JP2019065078A - 吸着仮固定シート - Google Patents
吸着仮固定シート Download PDFInfo
- Publication number
- JP2019065078A JP2019065078A JP2017188570A JP2017188570A JP2019065078A JP 2019065078 A JP2019065078 A JP 2019065078A JP 2017188570 A JP2017188570 A JP 2017188570A JP 2017188570 A JP2017188570 A JP 2017188570A JP 2019065078 A JP2019065078 A JP 2019065078A
- Authority
- JP
- Japan
- Prior art keywords
- temporary fixing
- fixing sheet
- mass
- silicon chip
- foam layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
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- 229910052710 silicon Inorganic materials 0.000 claims abstract description 51
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- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
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- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 2
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- DSVRVHYFPPQFTI-UHFFFAOYSA-N bis(ethenyl)-methyl-trimethylsilyloxysilane;platinum Chemical compound [Pt].C[Si](C)(C)O[Si](C)(C=C)C=C DSVRVHYFPPQFTI-UHFFFAOYSA-N 0.000 description 1
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- QBERHIJABFXGRZ-UHFFFAOYSA-M rhodium;triphenylphosphane;chloride Chemical compound [Cl-].[Rh].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 QBERHIJABFXGRZ-UHFFFAOYSA-M 0.000 description 1
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/02—Layer formed of wires, e.g. mesh
-
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Abstract
Description
連続気泡構造を備える発泡層を有する吸着仮固定シートであって、
表面抵抗率が1.0×104Ω/□〜1.0×1010Ω/□であり、
該発泡層の表面の、−30℃で18時間後のシリコンチップ垂直接着力をV1(N/1cm□)、23℃で18時間後のシリコンチップ垂直接着力をV2(N/1cm□)、80℃で18時間後のシリコンチップ垂直接着力をV3(N/1cm□)とし、
該発泡層の表面の、−30℃で18時間後のシリコンチップせん断接着力をH1(N/1cm□)、23℃で18時間後のシリコンチップせん断接着力をH2(N/1cm□)、80℃で18時間後のシリコンチップせん断接着力をH3(N/1cm□)としたとき、
V1<H1、V2<H2、V3<H3である、
吸着仮固定シート。
ここで、シリコンチップ垂直接着力は、平滑なステンレス板の上に吸着仮固定シートの評価面の反対面をシリコーン粘着テープで固定し、グラインダー(ディスコ社製、DFG8560)で研削しダイシングソー(ディスコ社製、DFD6450)で1cm□に個片化した厚み300μmのシリコンチップの研削面を吸着仮固定シートに2kgローラーを1往復させて貼り合せ、−30℃、23℃、80℃でそれぞれ18時間養生し、23℃で2時間静置させ、サーボパルサー(島津製作所社製、コントローラー4890、ロードセルMMT−250N)を用いて20mmΦのアダプターの先端に両面テープ(日東電工社製、No.5000NS)を貼付した状態で、0.05Nの荷重がかかるまで圧縮速度0.01N/secで垂直方向にシリコンチップのミラー面(研削面の反対面)を圧縮し、10mm/secで引き剥がした時の最大荷重である。
また、シリコンチップせん断接着力は、平滑なステンレス板の上に吸着仮固定シートの評価面の反対面をシリコーン粘着テープで固定し、グラインダー(ディスコ社製、DFG8560)で研削しダイシングソー(ディスコ社製、DFD6450)で1cm□に個片化した厚み300μmのシリコンチップの研削面を吸着仮固定シートに2kgローラーを1往復させて貼り合せ、−30℃、23℃、80℃でそれぞれ18時間養生し、23℃で2時間静置させ、フォースゲージ(日本電産シンポ社製、FGPX−10)を用いてシリコンチップの側面を1mm/secの速度で押して測定されるせん断接着力である。
本発明の吸着仮固定シートは、連続気泡構造を備える発泡層を有する吸着仮固定シートである。
連続気泡率(%)={(吸水した水の体積)/(気泡部分体積)}×100
気泡部分体積(cm3)={(発泡体(発泡シート)の質量)/(発泡体(発泡シート)の見かけ密度)}−{(発泡体(発泡シート)の質量)/(樹脂密度)}
(B)一分子中に少なくとも2個のケイ素原子結合水素原子を有するオルガノポリシロキサン((A)成分中のアルケニル基1モルに対して(B)成分中のケイ素原子結合水素原子が0.4モル〜20モルとなる量)、
(C)水と無機系増粘剤からなる混合物100質量部〜1000質量部、
(D)(D−1)HLBの値が3以上であるノニオン系界面活性剤および(D−2)HLBの値が3未満であるノニオン系界面活性剤からなる界面活性剤(ただし、(D−2)成分に対する(D−1)成分の質量比が少なくとも1)0.1質量部〜15質量部、
(E)ヒドロシリル化反応触媒、および、
(F)硬化遅延剤0.001質量部〜5質量部、
(G)導電性物質((A)成分および(B)成分の合計量を100質量部としたときに0.1質量部〜100質量部)
から少なくともなる。
本発明の吸着仮固定シートは、本発明の効果を損なわない範囲で、任意の適切な方法によって製造し得る。このような製造方法としては、好ましくは、連続気泡構造を備える発泡層を有する吸着仮固定シートの製造方法であって、該発泡層を形成する樹脂組成物(好ましくは、上記シリコーン樹脂組成物)をセパレーターA上に塗工し、該塗工した樹脂組成物の該セパレーターAと反対側の表面上にセパレーターBを載置し、熱硬化を行った後、該セパレーターAおよび該セパレーターBから選ばれる少なくとも1種を剥離し、該剥離したセパレーターの中の少なくとも1種が、算術平均表面粗さRaが0.1μm〜5μmの表面を有するセパレーターである。
3D測定レーザー顕微鏡(LEXT OLS4000、オリンパス(株)社製)にて、高精度・対物レンズ10倍の設定でガラス板(マイクロスライドガラスS、松浪硝子工業株式会社製)に測定対象物(例えば、吸着仮固定シート)を乗せ、ガラス板表面から測定対象物の最上部までの3D画像を測定し、その高さを厚みとした。
50mm×50mmの打ち抜き刃型にて測定対象物(例えば、吸着仮固定シート)を打ち抜き、厚みは前述した<厚みの測定>の値を用い、これらの値から測定対象物の体積を算出した。
次に、測定対象物の質量を最小目盛り0.01g以上の上皿天秤にて測定した。これらの値より、測定対象物の見掛け密度(g/cm3)を算出した。
100cm×100cmのサイズに測定対象物(例えば、吸着仮固定シート)を切り抜き、Hiresta HT−210(三菱油化株式会社製)を用いて、表面抵抗率(Ω/□)を求めた。
平滑なステンレス板の上にシリコーン発泡シートの評価面の反対面をシリコーン粘着テープで固定し、グラインダー(ディスコ社製、DFG8560)で研削しダイシングソー(ディスコ社製、DFD6450)で1cm□に個片化した厚み300μmのシリコンチップの研削面をシリコーン発泡シートに2kgローラーを1往復させて貼り合せ、−30℃、23℃、80℃でそれぞれ18時間養生し、23℃で2時間静置させ、サーボパルサー(島津製作所社製、コントローラー4890、ロードセルMMT−250N)を用いて20mmΦのアダプターの先端に両面テープ(日東電工社製、No.5000NS)を貼付した状態で、0.05Nの荷重がかかるまで圧縮速度0.01N/secで垂直方向にシリコンチップのミラー面(研削面の反対面)を圧縮し、10mm/secで引き剥がした時の最大荷重を垂直接着力とした。
平滑なステンレス板の上にシリコーン発泡シートの評価面の反対面をシリコーン粘着テープで固定し、グラインダー(ディスコ社製、DFG8560)で研削しダイシングソー(ディスコ社製、DFD6450)で1cm□に個片化した厚み300μmのシリコンチップの研削面をシリコーン発泡シートに2kgローラーを1往復させて貼り合せ、−30℃、23℃、80℃でそれぞれ18時間養生し、23℃で2時間静置させ、フォースゲージ(日本電産シンポ社製、FGPX−10)を用いてシリコンチップの側面を1mm/secの速度で押してせん断接着力を求めた。
ビニル基含有量0.28質量%のジメチルポリシロキサン:44.84質量部、ヘキサメチルジシラザンで表面処理したBET比表面積225m2/gのフュームドシリカ:3.25質量部、ケッチェンブラックEC−600JD(ケッチェンブラックインターナショナル株式会社製):1.80質量部、1−エチニル−1−シクロヘキサノール:0.02質量部および白金の1,3−ジビニルテトラメチルジシロキサン錯体の1,3−ジビニルテトラメチルジシロキサン溶液(白金金属含有量約4000ppm):0.22質量部をロスミキサーに投入し、室温で均一になるまで混合した後、3本ロールミルにかけて5パスして、シリコーン液(1−1)を調製した。
ビニル基含有量0.28質量%のジメチルポリシロキサン:38.61質量部、ケイ素原子結合水素原子含有量0.7質量%のメチルハイドロジェンポリシロキサン:6.40質量部(上記ジメチルポリシロキサンおよび上記シリコーン液(1−1)中のビニル基の総量1モルに対して、メチルハイドロジェンポリシロキサン中のケイ素原子結合水素原子が5モルとなる量)、ヘキサメチルジシラザンで表面処理したBET比表面積225m2/gのフュームドシリカ:3.25質量部、ケッチェンブラックEC−600JD(ケッチェンブラックインターナショナル株式会社製):0.20質量部、ノニオン系界面活性剤(ソルビタン脂肪酸エステル、商品名:レオドールSP−O10V、花王社製HLB4.3):1.63質量部、ノニオン系界面活性剤(ソルビタン脂肪酸エステル、商品名:レオドールSP−O30V、花王社製HLB1.8):0.045質量部をロスミキサーに投入し、室温で均一になるまで混合した後、3本ロールミルにかけて5パスして、シリコーン液(1−2)を調製した。
得られたシリコーン液(1)とシリコーン液(2)を各50.13質量部とスメクタイトクレー(水系添加剤、有機ポリマー複合精製ベントナイト、(株)ホージュン製):0.85質量部、イオン交換水:98.77質量部を、ホモミキサーを用いて室温で均一になるまで30分間乳化し、次いで、乳化液を室温で5分間減圧乾燥して脱泡を行い、樹脂組成物(1)を得た。
この樹脂組成物(1)をフロロシリコーン処理PETフィルム(ニッパシートPET38x1−SS4A、ニッパ社製)上にアプリケータを用いて塗布し、その上からPETフィルム(ルミラーS10、東レ社製)を被せて、熱風オーブンによって85℃で6分間加熱し、樹脂組成物(1)を硬化させた。硬化後、PETフィルムを剥離し、さらに、200℃で3分間加熱乾燥を行い、厚み200μm、見掛け密度0.5g/cm3のシリコーン発泡シート(1)を得た。
得られたシリコーン発泡シート(1)についての各種測定結果、評価結果を表1に示した。
シリコーン液(1−1)のケッチェンブラック:1.80質量部とシリコーン液(1−2)のケッチェンブラック:0.20質量部に代えて、ベンガラ(商品名:バイフェロクス、バイエル社製):シリコーン液(1−1)1.20質量部、シリコーン液(1−2)1.20質量部を用いた以外は、実施例1と同様に行い、厚み200μm、見掛け密度0.5g/cm3のシリコーン発泡シート(C1)を得た。
得られたシリコーン発泡シート(C1)についての各種測定結果、評価結果を表1に示した。
ビニル基含有量0.28質量%のジメチルポリシロキサン:46.44質量部、ヘキサメチルジシラザンで表面処理したBET比表面積225m2/gのフュームドシリカ:3.25質量部、ケッチェンブラックEC−600JD(ケッチェンブラックインターナショナル株式会社製):0.20質量部、1−エチニル−1−シクロヘキサノール:0.02質量部および白金の1,3−ジビニルテトラメチルジシロキサン錯体の1,3−ジビニルテトラメチルジシロキサン溶液(白金金属含有量約4000ppm):0.22質量部をロスミキサーに投入し、室温で均一になるまで混合した後、3本ロールミルにかけて5パスして、シリコーン液(C2−1)を調製した。
ビニル基含有量0.28質量%のジメチルポリシロキサン:37.01質量部、ケイ素原子結合水素原子含有量0.7質量%のメチルハイドロジェンポリシロキサン:6.40質量部(上記ジメチルポリシロキサンおよび上記シリコーン液(C2−1)中のビニル基の総量1モルに対して、メチルハイドロジェンポリシロキサン中のケイ素原子結合水素原子が5モルとなる量)、ヘキサメチルジシラザンで表面処理したBET比表面積225m2/gのフュームドシリカ:3.25質量部、ケッチェンブラックEC−600JD(ケッチェンブラックインターナショナル株式会社製):1.80質量部、ノニオン系界面活性剤(ソルビタン脂肪酸エステル、商品名:レオドールSP−O10V、花王社製HLB4.3):1.63質量部、ノニオン系界面活性剤(ソルビタン脂肪酸エステル、商品名:レオドールSP−O30V、花王社製HLB1.8):0.045質量部をロスミキサーに投入し、室温で均一になるまで混合した後、3本ロールミルにかけて5パスして、シリコーン液(C2−2)を調製した。
得られたシリコーン液(C2−1)とシリコーン液(C2−2)を各50.13質量部とスメクタイトクレー(水系添加剤、有機ポリマー複合精製ベントナイト、(株)ホージュン製):0.85質量部、イオン交換水:98.77質量部を、ホモミキサーを用いて室温で均一になるまで30分間乳化して、乳化液を室温で5分間減圧乾燥して脱泡を行い、樹脂組成物(C2)を得た。
この樹脂組成物(C2)をフロロシリコーン処理PETフィルム(ニッパシートPET38x1−SS4A、ニッパ社製)上にアプリケータを用いて塗布し、その上からPETフィルム(ルミラーS10、東レ社製)を被せて、熱風オーブンによって85℃で6分間加熱し、樹脂組成物(C2)を硬化させた。硬化後、PETフィルムを剥離し、さらに、200℃で3分間加熱乾燥を行い、厚み200μm、見掛け密度0.5g/cm3のシリコーン発泡シート(C2)を得た。
得られたシリコーン発泡シート(C2)についての各種測定結果、評価結果を表1に示した。
Claims (8)
- 連続気泡構造を備える発泡層を有する吸着仮固定シートであって、
表面抵抗率が1.0×104Ω/□〜1.0×1010Ω/□であり、
該発泡層の表面の、−30℃で18時間後のシリコンチップ垂直接着力をV1(N/1cm□)、23℃で18時間後のシリコンチップ垂直接着力をV2(N/1cm□)、80℃で18時間後のシリコンチップ垂直接着力をV3(N/1cm□)とし、
該発泡層の表面の、−30℃で18時間後のシリコンチップせん断接着力をH1(N/1cm□)、23℃で18時間後のシリコンチップせん断接着力をH2(N/1cm□)、80℃で18時間後のシリコンチップせん断接着力をH3(N/1cm□)としたとき、
V1<H1、V2<H2、V3<H3である、
吸着仮固定シート。
ここで、シリコンチップ垂直接着力は、平滑なステンレス板の上に吸着仮固定シートの評価面の反対面をシリコーン粘着テープで固定し、グラインダー(ディスコ社製、DFG8560)で研削しダイシングソー(ディスコ社製、DFD6450)で1cm□に個片化した厚み300μmのシリコンチップの研削面を吸着仮固定シートに2kgローラーを1往復させて貼り合せ、−30℃、23℃、80℃でそれぞれ18時間養生し、23℃で2時間静置させ、サーボパルサー(島津製作所社製、コントローラー4890、ロードセルMMT−250N)を用いて20mmΦのアダプターの先端に両面テープ(日東電工社製、No.5000NS)を貼付した状態で、0.05Nの荷重がかかるまで圧縮速度0.01N/secで垂直方向にシリコンチップのミラー面(研削面の反対面)を圧縮し、10mm/secで引き剥がした時の最大荷重である。
また、シリコンチップせん断接着力は、平滑なステンレス板の上に吸着仮固定シートの評価面の反対面をシリコーン粘着テープで固定し、グラインダー(ディスコ社製、DFG8560)で研削しダイシングソー(ディスコ社製、DFD6450)で1cm□に個片化した厚み300μmのシリコンチップの研削面を吸着仮固定シートに2kgローラーを1往復させて貼り合せ、−30℃、23℃、80℃でそれぞれ18時間養生し、23℃で2時間静置させ、フォースゲージ(日本電産シンポ社製、FGPX−10)を用いてシリコンチップの側面を1mm/secの速度で押して測定されるせん断接着力である。 - 前記V1が8N/1cm□以下である、請求項1に記載の吸着仮固定シート。
- 前記H1が0.5N/1cm□以上である、請求項1または2に記載の吸着仮固定シート。
- 前記V2が10N/1cm□以下である、請求項1から3までのいずれかに記載の吸着仮固定シート。
- 前記H2が0.6N/1cm□以上である、請求項1から4までのいずれかに記載の吸着仮固定シート。
- 前記V3が12N/1cm□以下である、請求項1から5までのいずれかに記載の吸着仮固定シート。
- 前記H3が0.7N/1cm□以上である、請求項1から6までのいずれかに記載の吸着仮固定シート。
- 前記発泡層の見かけ密度が0.15g/cm3〜0.90g/cm3である、請求項1から7までのいずれかに記載の吸着仮固定シート。
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US11401448B2 (en) | 2022-08-02 |
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CN111164172A (zh) | 2020-05-15 |
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JP6474474B1 (ja) | 2019-02-27 |
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CN111164172B (zh) | 2022-02-25 |
EP3689992A1 (en) | 2020-08-05 |
TWI790284B (zh) | 2023-01-21 |
TW201920401A (zh) | 2019-06-01 |
KR102412263B1 (ko) | 2022-06-24 |
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