JP2019021804A - 検査システム - Google Patents
検査システム Download PDFInfo
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- JP2019021804A JP2019021804A JP2017139936A JP2017139936A JP2019021804A JP 2019021804 A JP2019021804 A JP 2019021804A JP 2017139936 A JP2017139936 A JP 2017139936A JP 2017139936 A JP2017139936 A JP 2017139936A JP 2019021804 A JP2019021804 A JP 2019021804A
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- 238000007689 inspection Methods 0.000 title claims abstract description 268
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- 230000005855 radiation Effects 0.000 claims description 8
- 238000003860 storage Methods 0.000 claims description 7
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- 238000012546 transfer Methods 0.000 abstract description 36
- 230000007246 mechanism Effects 0.000 abstract description 18
- 235000012431 wafers Nutrition 0.000 description 76
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Abstract
Description
まず、第1の実施形態について説明する。
図1は本発明の第1の実施形態に係る検査システムの概略構成を示す平面図、図2は図1の検査システムのII−II′線による断面図であり、図3は図1の検査システムのIII-III′線による断面図である。
まず、FOUP18から検査前のウエハWをローダ21により取り出し、プリアライメント部24またはバッファ部25に搬送し、プリアライメント部24でプリアライメントを行ったウエハWについて、プリアライメント部24またはバッファ部25から搬送機構15により、ウエハWを搬送すべき検査ユニット30に搬送し、アライナー17上のチャックトップ36の上に載置する(図9(a))。このとき、アライナー17を移動させながら、カメラユニット16のアライメント用のカメラ51でウエハWを撮影する。なお、チャックトップ36にウエハWを載置する前の適宜のタイミングで、放射温度計52によりチャックトップ36表面の複数点の温度を測定しておく。
次に、第2の実施形態について説明する。
図12は、第2の実施形態に係る検査システムを示す平面図である。本実施形態の検査システム10′は、第1の実施形態の検査システム10とは異なり、X方向に沿って複数(図では5つ以上)の検査ユニット30が配置された検査ユニット列がZ方向(上下方向)に3段に配置された検査部12aと、これらの各段の側方にX方向に沿って延びる3つの搬送路14のみを含む検査領域12′を有しており、検査領域12′には第2の検査部12bが存在しない。他の構成は、第1の実施形態の検査システム10と同様である。
次に、第3の実施形態について説明する。
図13は、第3の実施形態に係る検査システムを示す平面図である。本実施形態の検査システム10″は、第1の実施形態の検査システム10とは異なり、第1の検査部12aと第2の検査部12bの間の搬送路14′の各段にX方向に沿って移動する搬送機構15が2つ設けられた検査領域12″を有している。一方の搬送機構15は第1の検査部12a専用であり、他方の搬送機構15は第2の検査部12b専用である。
なお、本発明は上記実施の形態に限定されることなく、本発明の思想の範囲内において種々変形可能である。
例えば、上記実施の形態では、アライナーと搬送機構とを別個に設けた例を示したが、アライナーにチャックトップを装着した状態で搬送ステージを構成し、搬送ステージがアライナーの機能と搬送機構の機能を兼備するようにしてもよい。
11;筐体
12,12′,12″;検査領域
13;ローダ領域
14,14′;搬送路
15;搬送機構
16;カメラユニット
17;アライナー
18;FOUP
21;ローダ
30;検査ユニット
70;制御部
W;ウエハ(被検査体)
Claims (11)
- 被検査体の電気的検査を行うためのテスタと、前記テスタと被検査体の間に設けられるプローブカードとを有し、被検査体の電気的検査を行う検査ユニットを、垂直方向に複数段設け、その複数段の前記検査ユニットを水平方向の一方向に複数配列した検査部を有する検査領域と、
前記検査部の前記一方向の端部側に設けられ、被検査体の収容容器が配置される配置部と、前記収容容器と前記検査領域との間で被検査体の受け渡しを行うローダとを有するローダ領域と
を備え、
前記検査領域は、前記検査部の各段に隣接して設けられ、前記一方向に延びる複数の搬送路と、前記各搬送路に沿って移動可能に設けられ、前記ローダから搬入された被検査体を前記各段の前記検査ユニットとの間で受け渡す複数の搬送機構とをさらに有することを特徴とする検査システム。 - 前記ローダ領域の前記配置部は、前記検査ユニットの配列方向に直交する方向に前記収容容器が配列されることを特徴とする請求項1に記載の検査システム。
- 前記検査領域は、前記搬送路を挟んで前記検査部と反対側に、前記検査ユニットを、垂直方向に複数段設け、その複数段の前記検査ユニットを水平方向の前記一方向に複数配列した他の検査部をさらに有することを特徴とする請求項1に記載の検査システム。
- 被検査体の電気的検査を行うためのテスタと、前記テスタと被検査体の間に設けられるプローブカードとを有し、被検査体の電気的検査を行う検査ユニットを、垂直方向に複数段設け、その複数段の前記検査ユニットを水平方向の一方向に複数配列した検査部を、間隔を空けて対向するように2つ有し、
さらに、前記2つの検査部の各段の間に設けられ、前記一方向に延びる複数の搬送路と、
前記各搬送路に沿って移動可能に設けられ、前記各段の前記検査ユニットとの間で被検査体を受け渡す複数の搬送機構と
を有することを特徴とする検査システム。 - 前記各搬送路に沿って2つの搬送機構が移動可能に設けられ、前記搬送機構の一方が、前記検査部の一方に属する前記検査ユニットに対して被検査体の受け渡しを行い、前記搬送機構の他方が、前記検査部の他方に属する検査ユニットに対して被検査体の受け渡しを行うことを特徴とする請求項3または請求項4に記載の検査システム。
- 前記検査部の各段に設けられ、ステージに載せられた被検査体を前記検査ユニットの前記プローブカードに対して位置決めするアライナーをさらに有することを特徴とする請求項1から請求項5のいずれか1項に記載の検査システム。
- 前記アライナーは、前記1つまたは2つの検査部の各段における全ての前記検査ユニットにアクセス可能に設けられていることを特徴とする請求項6に記載の検査システム。
- 前記検査ユニットは、検査時に、前記ステージ上の被検査体が前記プローブカードのプローブに接触した状態で、前記ステージが吸着されるように構成され、前記アライナーは、一の前記検査ユニットにおいて、前記ステージを上昇させて前記被検査体を前記プローブに接触させ、前記ステージを吸着させた後、一の前記検査ユニットから検査が終了した他の前記検査ユニットに移動し、その検査ユニットの前記ステージの取り外し動作を実施することを特徴とする請求項6または請求項7に記載の検査システム。
- 前記搬送路に沿って移動可能に設けられ、前記ステージに載せられた被検査体のアライメント用のカメラを有するカメラユニットをさらに有することを特徴とする請求項6から請求項8のいずれか1項に記載の検査システム。
- 前記カメラユニットは、前記ステージ上の基板温度を測定する放射温度計を有することを特徴とする請求項9に記載の検査システム。
- 前記カメラユニットは、前記搬送機構と上下に設けられ、互いに共通のガイドレールに沿って前記搬送路を移動可能に設けられていることを特徴とする請求項9または請求項10に記載の検査システム。
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JP7274350B2 (ja) * | 2019-05-28 | 2023-05-16 | 東京エレクトロン株式会社 | 搬送システム、検査システム及び検査方法 |
CN113053774A (zh) * | 2019-12-27 | 2021-06-29 | 迪科特测试科技(苏州)有限公司 | 探测装置 |
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