JP2018071529A - 真空ポンプ制御装置及び真空ポンプ、並びに真空ポンプ制御装置の組立方法 - Google Patents
真空ポンプ制御装置及び真空ポンプ、並びに真空ポンプ制御装置の組立方法 Download PDFInfo
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- JP2018071529A JP2018071529A JP2016216523A JP2016216523A JP2018071529A JP 2018071529 A JP2018071529 A JP 2018071529A JP 2016216523 A JP2016216523 A JP 2016216523A JP 2016216523 A JP2016216523 A JP 2016216523A JP 2018071529 A JP2018071529 A JP 2018071529A
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- Prior art keywords
- vacuum pump
- circuit board
- control device
- housing
- pump control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000000034 method Methods 0.000 title claims abstract description 13
- 230000017525 heat dissipation Effects 0.000 claims description 30
- 239000000758 substrate Substances 0.000 claims description 13
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 230000005855 radiation Effects 0.000 abstract description 8
- 238000009434 installation Methods 0.000 abstract 1
- 238000001816 cooling Methods 0.000 description 32
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 14
- 239000000463 material Substances 0.000 description 12
- 125000006850 spacer group Chemical group 0.000 description 10
- 239000002826 coolant Substances 0.000 description 8
- 239000007789 gas Substances 0.000 description 7
- 230000036544 posture Effects 0.000 description 4
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000001172 regenerating effect Effects 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- UXVMQQNJUSDDNG-UHFFFAOYSA-L Calcium chloride Chemical compound [Cl-].[Cl-].[Ca+2] UXVMQQNJUSDDNG-UHFFFAOYSA-L 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910001628 calcium chloride Inorganic materials 0.000 description 1
- 239000001110 calcium chloride Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004512 die casting Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
- F04D25/068—Mechanical details of the pump control unit
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/02—Selection of particular materials
- F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/5813—Cooling the control unit
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/14—Mounting supporting structure in casing or on frame or rack
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/14—Mounting supporting structure in casing or on frame or rack
- H05K7/1401—Mounting supporting structure in casing or on frame or rack comprising clamping or extracting means
- H05K7/1402—Mounting supporting structure in casing or on frame or rack comprising clamping or extracting means for securing or extracting printed circuit boards
- H05K7/1407—Mounting supporting structure in casing or on frame or rack comprising clamping or extracting means for securing or extracting printed circuit boards by turn-bolt or screw member
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/2039—Modifications to facilitate cooling, ventilating, or heating characterised by the heat transfer by conduction from the heat generating element to a dissipating body
- H05K7/20509—Multiple-component heat spreaders; Multi-component heat-conducting support plates; Multi-component non-closed heat-conducting structures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2210/00—Working fluids
- F05D2210/10—Kind or type
- F05D2210/12—Kind or type gaseous, i.e. compressible
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2260/00—Function
- F05D2260/20—Heat transfer, e.g. cooling
- F05D2260/221—Improvement of heat transfer
- F05D2260/2214—Improvement of heat transfer by increasing the heat transfer surface
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/12—Light metals
- F05D2300/121—Aluminium
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
- Mounting Of Printed Circuit Boards And The Like (AREA)
Abstract
Description
11 真空ポンプ本体
12 ポンプ固定脚
13 ケーシング
14 排気口
15 ベース
16 吸気口
17 フランジ部
18 冷却管
20 真空ポンプ制御装置
21 ケーシング
22 筐体
23 放熱用プレート
24 水冷プレート
24a 冷却管
25 側面部
26 底面部
26a 上面
26b 下面
27 開口窓
28 取付ネジ穴
29 取付ネジ穴
30 空間
31 取付ネジ
32 基板取付座部
32a 上面
33 長孔(取付孔)
34 取付ネジ
34a 頭部
35 ザグリ
40 回路基板
41 第1の回路基板
42 第2の回路基板
42a 一部
43 電源
44 絶縁シート材
45 六角スペーサ
46 絶縁シート材
47 コネクタ
48 取付ブラケット
48a 固定片
49 スルーホール
50 固定ナット(雌ねじ部材)
51 基板固定手段
52 六角ナット
53 ネジ止め手段
60 フロントパネル
61 取付孔
62 開口
Claims (7)
- 真空ポンプ本体を制御する真空ポンプ制御装置であって、
前記真空ポンプ本体を制御する制御回路を構成する第1の回路基板と第2の回路基板を有する複数枚の回路基板と、
前記複数枚の回路基板が配設される空間を内部に有して一面が開口された筐体と、
前記第1の回路基板を放熱可能に取り付け、前記筐体の開口を閉じて前記筐体に配設される放熱用プレートと、
前記筐体の内面に前記第2の回路基板を放熱可能に固定する基板固定手段と、
を備えることを特徴とする真空ポンプ制御装置。 - 前記筐体は、アルミ製であり、かつ、前記第2の回路基板と当接可能に形成された基板取付座部を備える、ことを特徴とする請求項1に記載の真空ポンプ制御装置。
- 前記基板取付座部は、前記筐体の一部が前記第2の回路基板と当接可能に断面視凸状に形成して設けられた、
ことを特徴とする請求項2に記載の真空ポンプ制御装置。 - 前記基板固定手段は、
前記筐体を貫通して設けられた取付孔と、
前記取付孔を通って取り付けられる取付ネジにより前記第2の回路基板と前記筐体とを互いにネジ止めして固定するネジ止め手段と、を備える、
ことを特徴とする請求項1から請求項3のいずれか1項に記載の真空ポンプ制御装置。 - 前記ネジ止め手段は、
前記第2の回路基板上に設けられた、雌ねじ部材である、
ことを特徴とする請求項4に記載の真空ポンプ制御装置。 - 請求項1から請求項5のいずれか1項に記載の真空ポンプ制御装置を備えることを特徴とする真空ポンプ。
- 請求項1から請求項5のいずれか1項に記載の真空ポンプ制御装置は、
前記第1の回路基板が前記放熱用プレートに配設された後、
前記第1の回路基板または前記放熱用プレートに対し、前記第2の回路基板が位置決めされた状態で、前記筐体が組立てられる、
ことを特徴とする真空ポンプ制御装置の組立て方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016216523A JP6884553B2 (ja) | 2016-11-04 | 2016-11-04 | 真空ポンプ制御装置及び真空ポンプ、並びに真空ポンプ制御装置の組立方法 |
US16/345,053 US11215186B2 (en) | 2016-11-04 | 2017-10-31 | Vacuum pump control apparatus and vacuum pump, and assembly method of vacuum pump control apparatus |
PCT/JP2017/039456 WO2018084160A1 (ja) | 2016-11-04 | 2017-10-31 | 真空ポンプ制御装置及び真空ポンプ、並びに真空ポンプ制御装置の組立方法 |
CN201780064519.8A CN109891100B (zh) | 2016-11-04 | 2017-10-31 | 真空泵控制装置及真空泵、以及真空泵控制装置的组装方法 |
EP17867165.7A EP3536964B1 (en) | 2016-11-04 | 2017-10-31 | Vacuum pump control device, vacuum pump, and method for assembling vacuum pump control device |
KR1020197010014A KR102504555B1 (ko) | 2016-11-04 | 2017-10-31 | 진공 펌프 제어 장치 및 진공 펌프, 및 진공 펌프 제어 장치의 조립 방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016216523A JP6884553B2 (ja) | 2016-11-04 | 2016-11-04 | 真空ポンプ制御装置及び真空ポンプ、並びに真空ポンプ制御装置の組立方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018071529A true JP2018071529A (ja) | 2018-05-10 |
JP6884553B2 JP6884553B2 (ja) | 2021-06-09 |
Family
ID=62076994
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016216523A Active JP6884553B2 (ja) | 2016-11-04 | 2016-11-04 | 真空ポンプ制御装置及び真空ポンプ、並びに真空ポンプ制御装置の組立方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US11215186B2 (ja) |
EP (1) | EP3536964B1 (ja) |
JP (1) | JP6884553B2 (ja) |
KR (1) | KR102504555B1 (ja) |
CN (1) | CN109891100B (ja) |
WO (1) | WO2018084160A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7048210B2 (ja) * | 2017-01-20 | 2022-04-05 | エドワーズ株式会社 | 真空ポンプ装置、及び該真空ポンプ装置に用いられるポンプ本体ユニット、制御ユニット、並びにスペーサ |
JP7022265B2 (ja) * | 2017-10-25 | 2022-02-18 | 株式会社島津製作所 | 真空ポンプ |
JP7087418B2 (ja) * | 2018-02-02 | 2022-06-21 | 株式会社島津製作所 | 真空ポンプ |
JP7088688B2 (ja) * | 2018-02-16 | 2022-06-21 | エドワーズ株式会社 | 真空ポンプと真空ポンプの制御装置 |
JP7096006B2 (ja) * | 2018-02-16 | 2022-07-05 | エドワーズ株式会社 | 真空ポンプと真空ポンプの制御装置 |
JP7158163B2 (ja) * | 2018-03-27 | 2022-10-21 | 京セラ株式会社 | 電子機器、撮像装置、および移動体 |
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-
2016
- 2016-11-04 JP JP2016216523A patent/JP6884553B2/ja active Active
-
2017
- 2017-10-31 US US16/345,053 patent/US11215186B2/en active Active
- 2017-10-31 EP EP17867165.7A patent/EP3536964B1/en active Active
- 2017-10-31 CN CN201780064519.8A patent/CN109891100B/zh active Active
- 2017-10-31 KR KR1020197010014A patent/KR102504555B1/ko active IP Right Grant
- 2017-10-31 WO PCT/JP2017/039456 patent/WO2018084160A1/ja unknown
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Also Published As
Publication number | Publication date |
---|---|
WO2018084160A1 (ja) | 2018-05-11 |
EP3536964A1 (en) | 2019-09-11 |
JP6884553B2 (ja) | 2021-06-09 |
CN109891100A (zh) | 2019-06-14 |
US11215186B2 (en) | 2022-01-04 |
KR102504555B1 (ko) | 2023-02-28 |
CN109891100B (zh) | 2022-05-13 |
KR20190079612A (ko) | 2019-07-05 |
EP3536964A4 (en) | 2020-06-10 |
EP3536964B1 (en) | 2022-08-17 |
US20190277296A1 (en) | 2019-09-12 |
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