
- 239000000758 substrate Substances 0.000 description 13
- 208000036971 interstitial lung disease 2 Diseases 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 229920003217 poly(methylsilsesquioxane) Polymers 0.000 description 10
- 239000011787 zinc oxide Substances 0.000 description 8
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 6
- 229910052733 gallium Inorganic materials 0.000 description 6
- 229910052738 indium Inorganic materials 0.000 description 6
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 6
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 235000012239 silicon dioxide Nutrition 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229920001621 AMOLED Polymers 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- -1 tungsten nitride Chemical class 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- GNTDGMZSJNCJKK-UHFFFAOYSA-N divanadium pentaoxide Chemical compound O=[V](=O)O[V](=O)=O GNTDGMZSJNCJKK-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000012044 organic layer Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229920000333 poly(propyleneimine) Polymers 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
- H10K59/1216—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being capacitors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
- H10K59/1213—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being TFTs
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- H—ELECTRICITY
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/126—Shielding, e.g. light-blocking means over the TFTs
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
- H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2300/00—Aspects of the constitution of display devices
- G09G2300/04—Structural and physical details of display devices
- G09G2300/0421—Structural details of the set of electrodes
- G09G2300/0426—Layout of electrodes and connections
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2300/00—Aspects of the constitution of display devices
- G09G2300/04—Structural and physical details of display devices
- G09G2300/0439—Pixel structures
- G09G2300/0465—Improved aperture ratio, e.g. by size reduction of the pixel circuit, e.g. for improving the pixel density or the maximum displayable luminance or brightness
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2300/00—Aspects of the constitution of display devices
- G09G2300/08—Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
- G09G2300/0809—Several active elements per pixel in active matrix panels
- G09G2300/0842—Several active elements per pixel in active matrix panels forming a memory circuit, e.g. a dynamic memory with one capacitor
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/22—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
- G09G3/30—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels
- G09G3/32—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED]
- G09G3/3208—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED]
- G09G3/3225—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED] using an active matrix
- G09G3/3233—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED] using an active matrix with pixel circuitry controlling the current through the light-emitting element
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
- H01L27/1225—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
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- H—ELECTRICITY
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
- H01L27/1229—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer with different crystal properties within a device or between different devices
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1255—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs integrated with passive devices, e.g. auxiliary capacitors
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- Condensed Matter Physics & Semiconductors (AREA)
- Ceramic Engineering (AREA)
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- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
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Abstract
Description
ΔQ=C×ΔV=リーク電流×Δt
VG2=(Vdata,High−Vdata,Low)×{(Cst+Cgs2)/(Cst+Cgd1+Cgs2)
ΔVp=(Vdata,High−Vdata,Low)×{(Cgd1)/(Cst+Cgd1+Cgs2)
Claims (15)
- ディスプレイ用のサブピクセル回路であって、
駆動TFT(thin film transistor)と、
酸化物TFTである少なくとも1つのスイッチングTFTと、
約1fFと約55fFとの間の容量を有する少なくとも1つの蓄電コンデンサと
を備えた、ディスプレイ用のサブピクセル回路。 - 前記少なくとも1つのスイッチングTFTは、
約100nmと約200nmとの間のGI厚さと、
約0.5umと約3umとの間のTFTチャネル長と、
約1umと約4umとの間のTFTチャネル幅と
をさらに有する、請求項1に記載のサブピクセル回路。 - 前記少なくとも1つのスイッチングTFTは、さらに
約1E−12(A)より小さいTFTリーク電流である、請求項2に記載のサブピクセル回路。 - 前記コンデンサは、前記駆動TFTのゲート金属とソース金属とを重ね合わせることによって形成される、請求項1に記載のサブピクセル回路。
- 積層体において形成されたサブピクセル回路であって、前記サブピクセル回路は、
駆動TFTであって、
前記積層体の上面に配置されたソース、
前記積層体の前記上面に配置されたドレイン、及び、
前記積層体において形成された導電性チャネルであって、前記導電性チャネルは、第1の終端及び第2の終端を有し、前記第1の終端が前記ソースに電気的に結合され、前記第2の終端が前記ドレインに電気的に結合される、導電性チャネル
を含む、駆動TFTと、
少なくとも1つのスイッチングTFTと、
前記駆動TFTの内部の、前記導電性チャネルの上方でかつ前記上面の下方に配置された少なくとも1つの蓄電コンデンサと
を備えた、積層体において形成されたサブピクセル回路。 - 前記積層体は、
第1のバッファ層(バッファ1)を形成する第1の層と、
ゲート絶縁材料(GI)から形成された第2の層と、
第1の中間層誘電体(ILD1)を形成する第3の層と、
第2のバッファ層(バッファ2)を形成する第4の層と、
第2の中間層誘電体(ILD2)を形成する第5の層と
を更に含み、
前記少なくとも1つのスイッチングTFTは、酸化物TFTであり、前記少なくとも1つのスイッチングTFTは、前記第4の層の内部まで延在しない、請求項5に記載のサブピクセル回路。 - 前記コンデンサは、前記駆動TFTのゲート金属とソース金属とを重ね合わせることによって形成される、請求項5に記載のサブピクセル回路。
- 前記コンデンサは、ゲート絶縁体(G2)をさらに含み、前記コンデンサは、前記第4の層の内部まで延在しない、請求項6に記載のサブピクセル回路。
- 前記コンデンサは、前記第4の層の下方に延在し、前記導電性チャネルは、前記第2の層の内部に存在する、請求項6に記載のサブピクセル回路。
- 前記スイッチングTFTの下方に配置された遮光体をさらに含む、請求項6に記載のサブピクセル回路。
- 前記スイッチングTFTの下方に形成された第2のコンデンサをさらに含む、請求項6に記載のサブピクセル回路。
- 前記駆動TFTの下方に形成された第3のコンデンサをさらに含む、請求項11に記載のサブピクセル回路。
- ディスプレイであって、
複数のピクセルを含み、
前記ピクセルは、複数のサブピクセルを含み、
前記複数のピクセルの各サブピクセルは、
OLED領域と、
サブピクセル回路と
を含み、
前記サブピクセル回路は、
駆動TFTと、
酸化物TFTである少なくとも1つのスイッチングTFTと、
約1fFと約55fFとの間の容量を有する少なくとも1つの蓄電コンデンサと
を含む、ディスプレイ。 - 前記蓄電コンデンサは、前記駆動TFTの範囲内に形成される、請求項13に記載のディスプレイ。
- 前記コンデンサは、前記駆動TFTのゲート金属とソース金属とを重ね合わせることによって形成される、請求項14に記載のディスプレイ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201862616314P | 2018-01-11 | 2018-01-11 | |
US62/616,314 | 2018-01-11 | ||
PCT/US2019/012936 WO2019140007A1 (en) | 2018-01-11 | 2019-01-09 | Thin film transistor with small storage capacitor with metal oxide switch |
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JP2021510426A true JP2021510426A (ja) | 2021-04-22 |
JP7171738B2 JP7171738B2 (ja) | 2022-11-15 |
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JP2020538782A Active JP7171738B2 (ja) | 2018-01-11 | 2019-01-09 | 金属酸化物スイッチを含み小型蓄電コンデンサを備えた薄膜トランジスタ |
Country Status (6)
Country | Link |
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US (2) | US11101338B2 (ja) |
JP (1) | JP7171738B2 (ja) |
KR (3) | KR20200098723A (ja) |
CN (1) | CN111771283A (ja) |
TW (1) | TWI810234B (ja) |
WO (1) | WO2019140007A1 (ja) |
Cited By (1)
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WO2023286168A1 (ja) * | 2021-07-13 | 2023-01-19 | シャープディスプレイテクノロジー株式会社 | 表示装置 |
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CN109686314B (zh) * | 2019-03-01 | 2021-01-29 | 京东方科技集团股份有限公司 | 像素电路、显示基板和显示装置 |
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Also Published As
Publication number | Publication date |
---|---|
US20190214447A1 (en) | 2019-07-11 |
US11101338B2 (en) | 2021-08-24 |
US11895872B2 (en) | 2024-02-06 |
TWI810234B (zh) | 2023-08-01 |
CN111771283A (zh) | 2020-10-13 |
KR20200098723A (ko) | 2020-08-20 |
WO2019140007A1 (en) | 2019-07-18 |
TW201941180A (zh) | 2019-10-16 |
US20210376032A1 (en) | 2021-12-02 |
JP7171738B2 (ja) | 2022-11-15 |
KR102661907B1 (ko) | 2024-04-26 |
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KR20230104780A (ko) | 2023-07-10 |
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